CN103233879B - A kind of continous vacuum production line two-chamber switch room extract system - Google Patents
A kind of continous vacuum production line two-chamber switch room extract system Download PDFInfo
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- CN103233879B CN103233879B CN201310144347.9A CN201310144347A CN103233879B CN 103233879 B CN103233879 B CN 103233879B CN 201310144347 A CN201310144347 A CN 201310144347A CN 103233879 B CN103233879 B CN 103233879B
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- seal chamber
- air extractor
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- production line
- switch room
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Abstract
The invention provides a kind of continous vacuum production line two-chamber switch room extract system, it comprises workpiece entrance, the first seal chamber, the first air extractor, the second seal chamber and the second air extractor, described workpiece entrance is positioned at the side of described first seal chamber, described first air extractor is communicated with described first seal chamber, described second seal chamber is communicated with described second air extractor, be intervally distributed with multiple roller-way in described first seal chamber, described second seal chamber is mutually in series by multiple seal space being positioned at described roller-way interval location.Continous vacuum production line two-chamber switch room extract system of the present invention, which shorten the pumping cycle time, thus reduces the cost, and increases production capacity.
Description
Technical field
The present invention relates to technical field of vacuum equipment, particularly a kind of continous vacuum production line two-chamber switch room extract system.
Background technique
Current vacuum air pump adopts the mode of bleeding at vacuum suction pump cavity two ends mostly, namely arranges suction port at two ends, vacuum suction pump cavity left and right.This air suction mode extracts gas in machine intracoelomic cavity device cavity out cavity continually from the two ends of plated film machine cavity.
The structural representation of the two-chamber switch room extract system of prior art as shown in Figure 1, adopts the mode evenly arranging bleeding point in vacuum suction pump cavity front.When workpiece (such as glass) is sent to the position limit switch of a door 1, air extractor 2 can stop bleeding automatically, and in seal chamber 3, vacuum reduces, and air pressure rises, and a door 1 is opened, and workpiece can be transported to switch room; After a cavity sent to by workpiece, a door 1 is closed, and position limit switch can give air extractor 2 one signals, and the valve open of air extractor 2, starts to bleed, and degree of vacuum in seal chamber 3 is kept evenly, and this process probably needs the time of 120 seconds.As shown in Figure 1, in existing two-chamber switch room extract system, employing is evenly arranged between bleeding point and the roller-way in cavity 4 in cavity front mostly increases packing 5 to reduce the mode of cavity volume, does like this and degree of vacuum in cavity can be made to keep very average.Although this technology can reach the guarantee of quality of product, the pumping cycle time is still longer, and production capacity is low, and efficiency is also lower.Also bring the wasting of resources, the problem that cost of production is higher simultaneously.
Summary of the invention
For the above problem existed in prior art, the present invention proposes a kind of continous vacuum production line two-chamber switch room extract system, which shorten the pumping cycle time, thus reduces the cost, and increases production capacity.The technical solution adopted in the present invention is specifically achieved in that
The invention provides a kind of continous vacuum production line two-chamber switch room extract system, it comprises workpiece entrance, the first seal chamber, the first air extractor, the second seal chamber and the second air extractor, described workpiece entrance is positioned at the side of described first seal chamber, described first air extractor is communicated with described first seal chamber, described second seal chamber is communicated with described second air extractor, be intervally distributed with multiple roller-way in described first seal chamber, described second seal chamber is mutually in series by multiple seal space being positioned at described roller-way interval location.
In the specific embodiment of the invention, described first air extractor and described second air extractor are connected.
In the specific embodiment of the invention, before described workpiece entrance is opened, close the connection of described first seal chamber and described first air extractor, and the connection of the second seal chamber described in close synchronously and described first seal chamber.
In the specific embodiment of the invention, after workpiece loads from described workpiece entrance, close described workpiece entrance, open the connection of described first seal chamber and described first air extractor, and open the connection of the second seal chamber and described first seal chamber, described first air extractor and described second air extractor cooperating syringe.
Continous vacuum production line two-chamber switch room extract system of the present invention, which shorten the pumping cycle time, thus reduces the cost, and increases production capacity.
Accompanying drawing explanation
Fig. 1 is the structural representation of the two-chamber switch room extract system of prior art.
Fig. 2 is the structural representation of the continous vacuum production line two-chamber switch room extract system of the specific embodiment of the invention.
Embodiment
For enabling above-mentioned purpose of the present invention, feature and advantage become apparent more, are described in detail the specific embodiment of the present invention below in conjunction with accompanying drawing, make above-mentioned and other object of the present invention, Characteristics and advantages will be more clear.Reference character identical in whole accompanying drawing indicates identical part.Deliberately do not draw accompanying drawing in proportion, focus on purport of the present invention is shown.
Fig. 2 is the structural representation of the continous vacuum production line two-chamber switch room extract system of the specific embodiment of the invention, as shown in Figure 2, the continous vacuum production line two-chamber switch room extract system of the specific embodiment of the invention, it comprises workpiece entrance 10, first seal chamber 30, first air extractor 20, second seal chamber 50 and the second air extractor 60, workpiece entrance 10 is positioned at the side of the first seal chamber 30, first air extractor 20 is communicated with the first seal chamber 30, second seal chamber 50 is communicated with the second air extractor 60, multiple roller-way 40 is intervally distributed with in first seal chamber 30, second seal chamber 50 is mutually in series by multiple seal space being positioned at roller-way 40 interval location.
In the specific embodiment of the invention, the first air extractor 20 and the second air extractor 50 are connected; Before workpiece entrance 10 is opened, close the connection of the first seal chamber 30 and the first air extractor 20, and the connection of close synchronously second seal chamber 50 and the first seal chamber 30; After workpiece loads from workpiece entrance 10, close workpiece entrance 10, open the connection of the first seal chamber 30 and the first air extractor 20, and open the connection of the second seal chamber 50 and the first seal chamber 30, the first air extractor 20 and the second air extractor 60 cooperating syringe.
The continous vacuum production line two-chamber switch room extract system of the specific embodiment of the invention, relative to prior art, the packing reducing cavity air volume in original seal chamber between roller-way is replaced to the second seal chamber and series connection mutually, the second air extractor is connected again by conversion equipment, and continue to bleed, second air extractor is connected with the first air extractor simultaneously, in the present invention, between first seal chamber 30 and the second seal chamber 50, valve is set, being communicated with or closedown between the first seal chamber 30 with the second seal chamber 50 can be controlled, also be provided with valve between first seal chamber 30 and the first air extractor 20, control its connection therebetween or closedown, be provided with valve equally between second seal chamber 50 with the second air extractor 60, control its connection therebetween or closedown, continous vacuum production line two-chamber switch room extract system of the present invention, after workpiece loads from workpiece entrance 10, close workpiece entrance 10, open the connection of the first seal chamber 30 and the first air extractor 20, first air extractor 20 can start to bleed to the first seal chamber, simultaneously and open the connection of the second seal chamber 50 and the first seal chamber 30, because the second seal chamber 50 is bled by the second air extractor 60 continuously, in second seal chamber 50, there is higher degree of vacuum, therefore when opening the connection of the second seal chamber 50 and the first seal chamber 30, degree of vacuum in first seal chamber also can have higher degree of vacuum along with fast lifting, simultaneously, follow-uply to vacuumize due to the first air extractor 20 and the second air extractor 60 cooperating syringe, therefore the time vacuumized can greatly be shortened, the continous vacuum production line two-chamber switch room extract system of the specific embodiment of the invention compared with prior art, pumpdown time can shorten to over half can realize target working vacuum degree.
Continous vacuum production line two-chamber switch room extract system of the present invention, greatly improves the manufacturing efficiency of product, greatly saves energy waste, reduces cost of production and improves production capacity; Meanwhile, degree of vacuum in cavity can be made to keep very even, when workpiece is through cavity, the stability of technique can be strengthened, ensure and improve the quality of workpiece product; Which shorten the pumping cycle time, thus reduce the cost, increase production capacity.
Set forth a lot of detail in the above description so that fully understand the present invention.But above description is only preferred embodiment of the present invention, the present invention can be much different from alternate manner described here to implement, and therefore the present invention is not by the disclosed concrete restriction implemented above.Any those skilled in the art are not departing under technical solution of the present invention ambit simultaneously, the Method and Technology content of above-mentioned announcement all can be utilized to make many possible variations and modification to technical solution of the present invention, or be revised as the Equivalent embodiments of equivalent variations.Every content not departing from technical solution of the present invention, according to technical spirit of the present invention to any simple modification made for any of the above embodiments, equivalent variations and modification, all still belongs in the scope of technical solution of the present invention protection.
Claims (4)
1. a continous vacuum production line two-chamber switch room extract system, it is characterized in that, comprise workpiece entrance, the first seal chamber, the first air extractor, the second seal chamber and the second air extractor, described workpiece entrance is positioned at the side of described first seal chamber, described first air extractor is communicated with described first seal chamber, described second seal chamber is communicated with described second air extractor, be intervally distributed with multiple roller-way in described first seal chamber, described second seal chamber is mutually in series by multiple seal space being positioned at described roller-way interval location.
2. continous vacuum production line two-chamber switch room extract system according to claim 1, it is characterized in that, described first air extractor and described second air extractor are connected.
3. continous vacuum production line two-chamber switch room extract system according to claim 2, it is characterized in that, before described workpiece entrance is opened, close the connection of described first seal chamber and described first air extractor, and the connection of the second seal chamber described in close synchronously and described first seal chamber.
4. continous vacuum production line two-chamber switch room extract system according to claim 2, it is characterized in that, after workpiece loads from described workpiece entrance, close described workpiece entrance, open the connection of described first seal chamber and described first air extractor, and open the connection of the second seal chamber and described first seal chamber, described first air extractor and described second air extractor cooperating syringe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310144347.9A CN103233879B (en) | 2013-04-24 | 2013-04-24 | A kind of continous vacuum production line two-chamber switch room extract system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310144347.9A CN103233879B (en) | 2013-04-24 | 2013-04-24 | A kind of continous vacuum production line two-chamber switch room extract system |
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| CN103233879A CN103233879A (en) | 2013-08-07 |
| CN103233879B true CN103233879B (en) | 2015-12-30 |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104878364B (en) * | 2015-04-15 | 2017-11-21 | 沈阳拓荆科技有限公司 | The independent backfill of two-layer equation load chamber and air extraction structure |
| CN106222626A (en) * | 2016-09-06 | 2016-12-14 | 中山瑞科新能源有限公司 | A kind of high efficiency enter sheet and air extractor |
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| DE102005024180A1 (en) * | 2005-05-23 | 2006-11-30 | Von Ardenne Anlagentechnik Gmbh | Transfer chamber for a vacuum coating assembly, e.g. for coating glass panes by vacuum deposition, has horizontal transport rollers in a housing with a separate roller group in a pump chamber with vacuum pumps |
| CN201121206Y (en) * | 2007-11-05 | 2008-09-24 | 苏贵方 | High-efficiency energy-saving vacuum apparatus |
| CN101922437A (en) * | 2010-08-05 | 2010-12-22 | 友达光电股份有限公司 | Vacuum device |
| CN201695080U (en) * | 2009-08-13 | 2011-01-05 | 黄骅荣达玻璃有限公司 | Magnetic control sputtering coating machine |
| CN101985737A (en) * | 2010-12-07 | 2011-03-16 | 魏海波 | Vacuum magnetron sputtering coating production line system of continuous solar energy collector chip |
| CN202323009U (en) * | 2011-11-17 | 2012-07-11 | 肇庆市科润真空设备有限公司 | Low-vacuum assistant exhauster for glass coating machine |
| CN203214268U (en) * | 2013-04-24 | 2013-09-25 | 江苏宇天港玻新材料有限公司 | Dual-cavity switching chamber air extracting system of continuous vacuum production line |
-
2013
- 2013-04-24 CN CN201310144347.9A patent/CN103233879B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2340937Y (en) * | 1998-08-11 | 1999-09-29 | 张跃 | Central air sucker for group of pipes |
| DE102005024180A1 (en) * | 2005-05-23 | 2006-11-30 | Von Ardenne Anlagentechnik Gmbh | Transfer chamber for a vacuum coating assembly, e.g. for coating glass panes by vacuum deposition, has horizontal transport rollers in a housing with a separate roller group in a pump chamber with vacuum pumps |
| CN201121206Y (en) * | 2007-11-05 | 2008-09-24 | 苏贵方 | High-efficiency energy-saving vacuum apparatus |
| CN201695080U (en) * | 2009-08-13 | 2011-01-05 | 黄骅荣达玻璃有限公司 | Magnetic control sputtering coating machine |
| CN101922437A (en) * | 2010-08-05 | 2010-12-22 | 友达光电股份有限公司 | Vacuum device |
| CN101985737A (en) * | 2010-12-07 | 2011-03-16 | 魏海波 | Vacuum magnetron sputtering coating production line system of continuous solar energy collector chip |
| CN202323009U (en) * | 2011-11-17 | 2012-07-11 | 肇庆市科润真空设备有限公司 | Low-vacuum assistant exhauster for glass coating machine |
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| CN103233879A (en) | 2013-08-07 |
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