CN108885380A - 调光薄膜的制造方法 - Google Patents

调光薄膜的制造方法 Download PDF

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Publication number
CN108885380A
CN108885380A CN201780019696.4A CN201780019696A CN108885380A CN 108885380 A CN108885380 A CN 108885380A CN 201780019696 A CN201780019696 A CN 201780019696A CN 108885380 A CN108885380 A CN 108885380A
Authority
CN
China
Prior art keywords
film
light modulation
layer
modulation layer
catalyst layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201780019696.4A
Other languages
English (en)
Chinese (zh)
Inventor
片桐正義
藤野望
梨木智刚
渡边健太
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority claimed from PCT/JP2017/011643 external-priority patent/WO2017164285A1/ja
Publication of CN108885380A publication Critical patent/CN108885380A/zh
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/19Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on variable-reflection or variable-refraction elements not provided for in groups G02F1/015 - G02F1/169
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/20Metallic material, boron or silicon on organic substrates
    • C23C14/205Metallic material, boron or silicon on organic substrates by cathodic sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/08Mirrors
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
    • G02F1/153Constructional details
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
    • G02F1/153Constructional details
    • G02F1/1533Constructional details structural features not otherwise provided for
    • G02F2001/1536Constructional details structural features not otherwise provided for additional, e.g. protective, layer inside the cell

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Physical Vapour Deposition (AREA)
CN201780019696.4A 2016-03-25 2017-03-23 调光薄膜的制造方法 Pending CN108885380A (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2016-062620 2016-03-25
JP2016062620 2016-03-25
JP2017-056183 2017-03-22
JP2017056183A JP2017182062A (ja) 2016-03-25 2017-03-22 調光フィルムの製造方法
PCT/JP2017/011643 WO2017164285A1 (ja) 2016-03-25 2017-03-23 調光フィルムの製造方法

Publications (1)

Publication Number Publication Date
CN108885380A true CN108885380A (zh) 2018-11-23

Family

ID=60004577

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201780019696.4A Pending CN108885380A (zh) 2016-03-25 2017-03-23 调光薄膜的制造方法

Country Status (5)

Country Link
EP (1) EP3435151A4 (ko)
JP (1) JP2017182062A (ko)
KR (1) KR20180122340A (ko)
CN (1) CN108885380A (ko)
TW (1) TW201736927A (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019176969A1 (ja) * 2018-03-16 2019-09-19 日東電工株式会社 ガスクロミック調光素子
TWI822743B (zh) * 2018-03-28 2023-11-21 日商日東電工股份有限公司 含玻璃薄膜之調光元件
WO2020158799A1 (ja) * 2019-01-30 2020-08-06 日東電工株式会社 調光フィルムおよびその製造方法
EP3994104A1 (en) * 2019-07-05 2022-05-11 Institutt For Energiteknikk Method for producing an oxyhydride-based photochromic device
EP3995447A4 (en) 2019-08-02 2024-02-28 Tokuyama Corporation SILICON CORE WIRE FOR DEPOSITION OF POLYCRYSTALLINE SILICON AND PRODUCTION METHOD THEREFOR

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6475354B1 (en) * 1997-07-10 2002-11-05 Canon Kabushiki Kaisha Deposited film producing process, photovoltaic device producing process, and deposited film producing system
CN102933729A (zh) * 2010-04-14 2013-02-13 株式会社渥美精机 储氢合金及使用该储氢合金的氢传感器
CN103328205A (zh) * 2011-01-27 2013-09-25 维特瑞弗莱克斯公司 无机多层堆叠件及其相关的制造方法以及组成成分
CN104412154A (zh) * 2012-06-20 2015-03-11 独立行政法人产业技术总合研究所 反射型调光元件

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7976899B2 (en) * 2006-10-23 2011-07-12 General Electric Company Methods for selective deposition of graded materials on continuously fed objects
JP2015074810A (ja) * 2013-10-10 2015-04-20 日東電工株式会社 スパッタ装置およびスパッタ装置のフィルムロールの交換方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6475354B1 (en) * 1997-07-10 2002-11-05 Canon Kabushiki Kaisha Deposited film producing process, photovoltaic device producing process, and deposited film producing system
CN102933729A (zh) * 2010-04-14 2013-02-13 株式会社渥美精机 储氢合金及使用该储氢合金的氢传感器
CN103328205A (zh) * 2011-01-27 2013-09-25 维特瑞弗莱克斯公司 无机多层堆叠件及其相关的制造方法以及组成成分
CN104412154A (zh) * 2012-06-20 2015-03-11 独立行政法人产业技术总合研究所 反射型调光元件

Also Published As

Publication number Publication date
EP3435151A1 (en) 2019-01-30
EP3435151A4 (en) 2019-10-02
JP2017182062A (ja) 2017-10-05
KR20180122340A (ko) 2018-11-12
TW201736927A (zh) 2017-10-16

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