JP2019502130A - コリオリ流量計 - Google Patents
コリオリ流量計 Download PDFInfo
- Publication number
- JP2019502130A JP2019502130A JP2018537496A JP2018537496A JP2019502130A JP 2019502130 A JP2019502130 A JP 2019502130A JP 2018537496 A JP2018537496 A JP 2018537496A JP 2018537496 A JP2018537496 A JP 2018537496A JP 2019502130 A JP2019502130 A JP 2019502130A
- Authority
- JP
- Japan
- Prior art keywords
- tube
- coriolis
- flow meter
- excitation
- detection elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/78—Direct mass flowmeters
- G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
- G01F1/84—Coriolis or gyroscopic mass flowmeters
- G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
- G01F1/844—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters
- G01F1/8445—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters micromachined flowmeters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/78—Direct mass flowmeters
- G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
- G01F1/84—Coriolis or gyroscopic mass flowmeters
- G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
- G01F1/8427—Coriolis or gyroscopic mass flowmeters constructional details detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/78—Direct mass flowmeters
- G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
- G01F1/84—Coriolis or gyroscopic mass flowmeters
- G01F1/845—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits
- G01F1/8468—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits
- G01F1/849—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits having straight measuring conduits
Abstract
【選択図】図1a
Description
Claims (4)
- −コリオリチューブ(3)と、
−前記チューブを、励起軸(29)の周りで振動させるための励起手段(9、9’、10)と、
−使用中に、少なくとも前記コリオリチューブ(3)の一部の運動の量の測定値を検出する検出手段(112、112’)とを備え、
前記コリオリチューブは、前記励起軸(29)を横断して延びる測定チューブ部分(124、124’)を備え、
前記検出手段は、2つの検出要素(112、112’)を備え、
前記2つの検出要素(112、112’)は、前記測定チューブ部分(124)のそれぞれ反対側面上に配置され、
前記2つの検出要素(112、112’)は、一部が励起軸(29)にオーバラップしており、
励起軸(29)と平行な方向に見たとき、前記2つの検出要素(112、112’)は、互いにそれぞれの後方に配置され、それぞれの一部同士がオーバラップし、
前記2つの検出要素(112、112’)の少なくとも1つは、励起軸(29)に関して非対称に配置される、
コリオリ流量計。 - 前記コリオリチューブ(3)は実質的にU字型である、
請求項1に記載のコリオリ流量計。 - 前記2つの検出要素(112、112’)の各々は、励起軸(29)に関して非対称に配置される、
請求項1または2に記載のコリオリ流量計。 - 前記検出要素は、読み出し要素(111、113;111’、113’)である、
請求項1から3のいずれか一項に記載のコリオリ流量計。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL2016092A NL2016092B1 (en) | 2016-01-14 | 2016-01-14 | Coriolis flowsensor. |
NL2016092 | 2016-01-14 | ||
PCT/NL2017/050014 WO2017123089A1 (en) | 2016-01-14 | 2017-01-13 | Coriolis flowsensor |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2019502130A true JP2019502130A (ja) | 2019-01-24 |
JP2019502130A5 JP2019502130A5 (ja) | 2020-02-20 |
JP6771036B2 JP6771036B2 (ja) | 2020-10-21 |
Family
ID=56027126
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018537496A Active JP6771036B2 (ja) | 2016-01-14 | 2017-01-13 | コリオリ流量計 |
Country Status (9)
Country | Link |
---|---|
US (1) | US10627277B2 (ja) |
EP (1) | EP3403059B1 (ja) |
JP (1) | JP6771036B2 (ja) |
KR (1) | KR102298790B1 (ja) |
CN (1) | CN108713131B (ja) |
DK (1) | DK3403059T3 (ja) |
ES (1) | ES2764717T3 (ja) |
NL (1) | NL2016092B1 (ja) |
WO (1) | WO2017123089A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11662237B2 (en) * | 2018-04-03 | 2023-05-30 | Lam Research Corporation | MEMS coriolis gas flow controller |
DE102018119332A1 (de) * | 2018-08-08 | 2020-02-13 | Endress+Hauser Flowtec Ag | Messaufnehmer und Messgerät |
DE102019105736B3 (de) * | 2019-03-07 | 2020-06-25 | Endress+Hauser Flowtec Ag | Coriolis-Messaufnehmer und Coriolis-Messgerät mit Coriolis-Messaufnehmer |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3689738B2 (ja) * | 2002-02-26 | 2005-08-31 | 独立行政法人産業技術総合研究所 | コリオリ式流量計 |
JP3783959B2 (ja) * | 2003-12-02 | 2006-06-07 | 株式会社オーバル | コリオリ流量計 |
US20070157739A1 (en) * | 2006-01-06 | 2007-07-12 | Integrated Sensing Systems, Inc. | Microfluidic device and method of operation |
US20100037708A1 (en) * | 2008-02-11 | 2010-02-18 | Integrated Sensing Systems, Inc. | Microfluidic device and method of operation |
JP2011506938A (ja) * | 2007-12-07 | 2011-03-03 | インテグレイテッド センシング システムズ,インク. | 流体の特性を評価するシステムおよび方法 |
JP5096689B2 (ja) * | 2005-05-02 | 2012-12-12 | ベルキン ビーブイ | 質量流量計 |
JP5537025B2 (ja) * | 2008-01-11 | 2014-07-02 | ベルキン ビーブイ | 流量計、流量計のためのシステムチップ及びその製造方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4823614A (en) * | 1986-04-28 | 1989-04-25 | Dahlin Erik B | Coriolis-type mass flowmeter |
DE19825775A1 (de) * | 1997-10-07 | 1999-05-12 | Krohne Ag | Massendurchflußmeßgerät |
US6748813B1 (en) * | 1998-12-08 | 2004-06-15 | Emerson Electric Company | Coriolis mass flow controller |
US6363794B1 (en) * | 1999-08-13 | 2002-04-02 | Micro Motion, Inc. | Method and apparatus for Coriolis flowmeter having an accuracy enhancing balance bar |
US6477901B1 (en) * | 1999-12-21 | 2002-11-12 | Integrated Sensing Systems, Inc. | Micromachined fluidic apparatus |
US6684716B2 (en) * | 2000-04-07 | 2004-02-03 | Kazumasa Ohnishi | Coriolis flowmeter |
US6606917B2 (en) * | 2001-11-26 | 2003-08-19 | Emerson Electric Co. | High purity coriolis mass flow controller |
DE102004060115A1 (de) * | 2004-12-13 | 2006-06-14 | Endress + Hauser Flowtec Ag | Meßaufnehmer vom Vibrationstyp |
NL1028939C2 (nl) * | 2005-05-02 | 2006-11-03 | Berkin Bv | Massa flowmeter van het Coriolistype. |
EP1889011A1 (de) * | 2005-06-01 | 2008-02-20 | Siemens Aktiengesellschaft | Massendurchflussmessgerät |
EP2534453A4 (en) * | 2010-02-12 | 2015-06-24 | Malema Engineering Corp | METHODS OF MANUFACTURING AND TEMPERATURE CALIBRATION OF CORIOLIS MASSIVE FLOW SENSOR |
EP2461079B1 (de) * | 2010-12-03 | 2019-04-10 | Levitronix GmbH | Durchflussmesser |
DE102013113689B4 (de) * | 2013-12-09 | 2018-02-01 | Endress + Hauser Flowtec Ag | Dichte-Meßgerät |
-
2016
- 2016-01-14 NL NL2016092A patent/NL2016092B1/en not_active IP Right Cessation
-
2017
- 2017-01-13 CN CN201780013899.2A patent/CN108713131B/zh active Active
- 2017-01-13 US US16/069,789 patent/US10627277B2/en active Active
- 2017-01-13 KR KR1020187023365A patent/KR102298790B1/ko active IP Right Grant
- 2017-01-13 ES ES17702968T patent/ES2764717T3/es active Active
- 2017-01-13 DK DK17702968.3T patent/DK3403059T3/da active
- 2017-01-13 JP JP2018537496A patent/JP6771036B2/ja active Active
- 2017-01-13 EP EP17702968.3A patent/EP3403059B1/en active Active
- 2017-01-13 WO PCT/NL2017/050014 patent/WO2017123089A1/en active Application Filing
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3689738B2 (ja) * | 2002-02-26 | 2005-08-31 | 独立行政法人産業技術総合研究所 | コリオリ式流量計 |
JP3783959B2 (ja) * | 2003-12-02 | 2006-06-07 | 株式会社オーバル | コリオリ流量計 |
JP5096689B2 (ja) * | 2005-05-02 | 2012-12-12 | ベルキン ビーブイ | 質量流量計 |
US20070157739A1 (en) * | 2006-01-06 | 2007-07-12 | Integrated Sensing Systems, Inc. | Microfluidic device and method of operation |
JP2011506938A (ja) * | 2007-12-07 | 2011-03-03 | インテグレイテッド センシング システムズ,インク. | 流体の特性を評価するシステムおよび方法 |
JP5537025B2 (ja) * | 2008-01-11 | 2014-07-02 | ベルキン ビーブイ | 流量計、流量計のためのシステムチップ及びその製造方法 |
US20100037708A1 (en) * | 2008-02-11 | 2010-02-18 | Integrated Sensing Systems, Inc. | Microfluidic device and method of operation |
Also Published As
Publication number | Publication date |
---|---|
US10627277B2 (en) | 2020-04-21 |
CN108713131A (zh) | 2018-10-26 |
ES2764717T3 (es) | 2020-06-04 |
NL2016092B1 (en) | 2017-07-24 |
DK3403059T3 (da) | 2020-01-20 |
EP3403059B1 (en) | 2019-10-16 |
EP3403059A1 (en) | 2018-11-21 |
JP6771036B2 (ja) | 2020-10-21 |
KR20180108663A (ko) | 2018-10-04 |
KR102298790B1 (ko) | 2021-09-06 |
US20190056254A1 (en) | 2019-02-21 |
CN108713131B (zh) | 2020-04-10 |
WO2017123089A1 (en) | 2017-07-20 |
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OM et al. | as Fig. 3 |
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