CN206570401U - Vertical surface magnetron sputtering film production line - Google Patents
Vertical surface magnetron sputtering film production line Download PDFInfo
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- CN206570401U CN206570401U CN201720233465.0U CN201720233465U CN206570401U CN 206570401 U CN206570401 U CN 206570401U CN 201720233465 U CN201720233465 U CN 201720233465U CN 206570401 U CN206570401 U CN 206570401U
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- chamber
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- outlet
- surge
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Abstract
The utility model discloses vertical surface magnetron sputtering film production line, including downstream chamber, outlet transition room, export surge chamber, coating chamber, import surge chamber, import transition chamber and upstream chamber, the downstream chamber, outlet transition room, export surge chamber, coating chamber, import surge chamber, import transition chamber and upstream chamber are fixedly connected with the fixation ear A on transmission tape frame, the left and right ends of the transmission tape frame are separately installed with switch cabinet and switch cabinet in charging in discharging, the runner and the runner of servomotor that described main shaft one end is fixed are rotated by creeper band to be connected, the fixation ear B of import surge chamber and import the transition chamber both sides is bolted to connection.Together with downstream chamber, outlet transition room, outlet surge chamber, coating chamber, import surge chamber, import transition chamber are bolted to connection by the utility model with multiple machining cells such as upstream chamber, the inside of device is provided with conveyer belt, it can be achieved continuously to produce, production capacity is high, and product stability is good.
Description
Technical field
The utility model is related to filming equipment technical field, specially vertical surface magnetron sputtering film production line.
Background technology
Magnetron sputtering is one kind of physical vapour deposition (PVD).General sputtering method can be used for preparing metal, semiconductor, insulation
Many materials such as body, and have the advantages that equipment is simple, easily controllable, plated film area is big and adhesive force is strong, and 70 years last century
The magnetron sputtering method that generation grows up is even more to realize high speed, low temperature, low damage.Because being to carry out splashing at a high speed at low pressure
Penetrate, it is necessary to effectively improve the ionization level of gas.Magnetron sputtering in target cathode surface by introducing magnetic field, using magnetic field to powered
The constraint of particle improves plasma density to increase sputtering raste, with the fast development of China's science and technology in recent years, Ren Menkai
Beginning produces magnetron sputtering technique with plated film, and because technology is not mature enough, existing magnetron sputtering film production line is general
For monolithic construction, this is unfavorable for the production quality for lifting production line on the original basis, while existing magnetron sputtering plating
Production line can not realize lasting work, reduce production efficiency.
The content of the invention
The purpose of this utility model is to provide vertical surface magnetron sputtering film production line, to solve above-mentioned background technology
The problem of middle proposition, had an advantageous effect in that；Process structure can be improved according to actual conditions using the machining cell of splicing,
Conveniently increase miscellaneous equipment, further lift the performance of production line, play and extend the potential of original equipment to greatest extent.
To achieve the above object, the utility model provides following technical scheme：Vertical surface magnetron sputtering film production line,
Including downstream chamber, outlet transition room, outlet surge chamber, coating chamber, import surge chamber, import transition chamber and upstream chamber, it is described go out
Mouth room, outlet transition room, outlet surge chamber, coating chamber, import surge chamber, import transition chamber and upstream chamber are with transmitting tape frame
On fixation ear A be fixedly connected, and by downstream chamber to upstream chamber one end be disposed with outlet transition room, outlet surge chamber, plating
Film room, import surge chamber and import transition chamber, the left and right ends of the transmission tape frame are separately installed with discharging switch cabinet and entered
It is provided with switch cabinet in material, and the leading flank of transmission tape frame in power distribution cabinet, the two side of the transmission tape frame and axle is installed
Hold, the inner ring of bearing is fixedly connected with the axis of guide, and bearing is provided with the outrigger of transmission tape frame both sides fixation, bearing
Inner ring is fixedly connected with main shaft, and the runner and the runner of servomotor that described main shaft one end is fixed are rotated by creeper band to be connected
Connect, and servomotor is arranged between the two side of transmission tape frame, the import surge chamber and import transition chamber both sides are consolidated
Determine ear B to be bolted to connection, and pad is provided between import surge chamber and import transition chamber.
It is preferred that, the top of the downstream chamber and upstream chamber is mounted on alarm lamp.
It is preferred that, the downstream chamber, outlet transition room, outlet surge chamber, coating chamber, import surge chamber, import transition chamber
The both sides of upstream chamber are provided with transparency window, and downstream chamber, outlet transition room, the both sides of outlet surge chamber and coating chamber are provided with
Fixed ear B.
It is preferred that, the fixed ear A is arranged on the outside of transmission tape frame.
It is preferred that, the power distribution cabinet is arranged on the transmission tape frame of downstream chamber lower end.
Compared with prior art, the beneficial effects of the utility model are：The equipment by downstream chamber, outlet transition room, outlet
Multiple machining cells such as surge chamber, coating chamber, import surge chamber, import transition chamber and upstream chamber are bolted to connection one
Rise, and conveyer belt is installed in the inside of device, can be achieved continuously to produce, production capacity is high, product stability is good, using spelling
The machining cell connect can improve process structure according to actual conditions, conveniently increase miscellaneous equipment, further lift production line
Performance, play and extend the potential of original equipment to greatest extent, and the junction of operated adjacent unit is provided with pad, can protect
The compactness of card device connection, it is ensured that the quality of converted products, the present apparatus is reasonable in design, in working cell docking, workpiece is transmitted,
Have in terms of Automatic Control and exchange compatible well, there are wide market prospects.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model；
Fig. 2 is the structural representation of the utility model conveyer belt lower portion；
Fig. 3 is the structural representation that the utility model import surge chamber is connected with upstream chamber.
In figure：Switch cabinet in 1- dischargings；2- power distribution cabinets；3- downstream chambers；4- outlet transitions room；5- exports surge chamber；6- plated films
Room；7- transparency windows；8- import surge chambers；9- transmits tape frame；10- import transition chambers；11- upstream chambers；12- alarm lamps；13- enters
Switch cabinet in material；14- fixes ear A；The 15- axis of guides；16- bearings；17- servomotors；18- runners；19- creeper bands；20- master
Axle；21- outriggers；22- pads；23- fixes ear B；24- bolts.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belongs to the scope of the utility model protection.
Refer to Fig. 1-3, a kind of embodiment that the utility model is provided：Vertical surface magnetron sputtering film production line, bag
Downstream chamber 3, outlet transition room 4, outlet surge chamber 5, coating chamber 6, import surge chamber 8, import transition chamber 10 and upstream chamber 11 are included,
Downstream chamber 3, outlet transition room 4, outlet surge chamber 5, coating chamber 6, import surge chamber 8, import transition chamber 10 and upstream chamber 11 are equal
It is fixedly connected with the fixation ear A14 on transmission tape frame 9, and is disposed with out and makes a slip of the tongue to the one end of upstream chamber 11 by downstream chamber 3
Cross room 4, outlet surge chamber 5, coating chamber 6, import surge chamber 8 and import transition chamber 10, the left and right ends difference of transmission tape frame 9
Be provided with discharging in switch cabinet 1 and charging in switch cabinet 13, and transmission tape frame 9 leading flank on be provided with power distribution cabinet 2, conveyer belt frame
Bearing 16 is installed, the inner ring of bearing 16 is fixedly connected with the axis of guide 15 in the two side of frame 9, and transmission tape frame 9 both sides are consolidated
Bearing 16 is provided with fixed outrigger 21, the inner ring of bearing 16 is fixedly connected with main shaft 20, the runner that the one end of main shaft 20 is fixed
18 are connected with the runner 18 of servomotor 17 by the rotation of creeper band 19, and servomotor 17 is arranged on transmission tape frame 9
Between two side, import surge chamber 8 is fixedly connected with the fixation ear B23 of the both sides of import transition chamber 10 by bolt 24, and import
It is provided with pad 22 between surge chamber 8 and import transition chamber 10, the top of downstream chamber 3 and upstream chamber 11 is mounted on alarm lamp
12, downstream chamber 3, outlet transition room 4, outlet surge chamber 5, coating chamber 6, import surge chamber 8, import transition chamber 10 and upstream chamber 11
Both sides be provided with transparency window 7, and downstream chamber 3, outlet transition room 4, the both sides of outlet surge chamber 5 and coating chamber 6 be provided with it is solid
Determine ear B23, fixed ear A14 is arranged on the outside of transmission tape frame 9, and power distribution cabinet 2 is arranged on the transmission tape frame of the lower end of downstream chamber 3
On 9.
Operation principle：The product for needing plated film is transported in charging on switch cabinet 13 when using, then opened in power distribution cabinet 2
Switch powered for whole device, at this time servomotor 17 works, servomotor 17 pass through creeper band 19 drive main shaft 20
Rotate, therefore, the product for needing plated film is passed sequentially through upstream chamber 11, import transition chamber 10, import and delayed by belt on main shaft 20
Room 8, coating chamber 6, outlet surge chamber 5, outlet transition room 4 and downstream chamber 3 are rushed, is completed after processing, by the product machined
Produced by switch cabinet in discharging 1, the processing of completion product, and upstream chamber 11, import transition chamber 10, import surge chamber 8, coating chamber
6th, the machining status of inside can be observed in outlet surge chamber 5, outlet transition room 4 and the transparency window 7 of the both sides of downstream chamber 3.
It is obvious to a person skilled in the art that the utility model is not limited to the details of above-mentioned one exemplary embodiment, and
And in the case of without departing substantially from spirit or essential attributes of the present utility model, can realize that this practicality is new in other specific forms
Type.Therefore, no matter from the point of view of which point, embodiment all should be regarded as exemplary, and is nonrestrictive, this practicality is new
The scope of type limits by appended claims rather than described above, it is intended that the equivalency fallen in claim is contained
All changes in justice and scope are included in the utility model.Any reference in claim should not be considered as limitation
Involved claim.
Claims (5)
1. vertical surface magnetron sputtering film production line, including downstream chamber（3）, outlet transition room（4）, outlet surge chamber（5）, plating
Film room（6）, import surge chamber（8）, import transition chamber（10）And upstream chamber（11）, it is characterised in that：The downstream chamber（3）, go out
Mouth transition chamber（4）, outlet surge chamber（5）, coating chamber（6）, import surge chamber（8）, import transition chamber（10）And upstream chamber（11）
With transmission tape frame（9）On fixation ear A（14）It is fixedly connected, and by downstream chamber（3）To upstream chamber（11）One end is set successively
It is equipped with outlet transition room（4）, outlet surge chamber（5）, coating chamber（6）, import surge chamber（8）With import transition chamber（10）, it is described
Transmit tape frame（9）Left and right ends be separately installed with discharging in switch cabinet（1）With switch cabinet in charging（13）, and transmission tape frame
（9）Leading flank on be provided with power distribution cabinet（2）, the transmission tape frame（9）Two side in bearing is installed（16）, bearing
（16）Inner ring and the axis of guide（15）It is fixedly connected, and transmission tape frame（9）The outrigger that both sides are fixed（21）In be provided with axle
Hold（16）, bearing（16）Inner ring and main shaft（20）It is fixedly connected, the main shaft（20）The runner that one end is fixed（18）With servo
Motor（17）Runner（18）Pass through creeper band（19）Rotate connection, and servomotor（17）Installed in transmission tape frame（9）
Two side between, the import surge chamber（8）With import transition chamber（10）The fixation ear B of both sides（23）Pass through bolt（24）Gu
Fixed connection, and import surge chamber（8）With import transition chamber（10）Between be provided with pad（22）.
2. vertical surface magnetron sputtering film production line according to claim 1, it is characterised in that：The downstream chamber（3）
And upstream chamber（11）Top be mounted on alarm lamp（12）.
3. vertical surface magnetron sputtering film production line according to claim 1, it is characterised in that：The downstream chamber（3）、
Outlet transition room（4）, outlet surge chamber（5）, coating chamber（6）, import surge chamber（8）, import transition chamber（10）And upstream chamber
（11）Both sides be provided with transparency window（7）, and downstream chamber（3）, outlet transition room（4）, outlet surge chamber（5）And coating chamber（6）
Both sides be provided with fixed ear B（23）.
4. vertical surface magnetron sputtering film production line according to claim 1, it is characterised in that：The fixed ear A
（14）It is arranged on transmission tape frame（9）Outside.
5. vertical surface magnetron sputtering film production line according to claim 1, it is characterised in that：The power distribution cabinet（2）
It is arranged on downstream chamber（3）The transmission tape frame of lower end（9）On.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720233465.0U CN206570401U (en) | 2017-03-11 | 2017-03-11 | Vertical surface magnetron sputtering film production line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720233465.0U CN206570401U (en) | 2017-03-11 | 2017-03-11 | Vertical surface magnetron sputtering film production line |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206570401U true CN206570401U (en) | 2017-10-20 |
Family
ID=60057979
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720233465.0U Expired - Fee Related CN206570401U (en) | 2017-03-11 | 2017-03-11 | Vertical surface magnetron sputtering film production line |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206570401U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108838900A (en) * | 2018-06-12 | 2018-11-20 | 东莞市德亿塑胶机械有限公司 | A kind of combined type tunnel burr machine |
| CN110699657A (en) * | 2019-11-28 | 2020-01-17 | 湖南华庆科技有限公司 | Vertical magnetron sputtering color film production line device |
-
2017
- 2017-03-11 CN CN201720233465.0U patent/CN206570401U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108838900A (en) * | 2018-06-12 | 2018-11-20 | 东莞市德亿塑胶机械有限公司 | A kind of combined type tunnel burr machine |
| CN110699657A (en) * | 2019-11-28 | 2020-01-17 | 湖南华庆科技有限公司 | Vertical magnetron sputtering color film production line device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171020 Termination date: 20200311 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |