JP2019513241A - 高剛性基体を伴う反射性光学素子 - Google Patents

高剛性基体を伴う反射性光学素子 Download PDF

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Publication number
JP2019513241A
JP2019513241A JP2018548785A JP2018548785A JP2019513241A JP 2019513241 A JP2019513241 A JP 2019513241A JP 2018548785 A JP2018548785 A JP 2018548785A JP 2018548785 A JP2018548785 A JP 2018548785A JP 2019513241 A JP2019513241 A JP 2019513241A
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layer
graphite
optical element
substrate
finish
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JP2018548785A
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Japanese (ja)
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JP2019513241A5 (https=
Inventor
スコット サザーランド，ジェイムズ
スコット サザーランド，ジェイムズ
ジェラード ワムボルト，レオナード
ジェラード ワムボルト，レオナード
スミス ウッダード，ケネス
スミス ウッダード，ケネス
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Corning Inc
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Corning Inc
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Publication of JP2019513241A publication Critical patent/JP2019513241A/ja
Publication of JP2019513241A5 publication Critical patent/JP2019513241A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14—Protective coatings, e.g. hard coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Ceramic Products (AREA)
  • Laminated Bodies (AREA)
JP2018548785A 2016-03-18 2017-03-16 高剛性基体を伴う反射性光学素子 Pending JP2019513241A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662310201P 2016-03-18 2016-03-18
US62/310,201 2016-03-18
PCT/US2017/022653 WO2017161084A1 (en) 2016-03-18 2017-03-16 Reflective optical element with high stiffness substrate

Publications (2)

Publication Number Publication Date
JP2019513241A true JP2019513241A (ja) 2019-05-23
JP2019513241A5 JP2019513241A5 (https=) 2021-05-27

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JP2018548785A Pending JP2019513241A (ja) 2016-03-18 2017-03-16 高剛性基体を伴う反射性光学素子

Country Status (7)

Country Link
US (1) US10816702B2 (https=)
EP (1) EP3430447A1 (https=)
JP (1) JP2019513241A (https=)
KR (1) KR102288420B1 (https=)
CN (1) CN108780161A (https=)
CA (1) CA3018211A1 (https=)
WO (1) WO2017161084A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022502710A (ja) * 2018-10-03 2022-01-11 コーニング インコーポレイテッド 反射光学部材

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DE102018204376B4 (de) * 2018-03-22 2022-07-07 Infineon Technologies Ag Siliziumcarbidvorrichtungen und Verfahren zur Herstellung derselben
US11619764B2 (en) * 2020-03-27 2023-04-04 Raytheon Company High-performance optical surface
US12345851B2 (en) 2021-01-27 2025-07-01 Corning Incorporated Corrosion-resistant coatings for IR-transmitting substrates
CN117735991B (zh) * 2023-12-20 2024-06-28 扬州北方三山工业陶瓷有限公司 一种用于反射镜的b4c复合材料及其制备方法

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JPH03153873A (ja) * 1989-10-23 1991-07-01 Cvd Inc 予備形状構造物の仕上げと形状を複製する化学気相蒸着法
US6206531B1 (en) * 1999-05-25 2001-03-27 Ultramet Lightweight precision optical mirror substrate and method of making
US20050037679A1 (en) * 2003-08-12 2005-02-17 Raytheon Company Print through elimination in fiber reinforced matrix composite mirrors and method of construction
JP2006518883A (ja) * 2003-02-24 2006-08-17 レイセオン・カンパニー 高精密度のミラーおよびその製造方法
JP2007537127A (ja) * 2004-05-13 2007-12-20 チェン−ミン スン， ダイヤモンド担持半導体デバイスおよび形成方法
JP2011222958A (ja) * 2010-03-25 2011-11-04 Komatsu Ltd ミラーおよび極端紫外光生成装置
DE102012204833A1 (de) * 2012-03-27 2013-02-28 Carl Zeiss Smt Gmbh Glatte euv-spiegel und verfahren zu ihrer herstellung
JP2013542593A (ja) * 2010-09-27 2013-11-21 カール・ツァイス・エスエムティー・ゲーエムベーハー ミラー、当該ミラーを備える投影対物レンズ、及び当該投影対物レンズを備えるマイクロリソグラフィ用投影露光装置
JP2014519056A (ja) * 2011-05-13 2014-08-07 レイセオン カンパニー マグネシウムミラー及び当該マグネシウムミラーの製造方法
JP2015018228A (ja) * 2013-06-10 2015-01-29 旭化成イーマテリアルズ株式会社 ペリクル膜及びペリクル

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FR2552554A1 (fr) 1983-09-23 1985-03-29 Leteurtre Jean Miroir pour faisceau lumineux, notamment laser de puissance
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US4659548A (en) * 1986-02-13 1987-04-21 The United States Of America As Represented By The Secretary Of The Navy Fabrication of metal matrix composite mirror
US5071596A (en) 1989-10-23 1991-12-10 Cvd Incorporated Fabrication of lightweight ceramic mirrors by means of a chemical vapor deposition process
JPH0774839B2 (ja) * 1991-09-30 1995-08-09 東芝セラミックス株式会社 Ｓｏｒ用ミラー
US5565052A (en) 1992-03-05 1996-10-15 Industrieanlagen-Betriebsgesellschaft Gmbh Method for the production of a reflector
US5912777A (en) * 1997-06-26 1999-06-15 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration High temperature solar reflector, its preparation and use
US6377655B1 (en) 1998-05-08 2002-04-23 Nikon Corporation Reflective mirror for soft x-ray exposure apparatus
ES2161171B1 (es) 1998-11-10 2003-04-01 Bwx Technologies Inc Un dispositivo optico reflector para lata temperatura.
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US7688495B2 (en) 2006-03-03 2010-03-30 Gentex Corporation Thin-film coatings, electro-optic elements and assemblies incorporating these elements
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DE102011103746A1 (de) * 2011-05-31 2012-12-06 Ixys Semiconductor Gmbh Verfahren zum Fügen von Metall-Keramik-Substraten an Metallkörpern
US9488760B2 (en) 2013-02-28 2016-11-08 Corning Incorporated Enhanced, durable silver coating stacks for highly reflective mirrors
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Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0194299A (ja) * 1987-10-06 1989-04-12 Canon Inc Ｘ線又は真空紫外線用多層膜反射鏡
JPH03153873A (ja) * 1989-10-23 1991-07-01 Cvd Inc 予備形状構造物の仕上げと形状を複製する化学気相蒸着法
US6206531B1 (en) * 1999-05-25 2001-03-27 Ultramet Lightweight precision optical mirror substrate and method of making
JP2006518883A (ja) * 2003-02-24 2006-08-17 レイセオン・カンパニー 高精密度のミラーおよびその製造方法
US20050037679A1 (en) * 2003-08-12 2005-02-17 Raytheon Company Print through elimination in fiber reinforced matrix composite mirrors and method of construction
JP2007537127A (ja) * 2004-05-13 2007-12-20 チェン−ミン スン， ダイヤモンド担持半導体デバイスおよび形成方法
JP2011222958A (ja) * 2010-03-25 2011-11-04 Komatsu Ltd ミラーおよび極端紫外光生成装置
JP2013542593A (ja) * 2010-09-27 2013-11-21 カール・ツァイス・エスエムティー・ゲーエムベーハー ミラー、当該ミラーを備える投影対物レンズ、及び当該投影対物レンズを備えるマイクロリソグラフィ用投影露光装置
JP2014519056A (ja) * 2011-05-13 2014-08-07 レイセオン カンパニー マグネシウムミラー及び当該マグネシウムミラーの製造方法
DE102012204833A1 (de) * 2012-03-27 2013-02-28 Carl Zeiss Smt Gmbh Glatte euv-spiegel und verfahren zu ihrer herstellung
JP2015018228A (ja) * 2013-06-10 2015-01-29 旭化成イーマテリアルズ株式会社 ペリクル膜及びペリクル

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022502710A (ja) * 2018-10-03 2022-01-11 コーニング インコーポレイテッド 反射光学部材

Also Published As

Publication number Publication date
US10816702B2 (en) 2020-10-27
WO2017161084A1 (en) 2017-09-21
KR20180121628A (ko) 2018-11-07
US20180231698A1 (en) 2018-08-16
KR102288420B1 (ko) 2021-08-11
EP3430447A1 (en) 2019-01-23
CA3018211A1 (en) 2017-09-21
CN108780161A (zh) 2018-11-09

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