CN103233879A - Double-cavity conversion chamber air pumping system of continuous vacuum production line - Google Patents

Double-cavity conversion chamber air pumping system of continuous vacuum production line Download PDF

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Publication number
CN103233879A
CN103233879A CN2013101443479A CN201310144347A CN103233879A CN 103233879 A CN103233879 A CN 103233879A CN 2013101443479 A CN2013101443479 A CN 2013101443479A CN 201310144347 A CN201310144347 A CN 201310144347A CN 103233879 A CN103233879 A CN 103233879A
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seal chamber
air extractor
production line
chamber
air pumping
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CN2013101443479A
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CN103233879B (en
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王进东
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JIANGSU YUTIAN GANGBO NEW MATERIALS CO Ltd
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JIANGSU YUTIAN GANGBO NEW MATERIALS CO Ltd
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Abstract

The invention discloses a double-cavity conversion chamber air pumping system of a continuous vacuum production line. The double-cavity conversion chamber air pumping system of the continuous vacuum production line comprises a work piece inlet, a first seal cavity, a first air pumping device, a second seal cavity and a second air pumping device. The work piece inlet is arranged on one side of the first seal cavity, the first air pumping device is communicated with the first seal cavity, the second seal cavity is communicated with the second air pumping device, a plurality of roller tables are distributed in the first seal cavity at intervals, and the second seal cavity is formed by connecting in series a plurality of sealed spaces, which are disposed at the positions of roller table intervals. The double-cavity conversion chamber air pumping system of the continuous vacuum production line shortens the air pumping cycle time, thereby reducing the cost and increasing the capacity.

Description

A kind of continous vacuum production line two-chamber switch room extract system
Technical field
The present invention relates to the vacuum equipment technical field, particularly a kind of continous vacuum production line two-chamber switch room extract system.
Background technique
Present vacuum air pump adopts the mode of bleeding at vacuum suction pump cavity two ends mostly, namely at two ends, the vacuum suction pump cavity left and right sides suction port is set.This air suction mode is extracted gas in the machine intracoelomic cavity device cavity out cavity continually from the two ends of plated film machine cavity.
The structural representation of the two-chamber switch room extract system of prior art adopts the mode that bleeding point evenly is set in vacuum suction pump cavity front as shown in Figure 1.When workpiece (for example glass) when being sent to the position limit switch of a door 1, air extractor 2 can stop to bleed automatically, and vacuum reduce in the seal chamber 3, pressure rises, and No. one door 1 is opened, and workpiece can be transported to switch room; After workpiece was sent cavity to, No. one door 1 was closed, and position limit switch can be given 2 one signals of air extractor, and the valve open of air extractor 2 begins to bleed, and made that degree of vacuum keep evenly in the seal chamber 3, and this process probably needs 120 seconds time.As shown in Figure 1, in the existing two-chamber switch room extract system, adopt mostly in the cavity front mode that bleeding point and 4 increases of the roller-way in cavity packing 5 reduce cavity volume evenly is set, do to make the interior degree of vacuum of cavity keep very average like this.Though this technology can reach the assurance of quality of product, the cycle time of bleeding is still longer, and production capacity is low, and efficient is also lower.The wasting of resources, cost of production problem of higher have also been brought simultaneously.
Summary of the invention
At the above problem that exists in the prior art, the present invention proposes a kind of continous vacuum production line two-chamber switch room extract system, and it has shortened the cycle time of bleeding, thereby reduces the cost, and increases production capacity.The technical solution adopted in the present invention specifically is achieved in that
The invention provides a kind of continous vacuum production line two-chamber switch room extract system, it comprises workpiece entrance, first seal chamber, first air extractor, second seal chamber and second air extractor, described workpiece entrance is positioned at a side of described first seal chamber, described first air extractor is communicated with described first seal chamber, described second seal chamber is communicated with described second air extractor, be intervally distributed with a plurality of roller-ways in described first seal chamber, described second seal chamber is connected mutually by a plurality of seal spacies that are positioned at described roller-way interval location place and is constituted.
In the specific embodiment of the invention, described first air extractor and described second air extractor link.
In the specific embodiment of the invention, before described workpiece entrance is opened, close being connected of described first seal chamber and described first air extractor, and being connected of described second seal chamber of close synchronously and described first seal chamber.
In the specific embodiment of the invention, after workpiece is packed into from described workpiece entrance, close described workpiece entrance, open being connected of described first seal chamber and described first air extractor, and open being connected of second seal chamber and described first seal chamber, described first air extractor and described second air extractor operate jointly.
Continous vacuum production line two-chamber switch room extract system of the present invention, it has shortened the cycle time of bleeding, thereby reduces the cost, and increases production capacity.
Description of drawings
Fig. 1 is the structural representation of the two-chamber switch room extract system of prior art.
Fig. 2 is the structural representation of the continous vacuum production line two-chamber switch room extract system of the specific embodiment of the invention.
Embodiment
For above-mentioned purpose of the present invention, feature and advantage can be become apparent more, below in conjunction with accompanying drawing the specific embodiment of the present invention is described in detail, it will be more clear making above-mentioned and other purpose, feature and advantage of the present invention.Reference character identical in whole accompanying drawings is indicated identical part.Painstakingly do not draw accompanying drawing in proportion, focus on illustrating purport of the present invention.
Fig. 2 is the structural representation of the continous vacuum production line two-chamber switch room extract system of the specific embodiment of the invention, as shown in Figure 2, the continous vacuum production line two-chamber switch room extract system of the specific embodiment of the invention, it comprises workpiece entrance 10, first seal chamber 30, first air extractor 20, second seal chamber 50 and second air extractor 60, workpiece entrance 10 is positioned at a side of first seal chamber 30, first air extractor 20 is communicated with first seal chamber 30, second seal chamber 50 is communicated with second air extractor 60, being intervally distributed with a plurality of roller-way 40, the second seal chambers 50 in first seal chamber 30 is connected mutually by a plurality of seal spacies that are positioned at roller-way 40 interval location places and constitutes.
In the specific embodiment of the invention, first air extractor 20 and second air extractor 50 link; Before workpiece entrance 10 is opened, close being connected of first seal chamber 30 and first air extractor 20, and being connected of close synchronously second seal chamber 50 and first seal chamber 30; After workpiece is packed into from workpiece entrance 10, close workpiece entrance 10, open being connected of first seal chamber 30 and first air extractor 20, and open being connected of second seal chamber 50 and first seal chamber 30, first air extractor 20 and second air extractor 60 operate jointly.
The continous vacuum production line two-chamber switch room extract system of the specific embodiment of the invention, with respect to prior art, the packing that reduces the cavity air volume in original seal chamber between roller-way is replaced to second seal chamber and series connection mutually, connect second air extractor by conversion equipment again, and continue to bleed, second air extractor links with first air extractor simultaneously, among the present invention, between first seal chamber 30 and second seal chamber 50 valve is set, can controls being communicated with or closing between first seal chamber 30 and second seal chamber 50; Also be provided with valve between first seal chamber 30 and first air extractor 20, control the connection between its two or close; Be provided with valve equally between second seal chamber 50 and second air extractor 60, control the connection between its two or close; Continous vacuum production line two-chamber switch room extract system of the present invention, after workpiece is packed into from workpiece entrance 10, close workpiece entrance 10, open being connected of first seal chamber 30 and first air extractor 20, first air extractor 20 can begin first seal chamber is bled, simultaneously and open being connected of second seal chamber 50 and first seal chamber 30, because second seal chamber 50 is bled by second air extractor 60 continuously, has higher degree of vacuum in second seal chamber 50, therefore when opening being connected of second seal chamber 50 and first seal chamber 30, degree of vacuum in first seal chamber also can have higher degree of vacuum along with fast lifting, simultaneously, follow-up because first air extractor 20 and the 60 common runnings of second air extractor vacuumize, therefore the time that vacuumizes can be shortened greatly, the continous vacuum production line two-chamber switch room extract system of the specific embodiment of the invention compared with prior art, the time of bleeding can shorten to over halfly can realize target working vacuum degree.
Continous vacuum production line two-chamber switch room extract system of the present invention improves production efficiency of products greatly, saves energy waste greatly, reduces production costs and improves production capacity; Simultaneously, can make the interior degree of vacuum of cavity keep very evenly, when workpiece process cavity, can strengthen the stability of technology, guarantee and improved the quality of workpiece product; It has shortened the cycle time of bleeding, thereby reduces the cost, and increases production capacity.
In above description, a lot of details have been set forth so that fully understand the present invention.But above description only is preferred embodiment of the present invention, and the present invention can implement much to be different from alternate manner described here, so the present invention is not subjected to the restriction of top disclosed concrete enforcement.Any skilled personnel are not breaking away under the technical solution of the present invention scope situation simultaneously, all can utilize method and the technology contents of above-mentioned announcement that technical solution of the present invention is made many possible changes and modification, or be revised as the equivalent embodiment of equivalent variations.Every content that does not break away from technical solution of the present invention according to any simple modification, equivalent variations and the modification that technical spirit of the present invention is done above embodiment, all still belongs in the scope of technical solution of the present invention protection.

Claims (4)

1. continous vacuum production line two-chamber switch room extract system, it is characterized in that, comprise workpiece entrance, first seal chamber, first air extractor, second seal chamber and second air extractor, described workpiece entrance is positioned at a side of described first seal chamber, described first air extractor is communicated with described first seal chamber, described second seal chamber is communicated with described second air extractor, be intervally distributed with a plurality of roller-ways in described first seal chamber, described second seal chamber is connected mutually by a plurality of seal spacies that are positioned at described roller-way interval location place and is constituted.
2. continous vacuum production line two-chamber switch room extract system according to claim 1 is characterized in that described first air extractor and described second air extractor link.
3. continous vacuum production line two-chamber switch room extract system according to claim 2, it is characterized in that, before described workpiece entrance is opened, close being connected of described first seal chamber and described first air extractor, and being connected of described second seal chamber of close synchronously and described first seal chamber.
4. continous vacuum production line two-chamber switch room extract system according to claim 2, it is characterized in that, after workpiece is packed into from described workpiece entrance, close described workpiece entrance, open being connected of described first seal chamber and described first air extractor, and open being connected of second seal chamber and described first seal chamber, described first air extractor and described second air extractor operate jointly.
CN201310144347.9A 2013-04-24 2013-04-24 A kind of continous vacuum production line two-chamber switch room extract system Active CN103233879B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104878364A (en) * 2015-04-15 2015-09-02 沈阳拓荆科技有限公司 Independent backfill and extraction structure with double-layer load chamber
CN106222626A (en) * 2016-09-06 2016-12-14 中山瑞科新能源有限公司 A kind of high efficiency enter sheet and air extractor

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Publication number Priority date Publication date Assignee Title
CN2340937Y (en) * 1998-08-11 1999-09-29 张跃 Central air sucker for group of pipes
DE102005024180A1 (en) * 2005-05-23 2006-11-30 Von Ardenne Anlagentechnik Gmbh Transfer chamber for a vacuum coating assembly, e.g. for coating glass panes by vacuum deposition, has horizontal transport rollers in a housing with a separate roller group in a pump chamber with vacuum pumps
CN201121206Y (en) * 2007-11-05 2008-09-24 苏贵方 High-efficiency energy-saving vacuum apparatus
CN101922437A (en) * 2010-08-05 2010-12-22 友达光电股份有限公司 Vacuum device
CN201695080U (en) * 2009-08-13 2011-01-05 黄骅荣达玻璃有限公司 Magnetic control sputtering coating machine
CN101985737A (en) * 2010-12-07 2011-03-16 魏海波 Vacuum magnetron sputtering coating production line system of continuous solar energy collector chip
CN202323009U (en) * 2011-11-17 2012-07-11 肇庆市科润真空设备有限公司 Low-vacuum assistant exhauster for glass coating machine
CN203214268U (en) * 2013-04-24 2013-09-25 江苏宇天港玻新材料有限公司 Dual-cavity switching chamber air extracting system of continuous vacuum production line

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2340937Y (en) * 1998-08-11 1999-09-29 张跃 Central air sucker for group of pipes
DE102005024180A1 (en) * 2005-05-23 2006-11-30 Von Ardenne Anlagentechnik Gmbh Transfer chamber for a vacuum coating assembly, e.g. for coating glass panes by vacuum deposition, has horizontal transport rollers in a housing with a separate roller group in a pump chamber with vacuum pumps
CN201121206Y (en) * 2007-11-05 2008-09-24 苏贵方 High-efficiency energy-saving vacuum apparatus
CN201695080U (en) * 2009-08-13 2011-01-05 黄骅荣达玻璃有限公司 Magnetic control sputtering coating machine
CN101922437A (en) * 2010-08-05 2010-12-22 友达光电股份有限公司 Vacuum device
CN101985737A (en) * 2010-12-07 2011-03-16 魏海波 Vacuum magnetron sputtering coating production line system of continuous solar energy collector chip
CN202323009U (en) * 2011-11-17 2012-07-11 肇庆市科润真空设备有限公司 Low-vacuum assistant exhauster for glass coating machine
CN203214268U (en) * 2013-04-24 2013-09-25 江苏宇天港玻新材料有限公司 Dual-cavity switching chamber air extracting system of continuous vacuum production line

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104878364A (en) * 2015-04-15 2015-09-02 沈阳拓荆科技有限公司 Independent backfill and extraction structure with double-layer load chamber
CN104878364B (en) * 2015-04-15 2017-11-21 沈阳拓荆科技有限公司 The independent backfill of two-layer equation load chamber and air extraction structure
CN106222626A (en) * 2016-09-06 2016-12-14 中山瑞科新能源有限公司 A kind of high efficiency enter sheet and air extractor

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