ES2764717T3 - Sensor de flujo de efecto Coriolis - Google Patents

Sensor de flujo de efecto Coriolis Download PDF

Info

Publication number
ES2764717T3
ES2764717T3 ES17702968T ES17702968T ES2764717T3 ES 2764717 T3 ES2764717 T3 ES 2764717T3 ES 17702968 T ES17702968 T ES 17702968T ES 17702968 T ES17702968 T ES 17702968T ES 2764717 T3 ES2764717 T3 ES 2764717T3
Authority
ES
Spain
Prior art keywords
tube
coriolis
excitation
axis
flow sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
ES17702968T
Other languages
English (en)
Spanish (es)
Inventor
Joost Conrad Lötters
Jarno Groenesteijn
Remco Gerardus Petrus Sanders
Remco John Wiegerink
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Berkin BV
Original Assignee
Berkin BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berkin BV filed Critical Berkin BV
Application granted granted Critical
Publication of ES2764717T3 publication Critical patent/ES2764717T3/es
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/844—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters
    • G01F1/8445—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters micromachined flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/8427—Coriolis or gyroscopic mass flowmeters constructional details detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/845—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits
    • G01F1/8468—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits
    • G01F1/849—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits having straight measuring conduits

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Measuring Volume Flow (AREA)
ES17702968T 2016-01-14 2017-01-13 Sensor de flujo de efecto Coriolis Active ES2764717T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL2016092A NL2016092B1 (en) 2016-01-14 2016-01-14 Coriolis flowsensor.
PCT/NL2017/050014 WO2017123089A1 (en) 2016-01-14 2017-01-13 Coriolis flowsensor

Publications (1)

Publication Number Publication Date
ES2764717T3 true ES2764717T3 (es) 2020-06-04

Family

ID=56027126

Family Applications (1)

Application Number Title Priority Date Filing Date
ES17702968T Active ES2764717T3 (es) 2016-01-14 2017-01-13 Sensor de flujo de efecto Coriolis

Country Status (9)

Country Link
US (1) US10627277B2 (enExample)
EP (1) EP3403059B1 (enExample)
JP (1) JP6771036B2 (enExample)
KR (1) KR102298790B1 (enExample)
CN (1) CN108713131B (enExample)
DK (1) DK3403059T3 (enExample)
ES (1) ES2764717T3 (enExample)
NL (1) NL2016092B1 (enExample)
WO (1) WO2017123089A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210310920A1 (en) * 2018-08-08 2021-10-07 Endress+Hauser Flowtec Ag Measuring transducer and measurement device

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102796445B1 (ko) * 2018-04-03 2025-04-15 램 리써치 코포레이션 Mems 코리올리 가스 유량 제어기
DE102019105736B3 (de) * 2019-03-07 2020-06-25 Endress+Hauser Flowtec Ag Coriolis-Messaufnehmer und Coriolis-Messgerät mit Coriolis-Messaufnehmer
IT202000006001A1 (it) * 2020-03-20 2021-09-20 St Microelectronics Srl Metodo di fabbricazione di un dispositivo sensore di flusso in silicio basato sulla forza di coriolis, dispositivo sensore di flusso basato sulla forza di coriolis, e sistema per misurare una proprieta' di un fluido
DE102020127356A1 (de) * 2020-10-16 2022-04-21 Endress + Hauser Flowtec Ag Modulares Messgerät

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4823614A (en) * 1986-04-28 1989-04-25 Dahlin Erik B Coriolis-type mass flowmeter
DE19825775A1 (de) * 1997-10-07 1999-05-12 Krohne Ag Massendurchflußmeßgerät
US6748813B1 (en) * 1998-12-08 2004-06-15 Emerson Electric Company Coriolis mass flow controller
US6363794B1 (en) * 1999-08-13 2002-04-02 Micro Motion, Inc. Method and apparatus for Coriolis flowmeter having an accuracy enhancing balance bar
US6477901B1 (en) * 1999-12-21 2002-11-12 Integrated Sensing Systems, Inc. Micromachined fluidic apparatus
US6684716B2 (en) * 2000-04-07 2004-02-03 Kazumasa Ohnishi Coriolis flowmeter
US6606917B2 (en) * 2001-11-26 2003-08-19 Emerson Electric Co. High purity coriolis mass flow controller
JP3689738B2 (ja) * 2002-02-26 2005-08-31 独立行政法人産業技術総合研究所 コリオリ式流量計
JP3783959B2 (ja) * 2003-12-02 2006-06-07 株式会社オーバル コリオリ流量計
DE102004060115A1 (de) * 2004-12-13 2006-06-14 Endress + Hauser Flowtec Ag Meßaufnehmer vom Vibrationstyp
NL1028939C2 (nl) * 2005-05-02 2006-11-03 Berkin Bv Massa flowmeter van het Coriolistype.
NL1028938C2 (nl) * 2005-05-02 2006-11-03 Berkin Bv Massa flowmeter van het Coriolistype.
US7690269B2 (en) * 2005-06-01 2010-04-06 Siemens Aktiengesellschaft Coriolis flow meter having bearings for mounting the measuring tube in the region of the oscillation nodes
US7581429B2 (en) * 2006-01-06 2009-09-01 Integrated Sensing Systems, Inc. Microfluidic device and method of operation
US7823445B2 (en) * 2007-12-07 2010-11-02 Integrated Sensing Systems, Inc. System and method of assessing a property of a flowing fluid
NL1034905C2 (nl) * 2008-01-11 2009-07-14 Berkin Bv Stromingsmeetapparaat.
WO2009102763A1 (en) * 2008-02-11 2009-08-20 Integrated Sensing Systems, Inc. Microfluidic device and method of operation
WO2011099989A1 (en) * 2010-02-12 2011-08-18 Malema Engineering Corporation Methods of manufacturing and temperature calibrating a coriolis mass flow rate sensor
EP2461079B1 (de) * 2010-12-03 2019-04-10 Levitronix GmbH Durchflussmesser
DE102013113689B4 (de) * 2013-12-09 2018-02-01 Endress + Hauser Flowtec Ag Dichte-Meßgerät

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210310920A1 (en) * 2018-08-08 2021-10-07 Endress+Hauser Flowtec Ag Measuring transducer and measurement device
US11933806B2 (en) * 2018-08-08 2024-03-19 Endress+Hauser Flowtec Ag Measuring transducer and measurement device

Also Published As

Publication number Publication date
CN108713131B (zh) 2020-04-10
KR20180108663A (ko) 2018-10-04
WO2017123089A1 (en) 2017-07-20
JP6771036B2 (ja) 2020-10-21
NL2016092B1 (en) 2017-07-24
DK3403059T3 (da) 2020-01-20
JP2019502130A (ja) 2019-01-24
US10627277B2 (en) 2020-04-21
CN108713131A (zh) 2018-10-26
EP3403059B1 (en) 2019-10-16
EP3403059A1 (en) 2018-11-21
KR102298790B1 (ko) 2021-09-06
US20190056254A1 (en) 2019-02-21

Similar Documents

Publication Publication Date Title
ES2764717T3 (es) Sensor de flujo de efecto Coriolis
ES2358161T3 (es) Caudalímetro con tubo de flujo de silicio.
JP4958999B2 (ja) マイクロ流体デバイスとそのためのマイクロチューブ
ES2294783T3 (es) Detector de caudalimetro de vortice y caudalimetro de vortice.
ES2875754T3 (es) Sensor MEMS para medir al menos una magnitud de medición de un fluido
EP1693653B1 (en) Coriolis flowmeter
Dau et al. Design and fabrication of convective inertial sensor consisting of 3DOF gyroscope and 2DOF accelerometer
CN111595315B (zh) 一种t字型推挽流微机械双轴薄膜陀螺
AU765725B2 (en) A coriolis effect fluid flow meter
US20090038412A1 (en) Tertiary mode vibration type coriolis flowmeter
CN111595318B (zh) 一种单热源“t”字型微机械双轴薄膜陀螺
JP2947789B1 (ja) コリオリ質量流量計
JP2579349B2 (ja) 流体計測装置
ES2347994T3 (es) Caudalímetro que usa un oscilador fluídico con señal de excitación alternativa.
CN212082385U (zh) 一种“t”字型推挽流微机械三轴薄膜陀螺
CN212082389U (zh) 一种单热源“t”字型微机械三轴薄膜陀螺
CN212082390U (zh) 一种“t”字型推挽流微机械双轴薄膜陀螺
CN111595319B (zh) 一种单热源t字型微机械三轴薄膜陀螺
Dinh et al. Design and fabrication of a convective 3-DOF angular rate sensor
CN111595316B (zh) 一种t字型推挽流微机械三轴薄膜陀螺
JP2002039830A (ja) コリオリ流量計
WO2019143239A1 (en) Coriolis flow sensor
JP2001108501A (ja) コリオリ質量流量計
JP2001289683A (ja) コリオリ式流量計
RU2071035C1 (ru) Датчик вихревого расходомера