CN108505007A - Magnetic material with automatic face-overturning device plates membrane production equipment - Google Patents
Magnetic material with automatic face-overturning device plates membrane production equipment Download PDFInfo
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- CN108505007A CN108505007A CN201810647626.XA CN201810647626A CN108505007A CN 108505007 A CN108505007 A CN 108505007A CN 201810647626 A CN201810647626 A CN 201810647626A CN 108505007 A CN108505007 A CN 108505007A
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- room
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- 239000000696 magnetic material Substances 0.000 title claims abstract description 51
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 35
- 239000012528 membrane Substances 0.000 title claims abstract description 24
- 230000007704 transition Effects 0.000 claims abstract description 52
- 230000007246 mechanism Effects 0.000 claims abstract description 47
- 239000011248 coating agent Substances 0.000 claims abstract description 36
- 238000000576 coating method Methods 0.000 claims abstract description 36
- 230000002441 reversible effect Effects 0.000 claims abstract description 4
- 230000003028 elevating effect Effects 0.000 claims description 7
- 239000011261 inert gas Substances 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 230000003139 buffering effect Effects 0.000 claims description 2
- 238000007747 plating Methods 0.000 abstract description 10
- 230000005540 biological transmission Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000002459 sustained effect Effects 0.000 description 2
- 230000007306 turnover Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention relates to the magnetic materials with automatic face-overturning device to plate membrane production equipment, including conveyor-belt apparatus, slice turning device, along plated film production line set gradually enter piece rack, into piece room, into transition chamber, into surge chamber, coating chamber, go out surge chamber, go out transition chamber, slice room, slice rack；Slice turning device includes frame body, the guide rail being fixed on frame body, and along the second fetching device of guide rail sliding, the first fetching device, tray rack is used for the switching mechanism of reversible tray；Tray rack is equipped with inverted pallet, and the first fetching device is located at the top of tray rack, and the second fetching device is located at the side of switching mechanism, and the first fetching device is located at the other side of switching mechanism, and switching mechanism is located at the inside of frame body；One end of conveyor-belt apparatus is located at at piece rack, and the other end of conveyor-belt apparatus is located at slice rack.This plating membrane production equipment can carry out double-sided coating to magnetic material, belong to the technical field of the production of magnetic material plated film.
Description
Technical field
The present invention relates to the technical field of the production of magnetic material plated film more particularly to a kind of magnetic material platings with automatic face-overturning device
Membrane production equipment.
Background technology
In the prior art, when carrying out plated film to magnetic material, used magnetic material coating film production line is Horizontal production line, every time only
The face plated film processing that can carry out magnetic material, the plated film for needing to carry out could carry out after artificial flaps another side are processed, production efficiency
It is low, labor intensity is high.Workpiece after plated film has higher temperature, if operated using manual flaps, needs to wait for workpiece cold
Operation can be just carried out when but to tangible temperature, needs more circulate carrier and a large amount of material stock space of occupancy；Simultaneously big
The resting period is longer in gas, adsorbs bulk gas again in temperature-fall period, when carrying out secondary film coating, in vacuum, and work
The deflation of part can extend vacuum pumpdown time, reduce the productive temp efficiency of equipment.
Invention content
For the technical problems in the prior art, the purpose of the present invention is：Magnetic material with automatic face-overturning device is provided
Membrane production equipment is plated, double-sided coating can be carried out to magnetic material.
In order to achieve the above object, the present invention adopts the following technical scheme that：
Magnetic material with automatic face-overturning device plates membrane production equipment, including conveyor-belt apparatus, slice turning device are produced along plated film
What route was set gradually enter piece rack, into piece room, into transition chamber, into surge chamber, coating chamber, go out surge chamber, go out transition chamber, slice
Room, slice rack；
Into piece room inlet be equipped with vacuum lock, into piece room and between transition chamber be equipped with vacuum lock, into transition chamber and into
It is equipped with vacuum lock between surge chamber, go out surge chamber and goes out between transition chamber equipped with vacuum lock, goes out between transition chamber and slice room and sets
There are vacuum lock, the exit of slice room to be equipped with vacuum lock；Connection into surge chamber, coating chamber, go out surge chamber formation communicate it is true
Empty room, coating chamber is interior to be equipped with coating source；
Slice turning device is located at slice rack, and slice turning device includes frame body, and the guide rail being fixed on frame body is slided along guide rail
The second dynamic fetching device, along the first fetching device that guide rail slides, tray rack is used for the switching mechanism of reversible tray；Support
Plate rail is equipped with inverted pallet, and the first fetching device for gripping the inversion pallet on tray rack is located at tray rack
Side, the second fetching device for gripping the pallet on slice rack are located at the side of switching mechanism, and the first fetching device is located at
The other side of switching mechanism, switching mechanism are located at the inside of frame body；
One end of conveyor-belt apparatus is located at at piece rack, and the other end of conveyor-belt apparatus is located at slice rack.
It is further：Switching mechanism includes the carrier for carrying pallet, is located at the first overturning of carrier both sides
It is equipped with clamping head on arm and the second flip-arm, the first flip-arm and the second flip-arm.Clamping head can be by upper and lower two pallets
It clamps, it is then whole to turn.
It is further：Switching mechanism further includes motor, and the output end of motor is connected on the first flip-arm.
It is further：Switching mechanism further includes first movement frame and the second movable stand, and the first flip-arm is pivotally pacified
On first movement frame, the second flip-arm is pivotally mounted on the second movable stand.
It is further：It is equipped with idler wheel on first movement frame and the second movable stand.
It is further：Into piece room, into transition chamber, into surge chamber, coating chamber, go out that surge chamber, to go out transition chamber, slice room equal
It sets gradually positioned at the top of conveyor-belt apparatus and along horizontal direction, enters and be equipped with cylinder mechanism on piece rack and slice rack
And elevating mechanism, cylinder mechanism are mounted on the output end of elevating mechanism.
It is further：Coating source is magnetic control sputtering cathode or arc ions cathode.
It is further：Into piece room, into transition chamber, into surge chamber, coating chamber, go out that surge chamber, to go out transition chamber, slice room equal
It is provided with and vacuumizes unit.
It is further：Inert gas is filled in coating chamber.
It is further：Into ranging from 0~100Pa of the operating pressure of piece room and slice room, into transition chamber and go out transition
Operating pressure≤10 of room-1Pa。
Generally speaking, the invention has the advantages that：
This plating membrane production equipment can be low to magnetic material progress double-sided coating, production efficiency height, labor intensity, and vacuum chamber turns over
Sheet devices, conveyor-belt apparatus are combined, and the automation of magnetic material double-sided coating is truly realized.
Description of the drawings
Fig. 1 is the structural schematic diagram of this plating membrane production equipment.
Fig. 2 is the structural schematic diagram of slice turning device.
Fig. 3 is the structure schematic diagram of this plating membrane production equipment.
Specific implementation mode
Below in conjunction with the drawings and specific embodiments, the present invention will be further described in detail.
It is now attached to what is occurred in Figure of description for the ease of uniformly checking each reference numeral inside Figure of description
Icon note is unitedly described as follows：
1 is into piece rack, 2 to be coating chamber into surge chamber, 5,6 be surge chamber, 7 into transition chamber, 4 into piece room, 3
For go out transition chamber, 8 be slice room, 9 be slice rack, 10 be conveyor-belt apparatus, 11 be slice turning device, 12 be the second pick-and-place machine
Structure, 13 be the first fetching device, 14 be guide rail, 15 be frame body, 16 be the second movable stand, 17 be first movement frame, 18 be carrying
Frame, 19 be the second flip-arm, 20 be clamping head, 21 be the first flip-arm, 22 be motor.
For sake of convenience, now hereafter described orientation is described as follows：Hereafter described direction and Fig. 1 itself up and down
Direction up and down it is consistent, horizontal direction, that is, left and right directions.
Referring to figs 1 and 3, the magnetic material with automatic face-overturning device plates membrane production equipment, including conveyor-belt apparatus, flaps
Device, along plated film production line set gradually enter piece rack, into piece room, into transition chamber, into surge chamber, coating chamber, go out it is slow
It rushes room, go out transition chamber, slice room, slice rack.This plating membrane production equipment is to give magnetic material plated film, plated film production line, that is, plated film
The running route of production process, i.e. magnetic material.In plated film, need magnetic material being placed on pallet, then pallet carries magnetic material,
Further along transfer passage successively by entering piece rack, into piece room, into transition chamber, into surge chamber, coating chamber, go out surge chamber, went out
Cross room, slice room, slice rack.
Into piece room inlet (i.e. into the left end of piece room) be equipped with vacuum lock, into piece room and between transition chamber be equipped with vacuum
Lock goes out surge chamber and goes out between transition chamber equipped with vacuum lock, go out transition chamber into transition chamber and into vacuum lock is equipped between surge chamber
Vacuum lock is equipped between slice room, the exit (i.e. the right end of slice room) of slice room is equipped with vacuum lock.Connection into buffering
Room, coating chamber go out surge chamber and form the vacuum chamber that communicates, i.e., into surge chamber, coating chamber, go out between surge chamber to communicate.Plating
Coating source is equipped in film room.It is first room that magnetic material enters plating membrane production equipment into piece room, into transition chamber and goes out transition chamber and be
Realization vacuum insulation, i.e., will keep apart into surge chamber and into piece room, will go out surge chamber and slice room keeps apart, and ensure plating
Film quality and raising working efficiency.Then realize that the product that will be machined transports out in slice room.
In conjunction with shown in Fig. 2, slice turning device is located at slice rack, and slice turning device includes frame body, is fixed on leading on frame body
Rail, along the second fetching device that guide rail slides, along the first fetching device that guide rail slides, tray rack is used for reversible tray
Switching mechanism.Slice rack can be located at the inside of frame body, and guide rail is fixed on the top of frame body, and guide rail is set along horizontal direction
It sets.Tray rack is equipped with inverted pallet, pallet can just put and upside down and put, in plated film, pallet just put, then
Magnetic material is placed on the upper surface of supporting plate, and the pallet on tray rack is upsided down and is put.For gripping the inversion pallet on tray rack
First fetching device is located at the top of tray rack, i.e. the first fetching device can be slided along guide rail, then grips on tray rack
Inverted pallet, and the first fetching device is located at the top of tray rack.Second for gripping the pallet on slice rack takes
Laying mechanism is located at the side of switching mechanism, and the first fetching device is located at the other side of switching mechanism, i.e. the second fetching device can be with
Slided along guide rail, then grip slice rack on pallet (pallet just put, and be placed with magnetic material above).Second takes
Laying mechanism is located at the left side of switching mechanism, and the first fetching device is located at the right side of switching mechanism.Switching mechanism is located at the interior of frame body
Portion.First fetching device, the second fetching device, clamping head belong to existing mature technology, and the first fetching device and second pick and place
How mechanism, which moves and how to grip pallet, belongs to the prior art, and how clamping head, which clamps two pallets up and down, belongs to existing skill
Art.Connection and transmission matching relationship between motor, flip-arm, clamping head also belong to the prior art.
One end of conveyor-belt apparatus is located at at piece rack, and the other end of conveyor-belt apparatus is located at slice rack.Transmission
Band device can will enter piece rack and slice rack connects, and carries the pallet of magnetic material after slice rack comes out, leads to
Crossing conveyor-belt apparatus can be transported on piece rack again.
Switching mechanism includes the carrier for carrying pallet, is located at the first flip-arm and the second overturning of carrier both sides
It is equipped with clamping head on arm, the first flip-arm and the second flip-arm.First flip-arm is located at the right side of carrier, the second flip-arm
Positioned at the left side of carrier.
Switching mechanism further includes motor, and the output end of motor is connected on the first flip-arm.Motor can drive first to turn over
Pivoted arm rotates, to realize the overturning of pallet.
Switching mechanism further includes first movement frame and the second movable stand, and the first flip-arm is pivotally mounted on first movement
On frame, the second flip-arm is pivotally mounted on the second movable stand.It is equipped with idler wheel on first movement frame and the second movable stand.
By the pallet just put, magnetic material, upside down after the pallet put overlays carrier successively from lower to upper, the clamping head of the first flip-arm
Clamp the left and right sides of pallet respectively with the clamping head of the second flip-arm, then motor drives the overturning of the first flip-arm, and second turns over
Pivoted arm is followed by overturning, and after 180 ° of overturning, the pallet just put becomes the pallet for upsiding down and putting, and upsides down the pallet put and becomes just
The pallet put, magnetic material has also and then overturn 180 °, after plated film, the upper surface plated film of magnetic material, and after 180 ° of overturning,
It is one face-down to have plated film for magnetic material, and the one side of plated film is not upward.Then plated film is carried out from the entrance of piece rack is entered again,
To realize the double-sided coating of magnetic material, i.e. upper surface and lower face all plated films of magnetic material.
Into piece room, into transition chamber, into surge chamber, coating chamber, go out surge chamber, go out transition chamber, slice room is respectively positioned on conveyer belt
It the top of device and is set gradually along horizontal direction, enters and be equipped with cylinder mechanism and elevator on piece rack and slice rack
Structure, cylinder mechanism are mounted on the output end of elevating mechanism.With rising or falling for elevating mechanism, the transmission of conveyor-belt apparatus
Band is in cylinder mechanism on sustained height, and such magnetic material can smoothly transit between conveyor-belt apparatus and cylinder mechanism.
Coating source is magnetic control sputtering cathode or arc ions cathode.
Into piece room, into transition chamber, into surge chamber, coating chamber, go out surge chamber, go out transition chamber, that slice room is both provided with pumping is true
Empty unit.Vacuumizing a kind of set-up mode of unit is：Set into piece room and slice room there are one vacuumizing unit, into transition chamber,
Into surge chamber, go out surge chamber, go out transition chamber and be respectively equipped with two to vacuumize unit, coating chamber sets that there are six vacuumize unit.It takes out
The quantity of vacuum pump set can be rationally arranged according to actual needs.Inert gas is filled in coating chamber.
Into ranging from 0~100Pa of the operating pressure of piece room and slice room, into transition chamber and the operating pressure for going out transition chamber
≤10-1Pa。
The operation principle of this plating membrane production equipment：By magnetic material be placed on one just on the pallet put, then by the pallet
It is placed on piece rack, which enters into piece room, then to carrying out preliminary vacuumize process (the i.e. row of black vacuum into piece room
Gas), it opens into piece room and into the vacuum lock between transition chamber, pallet enters into transition chamber, into after transition chamber, closes into piece
Room and into the vacuum lock between transition chamber, to carrying out further vacuumize process (i.e. the exhaust of high vacuum) into transition chamber；So
Pallet is sent into surge chamber afterwards, (time of the setting is generally very short, only after the time for stopping setting into surge chamber for pallet
Slightly stop), then pallet is sent into coating chamber, pallet plates magnetic material in plated film indoor sport, the indoor coating source of plated film
Film.After completing plated film, pallet is sent into out surge chamber, pallet is sent into after going out surge chamber and stopping the time of setting, then by pallet
Go out transition chamber, then enter slice room by going out transition chamber, the final pallet out reaches slice rack from slice room, completes magnetic material
The plated film of upper surface.Then the pallet on the second fetching device gripping slice rack (carries upper end on the pallet just put
The magnetic material of face plated film), then the pallet is placed on carrier by the second fetching device, then the first fetching device gripping support
Inversion pallet on plate rail, then the first fetching device will upside down pallet and overlay on magnetic material, pallet inverted in this way, magnetic material,
Just the pallet put be sequentially distributed from top to bottom, afterwards turn over mechanism by the pallet just put, magnetic material, upside down the tray clamps put
Tightly, then entirety turns, and then the first fetching device, which moves again on carrier, grips inverted pallet (inverted pallet
Be by just the pallet put turn) and be moved on tray rack, then the second fetching device grips carrier again
On pallet (this just the pallet put turned by inverted pallet) and be moved on slice rack, go out at this time
The upper surface of magnetic material on piece rack does not have plated film, lower face plated film, and then the elevating mechanism on slice rack drives rolling
Cylinder mechanism moves up and down so that the conveyer belt of conveyor-belt apparatus is in cylinder mechanism on sustained height, and then pallet is communicated
Band device is reached into piece rack, then again by entering piece rack through being again introduced into piece room, to not have the one side of plated film to magnetic material
Plated film is carried out, the purpose of the equal plated film in magnetic material upper and lower end face is realized.
The above embodiment is a preferred embodiment of the present invention, but embodiments of the present invention are not by above-described embodiment
Limitation, it is other it is any without departing from the spirit and principles of the present invention made by changes, modifications, substitutions, combinations, simplifications,
Equivalent substitute mode is should be, is included within the scope of the present invention.
Claims (10)
1. the magnetic material with automatic face-overturning device plates membrane production equipment, it is characterised in that：Including conveyor-belt apparatus, slice turning device, edge
That plated film production line sets gradually enter piece rack, into piece room, into transition chamber, into surge chamber, coating chamber, go out surge chamber, go out
Transition chamber, slice room, slice rack；
It is equipped with vacuum lock into the inlet of piece room, into piece room and into vacuum lock is equipped between transition chamber, into transition chamber and into buffering
It is equipped with vacuum lock between room, go out surge chamber and goes out between transition chamber equipped with vacuum lock, goes out between transition chamber and slice room to be equipped with true
The exit of sky lock, slice room is equipped with vacuum lock；Connection into surge chamber, coating chamber, go out surge chamber and form the vacuum chamber that communicates,
Coating source is equipped in coating chamber；
Slice turning device is located at slice rack, and slice turning device includes frame body, the guide rail being fixed on frame body, along guide rail sliding
Second fetching device, along the first fetching device that guide rail slides, tray rack is used for the switching mechanism of reversible tray；Tray rack
It is equipped with inverted pallet, the first fetching device for gripping the inversion pallet on tray rack is located at the top of tray rack, uses
It is located at the side of switching mechanism in the second fetching device of the pallet on gripping slice rack, the first fetching device is located at tipper
The other side of structure, switching mechanism are located at the inside of frame body；
One end of conveyor-belt apparatus is located at at piece rack, and the other end of conveyor-belt apparatus is located at slice rack.
2. the magnetic material described in accordance with the claim 1 with automatic face-overturning device plates membrane production equipment, it is characterised in that：Switching mechanism
Include the carrier for carrying pallet, be located at carrier both sides the first flip-arm and the second flip-arm, the first flip-arm and
It is equipped with clamping head on second flip-arm.
3. the magnetic material with automatic face-overturning device plates membrane production equipment according to claim 2, it is characterised in that：Switching mechanism
Further include motor, the output end of motor is connected on the first flip-arm.
4. the magnetic material with automatic face-overturning device plates membrane production equipment according to claim 2, it is characterised in that：Switching mechanism
Further include first movement frame and the second movable stand, the first flip-arm is pivotally mounted on first movement frame, the second flip-arm
Pivotally it is mounted on the second movable stand.
5. the magnetic material with automatic face-overturning device plates membrane production equipment according to claim 4, it is characterised in that：First movement
It is equipped with idler wheel on frame and the second movable stand.
6. the magnetic material described in accordance with the claim 1 with automatic face-overturning device plates membrane production equipment, it is characterised in that：Into piece room,
Into transition chamber, into surge chamber, coating chamber, go out surge chamber, go out transition chamber, slice room be respectively positioned on conveyor-belt apparatus top and along
Horizontal direction is set gradually, and is entered and is equipped with cylinder mechanism and elevating mechanism on piece rack and slice rack, cylinder mechanism is mounted on
On the output end of elevating mechanism.
7. the magnetic material described in accordance with the claim 1 with automatic face-overturning device plates membrane production equipment, it is characterised in that：Coating source is
Magnetic control sputtering cathode or arc ions cathode.
8. the magnetic material described in accordance with the claim 1 with automatic face-overturning device plates membrane production equipment, it is characterised in that：Into piece room,
Into transition chamber, into surge chamber, coating chamber, go out surge chamber, go out transition chamber, slice room is both provided with and vacuumizes unit.
9. the magnetic material described in accordance with the claim 1 with automatic face-overturning device plates membrane production equipment, it is characterised in that：In coating chamber
It is filled with inert gas.
10. the magnetic material described in accordance with the claim 1 with automatic face-overturning device plates membrane production equipment, it is characterised in that：Into piece room
With ranging from 0~100Pa of the operating pressure of slice room, into transition chamber and operating pressure≤10 for going out transition chamber-1Pa。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810647626.XA CN108505007A (en) | 2018-06-22 | 2018-06-22 | Magnetic material with automatic face-overturning device plates membrane production equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810647626.XA CN108505007A (en) | 2018-06-22 | 2018-06-22 | Magnetic material with automatic face-overturning device plates membrane production equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108505007A true CN108505007A (en) | 2018-09-07 |
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ID=63403677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810647626.XA Pending CN108505007A (en) | 2018-06-22 | 2018-06-22 | Magnetic material with automatic face-overturning device plates membrane production equipment |
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| CN (1) | CN108505007A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109112498A (en) * | 2018-11-01 | 2019-01-01 | 凯盛信息显示材料(黄山)有限公司 | A kind of mobile phone PC plate magnetron sputtering film production line and its production technology |
| CN111606025A (en) * | 2020-04-22 | 2020-09-01 | 广东生波尔光电技术有限公司 | Special workpiece coating equipment |
| CN112897034A (en) * | 2021-03-19 | 2021-06-04 | 浙江云度新材料科技有限公司 | Reciprocating feeding device and feeding method for magnetron sputtering production line |
| CN112962081A (en) * | 2021-02-01 | 2021-06-15 | 肇庆宏旺金属实业有限公司 | Continuous coating production line and coating process for steel plate |
| CN113714047A (en) * | 2021-09-17 | 2021-11-30 | 厉鹏 | Double-sided special glass production system and control method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109112498A (en) * | 2018-11-01 | 2019-01-01 | 凯盛信息显示材料(黄山)有限公司 | A kind of mobile phone PC plate magnetron sputtering film production line and its production technology |
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| CN111606025B (en) * | 2020-04-22 | 2021-09-07 | 广东生波尔光电技术有限公司 | Special workpiece coating equipment |
| CN112962081A (en) * | 2021-02-01 | 2021-06-15 | 肇庆宏旺金属实业有限公司 | Continuous coating production line and coating process for steel plate |
| CN112962081B (en) * | 2021-02-01 | 2023-07-18 | 肇庆宏旺金属实业有限公司 | Steel plate continuous coating production line and coating process |
| CN112897034A (en) * | 2021-03-19 | 2021-06-04 | 浙江云度新材料科技有限公司 | Reciprocating feeding device and feeding method for magnetron sputtering production line |
| CN112897034B (en) * | 2021-03-19 | 2023-01-31 | 浙江云度新材料科技有限公司 | Reciprocating type feeding device and feeding method for magnetron sputtering production line |
| CN113714047A (en) * | 2021-09-17 | 2021-11-30 | 厉鹏 | Double-sided special glass production system and control method |
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