CN105714260A - Sectional inlet-outlet chamber - Google Patents
Sectional inlet-outlet chamber Download PDFInfo
- Publication number
- CN105714260A CN105714260A CN201610181951.2A CN201610181951A CN105714260A CN 105714260 A CN105714260 A CN 105714260A CN 201610181951 A CN201610181951 A CN 201610181951A CN 105714260 A CN105714260 A CN 105714260A
- Authority
- CN
- China
- Prior art keywords
- cavity
- family
- influence
- power
- secondary cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Joining Of Glass To Other Materials (AREA)
Abstract
The invention discloses a sectional inlet-outlet chamber. A first gate is arranged outside a primary cavity so as to isolate air from a vacuum cavity. The primary cavity is connected with a secondary cavity, and a second gate is arranged between the two cavities. The secondary cavity is connected with a buffering chamber, and at the same time, a third valve is arranged. A roller way is arranged in the primary cavity and the secondary cavity. Cover plates are separately arranged at the upper parts of the two cavities. Bleeding valves are arranged at the upper parts of the cover plates. The sectional inlet-outlet chamber has the advantages that the device meets the rapid evacuation market demand of conventional glass panel production, and at the same time, can also meets the requirement of producing longer glass. The production requirements of coatings are met.
Description
Technical field
The present invention relates to vacuum glass coating technique field, particularly a kind of stagewise imports and exports room.
Background technology
Known magnetron sputtering plating is to carry out under a high vacuum, the coating film production line of flowing water is ensure that production run rapidly and efficiently is divided into upstream chamber, import surge chamber, import transition chamber, process chamber, outlet transition room, outlet surge chamber, downstream chamber totally seven parts the glass under atmospheric environment in production process to be sent to the process chamber of fine vacuum coating film production line, carries out sputter coating and spreads out of.
It is restricted with plated film cavity size that known existing coating film production line produces glass size, it is impossible to long can not be wide.And make the not high generation of excessive production often utilization rate and waste greatly, market is rare.
Known coated glass productive temp depends on the speed of evacuation with upstream chamber and downstream chamber and evacuation space, and bigger import and export room can produce bigger glass, and reduces evacuated time, and productive temp is slack-off.Less imports and exports the glass that room then can not produce the bigger plate face of market demands.
Known coating film production line uses a kind of overlength pattern that upstream chamber is merged with import surge chamber, and downstream chamber merges with outlet surge chamber.So solve coating wire and produce the problem of big plate surface glass, but simultaneously more complicated pumping process brings is longer evacuated time, greatly reduces productive temp, so also that the stability requirement of equipment is higher, production process easily goes wrong.
Summary of the invention
The technical problem to be solved is to provide a kind of stagewise and imports and exports room.
For solving above-mentioned technical problem, the present invention realizes as follows: a kind of stagewise imports and exports room, including one-level cavity, secondary cavity, the family of power and influence, cover plate, vent valve, roller-way, a spike；
Described one-level cavity is externally provided with first family of power and influence and completely cuts off air and vacuum cavity；Described one-level cavity is connected with described secondary cavity, is provided with second family of power and influence between two cavitys simultaneously；Described secondary cavity is connected with surge chamber, is simultaneously provided with the 3rd family of power and influence；Described roller-way is arranged on inside described one-level cavity and described secondary cavity；Described cover plate is separately positioned on the top of two cavitys；Described vent valve is arranged on described cover plate top.
The method have the advantages that this device meets the Market Demand producing Conventional glass plate face rapid evacuation, also can meet simultaneously and produce longer glass.Meet plated film Production requirement.
Accompanying drawing explanation
Fig. 1 is present configuration schematic diagram.
The working state figure of present invention when Fig. 2 is produce 3660mm conventional plate face.
The working state figure of present invention when Fig. 3 is produce 4880mm conventional plate face.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the present invention is further detailed explanation.
As it is shown in figure 1, a kind of stagewise of the present invention imports and exports room, including one-level cavity 1, secondary cavity 2, the family of power and influence 3, cover plate 4, vent valve 5, roller-way 6, a spike.One-level cavity 1 is externally provided with first family of power and influence and completely cuts off air and vacuum cavity；One-level cavity 1 is connected with secondary cavity 2, is provided with second family of power and influence between two cavitys simultaneously, and production model determined by the switch of second family of power and influence；Secondary cavity 2 is connected with surge chamber, is simultaneously provided with the 3rd family of power and influence；This second adjacent family of power and influence/the 3rd family of power and influence just switch is exactly the core of the present invention.Roller-way 6 is in the transmission of one-level cavity 1 and secondary cavity 2 interior liabilities glass, and cover plate 4 is separately positioned on the top of two cavitys, plays the effect sealing cavity, and vent valve 5 is arranged on cover plate 4 top, and the emptying in production process is completed by vent valve.
This device is divided into two sections importing and exporting room from one section.According to producing different size glass and being determined that by the switch of the family of power and influence importing and exporting room can produce the size of glass.It is applied in large-area flat-plate glass coating equipment, meets simultaneously and realize high-speed production beat and the production of big plate surface glass.
The method have the advantages that in coated glass production process, we only use one-level chamber to use Lay treasured backing pump evacuated time up to 8 seconds to produce conventional 3660mm plate face, productive temp can meet the process speed of 9 ms/min for 22 seconds, effectively improving yield, production capacity makes a call to 10,000,000 square metres/year.We can also open the family of power and influence between one-level chamber and secondary cavity simultaneously, and one-level chamber and secondary cavity share.Coating film production line thus can be made not use the big plate surface glass producing less than 4880 when overlength pattern.Same evacuated time also only 14 seconds.This has performed to the production capacity of coating film production line maximum beyond doubt.High yield drives corresponding process costs also can greatly reduce.
The present invention is not limited to above-mentioned preferred forms; anyone can draw other various forms of products under the enlightenment of the present invention; no matter but in its shape or structure, do any change, every have same or like with the present invention like technical scheme, all fall within protection scope of the present invention.
Claims (1)
1. a stagewise imports and exports room, it is characterised in that include one-level cavity, secondary cavity, the family of power and influence, cover plate, vent valve, roller-way, a spike；
Described one-level cavity is externally provided with first family of power and influence and completely cuts off air and vacuum cavity；Described one-level cavity is connected with described secondary cavity, is provided with second family of power and influence between two cavitys simultaneously；Described secondary cavity is connected with surge chamber, is simultaneously provided with the 3rd family of power and influence；Described roller-way is arranged on inside described one-level cavity and described secondary cavity；Described cover plate is separately positioned on the top of two cavitys；Described vent valve is arranged on described cover plate top.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610181951.2A CN105714260A (en) | 2016-03-28 | 2016-03-28 | Sectional inlet-outlet chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610181951.2A CN105714260A (en) | 2016-03-28 | 2016-03-28 | Sectional inlet-outlet chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105714260A true CN105714260A (en) | 2016-06-29 |
Family
ID=56159207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610181951.2A Pending CN105714260A (en) | 2016-03-28 | 2016-03-28 | Sectional inlet-outlet chamber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105714260A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108251815A (en) * | 2018-03-07 | 2018-07-06 | 河北物华天宝镀膜科技有限公司 | A kind of transmission pursuit piece-rate system |
| CN114182221A (en) * | 2021-11-02 | 2022-03-15 | 中国建材国际工程集团有限公司 | Flexible piece feeding system of coated glass production line |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203333755U (en) * | 2013-05-09 | 2013-12-11 | 肇庆市腾胜真空技术工程有限公司 | Vacuum coating device with independent vacuum locks |
| CN203683655U (en) * | 2014-01-22 | 2014-07-02 | 南京汇金锦元光电材料有限公司 | Magnetron sputtering coating device |
| CN205635763U (en) * | 2016-03-28 | 2016-10-12 | 河北物华天宝镀膜科技有限公司 | Room is imported and exported to sectional type |
-
2016
- 2016-03-28 CN CN201610181951.2A patent/CN105714260A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203333755U (en) * | 2013-05-09 | 2013-12-11 | 肇庆市腾胜真空技术工程有限公司 | Vacuum coating device with independent vacuum locks |
| CN203683655U (en) * | 2014-01-22 | 2014-07-02 | 南京汇金锦元光电材料有限公司 | Magnetron sputtering coating device |
| CN205635763U (en) * | 2016-03-28 | 2016-10-12 | 河北物华天宝镀膜科技有限公司 | Room is imported and exported to sectional type |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108251815A (en) * | 2018-03-07 | 2018-07-06 | 河北物华天宝镀膜科技有限公司 | A kind of transmission pursuit piece-rate system |
| CN114182221A (en) * | 2021-11-02 | 2022-03-15 | 中国建材国际工程集团有限公司 | Flexible piece feeding system of coated glass production line |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20160629 |