KR102288420B1 - 고 강성 기판을 갖는 반사 광학 소자 - Google Patents
고 강성 기판을 갖는 반사 광학 소자 Download PDFInfo
- Publication number
- KR102288420B1 KR102288420B1 KR1020187029488A KR20187029488A KR102288420B1 KR 102288420 B1 KR102288420 B1 KR 102288420B1 KR 1020187029488 A KR1020187029488 A KR 1020187029488A KR 20187029488 A KR20187029488 A KR 20187029488A KR 102288420 B1 KR102288420 B1 KR 102288420B1
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- graphite
- base substrate
- delete delete
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/14—Protective coatings, e.g. hard coatings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optical Elements Other Than Lenses (AREA)
- Ceramic Products (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662310201P | 2016-03-18 | 2016-03-18 | |
| US62/310,201 | 2016-03-18 | ||
| PCT/US2017/022653 WO2017161084A1 (en) | 2016-03-18 | 2017-03-16 | Reflective optical element with high stiffness substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20180121628A KR20180121628A (ko) | 2018-11-07 |
| KR102288420B1 true KR102288420B1 (ko) | 2021-08-11 |
Family
ID=58455670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020187029488A Active KR102288420B1 (ko) | 2016-03-18 | 2017-03-16 | 고 강성 기판을 갖는 반사 광학 소자 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US10816702B2 (https=) |
| EP (1) | EP3430447A1 (https=) |
| JP (1) | JP2019513241A (https=) |
| KR (1) | KR102288420B1 (https=) |
| CN (1) | CN108780161A (https=) |
| CA (1) | CA3018211A1 (https=) |
| WO (1) | WO2017161084A1 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102018204376B4 (de) * | 2018-03-22 | 2022-07-07 | Infineon Technologies Ag | Siliziumcarbidvorrichtungen und Verfahren zur Herstellung derselben |
| US11226438B2 (en) * | 2018-10-03 | 2022-01-18 | Corning Incorporated | Reflective optical element |
| US11619764B2 (en) * | 2020-03-27 | 2023-04-04 | Raytheon Company | High-performance optical surface |
| US12345851B2 (en) | 2021-01-27 | 2025-07-01 | Corning Incorporated | Corrosion-resistant coatings for IR-transmitting substrates |
| CN117735991B (zh) * | 2023-12-20 | 2024-06-28 | 扬州北方三山工业陶瓷有限公司 | 一种用于反射镜的b4c复合材料及其制备方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011222958A (ja) * | 2010-03-25 | 2011-11-04 | Komatsu Ltd | ミラーおよび極端紫外光生成装置 |
Family Cites Families (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3969131A (en) | 1972-07-24 | 1976-07-13 | Westinghouse Electric Corporation | Coated graphite members and process for producing the same |
| US4268124A (en) | 1978-06-21 | 1981-05-19 | Trw Inc. | Optical reflector having a nickel-iron alloy reflecting surface |
| DE3018785C2 (de) | 1980-05-16 | 1982-04-15 | Heraeus Quarzschmelze Gmbh, 6450 Hanau | Leichtgewichtsspiegel, insbesondere für astronomische Zwecke und Verfahren zu seiner Herstellung |
| US4376803A (en) * | 1981-08-26 | 1983-03-15 | The Aerospace Corporation | Carbon-reinforced metal-matrix composites |
| FR2552554A1 (fr) | 1983-09-23 | 1985-03-29 | Leteurtre Jean | Miroir pour faisceau lumineux, notamment laser de puissance |
| US4623228A (en) | 1984-10-25 | 1986-11-18 | United Technologies Corporation | Composite mirror substrate |
| US4659548A (en) * | 1986-02-13 | 1987-04-21 | The United States Of America As Represented By The Secretary Of The Navy | Fabrication of metal matrix composite mirror |
| JP2585300B2 (ja) * | 1987-10-06 | 1997-02-26 | キヤノン株式会社 | X線又は真空紫外線用多層膜反射鏡 |
| US4997678A (en) * | 1989-10-23 | 1991-03-05 | Cvd Incorporated | Chemical vapor deposition process to replicate the finish and figure of preshaped structures |
| US5071596A (en) | 1989-10-23 | 1991-12-10 | Cvd Incorporated | Fabrication of lightweight ceramic mirrors by means of a chemical vapor deposition process |
| JPH0774839B2 (ja) * | 1991-09-30 | 1995-08-09 | 東芝セラミックス株式会社 | Sor用ミラー |
| US5565052A (en) | 1992-03-05 | 1996-10-15 | Industrieanlagen-Betriebsgesellschaft Gmbh | Method for the production of a reflector |
| US5912777A (en) * | 1997-06-26 | 1999-06-15 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | High temperature solar reflector, its preparation and use |
| US6377655B1 (en) | 1998-05-08 | 2002-04-23 | Nikon Corporation | Reflective mirror for soft x-ray exposure apparatus |
| ES2161171B1 (es) | 1998-11-10 | 2003-04-01 | Bwx Technologies Inc | Un dispositivo optico reflector para lata temperatura. |
| US6206531B1 (en) * | 1999-05-25 | 2001-03-27 | Ultramet | Lightweight precision optical mirror substrate and method of making |
| US7132309B2 (en) * | 2003-04-22 | 2006-11-07 | Chien-Min Sung | Semiconductor-on-diamond devices and methods of forming |
| US6749309B1 (en) | 2001-09-27 | 2004-06-15 | Gsi Lumonics Corporation | Optical element for scanning system and method of manufacture thereof |
| US7866343B2 (en) | 2002-12-18 | 2011-01-11 | Masco Corporation Of Indiana | Faucet |
| US6921177B2 (en) * | 2003-02-24 | 2005-07-26 | Raytheon Company | High precision mirror, and a method of making it |
| US7022629B2 (en) * | 2003-08-12 | 2006-04-04 | Raytheon Company | Print through elimination in fiber reinforced matrix composite mirrors and method of construction |
| EP2316567B1 (en) | 2003-09-26 | 2018-01-24 | 3M Innovative Properties Co. | Nanoscale gold catalysts, activating agents, support media, and related methodologies useful for making such catalyst systems especially when the gold is deposited onto the support media using physical vapor deposition |
| US7688495B2 (en) | 2006-03-03 | 2010-03-30 | Gentex Corporation | Thin-film coatings, electro-optic elements and assemblies incorporating these elements |
| US8602576B1 (en) | 2010-07-29 | 2013-12-10 | Exelis, Inc. | Lightweight mirror blanks by deposition |
| JP5926264B2 (ja) * | 2010-09-27 | 2016-05-25 | カール・ツァイス・エスエムティー・ゲーエムベーハー | ミラー、当該ミラーを備える投影対物レンズ、及び当該投影対物レンズを備えるマイクロリソグラフィ用投影露光装置 |
| US9575223B2 (en) * | 2011-05-13 | 2017-02-21 | Raytheon Company | Magnesium mirrors and methods of manufacture thereof |
| DE102011103746A1 (de) * | 2011-05-31 | 2012-12-06 | Ixys Semiconductor Gmbh | Verfahren zum Fügen von Metall-Keramik-Substraten an Metallkörpern |
| DE102012204833A1 (de) * | 2012-03-27 | 2013-02-28 | Carl Zeiss Smt Gmbh | Glatte euv-spiegel und verfahren zu ihrer herstellung |
| US9488760B2 (en) | 2013-02-28 | 2016-11-08 | Corning Incorporated | Enhanced, durable silver coating stacks for highly reflective mirrors |
| JP2015018228A (ja) * | 2013-06-10 | 2015-01-29 | 旭化成イーマテリアルズ株式会社 | ペリクル膜及びペリクル |
| GB201313824D0 (en) | 2013-08-01 | 2013-09-18 | Orbital Power Ltd | A Rotary Engine |
| US20160024648A1 (en) | 2014-07-24 | 2016-01-28 | Lauren Bolton | Process for making triple graded CVC-CVD-CVC silicon carbide products |
-
2017
- 2017-03-10 US US15/455,654 patent/US10816702B2/en active Active
- 2017-03-16 CA CA3018211A patent/CA3018211A1/en not_active Abandoned
- 2017-03-16 EP EP17714613.1A patent/EP3430447A1/en not_active Withdrawn
- 2017-03-16 JP JP2018548785A patent/JP2019513241A/ja active Pending
- 2017-03-16 CN CN201780018178.0A patent/CN108780161A/zh active Pending
- 2017-03-16 WO PCT/US2017/022653 patent/WO2017161084A1/en not_active Ceased
- 2017-03-16 KR KR1020187029488A patent/KR102288420B1/ko active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011222958A (ja) * | 2010-03-25 | 2011-11-04 | Komatsu Ltd | ミラーおよび極端紫外光生成装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US10816702B2 (en) | 2020-10-27 |
| WO2017161084A1 (en) | 2017-09-21 |
| JP2019513241A (ja) | 2019-05-23 |
| KR20180121628A (ko) | 2018-11-07 |
| US20180231698A1 (en) | 2018-08-16 |
| EP3430447A1 (en) | 2019-01-23 |
| CA3018211A1 (en) | 2017-09-21 |
| CN108780161A (zh) | 2018-11-09 |
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Legal Events
| Date | Code | Title | Description |
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| PA0105 | International application |
Patent event date: 20181012 Patent event code: PA01051R01D Comment text: International Patent Application |
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| PG1501 | Laying open of application | ||
| A201 | Request for examination | ||
| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 20200227 Comment text: Request for Examination of Application |
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| PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 20210120 Patent event code: PE09021S01D |
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| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
Patent event code: PE07011S01D Comment text: Decision to Grant Registration Patent event date: 20210726 |
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| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
Comment text: Registration of Establishment Patent event date: 20210804 Patent event code: PR07011E01D |
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| PR1002 | Payment of registration fee |
Payment date: 20210805 End annual number: 3 Start annual number: 1 |
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