JP5652845B2 - 宇宙機搭載用光学装置 - Google Patents
宇宙機搭載用光学装置 Download PDFInfo
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- JP5652845B2 JP5652845B2 JP2009131918A JP2009131918A JP5652845B2 JP 5652845 B2 JP5652845 B2 JP 5652845B2 JP 2009131918 A JP2009131918 A JP 2009131918A JP 2009131918 A JP2009131918 A JP 2009131918A JP 5652845 B2 JP5652845 B2 JP 5652845B2
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- 230000003287 optical effect Effects 0.000 title claims description 57
- 239000002210 silicon-based material Substances 0.000 claims description 17
- 238000005245 sintering Methods 0.000 claims description 11
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 6
- 239000000463 material Substances 0.000 description 18
- 239000000047 product Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 238000005452 bending Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000005304 joining Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 2
- 238000009694 cold isostatic pressing Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
- G02B17/0647—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors
- G02B17/0652—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors on-axis systems with at least one of the mirrors having a central aperture
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
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- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
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- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
- C04B37/005—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of glass or ceramic material
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- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
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- C04B37/006—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of metals or metal salts
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- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/008—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of an organic adhesive, e.g. phenol resin or pitch
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
- G02B23/16—Housings; Caps; Mountings; Supports, e.g. with counterweight
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/183—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors specially adapted for very large mirrors, e.g. for astronomy, or solar concentrators
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/38—Non-oxide ceramic constituents or additives
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/42—Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
- C04B2235/428—Silicon
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- C04B2237/04—Ceramic interlayers
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- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/52—Pre-treatment of the joining surfaces, e.g. cleaning, machining
- C04B2237/525—Pre-treatment of the joining surfaces, e.g. cleaning, machining by heating
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12993—Surface feature [e.g., rough, mirror]
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- Structural Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Astronomy & Astrophysics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Optical Elements Other Than Lenses (AREA)
Description
(2)材料粉を冷間等方圧プレスによって固め、成型体とする。
(3)成型体を機械加工し、最終分割部品とほぼ同じ形状にする。
(4)加工された成型体をシリコンとともに焼成炉にいれ、シリコンの溶融温度以上とすることにより、溶融シリコンと初期材料の炭素と反応させて、炭化ケイ素とする。その結果、初期材料の炭化ケイ素、反応生成された炭化ケイ素、及び余剰のシリコンを含む粒子分散シリコン材料からなる分割部品用母材が得られる。こうして、得られた粒子分散シリコン材料は、焼成時の収縮がほとんどなく、最終製品の形状に近いものが得られる。
(5)最後に、研削により形状を整えて最終部活部品が得られる。
(3)接合体をSiの融点以上に加熱し、溶融Siを含浸させる。これにより、多孔質体を反応焼結させ、部品11〜13を一体化させる。
11,12,13 分割部品
14 接合面
20 光学ベンチ
21 主鏡(1次鏡)
22 副鏡(2次鏡)
23 3次鏡
24 折り曲げ鏡(4次鏡)
25 折り曲げ鏡(5次鏡)
26 折り曲げ鏡(6次鏡)
27 焦点面
41 光学反射鏡
42 取り付けフランジ
43 パイプ
44 支持板
71 コア
72,73 表面板
Claims (2)
- 炭化ケイ素及びシリコンを含む粒子分散シリコン材料を用いた直径1m以上の大型反射鏡及び光学装置構造体を備え、
前記反射鏡は、同一形状を有する複数に分割された分割部品が反応焼結によって互いに接合されたものであり、
前記光学装置構造体は、前記反射鏡と同じ粒子分散シリコン材料により作製され、ハニカム構造の同一形状を有する複数の部材が反応焼結によって互いに接合されたコアを含む、
ことを特徴とする宇宙機搭載用光学装置。 - 前記反射鏡が前記光学装置構造体に反応焼結によって接合されていることを特徴とする請求項1に記載の宇宙機搭載用光学装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009131918A JP5652845B2 (ja) | 2009-06-01 | 2009-06-01 | 宇宙機搭載用光学装置 |
US12/801,254 US8444281B2 (en) | 2009-06-01 | 2010-05-28 | Optical device |
EP10005658A EP2258672A1 (en) | 2009-06-01 | 2010-05-31 | Optical device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009131918A JP5652845B2 (ja) | 2009-06-01 | 2009-06-01 | 宇宙機搭載用光学装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010277022A JP2010277022A (ja) | 2010-12-09 |
JP5652845B2 true JP5652845B2 (ja) | 2015-01-14 |
Family
ID=42332480
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009131918A Active JP5652845B2 (ja) | 2009-06-01 | 2009-06-01 | 宇宙機搭載用光学装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8444281B2 (ja) |
EP (1) | EP2258672A1 (ja) |
JP (1) | JP5652845B2 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103217777B (zh) * | 2013-04-12 | 2015-01-07 | 中国科学院西安光学精密机械研究所 | 一种大口径主反射镜 |
CN103983223B (zh) * | 2014-05-04 | 2017-04-12 | 中国科学院长春光学精密机械与物理研究所 | 液压支撑主镜位置测量装置和测量方法 |
JP6079906B2 (ja) * | 2016-01-06 | 2017-02-15 | 三菱電機株式会社 | 軽量化ミラー |
CN106646817B (zh) * | 2016-12-08 | 2019-05-07 | 中国科学院长春光学精密机械与物理研究所 | 基于静压原理的望远镜主镜芯轴机构及注油方法 |
JP6995030B2 (ja) * | 2018-08-30 | 2022-01-14 | 京セラ株式会社 | ミラー |
CA3168232A1 (en) * | 2020-01-15 | 2021-07-22 | Sheltered Wings, Inc. D/B/A Vortex Optics | Viewing optic with contours |
US20230373871A1 (en) * | 2022-05-18 | 2023-11-23 | Ii-Vi Delaware, Inc. | Reaction-bonded silicon-carbide with in-situ formed silicon layer for optical finishing |
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US7195361B2 (en) * | 2005-01-19 | 2007-03-27 | Xinetics, Inc. | Active hybrid optical component |
US7376169B2 (en) * | 2005-03-07 | 2008-05-20 | Joseph Reid Henrichs | Optical phase conjugation laser diode |
CN100476462C (zh) | 2006-06-20 | 2009-04-08 | 刘彤 | 反射镜基体及其制造方法 |
JP5322382B2 (ja) | 2006-11-30 | 2013-10-23 | 株式会社東芝 | セラミックス複合部材とその製造方法 |
US7740362B1 (en) * | 2008-02-19 | 2010-06-22 | Jefferson Science Associates | Mirror with thermally controlled radius of curvature |
JP2009205108A (ja) * | 2008-02-29 | 2009-09-10 | Mitsubishi Electric Corp | 軽量化ミラーおよびその製造方法 |
JP2012216743A (ja) * | 2010-06-16 | 2012-11-08 | Gigaphoton Inc | スペクトル純度フィルタ及びそれを備える極端紫外光生成装置 |
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2009
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2010
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JP2010277022A (ja) | 2010-12-09 |
US20100309570A1 (en) | 2010-12-09 |
US8444281B2 (en) | 2013-05-21 |
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