CN109112498B - Magnetron sputtering coating production line for PC (personal computer) board of mobile phone and production process thereof - Google Patents

Magnetron sputtering coating production line for PC (personal computer) board of mobile phone and production process thereof Download PDF

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Publication number
CN109112498B
CN109112498B CN201811295295.4A CN201811295295A CN109112498B CN 109112498 B CN109112498 B CN 109112498B CN 201811295295 A CN201811295295 A CN 201811295295A CN 109112498 B CN109112498 B CN 109112498B
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plate
board
coating
hydraulic cylinders
guide rail
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CN109112498A (en
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张少波
陈诚
王进
张伟健
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Kaisheng Information Display Materials Huangshan Co ltd
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Kaisheng Information Display Materials Huangshan Co ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/35Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Abstract

The invention provides a magnetron sputtering coating production line for a PC board of a mobile phone and a production process thereof, wherein the magnetron sputtering coating production line for the PC board of the mobile phone comprises a bottom plate, a circulating conveying mechanism, conveying belts, a coating mechanism, rotating mechanisms and a discharging mechanism, the circulating conveying mechanism comprises an annular guide rail, a driving mechanism, a hydraulic cylinder I and a material plate, the annular guide rail is arranged on the bottom plate, a plurality of driving mechanisms are movably arranged on the annular guide rail, the driving mechanism is provided with the material plate, the two conveying belts are oppositely arranged on the bottom plate, the two rotating mechanisms are oppositely arranged on the bottom plate, and the discharging mechanism is fixedly arranged on the bottom plate and is positioned right above one. The material plate is driven to move along the annular guide rail through the driving mechanism, so that the whole coating process is carried out uninterruptedly, the coating efficiency is increased, the PC plate is overturned through the rotating mechanism, the two sides of the PC plate can be coated, and the condition that secondary feeding is needed for certain materials needing double-sided coating is avoided.

Description

Magnetron sputtering coating production line for PC (personal computer) board of mobile phone and production process thereof
Technical Field
The invention relates to the technical field of magnetron sputtering coating, in particular to a magnetron sputtering coating production line for a PC board of a mobile phone and a production process thereof.
Background
In the magnetron vacuum coating production line, electrons generated by gas ionization impact a cathode target at a high speed under a vacuum condition, substrate particles are replaced and reaction is realized near the surface of a substrate to generate metal, metal oxide or metal nitride, and magnetron sputtering vacuum coating is realized, wherein the magnetron sputtering vacuum coating has good firmness, a sputtering film has excellent adhesive force with a substrate, and the mechanical strength is also improved.
Publication No. CN102517553B provides a magnetron sputtering coating production system and process, which can complete a continuous coating process by the rotation of a rotating chamber, but can not coat both surfaces at one time.
Disclosure of Invention
The invention aims to provide a magnetron sputtering coating production line for a PC board of a mobile phone and a production process thereof, which aim to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme:
the utility model provides a cell-phone PC board magnetron sputtering coating film production line, includes bottom plate, circulation conveying mechanism, conveyer belt, coating film mechanism, rotary mechanism and discharge mechanism, four coating film mechanism symmetry respectively installs on the bottom plate, wherein:
the circular conveying mechanism comprises an annular guide rail, a driving mechanism, hydraulic cylinders I and material plates, the annular guide rail is fixedly installed on the bottom plate, the driving mechanism is movably installed on the annular guide rail, the material plates are movably installed on the driving mechanism and are oppositely installed on the bottom plate, the rotating mechanism is oppositely installed on the bottom plate and is located right above the circular arc part of the annular guide rail, and the discharging mechanism is fixedly installed on the bottom plate and is located right above one of the conveying belts.
Preferably, rotary mechanism includes pneumatic cylinder II, L shape backup pad, pneumatic cylinder III, driving plate, revolving cylinder and splint, L shape backup pad is through two II movable mounting of pneumatic cylinder are on the bottom plate, the driving plate is through two III movable mounting of pneumatic cylinder are in L shape backup pad, revolving cylinder's one end fixed mounting is on the driving plate, other end fixed mounting has splint.
Preferably, actuating mechanism includes frame board, wheel, big band pulley, belt, little band pulley and motor, the cooperation of frame board is installed in cyclic annular guide rail, four the wheel rotates through the transmission shaft respectively and installs on the frame board, big band pulley overlaps admittedly on the transmission shaft, motor fixed mounting is in the bottom of frame board, and its power take off end overlaps admittedly has little band pulley, the belt cover is established and is formed the belt drive on big band pulley and little band pulley.
Preferably, the discharging mechanism comprises a support frame, hydraulic cylinders IV and a push plate, the support frame is fixedly installed on the bottom plate, one ends of the hydraulic cylinders IV are fixedly installed on the support frame, and the other ends of the hydraulic cylinders IV are fixedly installed with the push plate.
Preferably, one end of each of the two hydraulic cylinders I is fixedly arranged on the frame plate, and the other end of each of the two hydraulic cylinders I is fixedly provided with a material plate.
Preferably, two one end fixed mounting of pneumatic cylinder II is on the bottom plate, and L shape backup pad is installed to the other end, two one end fixed mounting of pneumatic cylinder III is on L shape backup pad, other end fixed mounting has the driving plate.
Preferably, a guide body is arranged in the annular guide rail, two clamping sleeves are arranged at the bottom of the frame plate, the two clamping sleeves at the bottom of the frame plate are installed on the guide body in a matched mode and form a moving pair on the guide body, and wheels installed at the bottom of the frame plate are in friction contact with the guide rail respectively.
Preferably, the coating mechanism comprises a supporting leg, a coating box, a target frame, a hydraulic cylinder V, an air pump and a round tube, the supporting leg is fixedly mounted on the bottom plate, the coating box is fixedly mounted on the bottom plate, the target frame is movably mounted in the coating box, one end of the hydraulic cylinder V is fixedly mounted on the supporting leg, the other end of the hydraulic cylinder V is fixedly connected with the target frame, and the air pump is communicated with the coating box through the round tube.
A production process of a magnetron sputtering coating production line of a PC board of a mobile phone comprises the following steps:
s1, placing the PC board to be coated on one of the conveyer belts, and conveying the PC board to the material board under the transmission of the conveyer belts;
s2, driving the material plate to move along the annular guide rail by the driving mechanism, specifically, when the motor starts to rotate, the small belt wheel rotates along with the motor, power is transmitted to the large belt wheel under the action of the belt, and then the large belt wheel drives the wheel to rotate, because the wheel is in friction contact with the annular guide rail, the frame plate moves along the annular guide rail at the moment, wherein each mechanism in the circulating conveying mechanism moves synchronously, and when the material plate carrying the PC plate moves to the position right below the film coating box, the motor stops rotating;
s3, moving the two hydraulic cylinders I at the bottom of the material plate right below the coating box synchronously to further push the material plate to move towards the direction close to the coating box, stopping moving when the material plate is matched with the hydraulic cylinders I in the coating box, exhausting air by an air pump on the coating box outwards to vacuumize the interior of the coating box, coating the target on the target frame on the PC board under the action of a magnetic field, synchronously driving the material plate to move towards the direction far away from the coating box by the two hydraulic cylinders I after coating is completed, stopping moving the hydraulic cylinders I when the material plate is completely separated from the coating box, and completing primary coating;
s4, repeating S2 and S3, driving the PC board which is subjected to primary film plating to perform secondary film plating, and performing primary film plating on the PC board on the subsequent material board;
s5, when the PC board completing the secondary film coating moves to the side of the rotating mechanism, the two rotating mechanisms synchronously move to turn over the PC board, wherein the turning process specifically comprises that the two hydraulic cylinders II synchronously move to jack up the L-shaped supporting board, when the bottom surface of the clamping board is flush with the material board, the two hydraulic cylinders II stop moving, at the moment, the two hydraulic cylinders III synchronously move to further drive the transmission board, the rotating cylinders and the clamping board to move towards the direction close to the PC board, when the clamping board contacts the side surface of the PC board, the hydraulic cylinders III stop moving, at the moment, the two ends of the PC board are clamped by the clamping board due to the synchronous movement of the two rotating mechanisms, then the two hydraulic cylinders II drive the L-shaped supporting board to move towards the direction far away from the material board, then the clamping board drives the PC board to separate from the material board, when the hydraulic cylinders II move to the extreme position, at the moment, the rotating cylinders drive the clamping board to rotate by one hundred eighty degrees to complete the turning over of the PC board, then the two hydraulic cylinders II drive the L-shaped supporting board to move towards the direction close to the;
s6, repeating S2 and S3 to coat the turned PC board;
s7, the material plate carrying the PC board after the film coating is finished moves to the position above the conveyer belt oppositely placed with the S1, the discharging mechanism discharges materials at the moment, the discharging process specifically comprises the steps that the two hydraulic cylinders IV push the push plate to move towards the direction close to the material plate, then the push plate moves along the material plate, and then the PC board on the material plate is pushed onto the conveyer belt and is conveyed out of the production line by the conveyer belt.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, the driving mechanism drives the material plate to move along the annular guide rail, so that the whole film coating process is carried out uninterruptedly, and the film coating efficiency is further increased.
2. The invention realizes the turnover of the PC board through the rotating mechanism, and further can coat the two sides of the PC board, thereby avoiding the situation that certain materials needing double-side coating need secondary feeding.
Drawings
FIG. 1 is a three-dimensional schematic view of the overall structure of the present invention from the front;
FIG. 2 is a three-dimensional rear view of the overall structure of the present invention;
FIG. 3 is a three-dimensional schematic view of the circulating conveying mechanism of the present invention;
FIG. 4 is a three-dimensional schematic view of the drive mechanism of the present invention;
FIG. 5 is a cross-sectional view of the annular guide of the present invention;
FIG. 6 is a schematic view of portion B of FIG. 2;
fig. 7 is a schematic view of a portion a of fig. 1.
In the figure, a bottom plate 1, a circular conveying mechanism 2, a conveying belt 3, a coating mechanism 4, a rotating mechanism 5, a discharging mechanism 6, a ring-shaped guide rail 21, a driving mechanism 22, a hydraulic cylinder I23, a material plate 24, a guide body 211, a frame plate 221, wheels 222, a large belt wheel 223, a 224 belt, a small belt wheel 225, a motor 226, a cutting sleeve 2211, a supporting leg 41, a coating box 42, a target material rack 43, a hydraulic cylinder V44, an air pump 45, a circular tube 46, a hydraulic cylinder II 51, a supporting plate 52L, a hydraulic cylinder III 53, a transmission plate 54, a rotating air cylinder 55, a clamping plate 56, a supporting frame 61, a hydraulic cylinder IV 62 and a pushing plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example (b):
referring to fig. 1 to 7, the present invention provides a technical solution:
the utility model provides a cell-phone PC board magnetron sputtering coating film production line, includes bottom plate 1, circulation conveying mechanism 2, conveyer belt 3, coating mechanism 4, rotary mechanism 5 and discharge mechanism 6, wherein:
the circular conveying mechanism 2 comprises an annular guide rail 21, driving mechanisms 22, hydraulic cylinders I23 and material plates 24, the annular guide rail 21 is fixedly installed on the bottom plate 1, a guide body 211 is arranged in the annular guide rail 21, the driving mechanisms 22 are movably installed on the annular guide rail 21, one ends of the two hydraulic cylinders I23 are fixedly installed on a frame plate 221 through bolts, the other ends of the two hydraulic cylinders I23 are fixedly installed with the material plates 24 through connecting flanges, one end of the hydraulic cylinder I23, on which the material plates 24 are installed, is a power output end, the material plates 24 are respectively movably installed on the frame plate 221 through the two hydraulic cylinders I23, the driving mechanisms 22 comprise a frame plate 221, wheels 222, a large belt wheel 223, a belt 224, a small belt wheel 225 and a motor 226, two clamping sleeves 2211 are arranged at the bottom of the frame plate 221, two transmission shafts are respectively installed at the bottom of the frame plate, the diameter of the inner circular surface of the clamping sleeve 2211 at the bottom of the frame plate 221 is the same as that of the outer circular surface of the guide body 211, wherein the two clamping sleeves 2211 at the bottom of the frame plate 221 are arranged on the guide body 211 in a matched mode and form a moving pair on the guide body 211, the wheels 222 arranged at the bottom of the frame plate 221 are in friction contact with the guide rail 21 respectively, further the frame plate 221 can move along the guide rail 21 when the wheels 222 rotate, the large belt wheel 223 is fixedly sleeved on the transmission shaft, the motor 226 is fixedly arranged at the bottom of the frame plate 221 through bolts, the power output end of the motor 226 is fixedly sleeved with the small belt wheel 225, and the belt 224 is sleeved on the large belt wheel 223 and;
the two conveyer belts 3 are respectively and oppositely arranged on the bottom plate 1 through bearings, wherein one conveyer belt 3 for feeding is arranged on one conveyer belt 3, the other conveyer belt 3 for discharging is arranged on the other conveyer belt 3, the height of the conveyer belt 3 for feeding is higher than that of the material plate 24, and the height of the conveyer belt 3 for discharging is lower than that of the material plate 24;
the four film coating mechanisms 4 are respectively and symmetrically arranged on the bottom plate 1, each film coating mechanism 4 comprises a supporting leg 41, a film coating box 42, a target frame 43, a hydraulic cylinder V44, an air pump 45 and a round pipe 46, the supporting leg 41 is fixedly arranged on the bottom plate 1 through bolts, the film coating box 42 is fixedly arranged on the bottom plate 1 through bolts, the target frame 43 is movably arranged in the film coating box 42, targets for film coating are arranged on the target frame 43, the contact part of the target frame 43 and the film coating box 42 is in sealed installation, one end of the hydraulic cylinder V44 is fixedly arranged on the supporting leg 41, the other end of the hydraulic cylinder V44 is fixedly connected with the target frame 43 through a connecting flange, the air pump 45 is fixedly arranged on the film coating box 42 through bolts, one end of the round pipe 46 is in sealed connection with the film coating box 42, the other end of the round pipe is in sealed connection with;
the two rotating mechanisms 5 are oppositely arranged on the bottom plate 1 and are positioned right above the arc part of the annular guide rail 21, each rotating mechanism 5 comprises a hydraulic cylinder II 51, an L-shaped supporting plate 52, a hydraulic cylinder III 53, a transmission plate 54, a rotating cylinder 55 and a clamping plate 56, one end of each hydraulic cylinder II 51 is fixedly arranged on the bottom plate 1 through a bolt, the other end of each hydraulic cylinder II 51 is fixedly arranged on the L-shaped supporting plate 52 through a connecting flange, the L-shaped supporting plate 52 is movably arranged on the bottom plate 1 through the two hydraulic cylinders II 51, one end of each hydraulic cylinder III 53 is fixedly arranged on the L-shaped supporting plate 52 through a bolt, the other end of each hydraulic cylinder III 53 is fixedly arranged on the transmission plate 54 through a connecting flange, the transmission plate 54 is movably arranged on the L-shaped supporting plate 52 through the two hydraulic cylinders;
the discharging mechanism 6 is fixedly arranged on the bottom plate 1 and is positioned right above the discharging conveying belt 3, the discharging mechanism 6 comprises a supporting frame 61, hydraulic cylinders IV 62 and a push plate 63, the supporting frame 61 is fixedly arranged on the bottom plate 1 through bolts, one ends of the two hydraulic cylinders IV 62 are fixedly arranged on the supporting frame 61 through bolts, the other ends of the two hydraulic cylinders IV 62 are fixedly arranged with the push plate 63 through a connecting flange, and the bottom of the push plate 63 is in contact with the material plate 24;
a production process of a magnetron sputtering coating production line of a PC board of a mobile phone comprises the following steps:
s1, placing the PC board to be coated on the feeding conveyer belt 3, and conveying the PC board to the material board 24 under the transmission of the conveyer belt 3;
s2, the driving mechanism 22 drives the material plate 24 to move along the ring-shaped guide rail 21, specifically, the motor 226 starts to rotate, at this time, the small belt wheel 225 rotates along with it, the power is transmitted to the large belt wheel 223 under the action of the belt 224, and then the large belt wheel 223 drives the wheel 222 to rotate, because the wheel 222 and the ring-shaped guide rail 21 are in friction contact, the frame plate 221 moves along the ring-shaped guide rail 21 at this time, wherein, during film coating, each mechanism in the circular conveying mechanism 2 moves synchronously, and when the material plate 24 carrying the PC plate moves to a position just below the film coating box 42 nearest to the feeding conveyer belt 3, the motor 226 stops rotating;
s3, then moving the two hydraulic cylinders I23 at the bottom of the material plate 24 right below the coating box 42 to move synchronously, further pushing the material plate 24 to move towards the direction close to the coating box 42, when the material plate 24 is engaged with the hydraulic cylinder I23 in the coating box 42 to stop moving, at this time, the material plate 24 and the coating box 42 form a closed coating cavity, then exhausting air from the outside of an air pump 45 on the coating box 42) to vacuumize the inside of the coating box 42, then coating the target on the target frame 43 on a PC plate under the action of a magnetic field, after coating is completed, the two hydraulic cylinders I23 synchronously drive the material plate 24 to move towards the direction far away from the coating box 42, when the material plate 24 is completely separated from the coating box 42, the hydraulic cylinder I23 stops moving, and at this time, one-time coating is completed;
s4, repeating S2 and S3, driving the PC board which is subjected to primary film plating to perform secondary film plating, and performing primary film plating on the PC board on the subsequent material board 24;
s5, when the PC board completing the secondary coating moves to the side of the rotating mechanism 5, the two rotating mechanisms 5 synchronously move to turn over the PC board, wherein the turning process specifically includes that two hydraulic cylinders II 51 synchronously move to jack up the L-shaped support plate 52, when the bottom surface of the clamping plate 56 is flush with the upper surface of the material board 24, the two hydraulic cylinders II 51 stop moving, at the moment, the two hydraulic cylinders III 53 synchronously move to further drive the transmission plate 54, the rotating air cylinders 55 and the clamping plate 56 to move in the direction close to the PC board, when the clamping plate 56 contacts with the side surface of the PC board, the hydraulic cylinders III 53 stop moving, as the two rotating mechanisms 5 synchronously move, both ends of the PC board are clamped by the clamping plate 56, then the two hydraulic cylinders II 51 drive the L-shaped support plate 52 to move in the direction far away from the material board 24, and then the clamping plate 56 drives the PC board to separate from the material board 24, when the hydraulic cylinders II 51 move to the extreme position, the rotating air cylinders 55 drive the clamping plate 56 to rotate one hundred eighty degrees to complete the turning over of the PC board, then the two hydraulic cylinders 51 drive the PC board L-shaped support plate 52 to move in the direction close to the material board 24, and then stop moving when;
s6, repeating S2 and S3 to coat the turned PC board, wherein the coating process is carried out in the coating mechanism 4 opposite to the coating process of S2 and S3;
s7, after coating, the material plate 24 with the PC plate moves to the upper side of the conveyer belt 3 for discharging, at the moment, the discharging mechanism 6 discharges materials, the discharging process specifically includes that the two hydraulic cylinders IV 62 push the push plate 63 to move towards the direction close to the material plate 24, then the push plate 63 moves along the material plate 24, and then the PC plate on the material plate 24 is pushed onto the conveyer belt 3 for discharging, and the conveyer belt 3 conveys the material plate out of the production line.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (7)

1. The utility model provides a cell-phone PC board magnetron sputtering coating film production line, includes bottom plate (1), circulation conveying mechanism (2), conveyer belt (3), coating mechanism (4), rotary mechanism (5) and discharge mechanism (6), four coating mechanism (4) symmetry respectively install on bottom plate (1), its characterized in that:
the circular conveying mechanism (2) comprises an annular guide rail (21), a driving mechanism (22), a hydraulic cylinder I (23) and a material plate (24), the annular guide rail (21) is fixedly installed on the bottom plate (1), the driving mechanism (22) is movably installed on the annular guide rail (21), the driving mechanism (22) comprises a frame plate (221), wheels (222), a large belt wheel (223), a belt (224), a small belt wheel (225) and a motor (226), the frame plate (221) is installed in the annular guide rail (21) in a matched mode, the four wheels (222) are respectively installed on the frame plate (221) through rotation of a transmission shaft, the large belt wheel (223) is fixedly sleeved on the transmission shaft, the motor (226) is fixedly installed at the bottom of the frame plate (221), the power output end of the motor is fixedly sleeved with the small belt wheel (225), the belt (224) is sleeved on the large belt wheel (223) and the small belt wheel (225) to form belt transmission, a guide body (211) is arranged in the annular guide rail (21), two clamping sleeves (2211) are arranged at the bottom of the frame plate (221), two clamping sleeves (2211) at the bottom of the frame plate (221) are arranged on the guide body (211) in a matching way and form a moving pair on the guide body (211), wheels (222) arranged at the bottom of the frame plate (221) are in frictional contact with the guide rail (21) respectively, a plurality of material plates (24) are movably arranged on a driving mechanism (22) through two hydraulic cylinders I (23) respectively, two conveying belts (3) are oppositely arranged on the bottom plate (1), two rotating mechanisms (5) are oppositely arranged on the bottom plate (1) and are positioned right above the arc part of the annular guide rail (21), the discharging mechanism (6) is fixedly arranged on the bottom plate (1) and is positioned right above one of the conveying belts (3).
2. The magnetron sputtering coating production line for the PC board of the mobile phone according to claim 1, wherein the rotating mechanism (5) comprises a hydraulic cylinder II (51), an L-shaped supporting plate (52), a hydraulic cylinder III (53), a transmission plate (54), a rotating cylinder (55) and a clamping plate (56), the L-shaped supporting plate (52) is movably mounted on the bottom plate (1) through the two hydraulic cylinders II (51), the transmission plate (54) is movably mounted on the L-shaped supporting plate (52) through the two hydraulic cylinders III (53), one end of the rotating cylinder (55) is fixedly mounted on the transmission plate (54), and the other end of the rotating cylinder (55) is fixedly mounted on the clamping plate (56).
3. The magnetron sputtering coating production line for the PC board of the mobile phone according to claim 1, which is characterized in that: the discharging mechanism (6) comprises a supporting frame (61), hydraulic cylinders IV (62) and a push plate (63), the supporting frame (61) is fixedly installed on the bottom plate (1), one ends of the hydraulic cylinders IV (62) are fixedly installed on the supporting frame (61), and the other ends of the hydraulic cylinders IV (62) are fixedly installed with the push plate (63).
4. The magnetron sputtering coating production line for the PC board of the mobile phone according to claim 1, which is characterized in that: one end of each of the two hydraulic cylinders I (23) is fixedly arranged on the frame plate (221), and the other end of each of the two hydraulic cylinders I is fixedly provided with a material plate (24).
5. The magnetron sputtering coating production line for the PC board of the mobile phone according to claim 2, wherein one end of the two hydraulic cylinders II (51) is fixedly arranged on the bottom plate (1), the other end is provided with an L-shaped supporting plate (52), one end of the two hydraulic cylinders III (53) is fixedly arranged on the L-shaped supporting plate (52), and the other end is fixedly provided with a transmission plate (54).
6. The magnetron sputtering coating production line for the PC board of the mobile phone according to claim 1, which is characterized in that: coating mechanism (4) include supporting leg (41), coating film case (42), target frame (43), pneumatic cylinder V (44), air pump (45) and pipe (46), supporting leg (41) fixed mounting is on bottom plate (1), coating film case (42) fixed mounting is on bottom plate (1), target frame (43) movable mounting is in coating film case (42), the one end fixed mounting of pneumatic cylinder V (44) is on supporting leg (41), the other end and target frame (43) fixed connection, air pump (45) are through pipe (46) and coating film case (42) intercommunication.
7. A production process of a magnetron sputtering coating production line of a PC board of a mobile phone is characterized by comprising the following steps:
s1, placing the PC board to be coated on one of the conveyer belts (3), and conveying the PC board to the material board (24) under the transmission of the conveyer belts (3);
s2, driving the material plate (24) to move along the annular guide rail (21) by the driving mechanism (22), specifically, the motor (226) starts to rotate, at the moment, the small belt wheel (225) rotates along with the small belt wheel, power is transmitted to the large belt wheel (223) under the action of the belt (224), then the large belt wheel (223) drives the wheel (222) to rotate, the vehicle frame plate (221) moves along the annular guide rail (21) at the moment due to friction contact between the wheel (222) and the annular guide rail (21), wherein all mechanisms in the circulating conveying mechanism (2) are in synchronous motion, and when the material plate (24) loaded with the PC plate moves to the position right below the film coating box (42), the motor (226) stops rotating;
s3, moving the two hydraulic cylinders I (23) at the bottom of the material plate (24) right below the coating box (42) to move synchronously, further pushing the material plate (24) to move towards the direction close to the coating box (42), stopping moving the hydraulic cylinders I (23) when the material plate (24) is fit in the coating box (42), exhausting air outwards by an air pump (45) on the coating box (42) to vacuumize the coating box (42), coating the target material on the target material frame (43) on a PC board under the action of a magnetic field, synchronously driving the material plate (24) to move towards the direction far away from the coating box (42) by the two hydraulic cylinders I (23) after coating, stopping moving the hydraulic cylinders I (23) when the material plate (24) is completely separated from the coating box (42), and finishing one-time coating;
s4, repeating S2 and S3, driving the PC board which is subjected to primary film plating to perform secondary film plating, and performing primary film plating on the PC board on the subsequent material board (24);
s5, when the PC board which finishes secondary film coating moves to the side of the rotating mechanism (5), the two rotating mechanisms (5) synchronously move to turn over the PC board, wherein the turning process specifically comprises the steps that two hydraulic cylinders II (51) synchronously move to jack the L-shaped supporting plate (52), when the bottom surface of the clamping plate (56) is flush with the material board (24), the two hydraulic cylinders II (51) stop moving, at the moment, the two hydraulic cylinders III (53) synchronously move to further drive the transmission plate (54), the rotating cylinder (55) and the clamping plate (56) move towards the direction close to the PC board, when the clamping plate (56) contacts the side of the PC board, the hydraulic cylinders III (53) stop moving, because the two rotating mechanisms (5) synchronously move, at the moment, both ends of the PC board are clamped by the clamping plate (56), then the two hydraulic cylinders II (51) drive the L-shaped supporting plate (52) to move towards the direction far away from the material board (24), then the clamping plate (56) drives the clamping plate (24) to separate from the material board (24), when the hydraulic cylinder (51) moves to the limit position, at the opposite direction of the rotating cylinder II, then the rotating cylinder (55) drives the clamping plate (56) to move towards the direction far away from the material board (24, when the two hydraulic cylinders II) which turns over, then, when the two hydraulic cylinders II (35) close to the PC board (52) stop moving, the two hydraulic cylinders II (52) and the PC board (35) which close to turn;
s6, repeating S2 and S3 to coat the turned PC board;
s7, the material plate (24) carrying the PC board after the film coating is finished moves to the position above the conveyer belt (3) oppositely placed with the S1, the discharging mechanism (6) discharges materials at the moment, the discharging process specifically comprises the steps that the two hydraulic cylinders IV (62) push the push plate (63) to move towards the direction close to the material plate (24), then the push plate (63) moves along the material plate (24), and further the PC board on the material plate (24) is pushed onto the conveyer belt (3), and the conveyer belt (3) conveys the material plate out of the production line.
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CN112195445B (en) * 2020-10-23 2023-01-06 成都国泰真空设备有限公司 Plasma evaporation coating machine
CN112835133B (en) * 2020-12-31 2022-07-29 南京领英创光电科技有限公司 High-precision optical lens processing technology and coating device thereof

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