CN210826333U - Device with vacuum differential adjustable orifice - Google Patents
Device with vacuum differential adjustable orifice Download PDFInfo
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- CN210826333U CN210826333U CN201921605057.9U CN201921605057U CN210826333U CN 210826333 U CN210826333 U CN 210826333U CN 201921605057 U CN201921605057 U CN 201921605057U CN 210826333 U CN210826333 U CN 210826333U
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- diaphragm nozzle
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Abstract
The utility model discloses a device of adjustable orifice of vacuum difference, including first vacuum cavity, second vacuum cavity, diaphragm nozzle, actuating lever, planetary gear set and power device, the fixed surface of first vacuum cavity has the second vacuum cavity, and the right side fixed surface of first vacuum cavity has the diaphragm nozzle, the surface of diaphragm nozzle is provided with the transfer line, the surface of actuating lever is provided with the dwang, the fixed surface of first vacuum cavity has the connecting rod, and the surface of connecting rod is provided with the axis of rotation, the surperficial left end of axis of rotation is connected with power device, the surface of diaphragm nozzle is provided with first pivot. This device of adjustable orifice of vacuum difference is provided with diaphragm nozzle, first pivot, second pivot and adjustment sheet, makes the size of orifice can be adjusted to can make the light nanocluster of making not unidimensional of whole device, and then save the total length of making nanocluster, improve nanocluster's production efficiency.
Description
Technical Field
The utility model relates to a physical vapor deposition technical field specifically is a device mode of adjustable orifice of vacuum difference.
Background
The nanometer cluster of metal and oxide causes the change of electron and energy band structure due to quantum size effect, and can realize the functional materials with different purposes, such as biomedicine, gas sensing, photocatalysis, etc., by controlling the preparation of the nanometer cluster, the preparation of the nanometer cluster usually has hydrothermal synthesis method and vapor cluster deposition method, compared with hydrothermal synthesis, the nanometer cluster prepared by the vapor cluster deposition method has the characteristics of controllable size, no other impurity phase, simple method, etc., while the preparation of the nanometer cluster by the vapor cluster deposition method usually utilizes the magnetron sputtering method, the cluster needs to be generated in the atmospheric pressure environment of medium vacuum, and finally deposits on the sample of pure high vacuum or ultra-high vacuum environment, the vacuum cavity of the nanometer cluster is necessarily designed into a differential vacuum structure, the differential vacuum realizes the transition of pressure intensity through the throttling hole, the size of the orifice is one of the key factors affecting the differential vacuum system.
Most of the prior vacuum differential adjustable orifice devices generally have the following problems:
firstly, the cost is high, most of the existing vacuum differential adjustable orifice devices adjust the pressure difference of a differential system by adjusting the pumping speed through a vacuum pump, most of the vacuum pumps do not have the function of adjusting the pumping speed, and even if the pumping speed can be adjusted, more energy sources are required to obtain the required differential environment;
secondly, the efficiency is not good when manufacturing the nanoclusters, the aperture size of most vacuum differential flow holes cannot be changed after the vacuum differential flow holes are arranged, and the size of the throttling hole is one of the key factors influencing the differential vacuum system, so that the whole device consumes longer time and has lower efficiency when manufacturing the nanoclusters with different sizes.
We have therefore proposed a vacuum differential adjustable orifice arrangement to address the problems set out above.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a device of adjustable orifice of vacuum difference to solve above-mentioned background art and propose the higher and not good problem of efficiency of cost that most cluster deposition method made nanocluster.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a device of adjustable orifice of vacuum difference, includes first vacuum cavity, second vacuum cavity, diaphragm nozzle, actuating lever, planetary gear set and power device, the fixed surface of first vacuum cavity has the second vacuum cavity, and the right side fixed surface of first vacuum cavity has the diaphragm nozzle, the surface of diaphragm nozzle is provided with the transfer line, and the surface of transfer line is provided with the actuating lever, the surface of actuating lever is provided with the dwang, and the surface of dwang is connected with planetary gear set, the fixed surface of first vacuum cavity has the connecting rod, and the surface of connecting rod is provided with the axis of rotation, the surperficial left end of axis of rotation is connected with power device, the surface of diaphragm nozzle is provided with first pivot, and the surface of diaphragm nozzle is provided with the second pivot to the surface of first pivot is connected with the adjustment sheet.
Preferably, the driving rod and the planetary gear set form a rotating structure through the rotating rod, and the driving rod form a rotating structure.
Preferably, the transmission rod and the diaphragm nozzle form a rotating structure, and the transmission rod is in an inverted L shape.
Preferably, the adjusting sheet and the first rotating shaft form a rotating structure, and the adjusting sheet and the second rotating shaft form a rotating structure.
Preferably, the adjusting sheets are in an inverted '1' -shape, and the adjusting sheets form a circle.
Compared with the prior art, the beneficial effects of the utility model are that: the vacuum differential adjustable orifice device is provided with a vacuum differential adjustable orifice,
(1) the aperture nozzle, the first rotating shaft, the second rotating shaft and the adjusting sheet are arranged, so that the size of the throttling hole can be adjusted, the whole device can easily manufacture nanoclusters with different sizes, the total time for manufacturing the nanoclusters is saved, and the production efficiency of the nanoclusters is improved;
(2) compared with the function of adjusting pumping speed through a vacuum pump, the pressure difference of a differential system is adjusted, more energy is saved, the manufacturing cost of the nanoclusters is reduced, and the competitiveness of products is improved;
(3) the driving rod can be connected with the diaphragm nozzle, so that workers can easily adjust the size of the throttling hole, operation steps are simplified, labor intensity of the workers is reduced, and manpower is saved.
Drawings
FIG. 1 is a schematic front sectional view of the present invention;
FIG. 2 is a left side view schematic diagram of the planetary gear of the present invention;
fig. 3 is the left sectional structural schematic diagram of the diaphragm nozzle of the present invention.
In the figure: 1. a first vacuum chamber; 2. a second vacuum chamber; 3. a diaphragm nozzle; 4. a drive rod; 5. a planetary gear set; 6. a transmission rod; 7. rotating the rod; 8. a connecting rod; 9. a rotating shaft; 10. a power plant; 11. a first rotating shaft; 12. a second rotating shaft; 13. and a regulating sheet.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-3, the present invention provides a technical solution: a device of a vacuum differential adjustable orifice comprises a first vacuum cavity 1, a second vacuum cavity 2, a diaphragm nozzle 3, a driving rod 4, a planetary gear set 5, a transmission rod 6, a rotating rod 7, a connecting rod 8, a rotating shaft 9, a power device 10, a first rotating shaft 11, a second rotating shaft 12 and an adjusting sheet 13 of an operation platform, wherein the second vacuum cavity 2 is fixed on the surface of the first vacuum cavity 1, the diaphragm nozzle 3 is fixed on the right side surface of the first vacuum cavity 1, the transmission rod 6 is arranged on the surface of the diaphragm nozzle 3, the driving rod 4 is arranged on the surface of the transmission rod 6, the rotating rod 7 is arranged on the surface of the driving rod 4, the planetary gear set 5 is connected on the surface of the rotating rod 7, the connecting rod 8 is fixed on the surface of the first vacuum cavity 1, the rotating shaft 9 is arranged on the surface of the connecting rod 8, the power device 10 is connected at the left, and the surface of the diaphragm nozzle 3 is provided with a second rotating shaft 12, and the surface of the first rotating shaft 11 is connected with an adjusting blade 13.
The driving rod 4 and the planetary gear set 5 form a rotating structure through the rotating rod 7, the driving rod 4 and the driving rod 6 form a rotating structure, and the size of the throttling hole is adjusted through the rotation of the planetary gear set 5, so that the energy is saved, and the manufacturing cost of the nanoclusters is reduced.
The transmission rod 6 and the diaphragm nozzle 3 form a rotating structure, and the transmission rod 6 is inverted L-shaped, so that the size of the throttling hole can be adjusted, the working intensity of workers is reduced, and the manpower is saved.
The adjusting sheet 13 and the first rotating shaft 11 form a rotating structure, and the adjusting sheet 13 and the second rotating shaft 12 form a rotating structure, so that the size of the throttling hole can be rapidly adjusted, and the production efficiency of the nanoclusters is improved.
The adjusting sheets 13 are in an inverted '1' shape, and the adjusting sheets 13 form a circle, so that the air flow between the first vacuum cavity 1 and the second vacuum cavity 2 can be controlled, and the purpose of adjusting the size of the throttling hole is achieved.
The working principle is as follows: firstly, as shown in fig. 1 and 2, when nanoclusters of different sizes need to be prepared, the power device 10 is turned on, the power device 10 drives the rotating shaft 9 to rotate, so that the rotating shaft 9 drives the planetary gear set 5 to rotate, because the driving rod 4 forms a rotating structure with the planetary gear set 5 through the rotating rod 7, and the driving rod 4 forms a rotating structure with the driving rod 6, when the planetary gear set 5 rotates, the driving rod 4 drives the driving rod 6 to toggle the photo-nozzle 3, compared with the conventional method of adjusting the pumping rate through a vacuum pump, the energy is saved, the manufacturing cost of the nanoclusters is reduced, and the competitiveness of products is improved;
according to the fig. 1 and 3, when the transmission rod 6 shifts the diaphragm nozzle 3, the adjusting sheet 13 rotates through the first rotating shaft 11 and the second rotating shaft 12 respectively, so that the size of the circular area formed between the adjusting sheets 13 is changed, the flow rate and the pressure of the air flow between the first vacuum chamber 1 and the second vacuum chamber 2 are further changed, the purpose of adjusting the size of the orifice is further achieved, the manufacturing rate of nanoclusters of different sizes is improved, the yield of the nanoclusters is further improved, meanwhile, the operation steps of adjusting the orifice by workers are simplified, the working intensity of the workers is reduced, and the labor force is saved, which is the using process of the vacuum differential orifice-adjustable device, and the content which is not described in detail in the description belongs to the prior art known by the professional in the field.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the invention.
Claims (5)
1. A device of a vacuum differential adjustable orifice comprises a first vacuum cavity (1), a second vacuum cavity (2), a diaphragm nozzle (3), a driving rod (4), a planetary gear set (5) and a power device (10), and is characterized in that: a second vacuum cavity (2) is fixed on the surface of the first vacuum cavity (1), a diaphragm nozzle (3) is fixed on the right side surface of the first vacuum cavity (1), a transmission rod (6) is arranged on the surface of the diaphragm nozzle (3), a driving rod (4) is arranged on the surface of the driving rod (6), a rotating rod (7) is arranged on the surface of the driving rod (4), and the surface of the rotating rod (7) is connected with a planetary gear set (5), the surface of the first vacuum cavity (1) is fixed with a connecting rod (8), a rotating shaft (9) is arranged on the surface of the connecting rod (8), the left end of the surface of the rotating shaft (9) is connected with a power device (10), a first rotating shaft (11) is arranged on the surface of the diaphragm nozzle (3), and the surface of the diaphragm nozzle (3) is provided with a second rotating shaft (12), and the surface of the first rotating shaft (11) is connected with an adjusting sheet (13).
2. A vacuum differential adjustable orifice device as defined in claim 1 wherein: the driving rod (4) forms a rotating structure with the planetary gear set (5) through the rotating rod (7), and the driving rod (4) forms a rotating structure with the driving rod (6).
3. A vacuum differential adjustable orifice device as defined in claim 1 wherein: the transmission rod (6) and the diaphragm nozzle (3) form a rotating structure, and the transmission rod (6) is in an inverted L shape.
4. A vacuum differential adjustable orifice device as defined in claim 1 wherein: the adjusting sheet (13) and the first rotating shaft (11) form a rotating structure, and the adjusting sheet (13) and the second rotating shaft (12) form a rotating structure.
5. A vacuum differential adjustable orifice device as defined in claim 1 wherein: the adjusting sheets (13) are in an inverted '1' -shape, and the adjusting sheets (13) form a circle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921605057.9U CN210826333U (en) | 2019-09-25 | 2019-09-25 | Device with vacuum differential adjustable orifice |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921605057.9U CN210826333U (en) | 2019-09-25 | 2019-09-25 | Device with vacuum differential adjustable orifice |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210826333U true CN210826333U (en) | 2020-06-23 |
Family
ID=71254215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921605057.9U Active CN210826333U (en) | 2019-09-25 | 2019-09-25 | Device with vacuum differential adjustable orifice |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210826333U (en) |
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2019
- 2019-09-25 CN CN201921605057.9U patent/CN210826333U/en active Active
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