CN205635763U - Room is imported and exported to sectional type - Google Patents

Abstract

The utility model provides a room is imported and exported to sectional type, one -level cavity are equipped with isolated atmosphere of the first family of power and influence and vacuum cavity outward, the one -level cavity is connected with the second grade cavity, is equipped with the second family of power and influence between two cavitys of while, the second grade cavity is connected with the surge chamber, is equipped with the third family of power and influence simultaneously, the roll table sets up inside one -level cavity and second grade cavity, the apron sets up the upper portion at two cavitys respectively, the bleed valve sets up on apron upper portion. The utility model discloses an actively the effect is: this device satisfies the market demand that the conventional glass face of production was managed to find time fast, also can satisfy the longer glass of production simultaneously. Accord with coating film production demand.

Description

A kind of stagewise imports and exports room

Technical field

This utility model relates to vacuum glass coating technique field, particularly a kind of stagewise turnover Mouth room.

Background technology

Known magnetron sputtering plating is to carry out under a high vacuum, and the coating film production line of flowing water is for ensureing Production run rapidly and efficiently is divided into upstream chamber, import surge chamber, import coating film production line Cross room, process chamber, outlet transition room, outlet surge chamber, downstream chamber totally seven parts producing During glass under atmospheric environment be sent to the process chamber of fine vacuum, carry out sputter coating and pass Go out.

It is restricted with plated film cavity size that known existing coating film production line produces glass size, no Energy is long can not be wide.And it is the most unrestrained to make the excessive production the highest generation of often utilization rate Taking, market is rare.

Known coated glass productive temp depends on the speed of evacuation with upstream chamber and downstream chamber and takes out Absolutely empty, bigger import and export room can produce bigger glass, and reduces evacuated time, produces Beat is slack-off.Less imports and exports the glass that room then can not produce the bigger plate face of market demands.

Known coating film production line uses a kind of overlength pattern that upstream chamber is merged with import surge chamber, Downstream chamber merges with outlet surge chamber.So solve coating wire and produce asking of big plate surface glass Topic, but the most more complicated pumping process brings is longer evacuated time, greatly reduces Productive temp, the most also the stability requirement to equipment is higher, easily occurs asking in production process Topic.

Utility model content

Technical problem to be solved in the utility model is to provide a kind of stagewise and imports and exports room.

For solving above-mentioned technical problem, this utility model realizes as follows: Yi Zhongfen Segmentation import and export room, including one-level cavity, secondary cavity, the family of power and influence, cover plate, vent valve, Roller-way, a spike；

Described one-level cavity is externally provided with first family of power and influence and completely cuts off air and vacuum cavity；Described one-level chamber Body is connected with described secondary cavity, is provided with second family of power and influence between two cavitys simultaneously；Described two Level cavity is connected with surge chamber, is simultaneously provided with the 3rd family of power and influence；Described roller-way is arranged on described one Inside level cavity and described secondary cavity；Described cover plate is separately positioned on the top of two cavitys； Described vent valve is arranged on described cover plate top.

Good effect of the present utility model is: this device meets production Conventional glass plate face and quickly takes out Empty Market Demand, the most also can meet and produce longer glass.Meet plated film production to need Ask.

Accompanying drawing explanation

Fig. 1 is this utility model structural representation.

Working state figure of the present utility model when Fig. 2 is for producing 3660mm conventional plate face.

Working state figure of the present utility model when Fig. 3 is for producing 4880mm conventional plate face.

Detailed description of the invention

With detailed description of the invention this utility model made further details of theory below in conjunction with the accompanying drawings Bright.

As it is shown in figure 1, a kind of stagewise described in the utility model imports and exports room, including one-level Cavity 1, secondary cavity 2, the family of power and influence 3, cover plate 4, vent valve 5, roller-way 6, a spike. One-level cavity 1 is externally provided with first family of power and influence and completely cuts off air and vacuum cavity；One-level cavity 1 and two grades Cavity 2 is connected, and is provided with second family of power and influence between two cavitys simultaneously, and the switch of second family of power and influence is true Determine production model；Secondary cavity 2 is connected with surge chamber, is simultaneously provided with the 3rd family of power and influence；This phase Second family of power and influence faced/the 3rd family of power and influence just switch is exactly core of the present utility model.Roller-way 6 In one-level cavity 1 and the transmission of secondary cavity 2 interior liabilities glass, cover plate 4 is respectively provided with On the top of two cavitys, playing the effect sealing cavity, vent valve 5 is arranged on cover plate 4 Top, the emptying in production process is completed by vent valve.

This device is divided into two sections importing and exporting room from one section.According to producing different size glass and leading to The switch crossing the family of power and influence determines that importing and exporting room can produce the size of glass.It is applied to large-area flat-plate glass In glass filming equipment, meet simultaneously and realize high-speed production beat and the production of big plate surface glass.

Good effect of the present utility model is: in coated glass production process, produces routine 3660mm plate face we only use one-level chamber to use Lay treasured backing pump evacuated time up to 8 Second, productive temp can meet the process speed of 9 ms/min for 22 seconds, effectively improve yield, Production capacity makes a call to 10,000,000 square metres/year.Simultaneously we can also one-level chamber and secondary cavity it Between the family of power and influence open, one-level chamber share with secondary cavity.Thus can make coating film production line The big plate surface glass of less than 4880 is produced in the case of not using overlength pattern.When evacuating equally Between the most only 14 seconds.This has performed to maximum the production capacity of coating film production line beyond doubt.High yield Amount drives corresponding process costs also can greatly reduce.

This utility model is not limited to above-mentioned preferred forms, and anyone is of the present utility model Other various forms of products all can be drawn, no matter but appointing in its shape or structure under enlightenment What change, every have same or like with this utility model as technical scheme, all fall within this Within the protection domain of utility model.

Claims (1)

1. a stagewise imports and exports room, it is characterised in that include one-level cavity, secondary chamber Body, the family of power and influence, cover plate, vent valve, roller-way, a spike；

Described one-level cavity is externally provided with first family of power and influence and completely cuts off air and vacuum cavity；Described one-level chamber Body is connected with described secondary cavity, is provided with second family of power and influence between two cavitys simultaneously；Described two Level cavity is connected with surge chamber, is simultaneously provided with the 3rd family of power and influence；Described roller-way is arranged on described one Inside level cavity and described secondary cavity；Described cover plate is separately positioned on the top of two cavitys； Described vent valve is arranged on described cover plate top.