CN108713131B - 科里奥利流量传感器 - Google Patents

科里奥利流量传感器 Download PDF

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Publication number
CN108713131B
CN108713131B CN201780013899.2A CN201780013899A CN108713131B CN 108713131 B CN108713131 B CN 108713131B CN 201780013899 A CN201780013899 A CN 201780013899A CN 108713131 B CN108713131 B CN 108713131B
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China
Prior art keywords
coriolis
tube
flow sensor
excitation
detection elements
Prior art date
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CN201780013899.2A
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English (en)
Chinese (zh)
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CN108713131A (zh
Inventor
J·C·洛特斯
J·格罗内斯泰因
R·G·P·桑德斯
R·J·维格林克
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Berkin BV
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Berkin BV
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/844—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters
    • G01F1/8445—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters micromachined flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/8427—Coriolis or gyroscopic mass flowmeters constructional details detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/845—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits
    • G01F1/8468—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits
    • G01F1/849—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits having straight measuring conduits

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Measuring Volume Flow (AREA)
CN201780013899.2A 2016-01-14 2017-01-13 科里奥利流量传感器 Active CN108713131B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NL2016092A NL2016092B1 (en) 2016-01-14 2016-01-14 Coriolis flowsensor.
NL2016092 2016-01-14
PCT/NL2017/050014 WO2017123089A1 (en) 2016-01-14 2017-01-13 Coriolis flowsensor

Publications (2)

Publication Number Publication Date
CN108713131A CN108713131A (zh) 2018-10-26
CN108713131B true CN108713131B (zh) 2020-04-10

Family

ID=56027126

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201780013899.2A Active CN108713131B (zh) 2016-01-14 2017-01-13 科里奥利流量传感器

Country Status (9)

Country Link
US (1) US10627277B2 (enExample)
EP (1) EP3403059B1 (enExample)
JP (1) JP6771036B2 (enExample)
KR (1) KR102298790B1 (enExample)
CN (1) CN108713131B (enExample)
DK (1) DK3403059T3 (enExample)
ES (1) ES2764717T3 (enExample)
NL (1) NL2016092B1 (enExample)
WO (1) WO2017123089A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102796445B1 (ko) * 2018-04-03 2025-04-15 램 리써치 코포레이션 Mems 코리올리 가스 유량 제어기
DE102018119332A1 (de) * 2018-08-08 2020-02-13 Endress+Hauser Flowtec Ag Messaufnehmer und Messgerät
DE102019105736B3 (de) * 2019-03-07 2020-06-25 Endress+Hauser Flowtec Ag Coriolis-Messaufnehmer und Coriolis-Messgerät mit Coriolis-Messaufnehmer
IT202000006001A1 (it) * 2020-03-20 2021-09-20 St Microelectronics Srl Metodo di fabbricazione di un dispositivo sensore di flusso in silicio basato sulla forza di coriolis, dispositivo sensore di flusso basato sulla forza di coriolis, e sistema per misurare una proprieta' di un fluido
DE102020127356A1 (de) * 2020-10-16 2022-04-21 Endress + Hauser Flowtec Ag Modulares Messgerät

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1370270A (zh) * 1999-08-13 2002-09-18 微动公司 用于具有准确度提高的平衡杆的科氏流量计的方法和装置
CN1701291A (zh) * 2001-11-26 2005-11-23 美国艾默生电气公司 高纯度科氏质量流量控制器
DE102004060115A1 (de) * 2004-12-13 2006-06-14 Endress + Hauser Flowtec Ag Meßaufnehmer vom Vibrationstyp
EP1719983A1 (en) * 2005-05-02 2006-11-08 Berkin B.V. Coriolis mass flow meter using contactless excitation and detection

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4823614A (en) * 1986-04-28 1989-04-25 Dahlin Erik B Coriolis-type mass flowmeter
DE19825775A1 (de) * 1997-10-07 1999-05-12 Krohne Ag Massendurchflußmeßgerät
US6748813B1 (en) * 1998-12-08 2004-06-15 Emerson Electric Company Coriolis mass flow controller
US6477901B1 (en) * 1999-12-21 2002-11-12 Integrated Sensing Systems, Inc. Micromachined fluidic apparatus
US6684716B2 (en) * 2000-04-07 2004-02-03 Kazumasa Ohnishi Coriolis flowmeter
JP3689738B2 (ja) * 2002-02-26 2005-08-31 独立行政法人産業技術総合研究所 コリオリ式流量計
JP3783959B2 (ja) * 2003-12-02 2006-06-07 株式会社オーバル コリオリ流量計
NL1028938C2 (nl) * 2005-05-02 2006-11-03 Berkin Bv Massa flowmeter van het Coriolistype.
US7690269B2 (en) * 2005-06-01 2010-04-06 Siemens Aktiengesellschaft Coriolis flow meter having bearings for mounting the measuring tube in the region of the oscillation nodes
US7581429B2 (en) * 2006-01-06 2009-09-01 Integrated Sensing Systems, Inc. Microfluidic device and method of operation
US7823445B2 (en) * 2007-12-07 2010-11-02 Integrated Sensing Systems, Inc. System and method of assessing a property of a flowing fluid
NL1034905C2 (nl) * 2008-01-11 2009-07-14 Berkin Bv Stromingsmeetapparaat.
WO2009102763A1 (en) * 2008-02-11 2009-08-20 Integrated Sensing Systems, Inc. Microfluidic device and method of operation
WO2011099989A1 (en) * 2010-02-12 2011-08-18 Malema Engineering Corporation Methods of manufacturing and temperature calibrating a coriolis mass flow rate sensor
EP2461079B1 (de) * 2010-12-03 2019-04-10 Levitronix GmbH Durchflussmesser
DE102013113689B4 (de) * 2013-12-09 2018-02-01 Endress + Hauser Flowtec Ag Dichte-Meßgerät

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1370270A (zh) * 1999-08-13 2002-09-18 微动公司 用于具有准确度提高的平衡杆的科氏流量计的方法和装置
CN1701291A (zh) * 2001-11-26 2005-11-23 美国艾默生电气公司 高纯度科氏质量流量控制器
DE102004060115A1 (de) * 2004-12-13 2006-06-14 Endress + Hauser Flowtec Ag Meßaufnehmer vom Vibrationstyp
EP1719983A1 (en) * 2005-05-02 2006-11-08 Berkin B.V. Coriolis mass flow meter using contactless excitation and detection

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
A silicon resonant sensor structure for Coriolis mass-flow measurements;P. Enoksson ; G. Stemme ; E. Stemme;《Journal of Microelectromechanical Systems》;19970731;第6卷(第2期);119-125 *
微弯型科氏质量流量计测量气-液两相流研究;董帅，徐科军，侯其立，陶波波，刘铮;《仪器仪表学报》;20150930(第9期);1972-1977 *

Also Published As

Publication number Publication date
KR20180108663A (ko) 2018-10-04
WO2017123089A1 (en) 2017-07-20
JP6771036B2 (ja) 2020-10-21
NL2016092B1 (en) 2017-07-24
DK3403059T3 (da) 2020-01-20
JP2019502130A (ja) 2019-01-24
US10627277B2 (en) 2020-04-21
CN108713131A (zh) 2018-10-26
EP3403059B1 (en) 2019-10-16
EP3403059A1 (en) 2018-11-21
ES2764717T3 (es) 2020-06-04
KR102298790B1 (ko) 2021-09-06
US20190056254A1 (en) 2019-02-21

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