CN205188426U - Two -way business turn over is coating film device in turn - Google Patents
Two -way business turn over is coating film device in turn Download PDFInfo
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- CN205188426U CN205188426U CN201520916591.7U CN201520916591U CN205188426U CN 205188426 U CN205188426 U CN 205188426U CN 201520916591 U CN201520916591 U CN 201520916591U CN 205188426 U CN205188426 U CN 205188426U
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Abstract
The utility model discloses a two -way business turn over is coating film device in turn, its device set up surge chamber, business turn over material room and the business turn over work or material rest that connects gradually in coating film room both ends symmetry, lie in that same work piece is independently accomplished with business turn over work or material rest, business turn over material room and the surge chamber of one end in the coating film room or with the feeding and the ejection of compact of a set of work piece, the indoor driving roll group who is equipped with the two way drive of coating film, drive same work piece or with a set of work piece at the indoor back and forth movement of coating film, the multicoating carries out. Its method is in coating film room one end, and the work piece gets into business turn over work or material rest, business turn over material room, surge chamber and coating film room in proper order, drives work piece back and forth movement through driving roll group and carries out the multicoating in that the coating film is indoor, after accomplishing the coating film, the work piece adversive movement see off, simultaneously, the work piece that is located the coating film room other end is carried by corresponding business turn over work or material rest get under way, the work piece at coating film room both ends gets into the coating film room in turn, carries out the coating film and handles. The utility model discloses can satisfy magnetic material's thick film requirement to can effectively improve machining efficiency.
Description
Technical field
The utility model relates to coating technique field that is in enormous quantities or big area thick film, particularly one two-way turnover alternate plating device.
Background technology
Although vacuum coating technology obtains increasing application in recent years, because the sedimentation rate of vacuum plating is lower, equipment investment high in cost of production reason, still fails to popularize use in some field of surface treatment.Such as: for the field of in enormous quantities or big area thick film (thicknesses of layers is more than 1 μm) plated film.Concrete as the surface anticorrosion process of magneticsubstance, at present or adopt the conventional surface process works such as water power plating, electrophoresis to be main skill, but these traditional process of surface treatment processing procedures not environmentally, do not meet the needs of social development.
In addition for the vacuum plating process of the workpiece of some three-dimensional shape, due to the homogeneity of rete will be considered, be adopt the box type vacuum filming equipment of the public rotation rotating mechanism of band to carry out surface treatment all the time.But cause the defects such as workpiece surface localized membrane layer thickness is not enough because of clamping will be carried out to fix unavoidably, and have influence on the surface treatment quality of the finished product.The course work amount of clamping workpiece is large in addition, and length consuming time, causes inefficiency, and may because the problems such as causing scrap rate increase that drops of rotary course workpiece.Therefore the automatization vacuum coating film equipment designed without catcher mark, high efficiency production in enormous quantities, low operating cost has great meaning.
Utility model content
The purpose of this utility model is to overcome the deficiencies in the prior art, provide a kind of production efficiency higher, the two-way turnover alternate plating device that the in enormous quantities or big area thick film of magneticsubstance produces can be realized.
The technical solution of the utility model is: a kind of two-way turnover alternate plating device, comprise turnover bin, input and output material room, surge chamber and coating chamber, coating chamber two ends be symmetrical arranged connect successively surge chamber, input and output material room and turnover bin, be positioned at coating chamber and form an independently Work conveyance system, the charging of the same workpiece of complete independently or same group of workpiece and discharging with the turnover bin of one end, input and output material room and surge chamber; Bottom in coating chamber is provided with the live roll group of Bidirectional driving, drives same workpiece or same group of workpiece to move back and forth in coating chamber, carry out multicoating by live roll group.By arranging the live roll group of Bidirectional driving in coating chamber, workpiece being moved back and forth and carries out plated film, the thickness of workpiece surface coatings can be made in time processing just to reach requirement, and not only production efficiency is improved, and quality product is also improved; Meanwhile, arrange two respectively at coating chamber two ends and overlap independently Work conveyance system, and two cover Work conveyance system alternate runs, effectively can enhance productivity, increase substantially production capacity.
Top in described coating chamber is provided with overlaps magnetron sputtering target more, and the target of magnetron sputtering target is that the target of monolithic shape or the Double runway type heavy caliber of polylith splicing shape rotate cylindrical target, significantly can reduce the difficulty of processing of rare metal, improve rare metal utilization ratio.
Described live roll group comprises multiple live roll be arranged side by side, each live roll comprises transmission roller shell and transmission roll shaft respectively, live roll is sheathed on transmission roll shaft periphery, transmission roll shaft two ends arrange supporting seat respectively, transmission roll shaft one end is by the external driving mechanism of power wheel, and driving mechanism can adopt the driving mechanism identical with existing installation.
Described transmission roll shaft two ends are also respectively equipped with bench insulator, and bench insulator is between supporting seat and the end face of transmission roller shell.
The two ends of described live roll are also respectively equipped with shielding slab, and each shielding slab is located at above supporting seat respectively.
Be provided with vacuum lock between described turnover bin and input and output material room, be also provided with vacuum lock between input and output material room and surge chamber, coating chamber is communicated with the surge chamber at its two ends the vacuum chamber being formed and be connected.The vacuum lock that vacuum lock can adopt current market general.
Side, described input and output material room is provided with and vacuumizes unit, and surge chamber or coating chamber side are also provided with and vacuumize unit, and input and output material indoor are provided with ion processing assembly.Vacuumize unit and ion processing assembly all adopt adopt with existing film coating apparatus vacuumize unit and ion processing assembly.
Side, described input and output material room is also provided with the quickly cooling device of convection current Cooling Mode, quickly cooling device comprises the compressor and condenser that are connected, the exit end of compressor is also connected with the side of input and output material room, and the exit end of condenser is connected by the opposite side of cooling tube with input and output material room;
When input and output material room is in feed state, unlatching vacuumizes unit and vacuumizes process to input and output material room; When input and output material room is in discharge state, opens quickly cooling device and quick cooling process is carried out to workpiece.
By the two-way turnover alternate plating method that said apparatus realizes, comprise the following steps:
(1) workpiece sends into input and output material room by turnover bin, first vacuumizes process to input and output material room, then carries out ion processing to workpiece surface;
(2) then workpiece is sent into surge chamber and coating chamber successively, by the drive of live roll group, workpiece moves back and forth in coating chamber, carries out multicoating;
(3), after completing plated film, workpiece reversing motion, sends into surge chamber and input and output material room successively; Meanwhile, the workpiece being positioned at the coating chamber the other end is carried by passing in and out bin accordingly;
(4), when the workpiece completing plated film enters input and output material room, cool fast in input and output material indoor, then deliver to turnover bin, send two-way turnover alternate plating device;
(5) repeating step (1) is to (4), and the workpiece being positioned at coating chamber two ends alternately enters coating chamber, carries out coating film treatment.
In described step (4), when the workpiece completing plated film is cooled fast, adopt the mode that rare gas element convection current cools fast, its cooling efficiency is higher, the slice speed of workpiece can be improved, and significantly reduce the ability of workpiece surface absorption magazine, effectively improve the quality of products.
The utility model, relative to prior art, has following beneficial effect:
This two-way turnover alternate plating device and method adopts the form processing of coating chamber two ends alternate feed and discharging, by forming the separate Work conveyance system of two covers respectively at coating chamber two ends, realize the mode that both-end independently passes in and out, the thick film requirement of magneticsubstance can be met on the one hand, effectively can improve the working (machining) efficiency of workpiece on the other hand, increase substantially production capacity.
In this two-way turnover alternate plating device, can the live roll group of way traffic by arranging in coating chamber, realize workpiece move back and forth in coating chamber and carry out multicoating, not only can meet the requirements by effective guarantee coatings thickness, also effectively can reduce the interference of outer bound pair workpiece, effectively enhance productivity and the technique repetition stability of product.
In this two-way turnover alternate plating device, overlap magnetron sputtering target by arranging in coating chamber more, its target is made to be that the target of monolithic shape or the Double runway type heavy caliber of polylith splicing shape rotate cylindrical target, significantly can reduce the difficulty of processing of rare metal, improve rare metal utilization ratio and production efficiency.
In this two-way turnover alternate plating device, the mode that turnover sheet all adopts rare gas element convection current to cool fast, its cooling efficiency is higher, can improve the slice speed of workpiece, and significantly reduces the ability of workpiece surface absorption magazine, effectively improves the quality of products.
In this two-way turnover alternate plating device, because workpiece is generally polyhedron 3D shape, therefore relate to turn-over plated film, adopt both-end turnover structure, the waiting time can be utilized to complete flaps operation, increased substantially production efficiency.
This two-way turnover alternate plating device is except being applied to magneticsubstance plated film, and also can be applicable to the plated film that coatings requires thicker other types workpiece, range of application is wider.
Accompanying drawing explanation
Fig. 1 is the structural representation of this two-way turnover alternate plating device embodiment 1.
Fig. 2 is the structural representation of the enterprising discharge chamber in A direction and quickly cooling device in Fig. 1.
Fig. 3 is the structural representation in Fig. 1 on A direction in coating chamber.
Fig. 4 is the structural representation that in Fig. 3, Double runway type heavy caliber rotates cylindrical target.
Fig. 5 is the structural representation of this two-way turnover alternate plating device embodiment 2.
Embodiment
Below in conjunction with embodiment, the utility model is described in further detail, but embodiment of the present utility model is not limited thereto.
Embodiment 1
A kind of two-way turnover alternate plating device of the present embodiment, as shown in Figure 1, comprise turnover bin 1, input and output material room 2, surge chamber 3 and coating chamber 4, coating chamber two ends be symmetrical arranged connect successively surge chamber, input and output material room and turnover bin, be positioned at coating chamber and form an independently Work conveyance system, the charging of the same workpiece of complete independently or same group of workpiece and discharging with the turnover bin of one end, input and output material room and surge chamber; Bottom in coating chamber is provided with the live roll group of Bidirectional driving, drives same workpiece or same group of workpiece to move back and forth in coating chamber, carry out multicoating by live roll group.By arranging the live roll group of Bidirectional driving in coating chamber, workpiece being moved back and forth and carries out plated film, the thickness of workpiece 5 plated surface rete can be made in time processing just to reach requirement, and not only production efficiency is improved, and quality product is also improved; Meanwhile, arrange two respectively at coating chamber two ends and overlap independently Work conveyance system, and two cover Work conveyance system alternate runs, effectively can enhance productivity, increase substantially production capacity.
Wherein, top in coating chamber is provided with many cover magnetron sputtering targets 6, the target of magnetron sputtering target is that the target of monolithic shape or the Double runway type heavy caliber of polylith splicing shape rotate cylindrical target (as shown in Figures 3 and 4), significantly can reduce the difficulty of processing of rare metal, improve rare metal utilization ratio.
Live roll group comprises multiple live roll be arranged side by side, as shown in Figure 3, each live roll comprises transmission roller shell 7 and transmission roll shaft 8 respectively, live roll is sheathed on transmission roll shaft periphery, transmission roll shaft two ends arrange supporting seat 9 respectively, transmission roll shaft one end is by the external driving mechanism of power wheel 10, and driving mechanism can adopt the driving mechanism identical with existing installation.Transmission roll shaft two ends are also respectively equipped with bench insulator 11, and bench insulator is between supporting seat and the end face of transmission roller shell.The two ends of live roll are also respectively equipped with shielding slab 12, and each shielding slab is located at above supporting seat respectively.
As shown in Figure 1, be provided with vacuum lock 13 between turnover bin and input and output material room, be also provided with vacuum lock between input and output material room and surge chamber, coating chamber is communicated with the surge chamber at its two ends the vacuum chamber being formed and be connected.The vacuum lock that vacuum lock can adopt current market general.
Side, input and output material room is provided with and vacuumizes unit 14, and surge chamber or coating chamber side are also provided with and vacuumize unit, and input and output material indoor are provided with ion processing assembly.Vacuumize unit and ion processing assembly all adopt adopt with existing film coating apparatus vacuumize unit and ion processing assembly.
Side, input and output material room is also provided with the quickly cooling device 15 of convection current Cooling Mode, as shown in Figure 2, quickly cooling device comprises the compressor 17 and condenser 18 that are connected, the exit end of compressor is also connected with the side of input and output material room, and the exit end of condenser is connected with the opposite side of input and output material room by cooling tube 19; When input and output material room is in feed state, unlatching vacuumizes unit and vacuumizes process to input and output material room; When input and output material room is in discharge state, opens quickly cooling device and quick cooling process is carried out to workpiece.
The present embodiment realizes a kind of two-way turnover alternate plating method by said apparatus, as illustrated by the arrows in fig. 1, comprises the following steps:
(1) workpiece sends into input and output material room by turnover bin, first vacuumizes process to input and output material room, then carries out ion processing to workpiece surface;
(2) then workpiece is sent into surge chamber and coating chamber successively, by the drive of live roll group, workpiece moves back and forth in coating chamber, carries out multicoating;
(3), after completing plated film, workpiece reversing motion, sends into surge chamber and input and output material room successively; Meanwhile, the workpiece being positioned at the coating chamber the other end is carried by passing in and out bin accordingly;
(4), when the workpiece completing plated film enters input and output material room, cool fast in input and output material indoor, then deliver to turnover bin, send two-way turnover alternate plating device; When cooling fast the workpiece completing plated film, adopt the mode that rare gas element convection current cools fast, its cooling efficiency is higher, can improve the slice speed of workpiece, and significantly reduces the ability of workpiece surface absorption magazine, effectively improves the quality of products;
(5) repeating step (1) is to (4), and the workpiece 5 being positioned at coating chamber two ends alternately enters coating chamber, carries out coating film treatment.
Embodiment 2
A kind of two-way turnover alternate plating device of the present embodiment, as shown in Figure 5, compared with embodiment 1, its difference is: coating chamber 4 has two, coordinate the Work conveyance system at its two ends, left and right (namely passing in and out bin, input and output material room and surge chamber) to use respectively, meanwhile, the outer side of two coating chambers is also respectively equipped with surge chamber, the plated film back and forth of left and right two end pieces switch when plated film can be realized, significantly enhance productivity.
Embodiment 3
A kind of two-way turnover alternate plating device of the present embodiment, compared with embodiment 2, its difference is: the surge chamber outside two coating chambers is as a whole, can realize the plated film back and forth of left and right two end pieces circulation dislocation, significantly enhance productivity.
As mentioned above, just can realize the utility model preferably, above-described embodiment is only preferred embodiment of the present utility model, is not used for limiting practical range of the present utility model; Namely all equalizations done according to the utility model content change and modify, all by the utility model claim scope required for protection is contained.
Claims (8)
1. two-way turnover alternate plating device, it is characterized in that, comprise turnover bin, input and output material room, surge chamber and coating chamber, coating chamber two ends be symmetrical arranged connect successively surge chamber, input and output material room and turnover bin, be positioned at coating chamber with the charging of the turnover bin of one end, input and output material room and the same workpiece of surge chamber complete independently or same group of workpiece and discharging; Bottom in coating chamber is provided with the live roll group of Bidirectional driving, drives same workpiece or same group of workpiece to move back and forth in coating chamber, carry out multicoating by live roll group.
2. two-way turnover alternate plating device according to claim 1, it is characterized in that, top in described coating chamber is provided with overlaps magnetron sputtering target more, and the target of magnetron sputtering target is that the target of monolithic shape or the Double runway type heavy caliber of polylith splicing shape rotate cylindrical target.
3. two-way turnover alternate plating device according to claim 1, it is characterized in that, described live roll group comprises multiple live roll be arranged side by side, each live roll comprises transmission roller shell and transmission roll shaft respectively, live roll is sheathed on transmission roll shaft periphery, transmission roll shaft two ends arrange supporting seat respectively, and transmission roll shaft one end is by the external driving mechanism of power wheel.
4. two-way turnover alternate plating device according to claim 3, is characterized in that, described transmission roll shaft two ends are also respectively equipped with bench insulator, and bench insulator is between supporting seat and the end face of transmission roller shell.
5. two-way turnover alternate plating device according to claim 3, it is characterized in that, the two ends of described live roll are also respectively equipped with shielding slab, and each shielding slab is located at above supporting seat respectively.
6. two-way turnover alternate plating device according to claim 1, it is characterized in that, be provided with vacuum lock between described turnover bin and input and output material room, be also provided with vacuum lock between input and output material room and surge chamber, coating chamber is communicated with the surge chamber at its two ends the vacuum chamber being formed and be connected.
7. two-way turnover alternate plating device according to claim 6, is characterized in that, side, described input and output material room is provided with and vacuumizes unit, and surge chamber or coating chamber side are also provided with and vacuumize unit, and input and output material indoor are provided with ion processing assembly.
8. two-way turnover alternate plating device according to claim 7, it is characterized in that, side, described input and output material room is also provided with the quickly cooling device of convection current Cooling Mode, quickly cooling device comprises the compressor and condenser that are connected, the exit end of compressor is also connected with the side of input and output material room, and the exit end of condenser is connected by the opposite side of cooling tube with input and output material room;
When input and output material room is in feed state, unlatching vacuumizes unit and vacuumizes process to input and output material room; When input and output material room is in discharge state, opens quickly cooling device and quick cooling process is carried out to workpiece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520916591.7U CN205188426U (en) | 2015-11-17 | 2015-11-17 | Two -way business turn over is coating film device in turn |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520916591.7U CN205188426U (en) | 2015-11-17 | 2015-11-17 | Two -way business turn over is coating film device in turn |
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| CN205188426U true CN205188426U (en) | 2016-04-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201520916591.7U Expired - Fee Related CN205188426U (en) | 2015-11-17 | 2015-11-17 | Two -way business turn over is coating film device in turn |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105239051A (en) * | 2015-11-17 | 2016-01-13 | 广东腾胜真空技术工程有限公司 | Double-way in and out alternating film plating device and method |
| CN107541712A (en) * | 2017-10-11 | 2018-01-05 | 广东腾胜真空技术工程有限公司 | A kind of glass coating equipment of both-end disengaging |
-
2015
- 2015-11-17 CN CN201520916591.7U patent/CN205188426U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105239051A (en) * | 2015-11-17 | 2016-01-13 | 广东腾胜真空技术工程有限公司 | Double-way in and out alternating film plating device and method |
| CN105239051B (en) * | 2015-11-17 | 2018-11-30 | 广东腾胜真空技术工程有限公司 | Two-way disengaging alternate plating device and method |
| CN107541712A (en) * | 2017-10-11 | 2018-01-05 | 广东腾胜真空技术工程有限公司 | A kind of glass coating equipment of both-end disengaging |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160427 Termination date: 20191117 |
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| CF01 | Termination of patent right due to non-payment of annual fee |