KR102298790B1 - 코리올리 유량 센서 - Google Patents

코리올리 유량 센서 Download PDF

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Publication number
KR102298790B1
KR102298790B1 KR1020187023365A KR20187023365A KR102298790B1 KR 102298790 B1 KR102298790 B1 KR 102298790B1 KR 1020187023365 A KR1020187023365 A KR 1020187023365A KR 20187023365 A KR20187023365 A KR 20187023365A KR 102298790 B1 KR102298790 B1 KR 102298790B1
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South Korea
Prior art keywords
tube
coriolis
flow sensor
excitation
detection
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KR1020187023365A
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English (en)
Korean (ko)
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KR20180108663A (ko
Inventor
요스트 콘라드 루터스
야르노 그로에네스텡
렘코 헤라르뒤스 페트루스 샌더스
렘코 존 비헤린크
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버킨 비.브이.
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/844—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters
    • G01F1/8445—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters micromachined flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/8427—Coriolis or gyroscopic mass flowmeters constructional details detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/845—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits
    • G01F1/8468—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits
    • G01F1/849—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits having straight measuring conduits

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Measuring Volume Flow (AREA)
KR1020187023365A 2016-01-14 2017-01-13 코리올리 유량 센서 Active KR102298790B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NL2016092A NL2016092B1 (en) 2016-01-14 2016-01-14 Coriolis flowsensor.
NL2016092 2016-01-14
PCT/NL2017/050014 WO2017123089A1 (en) 2016-01-14 2017-01-13 Coriolis flowsensor

Publications (2)

Publication Number Publication Date
KR20180108663A KR20180108663A (ko) 2018-10-04
KR102298790B1 true KR102298790B1 (ko) 2021-09-06

Family

ID=56027126

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020187023365A Active KR102298790B1 (ko) 2016-01-14 2017-01-13 코리올리 유량 센서

Country Status (9)

Country Link
US (1) US10627277B2 (enExample)
EP (1) EP3403059B1 (enExample)
JP (1) JP6771036B2 (enExample)
KR (1) KR102298790B1 (enExample)
CN (1) CN108713131B (enExample)
DK (1) DK3403059T3 (enExample)
ES (1) ES2764717T3 (enExample)
NL (1) NL2016092B1 (enExample)
WO (1) WO2017123089A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102796445B1 (ko) * 2018-04-03 2025-04-15 램 리써치 코포레이션 Mems 코리올리 가스 유량 제어기
DE102018119332A1 (de) * 2018-08-08 2020-02-13 Endress+Hauser Flowtec Ag Messaufnehmer und Messgerät
DE102019105736B3 (de) * 2019-03-07 2020-06-25 Endress+Hauser Flowtec Ag Coriolis-Messaufnehmer und Coriolis-Messgerät mit Coriolis-Messaufnehmer
IT202000006001A1 (it) * 2020-03-20 2021-09-20 St Microelectronics Srl Metodo di fabbricazione di un dispositivo sensore di flusso in silicio basato sulla forza di coriolis, dispositivo sensore di flusso basato sulla forza di coriolis, e sistema per misurare una proprieta' di un fluido
DE102020127356A1 (de) * 2020-10-16 2022-04-21 Endress + Hauser Flowtec Ag Modulares Messgerät

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003247878A (ja) 2002-02-26 2003-09-05 National Institute Of Advanced Industrial & Technology コリオリ式流量計

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4823614A (en) * 1986-04-28 1989-04-25 Dahlin Erik B Coriolis-type mass flowmeter
DE19825775A1 (de) * 1997-10-07 1999-05-12 Krohne Ag Massendurchflußmeßgerät
US6748813B1 (en) * 1998-12-08 2004-06-15 Emerson Electric Company Coriolis mass flow controller
US6363794B1 (en) * 1999-08-13 2002-04-02 Micro Motion, Inc. Method and apparatus for Coriolis flowmeter having an accuracy enhancing balance bar
US6477901B1 (en) * 1999-12-21 2002-11-12 Integrated Sensing Systems, Inc. Micromachined fluidic apparatus
US6684716B2 (en) * 2000-04-07 2004-02-03 Kazumasa Ohnishi Coriolis flowmeter
US6606917B2 (en) * 2001-11-26 2003-08-19 Emerson Electric Co. High purity coriolis mass flow controller
JP3783959B2 (ja) * 2003-12-02 2006-06-07 株式会社オーバル コリオリ流量計
DE102004060115A1 (de) * 2004-12-13 2006-06-14 Endress + Hauser Flowtec Ag Meßaufnehmer vom Vibrationstyp
NL1028939C2 (nl) * 2005-05-02 2006-11-03 Berkin Bv Massa flowmeter van het Coriolistype.
NL1028938C2 (nl) * 2005-05-02 2006-11-03 Berkin Bv Massa flowmeter van het Coriolistype.
US7690269B2 (en) * 2005-06-01 2010-04-06 Siemens Aktiengesellschaft Coriolis flow meter having bearings for mounting the measuring tube in the region of the oscillation nodes
US7581429B2 (en) * 2006-01-06 2009-09-01 Integrated Sensing Systems, Inc. Microfluidic device and method of operation
US7823445B2 (en) * 2007-12-07 2010-11-02 Integrated Sensing Systems, Inc. System and method of assessing a property of a flowing fluid
NL1034905C2 (nl) * 2008-01-11 2009-07-14 Berkin Bv Stromingsmeetapparaat.
WO2009102763A1 (en) * 2008-02-11 2009-08-20 Integrated Sensing Systems, Inc. Microfluidic device and method of operation
WO2011099989A1 (en) * 2010-02-12 2011-08-18 Malema Engineering Corporation Methods of manufacturing and temperature calibrating a coriolis mass flow rate sensor
EP2461079B1 (de) * 2010-12-03 2019-04-10 Levitronix GmbH Durchflussmesser
DE102013113689B4 (de) * 2013-12-09 2018-02-01 Endress + Hauser Flowtec Ag Dichte-Meßgerät

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003247878A (ja) 2002-02-26 2003-09-05 National Institute Of Advanced Industrial & Technology コリオリ式流量計

Also Published As

Publication number Publication date
CN108713131B (zh) 2020-04-10
KR20180108663A (ko) 2018-10-04
WO2017123089A1 (en) 2017-07-20
JP6771036B2 (ja) 2020-10-21
NL2016092B1 (en) 2017-07-24
DK3403059T3 (da) 2020-01-20
JP2019502130A (ja) 2019-01-24
US10627277B2 (en) 2020-04-21
CN108713131A (zh) 2018-10-26
EP3403059B1 (en) 2019-10-16
EP3403059A1 (en) 2018-11-21
ES2764717T3 (es) 2020-06-04
US20190056254A1 (en) 2019-02-21

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