CA3018211A1 - Reflective optical element with high stiffness substrate - Google Patents

Reflective optical element with high stiffness substrate Download PDF

Info

Publication number
CA3018211A1
CA3018211A1 CA3018211A CA3018211A CA3018211A1 CA 3018211 A1 CA3018211 A1 CA 3018211A1 CA 3018211 A CA3018211 A CA 3018211A CA 3018211 A CA3018211 A CA 3018211A CA 3018211 A1 CA3018211 A1 CA 3018211A1
Authority
CA
Canada
Prior art keywords
layer
base substrate
graphite
optical element
solder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA3018211A
Other languages
English (en)
French (fr)
Inventor
James Scott Sutherland
Leonard Gerard WAMBOLDT
Kenneth Smith Woodard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of CA3018211A1 publication Critical patent/CA3018211A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14—Protective coatings, e.g. hard coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Ceramic Products (AREA)
  • Laminated Bodies (AREA)
CA3018211A 2016-03-18 2017-03-16 Reflective optical element with high stiffness substrate Abandoned CA3018211A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662310201P 2016-03-18 2016-03-18
US62/310,201 2016-03-18
PCT/US2017/022653 WO2017161084A1 (en) 2016-03-18 2017-03-16 Reflective optical element with high stiffness substrate

Publications (1)

Publication Number Publication Date
CA3018211A1 true CA3018211A1 (en) 2017-09-21

Family

ID=58455670

Family Applications (1)

Application Number Title Priority Date Filing Date
CA3018211A Abandoned CA3018211A1 (en) 2016-03-18 2017-03-16 Reflective optical element with high stiffness substrate

Country Status (7)

Country Link
US (1) US10816702B2 (https=)
EP (1) EP3430447A1 (https=)
JP (1) JP2019513241A (https=)
KR (1) KR102288420B1 (https=)
CN (1) CN108780161A (https=)
CA (1) CA3018211A1 (https=)
WO (1) WO2017161084A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018204376B4 (de) * 2018-03-22 2022-07-07 Infineon Technologies Ag Siliziumcarbidvorrichtungen und Verfahren zur Herstellung derselben
US11226438B2 (en) * 2018-10-03 2022-01-18 Corning Incorporated Reflective optical element
US11619764B2 (en) * 2020-03-27 2023-04-04 Raytheon Company High-performance optical surface
US12345851B2 (en) 2021-01-27 2025-07-01 Corning Incorporated Corrosion-resistant coatings for IR-transmitting substrates
CN117735991B (zh) * 2023-12-20 2024-06-28 扬州北方三山工业陶瓷有限公司 一种用于反射镜的b4c复合材料及其制备方法

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969131A (en) 1972-07-24 1976-07-13 Westinghouse Electric Corporation Coated graphite members and process for producing the same
US4268124A (en) 1978-06-21 1981-05-19 Trw Inc. Optical reflector having a nickel-iron alloy reflecting surface
DE3018785C2 (de) 1980-05-16 1982-04-15 Heraeus Quarzschmelze Gmbh, 6450 Hanau Leichtgewichtsspiegel, insbesondere für astronomische Zwecke und Verfahren zu seiner Herstellung
US4376803A (en) * 1981-08-26 1983-03-15 The Aerospace Corporation Carbon-reinforced metal-matrix composites
FR2552554A1 (fr) 1983-09-23 1985-03-29 Leteurtre Jean Miroir pour faisceau lumineux, notamment laser de puissance
US4623228A (en) 1984-10-25 1986-11-18 United Technologies Corporation Composite mirror substrate
US4659548A (en) * 1986-02-13 1987-04-21 The United States Of America As Represented By The Secretary Of The Navy Fabrication of metal matrix composite mirror
JP2585300B2 (ja) * 1987-10-06 1997-02-26 キヤノン株式会社 Ｘ線又は真空紫外線用多層膜反射鏡
US4997678A (en) * 1989-10-23 1991-03-05 Cvd Incorporated Chemical vapor deposition process to replicate the finish and figure of preshaped structures
US5071596A (en) 1989-10-23 1991-12-10 Cvd Incorporated Fabrication of lightweight ceramic mirrors by means of a chemical vapor deposition process
JPH0774839B2 (ja) * 1991-09-30 1995-08-09 東芝セラミックス株式会社 Ｓｏｒ用ミラー
US5565052A (en) 1992-03-05 1996-10-15 Industrieanlagen-Betriebsgesellschaft Gmbh Method for the production of a reflector
US5912777A (en) * 1997-06-26 1999-06-15 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration High temperature solar reflector, its preparation and use
US6377655B1 (en) 1998-05-08 2002-04-23 Nikon Corporation Reflective mirror for soft x-ray exposure apparatus
ES2161171B1 (es) 1998-11-10 2003-04-01 Bwx Technologies Inc Un dispositivo optico reflector para lata temperatura.
US6206531B1 (en) * 1999-05-25 2001-03-27 Ultramet Lightweight precision optical mirror substrate and method of making
US7132309B2 (en) * 2003-04-22 2006-11-07 Chien-Min Sung Semiconductor-on-diamond devices and methods of forming
US6749309B1 (en) 2001-09-27 2004-06-15 Gsi Lumonics Corporation Optical element for scanning system and method of manufacture thereof
US7866343B2 (en) 2002-12-18 2011-01-11 Masco Corporation Of Indiana Faucet
US6921177B2 (en) * 2003-02-24 2005-07-26 Raytheon Company High precision mirror, and a method of making it
US7022629B2 (en) * 2003-08-12 2006-04-04 Raytheon Company Print through elimination in fiber reinforced matrix composite mirrors and method of construction
EP2316567B1 (en) 2003-09-26 2018-01-24 3M Innovative Properties Co. Nanoscale gold catalysts, activating agents, support media, and related methodologies useful for making such catalyst systems especially when the gold is deposited onto the support media using physical vapor deposition
US7688495B2 (en) 2006-03-03 2010-03-30 Gentex Corporation Thin-film coatings, electro-optic elements and assemblies incorporating these elements
JP2011222958A (ja) 2010-03-25 2011-11-04 Komatsu Ltd ミラーおよび極端紫外光生成装置
US8602576B1 (en) 2010-07-29 2013-12-10 Exelis, Inc. Lightweight mirror blanks by deposition
JP5926264B2 (ja) * 2010-09-27 2016-05-25 カール・ツァイス・エスエムティー・ゲーエムベーハー ミラー、当該ミラーを備える投影対物レンズ、及び当該投影対物レンズを備えるマイクロリソグラフィ用投影露光装置
US9575223B2 (en) * 2011-05-13 2017-02-21 Raytheon Company Magnesium mirrors and methods of manufacture thereof
DE102011103746A1 (de) * 2011-05-31 2012-12-06 Ixys Semiconductor Gmbh Verfahren zum Fügen von Metall-Keramik-Substraten an Metallkörpern
DE102012204833A1 (de) * 2012-03-27 2013-02-28 Carl Zeiss Smt Gmbh Glatte euv-spiegel und verfahren zu ihrer herstellung
US9488760B2 (en) 2013-02-28 2016-11-08 Corning Incorporated Enhanced, durable silver coating stacks for highly reflective mirrors
JP2015018228A (ja) * 2013-06-10 2015-01-29 旭化成イーマテリアルズ株式会社 ペリクル膜及びペリクル
GB201313824D0 (en) 2013-08-01 2013-09-18 Orbital Power Ltd A Rotary Engine
US20160024648A1 (en) 2014-07-24 2016-01-28 Lauren Bolton Process for making triple graded CVC-CVD-CVC silicon carbide products

Also Published As

Publication number Publication date
US10816702B2 (en) 2020-10-27
WO2017161084A1 (en) 2017-09-21
JP2019513241A (ja) 2019-05-23
KR20180121628A (ko) 2018-11-07
US20180231698A1 (en) 2018-08-16
KR102288420B1 (ko) 2021-08-11
EP3430447A1 (en) 2019-01-23
CN108780161A (zh) 2018-11-09

Similar Documents

Publication Publication Date Title
US10816702B2 (en) Reflective optical element with high stiffness substrate
JP2019513241A5 (https=)
JP5418231B2 (ja) 焼結体およびその製造方法ならびに光学部品
US20130057952A1 (en) Substrate made of an aluminum-silicon alloy or crystalline silicon, metal mirror, method for the production thereof, and use thereof
JP2009532213A (ja) 微細構造工具及びレーザーアブレーションを用いてこれを作成する方法
JP4068496B2 (ja) 鏡面母材及びそれを用いた鏡体及び、鏡体を用いた光学装置
Ealey et al. Developmental history and trends for reaction-bonded silicon carbide mirrors
US11226438B2 (en) Reflective optical element
JP6266620B2 (ja) 光学素子をコーティングするための保持デバイス及び方法
Carlin Lightweight mirror systems for spacecraft-an overview of materials and manufacturing needs
WO2017161087A2 (en) Graphite substrates for reflective optics
WO2015153704A1 (en) Lightweight reflecting optics
US20160011413A1 (en) Reflective optical element for a dynamic deflection of a laser beam and method for manufacture thereof
EP3992716A1 (en) Mirror-mounting member, position-measuring mirror using same, and exposure device
CA3129112A1 (en) Process for manufacturing an athermal low cost telescope based on high precision replication technology, and such telescope
US9933617B2 (en) Mirror including polycrystalline diamond body for use with a motor, scanning systems including the same, and related methods
US20210157085A1 (en) Optical mount
Strzelecki et al. Low-temperature Bonding of lightweight Mirrors
Santos et al. High-quality Finishing Process for Silicon Carbide Optical Components Using Conventional Equipment
Aggarwal et al. Recent developments in transparent polycrystalline spinel for electro-optic applications
CN101795995B (zh) 烧结体、其制造方法和光学部件
Woida et al. Sol-gel coating of composite mirrors to provide a surface for optical figuring
Tsuno NTSIC (New Technology SiC): the progress of recent two years
JP4917844B2 (ja) 成形型、および成形型の製造方法、並びにガラス光学素子の製造方法
Namba et al. Manufacturing of replicated Pt/C multilayer mirrors for hard X-ray telescopes

Legal Events

Date Code Title Description
FZDE Discontinued

Effective date: 20220916