CN108975274A - 一种制备电子级氟化氢氧化反应装置 - Google Patents
一种制备电子级氟化氢氧化反应装置 Download PDFInfo
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- CN108975274A CN108975274A CN201811207304.XA CN201811207304A CN108975274A CN 108975274 A CN108975274 A CN 108975274A CN 201811207304 A CN201811207304 A CN 201811207304A CN 108975274 A CN108975274 A CN 108975274A
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- Prior art keywords
- comb
- catch box
- liquid
- storage groove
- hydrogen fluoride
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- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 title claims abstract description 60
- 229910000040 hydrogen fluoride Inorganic materials 0.000 title claims abstract description 28
- 238000007254 oxidation reaction Methods 0.000 title claims abstract description 24
- 239000007788 liquid Substances 0.000 claims abstract description 54
- 230000001590 oxidative effect Effects 0.000 claims abstract description 31
- 238000003860 storage Methods 0.000 claims abstract description 29
- 238000009835 boiling Methods 0.000 claims abstract description 22
- 238000010992 reflux Methods 0.000 claims abstract description 20
- 238000004062 sedimentation Methods 0.000 claims abstract description 9
- 230000003647 oxidation Effects 0.000 claims description 9
- 238000009833 condensation Methods 0.000 claims description 7
- 230000005494 condensation Effects 0.000 claims description 7
- 230000000630 rising effect Effects 0.000 claims description 7
- 230000004888 barrier function Effects 0.000 claims description 6
- 150000001875 compounds Chemical class 0.000 claims description 5
- 238000013461 design Methods 0.000 claims description 5
- 238000002309 gasification Methods 0.000 claims description 4
- 239000013067 intermediate product Substances 0.000 claims description 4
- 239000002245 particle Substances 0.000 claims description 4
- 230000001376 precipitating effect Effects 0.000 claims description 4
- 235000008733 Citrus aurantifolia Nutrition 0.000 claims description 3
- 235000011941 Tilia x europaea Nutrition 0.000 claims description 3
- 239000004571 lime Substances 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 abstract description 23
- 239000011737 fluorine Substances 0.000 abstract description 23
- 229910052731 fluorine Inorganic materials 0.000 abstract description 23
- 239000000126 substance Substances 0.000 abstract description 5
- 239000007789 gas Substances 0.000 description 26
- 229910052785 arsenic Inorganic materials 0.000 description 12
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 12
- 238000000034 method Methods 0.000 description 11
- 239000012535 impurity Substances 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 238000005406 washing Methods 0.000 description 8
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000007800 oxidant agent Substances 0.000 description 6
- 230000005068 transpiration Effects 0.000 description 6
- 239000012071 phase Substances 0.000 description 5
- 239000000047 product Substances 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000003682 fluorination reaction Methods 0.000 description 3
- 229960002163 hydrogen peroxide Drugs 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000000746 purification Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 150000001495 arsenic compounds Chemical class 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004821 distillation Methods 0.000 description 2
- 238000004880 explosion Methods 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- KMUONIBRACKNSN-UHFFFAOYSA-N potassium dichromate Chemical compound [K+].[K+].[O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O KMUONIBRACKNSN-UHFFFAOYSA-N 0.000 description 2
- 239000012286 potassium permanganate Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000012498 ultrapure water Substances 0.000 description 2
- 229910017049 AsF5 Inorganic materials 0.000 description 1
- 229910003638 H2SiF6 Inorganic materials 0.000 description 1
- 229910012213 MAsF6 Inorganic materials 0.000 description 1
- 229910019256 POF3 Inorganic materials 0.000 description 1
- 229910004014 SiF4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- YBGKQGSCGDNZIB-UHFFFAOYSA-N arsenic pentafluoride Chemical compound F[As](F)(F)(F)F YBGKQGSCGDNZIB-UHFFFAOYSA-N 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000007717 exclusion Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- FFUQCRZBKUBHQT-UHFFFAOYSA-N phosphoryl fluoride Chemical compound FP(F)(F)=O FFUQCRZBKUBHQT-UHFFFAOYSA-N 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 231100000004 severe toxicity Toxicity 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 1
- ZEFWRWWINDLIIV-UHFFFAOYSA-N tetrafluorosilane;dihydrofluoride Chemical compound F.F.F[Si](F)(F)F ZEFWRWWINDLIIV-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000006276 transfer reaction Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B7/00—Halogens; Halogen acids
- C01B7/19—Fluorine; Hydrogen fluoride
- C01B7/191—Hydrogen fluoride
- C01B7/195—Separation; Purification
- C01B7/196—Separation; Purification by distillation
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B7/00—Halogens; Halogen acids
- C01B7/19—Fluorine; Hydrogen fluoride
- C01B7/191—Hydrogen fluoride
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Treating Waste Gases (AREA)
Abstract
Description
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201811207304.XA CN108975274B (zh) | 2018-10-17 | 2018-10-17 | 一种制备电子级氟化氢氧化反应装置 |
Applications Claiming Priority (1)
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CN201811207304.XA CN108975274B (zh) | 2018-10-17 | 2018-10-17 | 一种制备电子级氟化氢氧化反应装置 |
Publications (2)
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CN108975274A true CN108975274A (zh) | 2018-12-11 |
CN108975274B CN108975274B (zh) | 2019-12-27 |
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Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1040358A (zh) * | 1988-08-01 | 1990-03-14 | 纳幕尔杜邦公司 | 通过相分离和蒸馏分离氟化氢的方法 |
US5585085A (en) * | 1991-10-31 | 1996-12-17 | Solvay Fluor Und Derivate Gmbh | Removal of water and/or hydrocarbons from hydrogen fluoride |
KR20130009201A (ko) * | 2011-07-14 | 2013-01-23 | 씨엔비산업주식회사 | 초고순도 불산(hf)의 제조방법 |
CN103086327A (zh) * | 2013-02-18 | 2013-05-08 | 苏州晶瑞化学有限公司 | 一种超净高纯氢氟酸的制备方法 |
CN103613075A (zh) * | 2013-12-02 | 2014-03-05 | 浙江凯圣氟化学有限公司 | 一种超纯电子级氢氟酸的制备方法 |
CN103991847A (zh) * | 2013-02-18 | 2014-08-20 | 福建省邵武市永晶化工有限公司 | 电子级氢氟酸制备方法 |
CN108163812A (zh) * | 2017-12-06 | 2018-06-15 | 多氟多化工股份有限公司 | 一种氟化氢的制备方法、氢氟酸的制备方法 |
CN108313983A (zh) * | 2018-05-03 | 2018-07-24 | 繁昌县凯艺电子商务有限公司 | 用于高纯氟化锂制备的氢氟酸纯化及配制方法 |
-
2018
- 2018-10-17 CN CN201811207304.XA patent/CN108975274B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1040358A (zh) * | 1988-08-01 | 1990-03-14 | 纳幕尔杜邦公司 | 通过相分离和蒸馏分离氟化氢的方法 |
US5585085A (en) * | 1991-10-31 | 1996-12-17 | Solvay Fluor Und Derivate Gmbh | Removal of water and/or hydrocarbons from hydrogen fluoride |
KR20130009201A (ko) * | 2011-07-14 | 2013-01-23 | 씨엔비산업주식회사 | 초고순도 불산(hf)의 제조방법 |
CN103086327A (zh) * | 2013-02-18 | 2013-05-08 | 苏州晶瑞化学有限公司 | 一种超净高纯氢氟酸的制备方法 |
CN103991847A (zh) * | 2013-02-18 | 2014-08-20 | 福建省邵武市永晶化工有限公司 | 电子级氢氟酸制备方法 |
CN103613075A (zh) * | 2013-12-02 | 2014-03-05 | 浙江凯圣氟化学有限公司 | 一种超纯电子级氢氟酸的制备方法 |
CN108163812A (zh) * | 2017-12-06 | 2018-06-15 | 多氟多化工股份有限公司 | 一种氟化氢的制备方法、氢氟酸的制备方法 |
CN108313983A (zh) * | 2018-05-03 | 2018-07-24 | 繁昌县凯艺电子商务有限公司 | 用于高纯氟化锂制备的氢氟酸纯化及配制方法 |
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CN108975274B (zh) | 2019-12-27 |
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PB01 | Publication | ||
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GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract | ||
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20181211 Assignee: QUANZHOU GREEN LOW CARBON Research Institute Assignor: Yang Song Contract record no.: X2020350000041 Denomination of invention: A device for preparing electronic grade hydrogen fluoride oxidation Granted publication date: 20191227 License type: Exclusive License Record date: 20200824 |
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EC01 | Cancellation of recordation of patent licensing contract |
Assignee: QUANZHOU GREEN LOW CARBON Research Institute Assignor: Yang Song Contract record no.: X2020350000041 Date of cancellation: 20210727 |
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EC01 | Cancellation of recordation of patent licensing contract | ||
TR01 | Transfer of patent right |
Effective date of registration: 20211223 Address after: 364012 room 306, building 1, science and technology entrepreneurship Park, No. 15, Qutan Road, Dongxiao Town, Donghua community, Xinluo District, Longyan City, Fujian Province Patentee after: LONGYAN LIRONG ELECTRONIC TECHNOLOGY CO.,LTD. Address before: 362000 the 2 floor of 32 new gate Street and 1916 Creative Industrial Park, Licheng District, Quanzhou, Fujian, China, 1916 Patentee before: Yang Song |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20221207 Address after: 400021 Shimahe Chemical Village, Jiangbei District, Chongqing Patentee after: Chongqing Chemical Research Institute Co.,Ltd. Address before: 364012 room 306, building 1, science and technology entrepreneurship Park, No. 15, Qutan Road, Dongxiao Town, Donghua community, Xinluo District, Longyan City, Fujian Province Patentee before: LONGYAN LIRONG ELECTRONIC TECHNOLOGY CO.,LTD. |
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TR01 | Transfer of patent right |