CN108780161A - 具有高刚度基材的反射光学元件 - Google Patents

具有高刚度基材的反射光学元件 Download PDF

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Publication number
CN108780161A
CN108780161A CN201780018178.0A CN201780018178A CN108780161A CN 108780161 A CN108780161 A CN 108780161A CN 201780018178 A CN201780018178 A CN 201780018178A CN 108780161 A CN108780161 A CN 108780161A
Authority
CN
China
Prior art keywords
layer
base substrate
optical element
graphite
finish
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201780018178.0A
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English (en)
Chinese (zh)
Inventor
J·S·萨瑟兰
L·G·万博尔特
K·S·伍达得
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of CN108780161A publication Critical patent/CN108780161A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14—Protective coatings, e.g. hard coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Ceramic Products (AREA)
  • Laminated Bodies (AREA)
CN201780018178.0A 2016-03-18 2017-03-16 具有高刚度基材的反射光学元件 Pending CN108780161A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662310201P 2016-03-18 2016-03-18
US62/310,201 2016-03-18
PCT/US2017/022653 WO2017161084A1 (en) 2016-03-18 2017-03-16 Reflective optical element with high stiffness substrate

Publications (1)

Publication Number Publication Date
CN108780161A true CN108780161A (zh) 2018-11-09

Family

ID=58455670

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201780018178.0A Pending CN108780161A (zh) 2016-03-18 2017-03-16 具有高刚度基材的反射光学元件

Country Status (7)

Country Link
US (1) US10816702B2 (https=)
EP (1) EP3430447A1 (https=)
JP (1) JP2019513241A (https=)
KR (1) KR102288420B1 (https=)
CN (1) CN108780161A (https=)
CA (1) CA3018211A1 (https=)
WO (1) WO2017161084A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117735991A (zh) * 2023-12-20 2024-03-22 扬州北方三山工业陶瓷有限公司 一种用于反射镜的b4c复合材料及其制备方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
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DE102018204376B4 (de) * 2018-03-22 2022-07-07 Infineon Technologies Ag Siliziumcarbidvorrichtungen und Verfahren zur Herstellung derselben
US11226438B2 (en) * 2018-10-03 2022-01-18 Corning Incorporated Reflective optical element
US11619764B2 (en) * 2020-03-27 2023-04-04 Raytheon Company High-performance optical surface
US12345851B2 (en) 2021-01-27 2025-07-01 Corning Incorporated Corrosion-resistant coatings for IR-transmitting substrates

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US20110297852A1 (en) * 2010-03-25 2011-12-08 Hidenobu Kameda Mirror and extreme ultraviolet light generation system
CN105143930A (zh) * 2013-02-28 2015-12-09 康宁股份有限公司 用于高反射镜子的增强、耐用银涂层堆叠

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US6921177B2 (en) * 2003-02-24 2005-07-26 Raytheon Company High precision mirror, and a method of making it
EP2316567B1 (en) 2003-09-26 2018-01-24 3M Innovative Properties Co. Nanoscale gold catalysts, activating agents, support media, and related methodologies useful for making such catalyst systems especially when the gold is deposited onto the support media using physical vapor deposition
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JP2015018228A (ja) * 2013-06-10 2015-01-29 旭化成イーマテリアルズ株式会社 ペリクル膜及びペリクル
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Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6206531B1 (en) * 1999-05-25 2001-03-27 Ultramet Lightweight precision optical mirror substrate and method of making
US20060186556A1 (en) * 2003-04-22 2006-08-24 Chien-Min Sung Semiconductor-on-diamond devices and methods of forming
US20050037679A1 (en) * 2003-08-12 2005-02-17 Raytheon Company Print through elimination in fiber reinforced matrix composite mirrors and method of construction
US20110297852A1 (en) * 2010-03-25 2011-12-08 Hidenobu Kameda Mirror and extreme ultraviolet light generation system
CN105143930A (zh) * 2013-02-28 2015-12-09 康宁股份有限公司 用于高反射镜子的增强、耐用银涂层堆叠

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117735991A (zh) * 2023-12-20 2024-03-22 扬州北方三山工业陶瓷有限公司 一种用于反射镜的b4c复合材料及其制备方法

Also Published As

Publication number Publication date
US10816702B2 (en) 2020-10-27
EP3430447A1 (en) 2019-01-23
WO2017161084A1 (en) 2017-09-21
KR20180121628A (ko) 2018-11-07
KR102288420B1 (ko) 2021-08-11
CA3018211A1 (en) 2017-09-21
US20180231698A1 (en) 2018-08-16
JP2019513241A (ja) 2019-05-23

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Application publication date: 20181109