CN107541712A - A kind of glass coating equipment of both-end disengaging - Google Patents
A kind of glass coating equipment of both-end disengaging Download PDFInfo
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- CN107541712A CN107541712A CN201710942947.8A CN201710942947A CN107541712A CN 107541712 A CN107541712 A CN 107541712A CN 201710942947 A CN201710942947 A CN 201710942947A CN 107541712 A CN107541712 A CN 107541712A
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- room
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- 239000011521 glass Substances 0.000 title claims abstract description 122
- 238000000576 coating method Methods 0.000 title claims abstract description 55
- 239000011248 coating agent Substances 0.000 title claims abstract description 54
- 230000007704 transition Effects 0.000 claims abstract description 60
- 230000007246 mechanism Effects 0.000 claims description 40
- 230000007723 transport mechanism Effects 0.000 claims description 20
- 230000003028 elevating effect Effects 0.000 claims description 18
- 230000005540 biological transmission Effects 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000005265 energy consumption Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000002459 sustained effect Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000686 essence Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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Abstract
The present invention relates to a kind of glass coating equipment of both-end disengaging, including it is sequentially connected and is equipped with advance slice room, preceding transition chamber, preceding surge chamber, coating chamber, rear surge chamber, rear transition chamber, the laggard slice room of roller conveyors structure；Vacuum lock is provided with the gateway of advance slice room, vacuum lock is provided between advance slice room and preceding transition chamber, vacuum lock is provided between preceding transition chamber and preceding surge chamber, vacuum lock is provided between surge chamber and rear transition chamber afterwards, vacuum lock is provided between transition chamber and laggard slice room afterwards, vacuum lock is provided with the gateway of laggard slice room；Preceding surge chamber, coating chamber, the rear surge chamber of connection form the vacuum chamber communicated；Multiple directional-rotation targets are provided with coating chamber, directional-rotation target is located at the top of glass, the magnet for being used for forming angle magnetic field is provided with directional-rotation target.The present invention can be coated with thicker film layer, belong to the technical field of coating film on glass.
Description
Technical field
The present invention relates to the technical field of coating film on glass, more particularly to a kind of glass coating equipment of both-end disengaging.
Background technology
When glass evacuated plated film needs to be coated with thicker film layer, as long as glass is walked about repeatedly repeatedly in coating chamber in theory
Can coats preferable film layer.But the thick film layer of comparison is coated with present, typically increase the length of coating chamber, and
Increase the quantity of magnetic control target, the thick film layer of comparison is coated with glass so as to realize.This can increase the volume of coating chamber, increase factory
Room area, increase the use cost of equipment, and plated film is inefficient.The magnetic control target utilization ratio of prior art is not high simultaneously, makes
Into the waste of magnetic control target.
The content of the invention
For technical problem present in prior art, the purpose of the present invention is：A kind of glass plating of both-end disengaging is provided
Film device, thicker film layer can be coated with.
In order to achieve the above object, the present invention adopts the following technical scheme that：
A kind of glass coating equipment of both-end disengaging, including be sequentially connected and be equipped with the advance slice of roller conveyors structure
Room, preceding transition chamber, preceding surge chamber, coating chamber, rear surge chamber, rear transition chamber, laggard slice room；At the gateway of advance slice room
Provided with vacuum lock, vacuum lock is provided between advance slice room and preceding transition chamber, vacuum is provided between preceding transition chamber and preceding surge chamber
Lock, is provided with vacuum lock, vacuum lock is provided between rear transition chamber and laggard slice room between rear surge chamber and rear transition chamber, rear disengaging
Vacuum lock is provided with the gateway of piece room；Preceding surge chamber, coating chamber, the rear surge chamber of connection form the vacuum chamber communicated；Plated film
Interior is provided with multiple directional-rotation targets, and directional-rotation target is located at the top of glass, is provided with directional-rotation target and is used to form angle
The magnet in magnetic field.
It is further：Multiple directional-rotation targets are successively set on coating chamber along the transmission path of glass, Mei Geding
Glass sensor is equipped with to rotary target.
It is further：Each directional-rotation target is put provided with one block of vertical magnet and two pieces of tilted magnets, vertical magnet
Put on the center of directional-rotation target bottom, two pieces of tilted magnets are arranged symmetrically in the both sides of vertical magnet.
It is further：Coating chamber is provided with two photoelectric sensors, and multiple directional-rotation targets are located at two photoelectric sensings
Between device.
It is further：The access port of advance slice room is provided with advance discharge rack, after the access port of laggard slice room is provided with
Pass in and out bin.
It is further：Conveying mechanism, the transfer passage of conveying mechanism are equipped with advance discharge rack and laggard discharge rack
It is in the Transfer pipe of roller conveyors structure on sustained height.
It is further：Filming equipment also includes transport mechanism under room, and one end of transport mechanism is located at preceding input and output material under room
At frame, the other end of transport mechanism is located at laggard discharge rack under room；Lifting is equipped with advance discharge rack and laggard discharge rack
Mechanism, when elevating mechanism minimizes place, elevating mechanism connects with transport mechanism under room, when elevating mechanism rises to highest point, rises
Descending mechanism connects with conveying mechanism.
It is further：It is advance slice room, preceding transition chamber, preceding surge chamber, coating chamber, rear surge chamber, rear transition chamber, laggard
Slice room, which is equipped with, vacuumizes unit；Advance slice room and laggard slice room are provided with Ion Cleaning device.
It is further：Heater is equipped with preceding transition chamber and rear transition chamber.
It is further：The length for being smaller than glass between two neighboring roller conveyors structure.
Generally speaking, the invention has the advantages that：
This glass coating equipment can make glass realize reciprocating motion in plated film area, and the different set of visual technological requirement is past
Again count, realization is coated with thicker film layer.When glass is not when on the position of directional-rotation target, directional-rotation target is transferred to low automatically
Energy consumption gear, avoid the waste of target and the energy.The setting of directional-rotation target internal magnet, forms angle magnetic field, defines and splash
The region penetrated, improve the utilization rate of directional-rotation target.The technology passed in and out using both-end can effectively improve the running efficiency of equipment.
Brief description of the drawings
Fig. 1 is the structural representation schematic diagram of this glass coating equipment.
Fig. 2 is the enlarged drawing at directional-rotation target.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention will be further described in detail.
It is now attached to what is occurred in Figure of description for the ease of uniformly checking each reference inside Figure of description
Icon note is unitedly described as follows：
1 is advance slice room, and 2 be preceding transition chamber, and 3 be preceding surge chamber, and 4 be coating chamber, and 5 be rear surge chamber, and 6 be rear transition
Room, 7 be laggard slice room, and 8 be advance discharge rack, and 9 be laggard discharge rack, and 10 be transport mechanism under room, and 11 be vacuum lock, and 12 are
Directional-rotation target, 13 be glass, and 14 be roller conveyors structure, and 15 be vertical magnet, and 16 be tilted magnets.
For sake of convenience, hereafter the direction up and down of described direction up and down with Fig. 1 in itself is consistent.
With reference to shown in Fig. 1 and Fig. 2, a kind of glass coating equipment of both-end disengaging, including be sequentially connected and be equipped with roller
Advance slice room, preceding transition chamber, preceding surge chamber, coating chamber, rear surge chamber, rear transition chamber, the laggard slice room of transport mechanism.I.e.
Advance slice room, preceding transition chamber, preceding surge chamber, coating chamber, rear surge chamber, rear transition chamber, laggard slice room are by from left to right successively
Set and be connected in turn；Advance slice room, preceding transition chamber, preceding surge chamber, coating chamber, rear surge chamber, rear transition chamber, after
Enter that slice room is vacuum chamber and the inside is equipped with roller conveyors structure.It is smaller than between two neighboring roller conveyors structure
The length of the length of glass, i.e. glass is more than the spacing of the roller conveyors structure in two neighboring vacuum chamber；For example, advance slice
The distance of indoor roller conveyors structure right-hand member to preceding transition chamber inner roller transport mechanism left end is far smaller than the length of glass, so
It can guarantee that continuous moving of the glass between two neighboring roller conveyors structure.(passed in and out at the gateway of advance slice room before i.e.
The left end of piece room) be provided with vacuum lock, be provided with vacuum lock between advance slice room and preceding transition chamber, preceding transition chamber and preceding surge chamber it
Between be provided with vacuum lock, vacuum lock is provided between rear surge chamber and rear transition chamber, is provided between rear transition chamber and laggard slice room true
Sky lock, the exit (right-hand member of i.e. laggard slice room) of laggard slice room is provided with vacuum lock.Connection preceding surge chamber, coating chamber,
Surge chamber forms the vacuum chamber communicated afterwards, i.e., is communicated between preceding surge chamber, coating chamber, rear surge chamber.It is provided with coating chamber
Multiple directional-rotation targets, directional-rotation target are located at the top of glass, the magnetic for being used for forming angle magnetic field are provided with directional-rotation target
Iron；With reference to shown in Fig. 2, there can be the magnetic line of force around magnet, angle magnetic field has magnetic field in some angle region, the folder
Angle magnetic field is in the lower section of directional-rotation target.Glass is placed on roller conveyors structure, then band of the glass in roller conveyors structure
Under dynamic, enter the entrance of slice room in the past, then move right, and come out from laggard slice room, glass can also be from laggard slice room
Into, then it is moved to the left, and enter slice room in the past and come out, i.e., glass can enter or go out from both-end.Directional-rotation target
During work, plasma can be produced, then can cause metal particle deposition on glass and form thin metal layer, so as to realize
The effect of plated film on glass, directional-rotation target belong to existing technology, i.e. directional-rotation target can be coated with glass
Film layer.
Multiple directional-rotation targets are successively set on coating chamber along the transmission path of glass, on each directional-rotation target
Provided with glass sensor.In the present invention, provided with six directional-rotation targets (only drawing four in Fig. 1), six directional-rotation targets from
Set gradually from left to right, and glass sensor is mounted on each directional-rotation target, when glass is moved to some directional-rotation
When below target, glass sensor senses signal, then finally causes the work of this directional-rotation target；And remaining directional-rotation target
On glass sensor when being not sensed by corresponding signal, then remaining directional-rotation target is in the gear of low energy consumption.For example, glass moves
When moving to the lower section of first directional-rotation target, first glass sensor senses signal, then causes first directional-rotation
Target is in running order, and glass is not moved to the lower section of second directional-rotation target, and second glass sensor does not sense
To signal, then second directional-rotation target is in low energy consumption state.So contribute to save the energy.Glass sensor revolves with orientation
Turn target signal connection.The control principle of glass sensor and directional-rotation target belongs to existing technology, and glass sensor is simply used
Whether there is glass in the lower section of sensing glass sensor, then feed back corresponding signal.
Each directional-rotation target is placed on directional-rotation provided with one block of vertical magnet and two pieces of tilted magnets, vertical magnet
On the center of target bottom, two pieces of tilted magnets are arranged symmetrically in the both sides of vertical magnet.The arrangement of three blocks of magnet can
To form the angle magnetic field of downward radiation, so as to guide metallic collision on glass.Three blocks of magnet cause directional-rotation target
Metallic out concentrates collision to improve the service efficiency of directional-rotation target on glass.
Coating chamber is provided with two photoelectric sensors, and multiple directional-rotation targets are between two photoelectric sensors.I.e.
One photoelectric sensor is located at the left side of leftmost directional-rotation target, and second photoelectric sensor is located at the orientation rotation of rightmost
Turn the right of target.The present invention also has control system, can control the rotation of roller conveyors structure.The principle of glass plated film back and forth
It is that, when glass moves right to second photoelectric sensor, second photoelectric sensor senses signal, then control system
So that roller conveyors structure reversely rotates, then glass is moved to the left, when glass is moved to the left first photoelectric sensor,
First photoelectric sensor senses signal, and then control system causes roller conveyors structure to reversely rotate once more, then glass
Glass moves right, so as to realize glass plated film back and forth.Control between photoelectric sensor, control system, roller conveyors structure is former
Reason belongs to prior art.It is not drawn into photoelectric sensor and glass sensor figure.
The access port (left end of advance slice room) of advance slice room is provided with advance discharge rack, the access port of laggard slice room
(right-hand member of laggard slice room) is provided with laggard discharge rack.Advance discharge rack and laggard discharge rack are easy to the interim storage of glass and defeated
Send.
Conveying mechanism, the transfer passage and roller conveyors of conveying mechanism are equipped with advance discharge rack and laggard discharge rack
The Transfer pipe of structure is on sustained height.If conveying mechanism is a conveyer belt, the transfer passage of conveying mechanism is exactly to pass
Send band；The Transfer pipe of roller conveyors structure is the Transfer pipe that all rollers are formed.The transfer passage and roller of conveying mechanism
When the Transfer pipe of transport mechanism is on sustained height, it is easy to the transmission of glass.Conveying mechanism and roller conveyors structure belong to
Very ripe prior art, do not deploy to be described in detail here.
Filming equipment also includes transport mechanism under room, and one end (left end) of transport mechanism is located at advance discharge rack under room,
The other end (right-hand member) of transport mechanism is located at laggard discharge rack under room；Lifting is equipped with advance discharge rack and laggard discharge rack
Mechanism, when elevating mechanism minimizes place, elevating mechanism connects with transport mechanism under room, when elevating mechanism rises to highest point, rises
Descending mechanism connects with conveying mechanism.Glass enters slice room and moved to after laggard slice room plated a film (from left to right) in the past,
If glass needs two-sided carry out plated film, glass is come out to up to laggard discharge rack, glass motion to rear input and output material from laggard slice room
Conveying mechanism at frame, then the elevating mechanism at laggard discharge rack rise to highest point, glass reaches elevating mechanism, then lifts
Mechanism minimizes place, and glass is moved to transport mechanism under room from elevating mechanism, and then glass moves to advance discharge rack to the left
Locate, the elevating mechanism at advance discharge rack minimizes place, and glass is then moved to elevating mechanism, and then elevating mechanism rises to highest
Place, glass reach the conveying mechanism at advance discharge rack, and then glass is arrived again at advance discharge rack, can will during this
Glass turning, so as to which glass the past disengaging bin after overturning enters advance slice room, plated film is carried out again.Certainly, glass from
Laggard slice room is moved to after advance slice room (being turned left from the right side) plated a film, can be by glass weight by transport mechanism under room
Newly send laggard slice room back to.Transport mechanism belongs to very ripe prior art under conveying mechanism, elevating mechanism, room, does not open up here
Open detailed description.It is not drawn into conveying mechanism, lift composition.
Advance slice room, preceding transition chamber, preceding surge chamber, coating chamber, rear surge chamber, rear transition chamber, laggard slice room are all provided with
Vacuumize unit；Advance slice room and laggard slice room are provided with Ion Cleaning device.Ion Cleaning device can clean glass
Impurity above glass.
Heater is equipped with preceding transition chamber and rear transition chamber.Heater can cause glass temperature to raise, so as to
So that the moisture heating on glass vapors away, the drying of glass is kept.It should be noted that：When certain block glass enters slice room in the past
Move to during the entire process of laggard slice room (from left to right) plated film, simply the heating devices heat glass of preceding transition chamber, glass
When glass has plated film and moved to rear transition chamber, the heater of rear transition chamber does not heat to the block glass.If on the contrary, certain
Block glass moves to advance slice room from laggard slice room and (turned left from the right side) during the entire process of plated film, simply after transition chamber plus
Thermal heats glass, and before glass has plated film and moved to during transition chamber, the heater of preceding transition chamber is not to the block glass
Heated.Heater be not each plated film be required for start, only it is in need vapor away on glass moisture when, just need
Start heater.
The use process of this glass coating equipment is described below, and with glass, entering slice room moves to laggard slice room in the past
(from left to right) coating process is row：
(1) glass is placed on roller conveyors structure, disengaging bin enters in advance slice room glass in the past, to preceding disengaging
Piece room carries out preliminary vacuumize process (i.e. the exhaust of black vacuum), opens the vacuum lock between advance slice room and preceding transition chamber,
Glass enters back into preceding transition chamber, into after preceding transition chamber, the vacuum lock between closing advance slice room and preceding transition chamber, to preceding mistake
Cross room and carry out further vacuumize process (i.e. the exhaust of high vacuum)；
(2) surge chamber before and then glass is sent into, glass are sent into after preceding surge chamber stops the time of setting, then by glass
Coating chamber, glass move back and forth in coating chamber, and the directional-rotation target in coating chamber carries out plated film to glass；
(3) after completing plated film, surge chamber after glass is sent into, glass is after rear surge chamber stops the time of setting, then incites somebody to action
Transition chamber after glass is sent into, then enters laggard slice room by rear transition chamber, is finally transported to rear input and output material from laggard slice room
Frame.
Glass by advance slice room and laggard slice room, preceding transition chamber and after transition chamber, preceding surge chamber and after buffer
Room, it is required to open or close corresponding vacuum lock.After glass enters preceding surge chamber, due to preceding transition chamber and preceding surge chamber it
Between vacuum lock be opened so that the vacuum environment of coating chamber is changed, thus glass need preceding surge chamber stop setting
Time, until coating chamber returns to the vacuum environment of suitable plated film.After the completion of coating film on glass, it is also desirable to stopped in rear surge chamber
The time of setting, after waiting the vacuum lock between rear surge chamber and rear transition chamber to open, glass enters back into rear transition chamber, rear transition chamber
Rear surge chamber and laggard slice room can be kept apart.
Above-described embodiment is the preferable embodiment of the present invention, but embodiments of the present invention are not by above-described embodiment
Limitation, other any Spirit Essences without departing from the present invention with made under principle change, modification, replacement, combine, simplification,
Equivalent substitute mode is should be, is included within protection scope of the present invention.
Claims (10)
- A kind of 1. glass coating equipment of both-end disengaging, it is characterised in that：Including being sequentially connected and being equipped with roller conveyors structure Advance slice room, preceding transition chamber, preceding surge chamber, coating chamber, rear surge chamber, rear transition chamber, laggard slice room；Advance slice room Gateway at be provided with vacuum lock, be provided with vacuum lock between advance slice room and preceding transition chamber, preceding transition chamber and preceding surge chamber it Between be provided with vacuum lock, vacuum lock is provided between rear surge chamber and rear transition chamber, is provided between rear transition chamber and laggard slice room true Sky is locked, and vacuum lock is provided with the gateway of laggard slice room；Preceding surge chamber, coating chamber, the rear surge chamber of connection form what is communicated Vacuum chamber；Multiple directional-rotation targets are provided with coating chamber, directional-rotation target is located at the top of glass, is provided with and uses in directional-rotation target In the magnet for forming angle magnetic field.
- 2. the glass coating equipment passed in and out according to a kind of both-end described in claim 1, it is characterised in that：Multiple directional-rotation targets It is successively set on along the transmission path of glass on coating chamber, glass sensor is equipped with each directional-rotation target.
- 3. the glass coating equipment passed in and out according to a kind of both-end described in claim 1, it is characterised in that：Each directional-rotation target It is placed on provided with one block of vertical magnet and two pieces of tilted magnets, vertical magnet on the center of directional-rotation target bottom, two Block tilted magnets are arranged symmetrically in the both sides of vertical magnet.
- 4. the glass coating equipment passed in and out according to a kind of both-end described in claim 1, it is characterised in that：Coating chamber is provided with two Individual photoelectric sensor, multiple directional-rotation targets are between two photoelectric sensors.
- 5. the glass coating equipment passed in and out according to a kind of both-end described in claim 1, it is characterised in that：Advance slice room goes out Enter end and be provided with advance discharge rack, the access port of laggard slice room is provided with laggard discharge rack.
- 6. the glass coating equipment passed in and out according to a kind of both-end described in claim 5, it is characterised in that：Advance discharge rack is with after Conveying mechanism is equipped with disengaging bin, the transfer passage of conveying mechanism is in same height with the Transfer pipe of roller conveyors structure On degree.
- 7. the glass coating equipment passed in and out according to a kind of both-end described in claim 6, it is characterised in that：Filming equipment also includes Transport mechanism under room, one end of transport mechanism is located at advance discharge rack under room, and the other end of transport mechanism is positioned at laggard under room At discharge rack；Elevating mechanism is equipped with advance discharge rack and laggard discharge rack, when elevating mechanism minimizes place, elevating mechanism Connect with transport mechanism under room, when elevating mechanism rises to highest point, elevating mechanism connects with conveying mechanism.
- 8. the glass coating equipment passed in and out according to a kind of both-end described in claim 1, it is characterised in that：It is advance slice room, preceding Transition chamber, preceding surge chamber, coating chamber, rear surge chamber, rear transition chamber, laggard slice room are equipped with and vacuumize unit；Advance slice Room and laggard slice room are provided with Ion Cleaning device.
- 9. the glass coating equipment passed in and out according to a kind of both-end described in claim 1, it is characterised in that：Preceding transition chamber and rear mistake Cross and heater is equipped with room.
- 10. the glass coating equipment passed in and out according to a kind of both-end described in claim 1, it is characterised in that：Two neighboring roller The length for being smaller than glass between transport mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710942947.8A CN107541712A (en) | 2017-10-11 | 2017-10-11 | A kind of glass coating equipment of both-end disengaging |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710942947.8A CN107541712A (en) | 2017-10-11 | 2017-10-11 | A kind of glass coating equipment of both-end disengaging |
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| Publication Number | Publication Date |
|---|---|
| CN107541712A true CN107541712A (en) | 2018-01-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710942947.8A Pending CN107541712A (en) | 2017-10-11 | 2017-10-11 | A kind of glass coating equipment of both-end disengaging |
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| Country | Link |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109722639A (en) * | 2019-01-30 | 2019-05-07 | 广东振华科技股份有限公司 | A kind of horizontal magnetic control film coating production line |
| CN111187007A (en) * | 2020-03-06 | 2020-05-22 | 东莞南玻工程玻璃有限公司 | Glass coating equipment with height limit detection protection |
| CN113998899A (en) * | 2021-11-03 | 2022-02-01 | 湖南旗滨节能玻璃有限公司 | Glass coating system and control method thereof |
| CN114481061A (en) * | 2021-12-26 | 2022-05-13 | 凯盛科技股份有限公司蚌埠华益分公司 | Glass continuous ITO (indium tin oxide) coating equipment and process |
| CN115627449A (en) * | 2022-11-02 | 2023-01-20 | 佛山市晶玻科技有限公司 | Curved glass coating process |
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| CN102549706A (en) * | 2009-10-02 | 2012-07-04 | 应用材料公司 | Method for coating a substrate and coater |
| CN105239051A (en) * | 2015-11-17 | 2016-01-13 | 广东腾胜真空技术工程有限公司 | Double-way in and out alternating film plating device and method |
| CN205188426U (en) * | 2015-11-17 | 2016-04-27 | 广东腾胜真空技术工程有限公司 | Two -way business turn over is coating film device in turn |
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|---|---|---|---|---|
| CN102549706A (en) * | 2009-10-02 | 2012-07-04 | 应用材料公司 | Method for coating a substrate and coater |
| JP2013506756A (en) * | 2009-10-02 | 2013-02-28 | アプライド マテリアルズ インコーポレイテッド | Method and coater for coating a substrate |
| CN104766779A (en) * | 2009-10-02 | 2015-07-08 | 应用材料公司 | Method for coating substrate and coater |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109722639A (en) * | 2019-01-30 | 2019-05-07 | 广东振华科技股份有限公司 | A kind of horizontal magnetic control film coating production line |
| CN111187007A (en) * | 2020-03-06 | 2020-05-22 | 东莞南玻工程玻璃有限公司 | Glass coating equipment with height limit detection protection |
| CN113998899A (en) * | 2021-11-03 | 2022-02-01 | 湖南旗滨节能玻璃有限公司 | Glass coating system and control method thereof |
| CN114481061A (en) * | 2021-12-26 | 2022-05-13 | 凯盛科技股份有限公司蚌埠华益分公司 | Glass continuous ITO (indium tin oxide) coating equipment and process |
| CN114481061B (en) * | 2021-12-26 | 2023-10-27 | 凯盛科技股份有限公司蚌埠华益分公司 | Glass continuous ITO coating equipment |
| CN115627449A (en) * | 2022-11-02 | 2023-01-20 | 佛山市晶玻科技有限公司 | Curved glass coating process |
| CN115627449B (en) * | 2022-11-02 | 2024-06-28 | 佛山市晶玻科技有限公司 | Curved glass coating process |
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