CN108251815A - A kind of transmission pursuit piece-rate system - Google Patents
A kind of transmission pursuit piece-rate system Download PDFInfo
- Publication number
- CN108251815A CN108251815A CN201810187723.5A CN201810187723A CN108251815A CN 108251815 A CN108251815 A CN 108251815A CN 201810187723 A CN201810187723 A CN 201810187723A CN 108251815 A CN108251815 A CN 108251815A
- Authority
- CN
- China
- Prior art keywords
- roller
- transmission roller
- pursuit
- transmission
- piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
A kind of transmission pursuit piece-rate system of the present invention, including processing chamber and surge chamber, partition board is equipped between processing chamber and surge chamber, partition board is located at hanging above secondary transmission roller interlude, there is the side of secondary transmission roller in processing chamber, the opposite side of secondary transmission roller is located in surge chamber, in surge chamber primary transmission roller is equipped in the tail end of secondary transmission roller, the bottom end of primary transmission roller and secondary transmission roller is equipped with control motor, detection grating is equipped between the roller of primary transmission roller and secondary transmission roller, being solved in invention for task is to provide a kind of transmission pursuit piece-rate system, enable the cavity that coated glass rapidly enters, reduce the spacing between glass, achieve the purpose that in exit quick separating, present invention is mainly applied to vacuum magnetic-control sputtering processing industries.
Description
Technical field
The present invention relates to mechanical automation equipment technical fields, are a kind of transmission pursuit piece-rate systems more specifically.
Background technology
Coated glass is needed when entering magnetron sputtered vacuum cavity by inlet chamber, Transition Room, and surge chamber classification enters work
In skill cavity, to ensure that vacuum system is stablized in cavity.
Current coated glass must remain above the distance of 500mm in process of production, to prevent glass in exit
Have little time to detach, there is a situation where jump target.
Large-area flat-plate glass needs at the uniform velocity to be driven to ensure the uniformity of film forming, plated film under the cathode in coating process
Distance of the glass in vacuum cavity during continuous production between glass is the smaller the better, and glass spacing is small to reduce cathode to bottom plate dirt
It is also the necessary means for reducing cost while dye.
Invention content
In order to solve the above technical problem, the present invention provides a kind of transmission pursuit piece-rate systems, may be such that plate glass
It is realized in coating process and quickly pursues and timely enter plating membrane cavity, reducing glass spacing, while can realize quick separating
Effect.
Technical scheme is as follows：
A kind of transmission pursuit piece-rate system, be equipped with including processing chamber and surge chamber, between processing chamber and surge chamber every
Plate, partition board are located at the side for vacantly, having secondary transmission roller above secondary transmission roller interlude in processing chamber, secondary transmission roller
Opposite side is located in surge chamber, and primary transmission roller, primary transmission roller and two level are equipped in the tail end of secondary transmission roller in surge chamber
The bottom end of live-roller is equipped with control motor, and detection grating is equipped between the roller of primary transmission roller and secondary transmission roller.
Primary transmission roller and secondary transmission roller are equipped with synchronous belt.
Primary transmission roller and secondary transmission roller have several drive links, and drive link is hollow cylindrical structure.
PLC is equipped in processing chamber, detection grating is connect with PLC by wired or wireless mode, PLC by wired or
Wirelessly it is connect with control motor.
Synchronous belt surface is equipped with resistance band, and the resistance band is strip.
Control motor is variable-frequency motor.
Control motor passes through power axis connection with drive link.
The advantageous effect of system disclosed by the invention is：
Being solved in invention for task is to provide a kind of transmission pursuit piece-rate system, the chamber that coated glass is enable to rapidly enter
Body reduces the spacing between glass, achievees the purpose that present invention is mainly applied to vacuum magnetic-control sputterings in exit quick separating
Processing industry.
Description of the drawings
Fig. 1 pursues structure diagram for a kind of transmission pursuit piece-rate system level-one of the present invention；
Fig. 2 is a kind of transmission pursuit piece-rate system secondary inlet structure diagram of the present invention；
Fig. 3 completes structure diagram for a kind of transmission pursuit piece-rate system pursuit of the present invention；
Wherein：1st, processing chamber；2nd, secondary transmission roller；3rd, grating is detected；4th, surge chamber；5th, primary transmission roller；6th, it controls
Motor.
Specific embodiment
Technical scheme of the present invention is specifically addressed below, it should be pointed out that technical scheme of the present invention is unlimited
In the embodiment described in embodiment, those skilled in the art's reference and the content for using for reference technical solution of the present invention, in this hair
The improvement and design carried out on the basis of bright, should belong to the scope of protection of the present invention.
The transmission speed needs of processing chamber remain a constant speed, and cause on whole plate surface glass into film thickness to avoid the variation of speed
Degree it is uneven, processing chamber is remained a constant speed movement with the transmission speed of 5m/min.Before glass does not enter processing chamber, level-one
Live-roller is run at high speed with secondary transmission roller with the speed of 60m/min, and when glass front end enters processing chamber, level-one passes
Dynamic roller is synchronous with processing chamber with the speed of secondary transmission roller, is 5m/min.It realizes pursuit to accelerate, in glass and processing chamber
During separation, when faceplate has gone out processing chamber and glass rear end does not come out, primary transmission roller and the speed of secondary transmission roller are
Synchronous, it is 5m/min, after glass all comes out, primary transmission roller is transported at a high speed with secondary transmission roller with the speed of 60m/min
Turn, realize that glass quickly detaches, achieve the purpose that quick separating.
A kind of transmission pursuit piece-rate system, including processing chamber 1 and surge chamber 4, sets between processing chamber 1 and surge chamber 4
There is partition board, partition board is located at the side for vacantly, having secondary transmission roller 2 above 2 interlude of secondary transmission roller in processing chamber 1, two level
The opposite side of live-roller 2 is located in surge chamber 4, and primary transmission roller 5, level-one are equipped in the tail end of secondary transmission roller 2 in surge chamber 4
The bottom end of live-roller 5 and secondary transmission roller 2, which is equipped with, controls motor 6, is equipped between the roller of primary transmission roller 5 and secondary transmission roller 2
Detect grating 3.
PLC is equipped in processing chamber 1, detection grating 3 is connect with PLC by wired or wireless mode, and PLC passes through wired
Or it is wirelessly connect with control motor 6.
Primary transmission roller 5 and secondary transmission roller 2 are equipped with synchronous belt.
Primary transmission roller 5 and secondary transmission roller 2 have several drive links, and drive link is hollow cylindrical structure.
Synchronous belt surface is equipped with resistance band, and the resistance band is strip.
Control motor 6 is variable-frequency motor.
Control motor 6 passes through power axis connection with drive link.
Enable the cavity that coated glass rapidly enters, reduce distance between glass, reach in exit quick separating
Purpose.
Claims (7)
1. a kind of transmission pursuit piece-rate system, including processing chamber (1) and surge chamber (4), it is characterised in that：Processing chamber (1)
Partition board is equipped between surge chamber (4), partition board is located above secondary transmission roller (2) interlude vacantly, has two in processing chamber (1)
The side of grade live-roller (2), the opposite side of secondary transmission roller (2) is located in surge chamber (4), in secondary transmission in surge chamber (4)
The tail end of roller (2) is equipped with primary transmission roller (5), and the bottom end of primary transmission roller (5) and secondary transmission roller (2) is equipped with control motor
(6), detection grating (3) is equipped between the roller of primary transmission roller (5) and secondary transmission roller (2).
2. a kind of transmission pursuit piece-rate system according to claim 1, it is characterised in that：Primary transmission roller (5) and two level
Live-roller (2) is equipped with synchronous belt.
3. a kind of transmission pursuit piece-rate system according to claim 1, it is characterised in that：Primary transmission roller (5) and two level
Live-roller (2) has several drive links, and drive link is hollow cylindrical structure.
4. a kind of transmission pursuit piece-rate system according to claim 1, it is characterised in that：It is equipped in processing chamber (1)
PLC, detection grating (3) are connect with PLC by wired or wireless mode, and PLC passes through wired or wireless mode and control electricity
Machine (6) connects.
5. a kind of transmission pursuit piece-rate system according to claim 1, it is characterised in that：Synchronous belt surface is equipped with resistance
Band, the resistance band are strip.
6. a kind of transmission pursuit piece-rate system according to claim 1, it is characterised in that：It is variable-frequency electric to control motor (6)
Machine.
7. a kind of transmission pursuit piece-rate system according to claim 1, it is characterised in that：Control motor (6) and drive link
Pass through power axis connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810187723.5A CN108251815A (en) | 2018-03-07 | 2018-03-07 | A kind of transmission pursuit piece-rate system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810187723.5A CN108251815A (en) | 2018-03-07 | 2018-03-07 | A kind of transmission pursuit piece-rate system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108251815A true CN108251815A (en) | 2018-07-06 |
Family
ID=62745847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810187723.5A Pending CN108251815A (en) | 2018-03-07 | 2018-03-07 | A kind of transmission pursuit piece-rate system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108251815A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113215548A (en) * | 2021-03-26 | 2021-08-06 | 吴江南玻华东工程玻璃有限公司 | Automatic control system and execution method for transmission speed of building glass coating sputtering chamber |
-
2018
- 2018-03-07 CN CN201810187723.5A patent/CN108251815A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113215548A (en) * | 2021-03-26 | 2021-08-06 | 吴江南玻华东工程玻璃有限公司 | Automatic control system and execution method for transmission speed of building glass coating sputtering chamber |
| CN113215548B (en) * | 2021-03-26 | 2023-08-04 | 吴江南玻华东工程玻璃有限公司 | Automatic control system for transmission speed of building glass coating sputtering chamber and execution method |
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| PB01 | Publication | ||
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