CN105543801A - Continuous coating production line used for mobile phone cover plate protection screens - Google Patents
Continuous coating production line used for mobile phone cover plate protection screens Download PDFInfo
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- CN105543801A CN105543801A CN201610072203.0A CN201610072203A CN105543801A CN 105543801 A CN105543801 A CN 105543801A CN 201610072203 A CN201610072203 A CN 201610072203A CN 105543801 A CN105543801 A CN 105543801A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Abstract
The invention discloses a continuous coating production line used for mobile phone cover plate protection screens. The continuous coating production line comprises a transmission assembly line and a coating assembly line, which are connected, wherein the transmission assembly line comprises a track, at least one transmission dolly and at least one chip loading device; the transmission dollies run on the track and are used for transmitting the chip loading devices; the coating assembly line comprises an inlet chamber, an inlet transition chamber, an inlet buffer chamber, a coating chamber, an outlet buffer chamber, an outlet transition chamber and an outlet chamber. Compared with the prior art, the continuous coating production line has the advantages that the transmission assembly line and the coating assembly line are connected end to end to form an annular assembly line, thus saving the floor area; chip transfer is intelligently controlled in the whole coating production line, thus saving manpower and material resources and improving the production efficiency; the chambers are changed or added according to the product requirements in the coating assembly line; the whole coating production line meets the requirements of various coating processes, has longer service life and has the effect of saving resources, so that the coating production line has a quite broad application prospect.
Description
This case is the patent No.: 201310690991.6, the applying date: on December 16th, 2013, patent name: a kind of divisional application of vertical vacuum sputter coating production line.
Technical field
The present invention relates to technical field of vacuum plating, specifically, relate to a kind of for hand-set lid protection screen continuous coating production line.
Background technology
Along with the fast development of modern science and technology, touch-screen has been the first-selection of many electronical display products.Capacitive touch screen then becomes the touch screen technology of global main flow, and the outermost cover-plate glass of capacitive touch screen is one of critical material of touch-screen.Cover-plate glass product is mainly ultra-thin glass, needs to be made through a series of special processing process such as sawing sheet, CNC, polishing, tempering, ultrasonic cleaning, vacuum plating, silk-screens in making processes.The features such as high strength, high rigidity and best bright finish will be possessed due to this glass, have withstand voltage, resistance toly to fall, the performance such as damage resistant and shock resistance, mobile phone, computer, the first-class industry field of numerals sum optical frames can be widely used in.Coating process is the key link of capacitive touch screen manufacture craft, and what directly decide subsequent technique carries out the final utilization performance with touch-screen smoothly, and therefore, coating technique is the key factor determining capacitive touch screen quality.
Vacuum coating technology was begun to show the thirties in 20th century, and four the fifties start to occur industrial application, and industrialization scale operation starts from the eighties in 20th century, obtains and apply widely in the industry such as electronics, aerospace, packaging, decoration, gold stamping printing.Vacuum coating technology is a kind of materials synthesis of novelty and the new technology of processing, is the important component part of field of surface engineering technique.Vacuum coating technology is the plated film utilizing physics, chemical means solid surface to be applied one deck property, thus make solid surface have wear-resistant, high temperature resistant, corrosion-resistant, anti-oxidant, radioprotective, conduction, magnetic conduction, insulation and the many high-performances being better than solid material itself of ornament lamp, reach the effect of the remarkable technical economic benefit of product life, save energy and acquisition of improving the quality of products, extend.What need plated film is called as substrate, and the material of plating is called as target.Electron beam evaporation is a kind of maturation and main film coating method in current vacuum plating optical technology, is also the main technique of Chinese most of optical material plated film, it solves coating materials and vapor deposition source material in resistance heating manner and directly contacts easily mixed mutually problem.Electron beam is a kind of stream of electrons of high speed, materials with high melting point can be evaporated, higher than general resistance heating evaporation thermo-efficiency, beam current density is large, velocity of evaporation is fast, the film purity made is high, quality good, thickness can control more exactly, can be widely used in various optical material film such as preparation high purity films and conductive glass etc.But the feature due to electron beam evaporation is the both sides or seldom can not covering target three-dimensional structure, usually only can be deposited on target surface, therefore gradually adopts magnetron sputtering plating now.It is reported, sputter coating has become topmost method in vacuum plating, and this technology utilizes lotus energy particle bombardment target surface in a vacuum, makes by the particle deposition that pounds on substrate.At present, magnetron sputtering optical coating is also a newer vocabulary at home.Magnetron sputtering optical coating system the earliest appears at North America (America & Canada) at the end of last century, and the blooming being coated with out is exactly AR film (antireflection film).Along with the progress of technology, the optical film of tens layers is coated with out by magnetron sputtering coater.The optical thin film preparation of current China most enterprises still based on electron beam evaporation, but also starts to gradually adopt sputtering technology, comprises ion beam sputtering and magnetron sputtering.
In magnetron sputtering membrane process, very high to the specification of quality of magnetic-controlled sputtering coating equipment, and in magnetic-controlled sputtering coating equipment, magnetic control sputtering cathode is particularly important.Generally adopt planar magnetic control sputtering cathode (rear abbreviation " planar cathode ") or rotary magnetron sputtering negative electrode (rear abbreviation " rotating cathode ") at present.Planar cathode because of its bombardment track and target are all shortcomings that this structure of being fixedly installed designs, target material deposition utilization ratio very low (being less than 20%); Especially in use for some time, target material surface can form " runway shape " and sputter pit, not only can destroy the homogeneity of coatings, has a strong impact on stability and the homogeneity of later stage plated film; And need often to change target, bring inconvenience greatly to continuous seepage and cause the resource that target can not make full use of.The rotating cathode then researched and developed compares above-mentioned planar cathode, improves target utilization, effectively reduces to beat arc and target surface and fall slag, and technology stability is better, can eliminate the multiple advantages such as the sedimentary province again that planar cathode more easily formed; Because technology is immature, there will be and leak, leak gas and the phenomenon of negative electrode short circuit, have a strong impact on the quality of plated film and the work-ing life of equipment.Especially: 1, the structure of rotating cathode is more complicated, and optional feature is many, and need drive system to coordinate, the investment of equipment will apparently higher than planar cathode; 2, due to moving-member, in production, vacuum-sealing there will be leakage, although adopt replacing sealing that is the simplest, minimum degree, comparing planar cathode still needs higher maintenance cost; 3, rotating cathode adds the labile factor in production line, brings certain impact to the stability of production line.The planar cathode be most widely used at present is rectangular plane magnetic control negative electrode, is the predominate architecture of magnetron sputtering plane class target.Its advantage is that the restriction that the material of target is subject to is few, generally can adopt direct-cooled structure to sheet metal, can adopt an air-cooled structure to other precious metal, unmanageable metal and hard brittle material (as silicon, graphite, ITO sinter target etc.).The sputtering area of this negative electrode is large, and integral manufacturing and maintenance cost are all lower.But the maximum inferior position of rectangle plane target is the low target utilization because the unique physical process of magnetron sputtering causes.The typical etch shape of its target surface is as depicted in figs. 1 and 2, wider above, below width shrink continuously, to last become a dark and thin groove.But the utilization ratio promoting planar cathode becomes of paramount importance research contents in planar cathode application and research and development.The splitter adopting and add high magnetic permeability in magnetic structure is had in existing planar cathode product, the Distribution of Magnetic Field of negative electrode is changed with this, improve the homogeneity of the parallel induction distribution of target material surface, namely improve the width of target etching, therefore improve the utilization ratio of target to a certain extent.But this cathode assembly is subject to the impact of dimensional precision own and high-intensity magnetic field magnetism, and especially when mounted, assembly precision is difficult to the requirement meeting design accuracy.Chinese patent CN201778106U discloses the rectangular plane magnetic control cathode structure in a kind of vacuum coating film equipment, and this cathode construction to some extent solves the problems referred to above, but its target utilization still can not reach qualitative leap.Chinese patent CN201770767U discloses a kind of cathode assembly of vacuum plating, and the technical problem that this patent mainly solves is a simplified the operation changing target, has saved the time changed needed for target, does not solve the low technical problem of target utilization.Chinese patent CN201981253U discloses a kind of rectangle plane magnetron sputtering cathode, for the shortcoming of sputter cathode being provided with anode frame, eliminates anode frame, simplifies the structure; In addition improve shielding case structure, avoid this problem of Shielding Case grounding; The improvement of this planar cathode still fails to improve the utilization ratio of target.
In vacuum coating production line, the needs of vacuum environment plated film, can keep the import and export of production line completely closed, usually adopt and are respectively arranged with the family of power and influence, and when substrate turnover production line, this family of power and influence can open accordingly.In the prior art, the switch of usual this family of power and influence of employing manual operation, namely, received the signal (or calculating the time that substrate runs at substrate transmission class waterline and plated film streamline) of substrate turnover by other equipment after, the family of power and influence of production line import or export is manually opened.But because very accurately can not receive the signal of substrate turnover, and the action of manual control has certain retardance, usually can not open the family of power and influence of import and outlet very timely, makes production efficiency reduce like this.In addition, vacuum coating production line is very high to the environmental requirement of vacuum, and the thickness of the door body of such vacuum chamber can increase, and correspondingly, the thickness of the family of power and influence of production line import and outlet increases, and the difficulty that manual operation controls increases.
Along with making rapid progress of coating technique in field of vacuum coating, also more and more higher to the requirement of coated product, therefore also there is increasing improvement in coating film production line, the requirement of production line improves thereupon, the resistance to overturning of the coating film production line of prior art and plated film homogeneity, production efficiency is low and corresponding equipment cost is high; And existing coating film production line mostly can only meet a kind of plated film of target, or whole production line is only suitable for the target of a type, the present market requirement can not be met, by danger on the verge of being replaced, therefore need badly and a kind ofly can adapt to multiple target and whole coating process coating film production line simple to operate.
Summary of the invention
For the problems referred to above that prior art exists, the object of this invention is to provide a kind of for hand-set lid protection screen continuous coating production line, this coating film production line adapts to multiple coating films processing requirement, be applicable to multiple target plated film, whole coating process, intelligent operation, reduces manual labor, enhances productivity; Production line compact construction is reasonable, and without the need to special process component, overall appearance, production on-site environment is friendly, pollution-free and energy-conserving and environment-protective.
For achieving the above object, the technical solution used in the present invention is as follows:
A kind of for hand-set lid protection screen continuous coating production line, comprising:
One transmission class waterline and a plated film streamline, plated film streamline is connected with transmission class waterline, transmission class waterline transmits substrate, plated film streamline comprises inlet plenum, import transition chamber thereof, import buffer chamber, plated film chamber, outlet buffer chamber, outlet transition chamber and outlet chamber, inlet plenum, import transition chamber thereof, import buffer chamber, plated film chamber, outlet buffer chamber, outlet transition chamber are connected with outlet chamber successively head and the tail, substrate enters plated film streamline by inlet plenum from transmission class waterline, is shifted out from plated film streamline by outlet chamber.
Preferably, in order to save floor occupying area and increase work efficiency, transmission class waterline and plated film streamline be arranged in parallel.
As a kind of preferred version, be provided with a moving cathode device in plated film chamber, the target bombardment track on-fixed of the cathode assembly of this movable type, so the magnetic field width of this negative electrode increases, increases target etch areas, improves target utilization.
Preferably, this moving cathode device comprises cathode assembly and translation assembly, and cathode assembly is fixedly connected with translation assembly and with the motion translation of translation assembly, wherein negative electrode is planar magnetic control sputtering cathode; Cathode assembly is connected by an insulating part with translation assembly.
More preferably, cathode assembly comprises target, target backboard, magnet and yoke, and target backboard surrounding is with insulating mat, and target is fixedly connected with target backboard, and magnet is fixed on yoke, and yoke connects insulating part; Enter electricity when target backboard sputters for negative electrode, the casing of the plated film chamber now in production line is anode, this insulating mat with in prior art for realizing target backboard and casing insulate, and in whole cathode assembly, only target backboard is charged.
More preferably, target backboard and magnet opposite face have a groove, and magnet is positioned at described groove but does not contact described target backboard.
More preferably, magnet with the translation in groove of translation assembly, thus realizes width increase in magnetic field in cathode assembly, increases target etch areas, improves target utilization, fix this defect with the bombardment track overcoming prior art midplane negative electrode; And by by the translation in the groove that target backboard has of magnet battle array, the target-substrate distance in original planar cathode and target surface magneticstrength can be maintained, and make this cathode assembly space structure compact, the thickness of whole cathode assembly can with do not improve front close, without the need to adjusting plated film chamber and even whole production line because of cathode assembly of the present invention; In addition, in this cathode assembly, target is still fixing, thus can avoid moving due to target the uncertain factor brought and causing the instability of production line.
As further preferred version, translation assembly is followed successively by moving member, slide rail part, fabricated section and strut member from outside to inside, wherein moving member is connected with the slide block in insulating part and slide rail part respectively, and fabricated section is connected with the slide rail in slide rail part, and fabricated section is connected with strut member; Now moving member in slide rail part during slide block translation by translation in the lump thereupon, so translation insulating part, translation cathode assembly then, thus realize the translation of cathode assembly, the especially translation of magnet.
As the further preferred version of another kind, translation assembly is followed successively by moving member, ball-screw part, fabricated section and strut member from outside to inside, wherein moving member is connected with the nut in insulating part and ball-screw part respectively, fabricated section is connected with the mounting block in ball-screw part, and fabricated section is connected with strut member; Now moving member in ball-screw part nut with during the translation of screw rod rotary drive by translation in the lump thereupon, so translation insulating part, translation cathode assembly then, thus realize the translation of cathode assembly, the especially translation of magnet.
As another kind of preferred version, more stable and firm in order to realize this cathode assembly structure, especially translation modular support Li Gengjia, and the translation of cathode assembly is more stable, wherein translation assembly comprises a moving member, a slide rail part, a ball-screw part, fabricated section and strut member; With said structure unlike, slide rail part comprises a slide block and a slide rail, and slide block coordinates with slide rail, and slide block slides on slide rail; Ball-screw part comprises a nut, a screw rod and a mount pad, and screw rod is arranged on mount pad, screw rod and nut screw connection, and during bolt rotary, nut can move along screw rod; Slide block on moving member in difference connecting sliding rail part and the nut of ball-screw part, the slide rail in fabricated section difference connecting sliding rail part and the mount pad of ball-screw part; Now moving member translation under the common effect of slide rail part and ball-screw part, wherein ball-screw part is as the main driving of moving member translation, slide rail part as moving member translation from driving and become load bearing support.
Preferably, in order to realize the automatization campaign of translation assembly, ball-screw part is electrically connected a motor, and by the nut translation in motor driven ball screws part, the slide block then in transmission slide rail part, to realize the translation of cathode assembly.
More preferably, motor is a servomotor, by a toothed belt transmission ball-screw part.
More preferably, translation assembly at least comprises two slide rail parts and is distributed in the both sides of ball-screw part, with better load-bearing cathode assembly, makes this cathode assembly translation more stable and uniform.
More preferably, translation assembly also comprises a photoelectric sensor, is divided into the both sides of the screw rod of ball-screw part, automatically comes and goes translation to realize nut on screw rod; Realized by the turning direction controlling screw rod after induction nut location signal especially by by photoelectric sensor.
Preferably, the magnet in cathode assembly can select various magnet battle array of the prior art, or multiple magnet arrangement forms, or customizes shaping magnet and form.
As another kind of preferred version, easily be installed in this production line for realizing this cathode assembly, and the negative electrode needed for can configuring according to production line demand, this cathode assembly also comprises a connection piece, this web member is flexibly connected with the casing of the plated film chamber in vacuum coating production line, and translation assembly connects this web member.
Preferably, described flexible connection is hinged, specifically realizes by a hinge.
Preferably, when this cathode assembly is multiple, this web member is same a connection piece, and now, multiple cathode assembly is connected on this web member altogether.
More preferably, web member is a back up pad.
Preferably, the insulating material that insulating part and insulating mat adopt is selected from as tetrafluoroethylene, synthetic glass or nylon.
As a kind of preferred version, present invention also offers a kind of transmission rig for being transported substrate in plated film streamline by magnetic coupling, to overcome in prior art because cause each cavity seal inefficacy of plated film streamline and the unbalance stress of mechanical contact transmission cause the defects such as transmission retardance, this transmission rig is arranged at each chamber of plated film streamline, and substrate is transported by transmission rig in each chamber of plated film streamline; In this transmission rig and the present invention, corresponding substrate loading device is set above this transmission rig.
Preferably, transmission rig comprises a driving component, a driven subassembly and a magnetic coupler, and driving component and driven subassembly are separately positioned on the both sides of magnetic coupler, driving component by electric drive, by magnetic coupler by the Movement transmit of driving component to driven subassembly.
More preferably, driven subassembly is positioned at each chamber of plated film streamline, and driving component is positioned at outside each chamber, and magnetic coupler runs through the casing being sealed in each chamber.
Preferably, driving component comprises a main drive shaft, and driven subassembly comprises a driven shaft and a power wheel, and driven shaft drives power wheel to rotate, and main drive shaft and driven shaft are arranged on the both sides of magnetic coupler, and magnetic coupler connects main drive shaft and driven shaft.
Preferably, driving component comprises a belt wheel and a belt further, and belt wheel is arranged on main drive shaft, and belt connects the motor in plated film streamline and the belt wheel on main drive shaft, and main drive shaft drives by motor in plated film streamline.
More preferably, main drive shaft comprises a main drive shaft first end, a main drive shaft the second end and initiatively axis body, and extend to form initiatively axis body from main drive shaft first end to main drive shaft the second end, main drive shaft the second end is connected with magnetic coupling.
Preferably, belt wheel is arranged on main drive shaft first end and is connected by key.
More preferably, driving component comprises at least one initiatively axle key further, and initiatively axle key is arranged between belt wheel and main drive shaft first end.
More preferably, main drive shaft first end is provided with at least one main drive shaft keyway, the width of main drive shaft keyway is consistent with the width of active axle key, belt wheel comprises further a belt wheel inner hole and at least one band wheel key way, the internal diameter of belt wheel inner hole is consistent with the diameter of main drive shaft first end, band wheel key way carries on wheel endoporus and removes material formation, and the width of band wheel key way is consistent with the width of active axle key.
More preferably, when belt wheel is arranged on main drive shaft first end, main drive shaft keyway is communicated with band wheel key way, and initiatively axle key is placed between main drive shaft keyway and band wheel key way, and the degree of depth of main drive shaft keyway and band wheel key way is not less than the thickness of initiatively axle key.
More preferably, the quantity of main drive shaft keyway is consistent with the quantity of active axle key.
Preferably, driven shaft comprises a driven shaft first end, a driven shaft the second end and a driven axis body further, and driven shaft first end extends to form driven axis body to driven shaft the second end, and driven shaft first end is connected with magnetic coupling.
Preferably, power wheel is arranged on driven shaft, and power wheel is connected by key with driven shaft.
More preferably, driven subassembly comprises at least one driven shaft key further, and driven shaft key is arranged between driven shaft and power wheel.
More preferably, driven shaft comprises at least one driven shaft keyway further, and driven shaft keyway is removed material since moving axis the second end and formed, and the width of driven shaft keyway is consistent with the width of driven shaft key.
More preferably, power wheel comprises a power wheel endoporus and at least one power wheel keyway further, power wheel keyway is removed material and is formed on power wheel endoporus, and the diameter of power wheel endoporus is consistent with the diameter of driven shaft the second end, and the width of power wheel keyway is consistent with the width of power wheel key.
More preferably, when power wheel is arranged on driven shaft the second end, driven shaft keyway on driven shaft is communicated with power wheel keyway, and driven shaft key is placed between driven shaft keyway and power wheel keyway, and the degree of depth of driven shaft keyway and power wheel keyway is not less than the thickness of driven shaft key.
Preferably, driven subassembly comprises a power wheel permanent seat further, and power wheel permanent seat is arranged on driven shaft, and power wheel and power wheel permanent seat are bolted, and prevent power wheel from coming off from driven shaft.
Preferably, vacuum coating production line transmission rig comprises a tongued and grooved flanges further, and tongued and grooved flanges is arranged on magnetic coupling, and tongued and grooved flanges comprises a seal washer and a gasket groove further, and seal washer is placed in gasket groove.Magnetic coupling is arranged in vacuum plating line by tongued and grooved flanges, prevents magnetic coupling from coming off.
Preferably, this main drive shaft and driven shaft adopt magneticsubstance to make.
As a kind of preferred version; in order to further improve practicality and the universality of this production line; present invention also offers a kind of for this door body structure for hand-set lid protection screen continuous coating production line; this door body structure is configured at each function chamber; comprise room door and doorframe; the both sides of room door are all flexibly connected with doorframe, the door body structure size of each function chamber configuration and to configure the mode of each function chamber all consistent.
Preferably, this door body structure comprises further organizes seal assembly more, and more both sides and the doorframe of room door pass through to organize seal assembly and be detachably flexibly connected with doorframe, are preferably spirally connected.
More preferably, the seal assembly position of room door both sides is corresponding.
More preferably, seal assembly comprises hinged component and tight latch fitting, hinged component junction chamber door and doorframe, and room door is through hinged component folding, and tight latch fitting is arranged on doorframe.
More preferably, hinged component comprises the first hinged component, the second hinged component and secondary hinge part, and wherein the first hinged component is connected with room door, and the second hinged component is connected with doorframe, and secondary hinge part connects the first hinged component and the second hinged component respectively; First hinged component comprises the first hinge seat and the first hinge axis, second hinged component comprises the second hinge seat and the second hinge axis, first hinge seat and secondary hinge part are with the first hinge axis, second hinge seat and secondary hinge part are with the second hinge axis, and be provided with bearing between the second hinge seat and secondary hinge seat, be preferably surface bearing.
More preferably, in order to make hinged component structure more compact and reasonable, the first hinge seat is removed material according to secondary hinge part shape and is become the first groove, and secondary hinge part embeds in the first groove and the first hinge seat coaxial rotation; Correspondingly, the second hinge seat is removed material according to secondary hinge part shape and is become the second groove, and secondary hinge part embeds in the second groove and the second hinge seat coaxial rotation; First groove is contrary with the second slot opening direction.
More preferably, the first hinge seat and the second hinge seat contour isometric, the second hinge seat and the first hinge seat not wide, in other words, the second hinge seat is thicker than the first hinge seat; When this thickness difference can realize becoming vacuum state in vacuum coating production line chamber, avoiding external atmosphere pressure room door to be provided with the side of hinged component cannot be evenly airtight, and make the process that closes of whole room door stressed more average, room door sealing performance is good.
More preferably, the first groove is arranged on the stage casing of the first hinge seat, and similarly, the second groove is arranged on the stage casing of the second hinge seat.
More preferably, in order to make the process that closes of whole room door stressed more average, fixed by a bolt between the first hinge seat and secondary hinge part, and this bolt is connected with room door, by this bolt adjustment secondary hinge part, secondary hinge part is not swung in rotation process, and in rotation process, confinement cells door along with the gap wobble of secondary hinge part and the first hinge seat, but makes room door rotate along with secondary hinge part, and this bolt is preferably countersunk screw.
Preferably, tight latch fitting comprises permanent seat, retaining element and thrust screw, and permanent seat is bolted on the doorframe of each function chamber of coating film production line, and retaining element is movably arranged on permanent seat by thrust screw.
More preferably, be flexibly connected between thrust screw with retaining element, retaining element is rotatable when thrust screw is arranged on doorframe.
As another kind of preferred version, present invention also offers a kind of for this pipeline coupling assembly for hand-set lid protection screen continuous coating production line, molecular pump or other pipeline separation automations when this production line is detected and easy to operate, this pipeline coupling assembly comprises male part and lower male part, upper and lower male part is flexibly connected and seals, and upper and lower male part is fixedly connected with same pipeline respectively; During upper and lower male part coupling sealing, pipeline communication; When upper and lower male part is separated, pipeline disconnects.
Preferably, upper male part comprises mounting flange and upper pipeline connection, wherein goes up mounting flange and upper pipeline connection is fixedly connected, and junction sealing.
Preferably, lower male part comprises coupling flange, corrugated tube, lower mounting flange and lower pipeline connection, and the flange that is wherein coupled, corrugated tube, lower mounting flange are connected successively with lower pipeline connection and communicate, and each junction all seals.
More preferably, corrugated tube is fixed by briquetting with the flange that is coupled.
More preferably, junction is through welded seal.
More preferably, upper and lower male part through upper mounting flange and the flange coupling that is coupled seal realize both be coupled and seal.
More preferably, lower mounting flange is connected with a moving assembly, and mounting flange makes lower male part move under moving assembly effect underdrive; Wherein moving assembly can adopt the various ways such as rotating shaft of the prior art or metal arm, does not repeat at this.
More preferably, in order to realize automatic coupling or the separation of this pipeline coupling assembly, pipeline coupling assembly comprises at least one cylinder further, and cylinder is arranged between coupling flange and lower mounting flange, make moving up and down of coupling flange, with realize being coupled flange and upper mounting flange deciliter.
More preferably, cylinder is two, is divided into the both sides of corrugated tube.
More preferably, cylinder is thin cylinder.
More preferably, corrugated tube is compressible metallic bellows.
More preferably, cylinder comprises a tracheae web member, and cylinder is by tracheae web member and the Flange joint that is coupled.
More preferably, the flange opening part that is coupled is provided with filter screen, to prevent from falling into foreign matters from being blocked pipeline in lower male part.
More preferably, each junction is equipped with seal washer.
As another kind of preferred version; the invention provides a kind of for hand-set lid protection screen continuous coating production line can with the adjustable loading device of sizes of substrate load demand; with cost-saving; production line provided by the invention is made to be applicable to the substrate of all size; this loading device comprises a fixation kit and an adjusting part; adjusting part is arranged on fixation kit, by the substrate regulating the position of adjusting part to install different size.Correspondingly, when this loading device transports substrate on plated film streamline, transport through above-mentioned transmission rig, as one preferably embodiment, this loading device is positioned on the driven subassembly of this transmission rig, by the follow-up pulley transmission of driven subassembly; When this loading device transports substrate on transmission class waterline, will in conveyer with the use of, specific as followsly to state.
Preferably, fixation kit comprises the first support bar, the second support bar, the first baffle plate and second baffle, first support bar, the first baffle plate, the second support bar and second baffle are connected to form a quadra between two, and the first support bar and the second support bar are respectively equipped with at least two guide groove regions; Adjusting part is arranged on fixation kit, and adjusting part comprises at least two and regulates beam and at least one group of positioning element, and dismountable being arranged on of positioning element regulates on beam, regulates beam to be arranged on the guide groove region of the first support bar and the second support bar.
Preferably, guide groove region comprises a guide groove and a settlement further, and guide groove is arranged in settlement, and guide groove is vertical direction.
Preferably, the length of settlement is not less than the length of guide groove, and the width of settlement is not less than the width of guide groove.
Preferably, guide groove region comprises the first guide groove region and the second guide groove region, and the area in the first guide groove region is greater than the second guide groove region.
More preferably, first guide groove region is arranged on the both ends of the first support bar and the second support bar, second guide groove region is arranged on the first support bar and the second support bar middle part, first guide groove region comprises one first guide groove and the first settlement further, first guide groove is that vertical direction is arranged in described first settlement, the length of the first settlement is not less than the length of described first guide groove, and the width of the first settlement is not less than the width of the first guide groove; Second guide groove region comprises one second guide groove and one second settlement further, second guide groove is that vertical direction is arranged in the second settlement, the length of the second settlement is not less than the length of the second guide groove, the width of the second settlement is not less than the width of the second guide groove, the area of the first settlement is greater than the second settlement, and the length of the first guide groove is longer than the second guide groove.
Preferably, first support bar of fixation kit and the second support bar are respectively equipped with resettlement area, center further, region, central guiding position is arranged in the middle of the first support bar and the second support bar, region, central guiding position comprises a center placement hole and a settlement, center further, center placement hole is arranged on the center of settlement, center, settlement, center is removed material and is formed on the first support bar and the second support bar, and the degree of depth of settlement, center is consistent with settlement.
Preferably, beam is regulated to be arranged on guide groove region and/or the resettlement area, center of the first support bar and the second support bar, beam is regulated to comprise a first end, a second end and a crossbeam, the two ends of crossbeam connect first end and the second end, the thickness of first end and the second end is less than the consistency of thickness of the thickness of crossbeam, first end and the second end.
More preferably, first end is consistent with the thickness of the second end and the degree of depth of settlement, reduces the cross-sectional area of whole device like this, facilitates device to enter vacuum plating chamber.
More preferably, first end is provided with adjustment hole, the diameter of adjustment hole is consistent with the width of guide groove.
More preferably, the second end is provided with regulating tank, and the length of regulating tank is greater than the diameter of adjustment hole, and the width of regulating tank is consistent with the width of guide groove, prevent from like this regulating beam to occur thermal distortion phenomenon in vacuum plating chamber, cause substrate on loading device firmly not install.
Preferably, beam is regulated to comprise one first groove, one second groove and a spacer further, first groove and the second groove divide the both sides being listed in spacer, and the first groove and the second groove are removed material and formed, and the first groove is consistent with the degree of depth of the second groove and the degree of depth of settlement.
Preferably, positioning element comprises one first setting element and one second setting element, and the first setting element removes and installs and regulates on beam one, and the second setting element is detachably arranged on another and regulates on beam, and the installation site of the first setting element is higher than the second setting element.
More preferably, the first setting element and the second setting element are arranged on by screw and regulate on beam.
More preferably, the first setting element is an elastic element; Second setting element is a draw-in groove.
More preferably, one group of positioning element is detachably arranged on and regulates Liang Shangshi, and the first setting element is arranged on the second groove of an adjustment beam, and the second setting element is arranged on another first groove regulating beam; In other words, an adjustment beam can install the first setting element and the second setting element simultaneously, and the first setting element is arranged on the second groove, and the second setting element is arranged on the first groove; On same adjustment beam, the second setting element installation site is higher than the first setting element, but when one group of positioning element, the installation site of the first setting element is higher than the second setting element.
Preferably, second baffle is provided with shifting axle, shifting axle is flexibly connected with second baffle.
More preferably, the length of shifting axle is not less than the length of second baffle.
More preferably, the length of shifting axle and the length of second baffle consistent.
As a kind of preferred version, in order to overcome the design defect of the import and export family of power and influence of production line in prior art, present invention also offers the rotation family of power and influence that a kind of processing property is better, this plated film streamline comprises at least two and rotates the family of power and influence, rotating the family of power and influence is arranged on the chamber wall that inlet plenum and outlet chamber contact with transmission class waterline, rotate the family of power and influence and comprise family of power and influence's assembly and family of power and influence's driven unit, family of power and influence's driven unit is connected with family of power and influence's assembly one end, is rotated by family of power and influence's driven unit driving gate valve module.
More preferably, for making the rotation of family of power and influence's assembly more steady, rotate the family of power and influence and comprise another family of power and influence's driven unit further, two family of power and influence's driven units are connected with the two ends of family of power and influence's assembly respectively, and the synchronous driving gate valve module of two family of power and influence's driven units rotates.
More preferably, family of power and influence's assembly comprises a family of power and influence, a turning axle and at least one family of power and influence's web member, and family of power and influence's web member connects the family of power and influence and turning axle; Family of power and influence's driven unit comprises a cylinder and a driving mechanism, driving mechanism connects cylinder and turning axle, driving mechanism comprises one first drive shaft, one second drive shaft and a propeller shaft sleeve further, first drive shaft is connected with cylinder, second drive shaft is connected with turning axle, and the first drive shaft and the second drive shaft are arranged in propeller shaft sleeve.
More preferably, cylinder comprises a tooth bar and a gear, and rack drives gear rotates, and gear is connected with the first drive shaft; The angle that cylinder middle rack driven gear rotates is 0 ~ 180 degree, and the angle of gear driven first drive shaft is 0 ~ 180 degree.
More preferably, the angle that cylinder middle rack driven gear rotates is 0 ~ 180 degree, and the angle of gear driven first drive shaft is 0 ~ 95 degree.
Preferably, the first drive shaft and the second drive shaft are flexibly connected with propeller shaft sleeve.
More preferably, the first drive shaft is connected by key with propeller shaft sleeve with the second drive shaft, and the first drive shaft drives the second drive shaft to rotate by propeller shaft sleeve.
More preferably, propeller shaft sleeve comprises a propeller shaft sleeve endoporus, two propeller shaft sleeve keyways and two propeller shaft sleeve keys further, propeller shaft sleeve endoporus is communicated with two propeller shaft sleeve keyways, two propeller shaft sleeve keyways are arranged on the both ends of propeller shaft sleeve, the width of propeller shaft sleeve keyway is consistent with propeller shaft sleeve key, and propeller shaft sleeve key is arranged in propeller shaft sleeve.
Preferably, first drive shaft comprises one first drive shaft first end further, one first drive shaft the second end and first drives axis body, first drives axis body to connect the first drive shaft first end and the first drive shaft the second end, first drive shaft first end is connected with cylinder, and the first drive shaft the second end is inserted in propeller shaft sleeve.
More preferably, the first drive shaft the second end is provided with the first drive shaft keyways, and the width of the first drive shaft keyways is consistent with propeller shaft sleeve key.
Preferably, second drive shaft comprises one second drive shaft first end further, one second drive shaft the second end and second drives axis body, second drives axis body to connect the second drive shaft first end and the second drive shaft the second end, second drive shaft first end is inserted in propeller shaft sleeve, and the second drive shaft the second end is connected with turning axle.
More preferably, the second drive shaft first end is provided with the second drive shaft keyways, and the width of the second drive shaft keyways is consistent with propeller shaft sleeve key.
Preferably, the second drive shaft is flexibly connected with turning axle, and the second drive shaft driven rotary axle rotates.
More preferably, turning axle is respectively equipped with a turning axle coupling end further at both ends, second drive shaft the second end is provided with the second drive shaft coupling end further, and turning axle is connected with the second drive shaft coupling end of the second drive shaft in two groups of driven units respectively by the turning axle coupling end at two ends.
More preferably, turning axle coupling end is recessed end, and the second drive shaft coupling end is nose portion, and the second drive shaft and turning axle are connected by the second drive shaft coupling end and turning axle coupling end, and turning axle coupling end is consistent with the second drive shaft coupling end diameter.
Preferably, driving mechanism comprises a protection axle sleeve further, and the second drive shaft and turning axle are inserted in protection axle sleeve, and the internal diameter of protection axle sleeve is consistent with turning axle coupling end and the second drive shaft coupling end diameter.
Preferably, family of power and influence's web member comprises a connecting bushing and family of power and influence's Connection Block further, and family of power and influence's Connection Block extends to form from the side outer wall of connecting bushing, and turning axle is inserted in connecting bushing.
Preferably, turning axle is inserted in connecting bushing and is connected by keyway.
More preferably, family of power and influence's web member comprises a connecting key further, and connecting key is arranged between turning axle and connecting bushing.
More preferably, connecting bushing comprises a connecting bushing endoporus and a connecting bushing keyway further, and the aperture of connecting bushing endoporus is consistent with the diameter of turning axle, and connecting bushing keyway is communicated with connecting bushing endoporus, and connecting bushing keyway is consistent with the width of connecting key.
More preferably, turning axle is provided with at least one turning axle keyway, and the width of turning axle keyway is consistent with the width of connecting key.
Preferably, the family of power and influence comprises at least one mounting groove further, and mounting groove is formed from the upper material of removing of the family of power and influence, and family of power and influence's Connection Block of family of power and influence's web member is arranged in mounting groove.
More preferably, the quantity of mounting groove is corresponding with the quantity of family of power and influence's web member.
More preferably, the size of mounting groove and the in the same size of family of power and influence's Connection Block.
More preferably, family of power and influence's Connection Block is detachably arranged in mounting groove.
Preferably, driven unit comprises a mounting flange and a permanent seat further, mounting flange is connected with cylinder, cylinder is fixed on the chamber wall of the snout cavity/outlet plenum of plated film streamline, reduce the gas leakage situation of cylinder, propeller shaft sleeve is arranged in mounting flange, and permanent seat is connected with mounting flange simultaneously, further support cylinder, keeps the first drive shaft, the second drive shaft and turning axle to keep vertical concentric simultaneously.
As a kind of preferred version, this transmission class waterline being used for hand-set lid protection screen continuous coating production line comprises a transport unit, for transmitting substrate in transmission class waterline, the loading device of the substrate wherein in transmission class waterline is consistent with the loading device of plated film streamline, this transport unit comprises track and at least one delivery vehicle, track is charged, and delivery vehicle comprises at least two electrode lead-throughs, and electrode lead-through is electrically connected with track and drives delivery vehicle to orbit; Loading device is arranged on transport unit.
Preferably, track comprises an anode guide rail and a negative electrode guide rail, and anode guide rail and negative electrode guide rail are electrically connected step-down transformer respectively makes it be energized, and two electrode lead-throughs are connected to form a loop with anode guide rail and negative electrode guide rail respectively.
Preferably, track comprises two bench insulators further, and two bench insulators lay respectively at below anode guide rail and negative electrode guide rail, is in anode guide rail, between negative electrode guide rail and ground, on such anode guide rail and negative electrode guide rail charged can not with earth surface, protection personnel safety.
Preferably, delivery vehicle orbits, delivery vehicle comprises a vehicle frame, a wheel further to a, electric drive and a step-up transformer, wheel is to orbiting, vehicle frame is fixed on wheel to upper, electric drive and wheel are to being electrically connected, and electric drive and step-up transformer are arranged on vehicle frame.
Preferably, track is connected with not higher than 36V voltage, be preferably 24V voltage, two electrode lead-throughs are arranged on vehicle frame, one end of two electrode lead-throughs is electrically connected with anode guide rail and negative electrode guide rail respectively, the other end of two electrode lead-throughs is electrically connected with step-up transformer, and step-up transformer is electrically connected with electric drive simultaneously.
Preferably, vehicle frame comprises connected upper frame and lower vehicle frame loading device is arranged in upper frame, and lower vehicle frame is with wheel to being fixedly connected with, and electric drive and wheel are to being electrically connected, and electric drive, step-up transformer and electrode lead-through are arranged on lower vehicle frame.
More preferably, the quality of upper frame and lower vehicle frame is unequal.
More preferably, the quality of lower vehicle frame is greater than the quality of upper frame.
More preferably, the quality of lower vehicle frame is directly proportional to the substrate quality that loading device loads.
Preferably, wheel to be divided into an adhesion wheel to a driven wheel pair, adhesion wheel pair is electrically connected with electric drive, and electric drive drives adhesion wheel to rotation, and follow-up pulley is to rotating traction by motion-work wheel.
More preferably, wheel is to comprising wheel and an insulated liner, and insulated liner is connected with wheel, and wheel is at anode guide rail and negative electrode guide rail is up sails, and insulated liner prevents wheel from the fax on anode guide rail and negative electrode guide rail being entered on delivery vehicle.
Preferably, delivery vehicle comprises further a transmission seat, loading device is transmitted by transmitting seat, transmit seat and comprise a transmission motor, at least two conveying elements and a travelling belt further, transmit motor to be electrically connected with electric drive, transmit motor to be electrically connected with at least one conveying element, and two conveying elements transmit driving through described travelling belt, transmit driven by motor conveying element and be synchronized with the movement.Conveying element is preferably delivery wheel.
As another kind of preferred version, present invention also offers a kind of for this substrate recognizer component for hand-set lid protection screen continuous coating production line, this substrate recognizer component is arranged on loading device and transport unit, this substrate recognizer component comprises: at least n identifying hole (n >=1) and a recognizer, identifying hole is arranged on loading device, recognizer is arranged on transport unit, recognizer comprises an infra-red ray transmitting unit further, one infrared receiver unit and a converting unit, converting unit is connected with infrared receiver unit, infra-red ray transmitting unit is consistent with the height of identifying hole.
Preferably, identifying hole is arranged on the second baffle of loading device, and recognizer is arranged on transport unit vehicle frame.
More preferably, infra-red ray transmitting unit and infrared receiver unit are integrated and are installed.
Preferably, infra-red ray transmitting unit and infrared receiver unit are arranged on the both sides of transport unit vehicle frame respectively, infra-red ray transmitting unit and infrared receiver unit correspondence, infra-red ray transmitting unit comprises at least one fired infra-red component further, infrared receiver unit comprises an infrared receiver component further, fired infra-red component and infrared receiver component correspondence, fired infra-red component and infrared receiver component are combined corresponding with identifying hole.
Preferably, identifying hole is further divided into open identifying hole and closed identifying hole, closes identifying hole consistent with the diameter of open identifying hole, and closed identifying hole will close formation by opening identifying hole.
More preferably, this closed identifying hole is artificial self-closed, in other words, when processing this identifying hole, be all be processed into open identifying hole, then artificial closing opens identifying hole, the position of the open identifying hole of flexible and closed identifying hole so more, convenient tracking substrate.
More preferably, the quantity and the position relationship that open identifying hole and closed identifying hole determine adjustment according to loading device quantity in production line and type.
More preferably, fired infra-red component and the open identifying hole of infrared receiver component corresponding one or close identifying hole, when the open identifying hole of fired infra-red component correspondence, the infrared rays that fired infra-red component is launched is by open identifying hole, and by infrared receiver component receiving infrared-ray, receiving element transmits a kind of signal to converting unit; When fired infra-red component correspondence closes identifying hole, the infrared rays that fired infra-red component is launched is not by closed identifying hole, the infrared rays that infrared receiver is launched less than fired infra-red component, infrared receiver component transmits another kind of type signal to converting unit.
Preferably, infrared receiver component is received the signal that infrared rays that fired infra-red component sends sends and is converted to " 1 " by converting unit, infrared receiver component is not received the signal that fired infra-red component sends and is converted to " 0 " by converting unit, corresponding scale-of-two.
Preferably, the quantity of the quantity basis identifying hole of the identification type of substrate of substrate recognizer component is determined.
More preferably, the quantity of substrate recognizer component identification type of substrate is 2
n, n>=1.
More preferably, the quantity of substrate recognizer component identification type of substrate is 2
n, 5>=n>=1.
Preferably, substrate recognizer component comprises an identification controller further, the converting unit wireless connections of identification controller and recognizer, and the signal that identification controller receives converting unit gathers.
Preferably, substrate recognizer component comprises an indicating meter and an input keyboard further, and indicating meter is connected with identification controller, and input keyboard is connected with controller, by input keyboard by various substrate model input control device, is convenient to be shown by indicating meter.
As a kind of preferred version, in order to save floor occupying area and increase work efficiency, this is used for the production line that substrate transmission class waterline and plated film streamline be arranged in parallel by hand-set lid protection screen continuous coating production line; Present invention also offers and a kind ofly turn for what the substrate on substrate transmission class waterline can be made safe and reliable for hand-set lid protection screen continuous coating production line the rotating platform mechanism that 180 degree, direction enters plated film streamline; this rotating platform mechanism is at least two; lay respectively at this both sides for hand-set lid protection screen continuous coating production line; for the substrate transfer transmission mechanism between transmission class waterline and plated film streamline, connect transmission class waterline and plated film streamline.
Preferably, rotating platform mechanism comprises a driven unit, a rotary components and a limit assembly, and rotary components is connected with driven unit, and limit assembly is fixed on rotary components, drive rotary components to rotate by driven unit, limit rotary components angle of rotation by limit assembly.
More preferably, driven unit comprises a rotation platform motor, one first driving element and one second driving element, and rotation platform motor is connected with the first driving element, and the first driving element is connected with the second driving element; Rotary components comprises an anchor and a rotating disk, and rotating disk is connected with the second driving element, and rotation platform motor is arranged on anchor; Limit assembly comprises a rotary photoelectric inductor block, an inductive rod and at least one induced signal element, rotary photoelectric inductor block is connected with inductive rod, induced signal element is connected with motor, and induced signal element is arranged on anchor, and rotary photoelectric inductor block and inductive rod are installed on the rotating pan.
Preferably, rotation platform motor comprises a driving turning axle further, and the first driving element is arranged on and drives on turning axle.
Preferably, rotating platform mechanism comprises a controller further, and controller is connected with rotary photoelectric inductor block and motor, and this controller is preferably PLC.
More preferably, the second driving element is arranged on the rotating pan, and the first driving element is connected by gears meshing with the second driving element, and the driving turning axle on motor drives the first driving element motion, and the first driving element drives the second driving element motion.
More preferably, the first driving element is preferably a gear, and the second driving element is preferably single-revolution supporting, and the first driving element is connected by gears meshing with the second driving element.
Preferably, rotating platform mechanism comprises substrate transfer assembly further, and substrate transfer assembly is fixing on the rotating pan, when rotating disk rotates, drives substrate transfer assembly in company with rotating disk motion.
More preferably, substrate transfer assembly comprises at least one retainer and a drive-motor further, and retainer is connected with drive-motor, and drive-motor drives retainer transmission, drives the substrate motion on retainer like this.
Preferably, the diameter of the rotating disk of rotating platform mechanism is not less than the diameter of substrate or substrate frame.
Preferably, rotary photoelectric inductor block is arranged on one end of rotating disk, responded to by optoelectronic distance between inductive rod and induced signal element, induced signal element is around the central distribution of rotating disk at anchor, and the distributing position of induced signal element is consistent with the track that inductive rod rotates with rotating disk.
More preferably, when the distance between inductive rod and induced signal element is not more than 10mm, induced signal element transmits to rotary photoelectric inductor block.
More preferably, limit assembly comprises at least one position guiding groove further, position guiding groove around rotating disk central distribution on the rotating pan, the distributing position of position guiding groove is consistent with the track that inductive rod rotates with rotating disk, and inductive rod is arranged in position guiding groove.
As a kind of preferred version, this is used for hand-set lid protection screen continuous coating production line and also comprises a supervisory system, and this supervisory system comprises display module, processing module, data memory module, communication interface module, data conversion module and distribution each monitor component on a production line;
Described display module connects described processing module, and described processing module connects described data memory module, and described data memory module is connected with described data conversion module by described communication interface module; Described data conversion module, by fieldbus, communicates with distribution each monitor component on a production line;
Described data conversion module is gathered the data in affiliated monitor component by described fieldbus, and row format of going forward side by side transforms, to form unified data and to be sent to described data memory module by described communication interface module; Described data memory module is for storing the data sent; Described processing module reads the data in described data memory module and processes, and is then sent to the display of described display module.
Preferably, described monitor component mainly comprises monitoring position assembly and speed monitoring assembly; Whether described monitoring position assembly runs to specified location at least one equipment judges; Described speed monitoring assembly carries out identification to the travelling speed of at least one equipment and judges.
Preferably, described monitoring position assembly is photosignal induction installation.
Preferably, described speed monitoring assembly is speed sensor.
Preferably, described supervisory system also comprises a Controlling System; Described Controlling System and speed monitoring system wireless connections, to the speed signal fed back after judging to identify, pass to Controlling System, Controlling System sends command adapted thereto again, controls after supervisory system accepts instruction to the travelling speed of equipment.
Compared with prior art, provided by the invention possess following advantage for hand-set lid protection screen continuous coating production line:
1, production line reasonable integral structure is entered to play, and transmission class waterline and plated film streamline join end to end formation one annular flow waterline, save floor occupying area;
That 2, is initiated by the cathode assembly of a movable type realizes the translation of planar cathode in sputter coating process, thus the defect of fixing in this design avoided due to its target and bombardment track, significantly improve the utilization ratio of target, the target utilization of this cathode assembly can reach 35 ~ 40% after testing, on target line, the replacement cycle is extended for 7 ~ 10 days, obviously be better than the planar cathode of other structures, and the extreme value that planar cathode utilization ratio of the prior art is difficult to more than 30% can be broken through, still can maintain preferably plated film stability and homogeneity; In addition, this cathode assembly structure is simple, and without the need to the complete processing of Special complex, each functional element used all can adopt commercially available part, and rational in infrastructure between each parts, and dismounting is easy; The advantage that the low-cost and easy-to that not only can maintain planar cathode is safeguarded, also target and bombardment track this advantage variable of rotating cathode is achieved, and the optional feature structure realizing translation is simple, can not affect vacuum leakproofness, equally also can not become the uncertain factor in production line; In addition this cathode assembly has great economic worth, and environmental friendliness, decrease the waste of target, work-ing life extends, and economizes on resources.
3, the substrate drive mechanism mechanical transmission in plated film streamline, adopts magnetic coupling transmission, reduces wear, dynamic seal is converted to static seal, keep the resistance to air loss of each chamber in each coating film production line, effectively prevent gas leak phenomenon and produce, this transmission rig structure is simple
4, the substrate by regulating loading device can install various different size, the substrate in loading device is accurately entered in plated film streamline safely and fast by transport unit and rotating platform mechanism, and intelligent control, uses manpower and material resources sparingly, and provides production efficiency;
5, in whole coating film production line, substrate quick and precisely identifies type of substrate continuously by substrate recognizer component, understands substrate accurate location in whole coating film production line;
6, distinctive door body structure in plated film streamline, can realize each function chamber can change according to product demand or increase, and such whole piece coating film production line adapts to multiple coating films processing requirement, is applicable to multiple target plated film;
7, plated film streamline imports and exports the rotation family of power and influence of employing by air cylinder driven, use manpower and material resources sparingly, be active in one's movements, make the family of power and influence rotate 0 ~ 95 degree, guarantee that substrate passes in and out import and the outlet of plated film streamline fast, improve the working efficiency of whole vacuum coating production line;
8, the pipeline coupling assembly of plated film streamline promotes coupling flange by cylinder and moves up and down, and makes coupling flange and upper mounting flange automatic coupling or disengaging, drives wavy metal pipeline automatic open-close with this; Pipeline after disengaging can freely move horizontally, and when mobile, also can keep geo-stationary with pipeline place plane, what avoid pipeline scrapes damage; The pipeline opening of opening and closing place is provided with filtering net, foreign material landing blocking channel can be avoided;
9, the substrate transport of transmission class waterline adopts the integration of conveyer and loading device to realize, and substrate safety and firmness is installed, and is efficiently transmitted fast by delivery vehicle, transport is on-the-spot clean and tidy, delivery vehicle supplies electric drive by track, easy to operate and safe, economizes on resources.
10, this supervisory system be used in hand-set lid protection screen continuous coating production line grabs die change block and fieldbus by data, realizes the reading and writing data function to distinct device on production line; And by the multipart design of multimode and between be interconnected; Build the general frame of supervisory system, both achieved the unified management of equipment, enriched again the function of production line, achieved the Intellectualized monitoring to production line.
To sum up state, this is used for the multiple difficult problems that hand-set lid protection screen continuous coating production line solves prior art, overcomes the familiar lacunas of traditional planar cathode, whole production line workflow links up, safety is controlled, and coating performance stable and uniform is the leading work in industry; Therefore its application prospect is very wide.
Accompanying drawing explanation
Fig. 1 is a kind of preferred implementation schematic diagram for hand-set lid protection screen continuous coating production line provided by the invention;
Fig. 2 is the front view for transport unit in hand-set lid protection screen continuous coating production line provided by the invention;
Fig. 3 is the side-view for transport unit in hand-set lid protection screen continuous coating production line provided by the invention;
Fig. 4 is the front view for loading device in hand-set lid protection screen continuous coating production line provided by the invention;
Fig. 5 is provided by the invention for substrate recognizer component schematic diagram in hand-set lid protection screen continuous coating production line;
Fig. 6 is the connection diagram for substrate recognizer component in hand-set lid protection screen continuous coating production line provided by the invention;
Fig. 7 is the front view for rotating platform mechanism in hand-set lid protection screen continuous coating production line provided by the invention;
Fig. 8 is the vertical view for rotating platform mechanism in hand-set lid protection screen continuous coating production line provided by the invention;
Fig. 9 is the side-view for rotating platform mechanism in hand-set lid protection screen continuous coating production line provided by the invention;
Figure 10 is the sectional view for rotating the family of power and influence in hand-set lid protection screen continuous coating production line provided by the invention;
Figure 11 is the schematic diagram for rotating the family of power and influence in the family of power and influence in hand-set lid protection screen continuous coating production line provided by the invention;
Figure 12 is the action schematic diagram for rotating the family of power and influence in hand-set lid protection screen continuous coating production line provided by the invention;
Figure 13 is the schematic diagram for transmission rig in hand-set lid protection screen continuous coating production line provided by the invention;
Figure 14 is the front view for transmission rig in hand-set lid protection screen continuous coating production line provided by the invention;
Figure 15 is the sectional view A-A for hand-set lid protection screen continuous coating production line transmission rig provided by the invention;
Figure 16 is the sectional view B-B for hand-set lid protection screen continuous coating production line transmission rig provided by the invention;
Figure 17 is the structure iron for pipeline coupling assembly in hand-set lid protection screen continuous coating production line provided by the invention;
State graph when Figure 18 is the folding for pipeline coupling assembly in hand-set lid protection screen continuous coating production line provided by the invention;
Figure 19 is provided by the invention for state graph during pipeline coupling assembly in hand-set lid protection screen continuous coating production line closed;
Figure 20 is the exchange door for door body structure in hand-set lid protection screen continuous coating production line provided by the invention assembling schematic diagram;
Figure 21 is the single door body schematic diagram for door body structure in hand-set lid protection screen continuous coating production line provided by the invention;
Figure 22 is the stereographic map for the hinged component of door body structure in hand-set lid protection screen continuous coating production line provided by the invention;
Figure 23 is the skeleton view for the hinged component of door body structure in hand-set lid protection screen continuous coating production line provided by the invention;
Figure 24 is the structure iron for the tight latch fitting of door body structure in hand-set lid protection screen continuous coating production line provided by the invention;
Figure 25 is the assembling schematic diagram for cathode assembly in hand-set lid protection screen continuous coating production line provided by the invention;
Figure 26 is the vertical view cutaway drawing for cathode assembly in hand-set lid protection screen continuous coating production line provided by the invention;
Figure 27 provided by the inventionly looks sectional view for a left side for cathode assembly in hand-set lid protection screen continuous coating production line;
Figure 28 is the enlarged view for moving portion C-C in cathode assembly in hand-set lid protection screen continuous coating production line provided by the invention;
Figure 29 is the schema of the supervisory system for hand-set lid protection screen continuous coating production line provided by the invention;
Figure 30 is the etched shape figure for target surface in cathode assembly in hand-set lid protection screen continuous coating production line provided by the invention;
Figure 31 is the etched shape figure of the target surface of prior art midplane negative electrode;
Figure 32 is the target sectional view for cathode assembly and prior art planar cathode in hand-set lid protection screen continuous coating production line provided by the invention.
Embodiment
Do to illustrate in detail, intactly further to the present invention below in conjunction with embodiment and accompanying drawing.
Fig. 1 to Figure 28, for provided by the invention for the schematic diagram of a kind of preferred implementation of hand-set lid protection screen continuous coating production line.As shown in Figure 1, coating film production line comprises transmission class waterline 10 and a plated film streamline 20, and transmission class waterline 10 is connected with plated film streamline 20, and in order to save floor occupying area and increase work efficiency, transmission class waterline 10 and plated film streamline 20 be arranged in parallel.
Plated film streamline 20 comprises inlet plenum 21, import transition chamber thereof 22, import buffer chamber 23, plated film chamber 24, outlet buffer chamber 25, outlet transition chamber 26 and outlet chamber 27, inlet plenum 21, import transition chamber thereof 22, import buffer chamber 23, plated film chamber 24, outlet buffer chamber 25, outlet transition chamber 26 are connected successively with outlet chamber 27, substrate enters plated film streamline 20 by inlet plenum 21 from transmission class waterline 10, is shifted out from plated film streamline 20 by outlet chamber 27.
In the inlet plenum 21 of plated film streamline 20, import transition chamber thereof 22 and import buffer chamber 23, each chamber deflates formation vacuum gradually, and to plated film chamber 24, vacuum tightness reaches maximum value, now plated film in plated film chamber 24.In import transition chamber thereof 22 and import buffer chamber 23, there is heating unit, can to the substrate heating in import transition chamber thereof 22 and import buffer chamber 23.From the outlet buffer chamber 25 after plated film chamber 24, outlet transition chamber 26 and outlet chamber 27, pass into air gradually lower its vacuum tightness, reach minimum to vacuum tightness during outlet chamber 27, ensure that substrate shifts out from outlet chamber.In outlet buffer chamber 25 and outlet transition chamber 26, be provided with refrigerating unit, the substrate in outlet buffer chamber 25 and outlet transition chamber 26 is cooled gradually.
As shown in Figures 2 to 4, transmission class waterline 10 comprises transport unit 11 and a loading device 12, and loading device 12 is arranged on transport unit 11, and substrate is arranged on loading device 12, transmit loading device 12 by transport unit 11, substrate is transmitted in transmission class waterline 10.Fig. 2 is the front view for transport unit in hand-set lid protection screen continuous coating production line provided by the invention; Fig. 3 is the side-view for transport unit in hand-set lid protection screen continuous coating production line provided by the invention.As shown in Figure 2 to Figure 3, transport unit 11 comprises track 111 and at least one delivery vehicle 112, track 111 is charged, and delivery vehicle 112 comprises at least two electrode lead-throughs 1125, and electrode lead-through 1125 is electrically connected with track 111 and drives delivery vehicle 112 to run on track 111.Loading device 12 is arranged on transport unit 11, and loading device 12 comprises fixation kit 121 and an adjusting part 122, and adjusting part 122 is arranged on fixation kit 121, by the substrate regulating the position of adjusting part 122 to install different size.Delivery vehicle 112 automatically runs on track 111, does not need, by manpower, to save manpower like this, enhances productivity.Substrate is dismountable to be arranged on loading device 12, mobile in transmission class waterline 10 and plated film streamline 20 by loading device 12.
Track 111 comprises anode guide rail 1111 and a negative electrode guide rail 1112, and anode guide rail 1111 and negative electrode guide rail 1112 are energized, and two electrode lead-throughs 1125 are connected to form a loop with anode guide rail 1111 and negative electrode guide rail 1112 respectively.Anode guide rail 111 and the negative electrode guide rail 1112 of track 111 are connected with 24V voltage, and 24V voltage is to human body fanout free region.
Track 111 comprises two bench insulators 1113 further; two bench insulators 1113 are placed on below anode guide rail 1111 and negative electrode guide rail 1112 respectively; be in anode guide rail 1111, between negative electrode guide rail 1112 and ground; on such anode guide rail 1111 and negative electrode guide rail 1112 charged can not with earth surface, protection personnel safety.
Delivery vehicle 112 runs on track 111, delivery vehicle 112 comprises vehicle frame 1121, wheel further to 1122, one electric drive 1123 and a step-up transformer 1124, wheel runs on track 111 1122, vehicle frame 1121 is fixed on wheel on 1122, electric drive 1123 is electrically connected 1122 with wheel, and electric drive 1123 and step-up transformer 1124 are arranged on vehicle frame 1121.Wheel to 1122 be divided into an adhesion wheel to 11221 and one driven wheel to 11222, adhesion wheel is electrically connected with electric drive 1123 11221, electric drive 11223 drives adhesion wheel to rotate 11221, and driven wheel rotates 11221 tractions by adhesion wheel 11222.Wheel comprises wheel 112201 and an insulated liner 112202 to 1122, insulated liner 112202 is connected with wheel 112201, wheel 112201 travels on anode guide rail 1111 and negative electrode guide rail 1112, and insulated liner 112202 prevents wheel 112201 from the fax on anode guide rail 1111 and negative electrode guide rail 1112 being entered on delivery vehicle 112.Electric drive 1123 drives motion-work wheel to rotate 11221 by belt drive motion-work wheel to the wheel 112201 of 11221 sides.
One end of electrode lead-through 1125 is electrically connected with track 111, and the other end of electrode lead-through 1124 is electrically connected with step-up transformer 1124, and step-up transformer 1124 is electrically connected with electric drive 1123 simultaneously.
Vehicle frame 1121 comprises connected upper frame 11211 and lower vehicle frame 11212, loading device 12 is arranged in upper frame 11211, lower vehicle frame 11212 is fixedly connected with 1122 with wheel, electric drive 1123 is electrically connected 1122 with wheel, and electric drive 1123, step-up transformer 1124 and electrode lead-through 1125 are arranged on lower vehicle frame 11212.Upper frame 11211 is unequal with the quality of lower vehicle frame 11212.Preferably, the quality of lower vehicle frame 11212 is greater than the quality of upper frame 11211, and the substrate quality that quality and the loading device 12 of lower vehicle frame 11212 load is directly proportional.
Delivery vehicle 112 comprises further a transmission seat 1126, loading device 12 is transmitted by transmitting seat 1126, transmit seat 1126 and comprise a transmission motor 11261, at least two conveying elements 11262 and a travelling belt 11263 further, transmit motor 11261 to be electrically connected with electric drive 1123, transmit motor 11261 to be electrically connected with at least one conveying element 11262, and two conveying elements 11262 transmit driving through described travelling belt 11263, transmit motor 11261 and drive conveying element 11262 to be synchronized with the movement.Conveying element 11262 is preferably delivery wheel.When loading device 12 is arranged on transport unit 11, loading device 12 is moved on delivery vehicle 112 by the conveying element 11262 transmitting seat 1126.
When after mounted substrate on loading device 12, electrode lead-through 1125 on delivery vehicle 112 introduces electric current from track 111, electric drive 1123 is passed to after step-up transformer 1124 boosts, electricity is given wheel to 1122 and transmission motor 11261 by electric drive 1123, transmitting motor 11261 drives conveying element 11262 to move by travelling belt 11263, and conveying element 11262 drives loading device 12 to move; After loading device 12 moves to delivery vehicle 112, electric drive 1123 drives the wheel 1122 of delivery vehicle 112 to roll on track 111, and delivery vehicle 112 drives loading device 12 to move on track 111.
Fig. 4 is the front view for loading device in hand-set lid protection screen continuous coating production line provided by the invention.As shown in Figure 4, the fixation kit 121 of loading device 12 comprises the first support bar 1211, second support bar 1212, first baffle plate 1213 and second baffle 1214, first support bar 1211, first baffle plate 1213, second support bar 1212 and second baffle 1214 are connected to form a quadra between two, and the first support bar 1211 and the second support bar 1212 are respectively equipped with at least two guide groove regions 1215; Adjusting part 122 is arranged on fixation kit 121, adjusting part 122 comprises at least two and regulates beam 1221 and at least one group of positioning element 1222, dismountable being arranged on of positioning element 1222 regulates on beam 1221, regulates beam 1221 to be arranged on the guide groove region 1215 of the first support bar 1211 and the second support bar 1212.
Guide groove region 1215 comprises guide groove 12151 and a settlement 12152 further, and guide groove 12151 is arranged in settlement 12152, and guide groove 12151 is in vertical direction.The length of settlement 12152 is not less than the length of guide groove 12151, and the width of settlement 12152 is not less than the width of guide groove 12151.
Guide groove region 12151 comprises the first guide groove region 12151A and the second guide groove region 12151B, and the area of the first guide groove region 12151A is greater than the second guide groove region 12151B.
First support bar 1211 of fixation kit 121 and the second support bar 1212 are respectively equipped with resettlement area, center 1216 further, and region, central guiding position 1216 is arranged in the middle of the first support bar 1211 and the second support bar 1212.
Beam 1221 is regulated to be arranged on guide groove region 1215 and/or the resettlement area, center 1216 of the first support bar 1211 and the second support bar 1212, beam 1221 is regulated to comprise first end 12211, the second end 12212 and a crossbeam 12213, the two ends of crossbeam 12213 connect first end 12211 and the second end 12212, the thickness of first end 12211 and the second end 12212 is less than the thickness of crossbeam 12213, the consistency of thickness of first end 12211 and the second end 12212.
Positioning element 1222 comprises one first setting element 12221 and one second setting element 12222, first setting element 12221 removes and installs and regulates on beam 1221 one, second setting element 12222 is detachably arranged on another and regulates on beam 1221, and the installation site of the first setting element 12221 is higher than the second setting element 12222.
When one group of positioning element 1222 is detachably arranged on and regulates on beam 1221, the first setting element 12221 is arranged on an adjustment beam 1221, and the second setting element 12222 is arranged on another and regulates on beam 1221; In other words, an adjustment beam 1221 can install the both sides that the first setting element 12221 and the second setting element 12222, first setting element 12221 and the second setting element 12222 are arranged on same adjustment beam 1221 simultaneously; On same adjustment beam 1221, the second setting element 12222 installation site is higher than the first setting element 12221, but when one group of positioning element 1221, the installation site of the first setting element 12221 is higher than the second setting element 12222.First setting element 12221 and the second setting element 12222 are arranged on by screw and regulate on beam 1221.First setting element 12221 is preferably an elastic element; Second setting element 12222 is preferably a draw-in groove.
Second baffle 1214 is provided with shifting axle 12141, shifting axle 12141 is flexibly connected with second baffle 1214.Shifting axle 12141 and second baffle 1214 are bolted.The length of shifting axle 12141 is not less than the length of second baffle 1214, and preferably, the length of shifting axle 12141 is consistent with the length of second baffle 1214.When loading device 12 is arranged on transfer bogie 112, shifting axle 12141 moves on the conveying element 11262 of delivery vehicle 112, and when conveying element 11262 rotates, the shifting axle 12141 of loading device 12 moves.
This loading device 12 is applied in whole coating film production line, and substrate is arranged on loading device 12, is transported to plated film streamline 20 by the delivery vehicle 112 of transport unit 11 from transmission class waterline 10.When being mounted on loading device 12 by substrate, first measuring the size of substrate, according to the size of substrate, determining to regulate the distance between beam 1221.When installing between adjustment beam 1221 to the first bracing frame 1211 and the second bracing frame 1212, beam 1221 is preferably regulated to install from bottom to up.To the first end 12211 of beam 1221 be regulated to be bolted in the guide groove 12151 in the guide groove region 1215 of the first bracing frame 1211 in installation process, then the guide groove 12151 regulated in the second end 12212 of beam 1221 and the guide groove region 1215 of the second bracing frame 1212 is communicated with, when keeping crossbeam 12213 level regulating beam 1221, be fixed on regulating the second end 12212 of beam 1221 on the second bracing frame 1212 by bolt, other adjustment beam 121 is in like manner installed.Then on adjustment beam 1221, setting element 1222 is installed, by the first setting element 12221 in setting element 1222 and the second setting element 12222, substrate is firmly arranged on loading device 12.
Fig. 5 is provided by the invention for substrate recognizer component schematic diagram in hand-set lid protection screen continuous coating production line; Fig. 6 is the connection diagram for substrate recognizer component in hand-set lid protection screen continuous coating production line provided by the invention.In order to more quick and precisely identify substrate, as shown in Figure 5 to Figure 6, this transmission class waterline 10 comprises substrate recognizer component 13 further, and substrate recognizer component 13 comprises at least 2
nindividual identifying hole 131 and a recognizer 132, identifying hole 131 is arranged on transport unit 11, and recognizer 132 is arranged on loading device 12, and recognizer 132 is by identifying the model of substrate in the quantity of identifying hole 10 in substrate frame 10 and identification of position substrate frame 10.
Recognizer 132 comprises infra-red ray transmitting unit 1321, infrared receiver unit 1322 and a converting unit 1323 further, and converting unit 1323 is connected with infrared receiver unit 1322, and infra-red ray transmitting unit 1321 is consistent with the height of identifying hole 131.Infra-red ray transmitting unit 1321 and infrared receiver unit 1322 are integrated and are installed together, and infra-red ray transmitting unit 1321 launches infrared rays, infrared receiver unit 1322 receiving infrared-ray.
Infra-red ray transmitting unit 1321 and infrared receiver unit 1322 are arranged on the both sides of transport unit 11, infra-red ray transmitting unit 1321 and infrared receiver unit 1322 correspondence, infra-red ray transmitting unit 1321 comprises at least one fired infra-red component 13211 further, infrared receiver unit 1322 comprises an infrared receiver component 13221 further, fired infra-red component 13211 and infrared receiver component 13221 correspondence, fired infra-red component 13211 and infrared receiver component 13221 are combined corresponding with identifying hole 131.
Identifying hole 131 is further divided into open identifying hole 1311 and closed identifying hole 1312, closes identifying hole 1312 consistent with the diameter of open identifying hole 1311, and identifying hole 1311 is closed to be formed by opening to close identifying hole 1312.Closing identifying hole 1312 is artificial self-closeds, in other words, when processing identifying hole 131, all that open identifying hole 1311 is processed in unification, then artificial closing opens identifying hole 1311, the quantity of so open identifying hole 1311 and closed identifying hole 1312 and position relationship determine adjustment according to substrate frame quantity in production line and type, flexible opens position and the quantity of identifying hole 1311 and closed identifying hole 1312 more, the kind of identifying hole 131 is made to increase like this, the substrate that convenient tracking is dissimilar.
Fired infra-red component 13211 and the open identifying hole 1311 or of infrared receiver component 13221 corresponding close identifying hole 1312, when the open identifying hole 1311 of fired infra-red component 13211 correspondence, the infrared rays that fired infra-red component 13211 is launched is through open identifying hole 31, and by infrared receiver component 13221 receiving infrared-ray, infrared receiver component 13221 transmits a kind of signal to converting unit 1323; When fired infra-red component 13211 correspondence closes identifying hole 32, the infrared rays that fired infra-red component 132111 is launched is not by closed identifying hole 32, infrared receiver component 13221 does not receive the infrared rays that fired infra-red component 13211 is launched, and infrared receiver component 13221 transmits another kind of type signal to converting unit 1323.
Infrared receiver component 13221 is received the signal that infrared rays that fired infra-red component 13211 sends sends and is converted to " 1 " by converting unit 1323, infrared receiver component 13221 is not received the signal that fired infra-red component 13211 sends and is converted to " 0 " by converting unit 1323, such correspondence and scale-of-two, be convenient to programming.
The type of the identification substrate of substrate recognizer component 13 is determined according to the quantity of identifying hole 131, identifying hole more than 131, the quantity in identifying hole 131 between open identifying hole 1311 and closed identifying hole 1312 and position relationship varied, identifying hole quantity is designated as 2
nindividual, then the quantity of substrate recognizer component identification type of substrate is 2
n, n>=1.Preferably, the quantity of means of identification identification type of substrate is 2
n, 5>=n>=1, n represents the quantity of identifying hole, and such substrate recognizer component 13 identifies that type of substrate has 2 kinds at least, has 32 kinds at the most.
Substrate recognizer component 13 comprises an identification controller 133 further, and converting unit 1323 wireless connections of identification controller 133 and recognizer 132, identification controller 133 receives the signal of converting unit 1323 and gathers.
Substrate recognizer component 13 comprises indicating meter 134 and an input keyboard 135 further, indicating meter 134 is connected with identification controller 135, input keyboard 135 is connected with identification controller 133, by input keyboard 134 by various substrate model input identification controller 135, corresponding to the binary coding that converting unit 1323 is changed, clearly show each substrate model by indicating meter 134 like this.
Fig. 7 is the front view for rotating platform mechanism in hand-set lid protection screen continuous coating production line provided by the invention; Fig. 8 is the vertical view for rotating platform mechanism in hand-set lid protection screen continuous coating production line provided by the invention; Fig. 9 is the side-view for rotating platform mechanism in hand-set lid protection screen continuous coating production line provided by the invention.As shown in Figure 7 to 9, in order to save floor occupying area and increase work efficiency, this is used for the production line that transmission class waterline 10 and plated film streamline 20 be arranged in parallel by hand-set lid protection screen continuous coating production line; This transmission class waterline 10 comprise further a kind of make the substrate on substrate transmission class waterline safe and reliable turn the rotating platform mechanism 14 that 180 degree, direction enters plated film streamline 20; this rotating platform mechanism 14 is at least two; lay respectively at this both sides for hand-set lid protection screen continuous coating production line; for the substrate transfer transmission mechanism between transmission class waterline 10 and plated film streamline 20, connect transmission class waterline 10 and plated film streamline 20.
Rotating platform mechanism 14 is arranged on transmission class waterline 10 and the same end of plated film streamline 20, connects transmission class waterline 10 and plated film streamline 20.Preferred transmission class waterline 10 comprises 2 rotating platform mechanisms 14, two rotating platform mechanisms 14 are separately positioned on the both ends of transmission class waterline 10 and plated film streamline 20, connect transmission class waterline 10 and plated film streamline 20, such transmission class waterline 10 and plated film streamline 20 form a circular line, save floor occupying area, after loading device 12 enters plated film streamline 20 from transmission class waterline 10, transmission class waterline 10 can be automatically returned to again, such saving manpower, recycle, provides production efficiency.
Rotating platform mechanism 14 comprises driven unit 141, rotary components 142 and a limit assembly 143, rotary components 142 is connected with driven unit 141, limit assembly 143 is fixed on rotary components 142, drive rotary components 142 to rotate by driven unit 141, limit rotary components 142 angle of rotation by limit assembly 143.
Driven unit 141 comprises one first driving element 1411,1 second driving element 1412 and a rotation platform motor 1413, and rotation platform motor 1413 is connected with the first driving element 1411, and the first driving element 1411 is connected with the second driving element 1412; Rotary components 142 comprises anchor 1421 and a rotating disk 1422, and rotating disk 1421 is connected with the second driving element 1412, and rotation platform motor 1413 is arranged on anchor 1421; Limit assembly 143 comprises rotary photoelectric inductor block 1431, inductive rod 1432 and at least one induced signal element 1433, rotary photoelectric inductor block 1431 is connected with inductive rod 1432, induced signal element 1433 is connected with rotation platform motor 1413, induced signal element 1433 is arranged on anchor 1421, and rotary photoelectric inductor block 1431 and inductive rod 1432 are arranged on rotating disk 1422.
Rotation platform motor 1413 comprises driving turning axle 14131, first driving element 1411 further and is arranged on driving turning axle 14131.Vacuum coating production line rotating platform mechanism comprises controller 50 (not shown) further, and controller 50 is connected with rotary photoelectric inductor block 31 and motor 13,
Rotating platform mechanism 14 comprises controller 144 (not shown) further, and controller 144 is connected with rotary photoelectric inductor block 1431 and rotation platform motor 1413.Controller 144 receives the motion of the signal control rotation platform motor 1413 of rotary photoelectric inductor block 1431.This controller 144 is preferably PLC.
Second driving element 1412 is arranged on rotating disk 1422, first driving element 1411 is connected by gears meshing with the second driving element 1412, driving turning axle 14131 on rotation platform motor 1413 drives the first driving element 1411 to move, and the first driving element 1411 drives the second driving element 1412 to move.First driving element 1411 is preferably a gear, and the second driving element 1412 is preferably single-revolution supporting, and the first driving element 1411 is connected by gears meshing with the second driving element 1412.
Rotating platform mechanism 14 is in the both ends of transmission class waterline 10 and plated film streamline 20, loading device 12 is transported to plated film streamline 20 from transmission class waterline 10, the loading device 12 having plated film is transported in transmission class waterline 10 from plated film streamline 20 simultaneously and unloads subtegulum in plated film streamline 20.Substrate is in transmission class waterline 10, first be arranged on loading device 12, loading device 12 is transported on rotating platform mechanism 14 by delivery vehicle 112, loading device 12 is transported on rotating disk 1422, rotation platform motor 1413 starts, the driving turning axle 14131 of rotation platform motor 1413 rotates, turning axle 14131 is driven to drive the first driving element 1411 to rotate, first driving element 1411 and the second driving element 1412 pass through gears meshing, first driving element 1411 drives the second driving element 1412 to rotate, second driving element 1412 is fixed with rotating disk 1422, second driving element 1412 simultaneously driven rotary dish 1422 rotates, loading device 12 on such rotating disk 1422 rotates along with rotating disk 1422, when rotating disk 1422 revolves turnback, loading device 12 on rotating disk 1422 have rotated 180 degree, loading device 12 is concordant with plated film streamline 20, inductive rod 1432 on rotating disk 1422 have rotated 180 degree, distance between inductive rod 1432 and induced signal element 1433 is less than 10mm, induced signal element 1433 transmits to rotary photoelectric inductor block 1431, controller 144 is connected with rotary photoelectric inductor block 1431 and rotation platform motor 1413, controller 144 controls rotation platform motor 13 and stops the rotation, such driving turning axle 14131 stops the rotation, drive the first driving element 1411 stop motion driven on turning axle 14131, second driving element 1412 stop motion of engaging with the first driving element 1411, be arranged on rotating disk 1422 stop motion on the second driving element 1412, loading device 12 on rotating disk 1422 moves, when moving on plated film streamline 20 to loading device 12, rotation platform motor 1413 starts, the driving turning axle 14131 of rotation platform motor 1413 rotates, turning axle 14131 is driven to drive the first driving element 1411 to rotate, first driving element 1411 and the second driving element 1412 pass through gears meshing, first driving element 1411 drives the second driving element 1412 to rotate, rotating disk 1422 fixing on second driving element 1412 is simultaneously along with the second driving element 1412 rotates, when rotating disk 1422 have rotated 14180 degree, inductive rod 1432 on rotating disk 1422 revolves turnback, distance between inductive rod 1432 and induced signal element 1433 is less than 10mm, induced signal element 1433 transmits to rotary photoelectric inductor block 1431, controller 144 is connected with rotary photoelectric inductor block 1431 and rotation platform motor 1413, controller 144 controls rotation platform motor 13 and stops the rotation, such driving turning axle 14131 stops the rotation, drive the first driving element 1411 stop motion driven on turning axle 14131, second driving element 1412 stop motion of engaging with the first driving element 1411, be arranged on rotating disk 1422 stop motion on the second driving element 1412, rotating disk 1422 gets back to starting position, again receive the loading device 12 that transmission class waterline 10 transports.
Figure 10 is the schematic diagram for rotating the family of power and influence in hand-set lid protection screen continuous coating production line provided by the invention; Figure 11 is the sectional view for rotating the family of power and influence in the family of power and influence in hand-set lid protection screen continuous coating production line provided by the invention; Figure 12 is the action schematic diagram for rotating the family of power and influence in hand-set lid protection screen continuous coating production line provided by the invention.As shown in Figure 10 to Figure 12, plated film streamline 20 comprises at least two further and rotates the family of power and influence 28, rotating the family of power and influence 28 is arranged on the chamber wall that inlet plenum 21 and outlet chamber 27 contact with transmission class waterline 10, rotate the family of power and influence 28 and comprise family of power and influence's assembly 281 and family of power and influence's driven unit 282, family of power and influence's driven unit 282 is connected with family of power and influence's assembly 281 one end, is rotated by family of power and influence's driven unit 282 driving gate valve module 281.
For making the rotation of family of power and influence's assembly 281 more steady, the rotation family of power and influence 28 comprises another family of power and influence's driven unit 282, two family of power and influence's driven unit 282 further and is connected with the two ends of family of power and influence's assembly 281 respectively, and the synchronous driving gate valve module 281 of two family of power and influence's driven units 282 rotates.
Family of power and influence's assembly 281 comprises the family of power and influence 2811, turning axle 2812 and at least one family of power and influence's web member 2813, and family of power and influence's web member 2813 connects the family of power and influence 2811 and turning axle 2812; Family of power and influence's driven unit 282 comprises cylinder 2821 and a driving mechanism 2822, driving mechanism 2822 connects cylinder 2821 and turning axle 2812, driving mechanism 2822 comprises one first drive shaft 28221,1 second drive shaft 28222 and a propeller shaft sleeve 28223 further, first drive shaft 28221 is connected with cylinder 2821, second drive shaft 28222 is connected with turning axle 2812, and the first drive shaft 28221 and the second drive shaft 28222 are arranged in propeller shaft sleeve 28223.The family of power and influence 2811 comprises family of power and influence's body 28111 and a gasket groove 28112 further, and gasket groove 28112 is removed material and formed on family of power and influence's body 28111.
Cylinder 2821 comprises a tooth bar (not shown) and a gear (not shown), and rack drives gear rotates, and gear is connected with the first drive shaft 28221; The angle that cylinder 2821 middle rack driven gear rotates is 0 ~ 180 degree, and the angle of gear driven first drive shaft 28221 is 0 ~ 180 degree.The angle that cylinder 2821 middle rack driven gear rotates is preferably 0 ~ 180 degree, and the angle of gear driven first drive shaft 28221 is preferably 0 ~ 95 degree.
When loading device 12 enters plated film streamline 20 from inlet plenum 21 or shifts out plated film streamline from outlet chamber 27, each cylinder 2821 the same side of two groups of driven units 282 is filled with air, order about the rack drives gear movement in cylinder 2821, first drive shaft 28221 is coaxial with gear, gear drives the first drive shaft 28221 to rotate (being designated as rotating forward) when rotating, and the first drive shaft 28221 drives propeller shaft sleeve 28223 to rotate; First drive shaft 28221 and the second drive shaft 28222 are arranged in propeller shaft sleeve 28223, and propeller shaft sleeve 28223 drives the second drive shaft 28222 to rotate; The two ends of turning axle 2812 are connected with the second drive shaft 28222 in two groups of driven units 282 respectively, and when the second drive shaft 28222 rotates, turning axle 2812 rotates in company with the second drive shaft 28222 concentric; Turning axle 2812 is inserted in connecting bushing 28131, and turning axle 2812 and family of power and influence's web member 2813 link together, and when turning axle 2812 rotates, turning axle 2812 drives family of power and influence's web member 2813 to rotate; Family of power and influence's web member 2813 is connected with the family of power and influence 2811, and family of power and influence's web member 2813 drives the family of power and influence 2811 to connect rotation; When the tooth bar in each cylinder 2821 moves to the other end by gaseous tension from an end, rack drives gear 90-degree rotation, the family of power and influence 2811 is by driving 90-degree rotation, and now valve 2811 is opened completely.Gear, the first drive shaft 28221, second drive shaft 28222, turning axle 2812 and connecting bushing 28131 are rotating in same direction, are opened by valve 2811 and are designated as forward rotating movements.
When loading device 12 inlet plenum 21 snout cavity or loading device 12 shift out from outlet chamber 27, each cylinder 2821 of two groups of driven units 282 is filled with air in the same side in addition, order about the rack drives gear reversing motion in cylinder 2821, first drive shaft 28221 is coaxial with gear, gear drives the first drive shaft 28221 reverse rotation (being designated as reversion) when rotating, and the first drive shaft 28221 drives propeller shaft sleeve 28223 reverse rotation; During propeller shaft sleeve 28223 reverse rotation, propeller shaft sleeve 28223 drives the second drive shaft 28222 reverse rotation; The two ends of turning axle 2812 are connected with the second drive shaft 28222 in two groups of driven units 282 respectively, and when the second drive shaft 28222 reverse rotation, turning axle 2812 rotates backward in company with the second drive shaft 28222 concentric; Turning axle 2812 is inserted in connecting bushing 28131, and when turning axle 2812 reverse rotation, turning axle 2812 drives family of power and influence's web member 2813 reverse rotation; Family of power and influence's web member 2813 is connected with the family of power and influence 2811, and family of power and influence's web member 2813 drives the family of power and influence 2811 reverse rotation; When the tooth bar in each cylinder 2821 returns from the other end by gas pressure-driven, rack drives gear reverse rotation 90 degree, the family of power and influence 2811 is by driving reverse rotation 90 degree, and now the family of power and influence 2811 closes.Gear, the first drive shaft 28221, second drive shaft 28222, turning axle 2812 and connecting bushing 28131 are that reverse concentric rotates, and are closed by valve 2811 and are designated as return motion.
Figure 13 is the schematic diagram for transmission rig in hand-set lid protection screen continuous coating production line provided by the invention; Figure 14 is the front view for transmission rig in hand-set lid protection screen continuous coating production line provided by the invention; As shown in Figure 13 and Figure 14, plated film streamline 20 comprises multiple transmission rig 29 further, and transmission rig 29 is arranged in each chamber of plated film streamline 20, and loading device 12 passes through transmission rig 29 transmission in each chamber of plated film streamline 20.Transmission rig 29 comprises driving component 291, driven subassembly 292 and a magnetic coupler 293, driving component 291 and driven subassembly 292 are separately positioned on the both sides of magnetic coupler 293, driving component 291 by electric drive, by magnetic coupler 293 by the Movement transmit of driving component 291 to driven subassembly 292.Driven subassembly 292 is positioned at each chamber of plated film streamline 20, and driving component 291 is positioned at outside each chamber, and magnetic coupler 293 runs through the casing being sealed in each chamber.
Driving component 291 comprises a main drive shaft 2911, driven subassembly 292 comprises driven shaft 2921 and a power wheel 2922, driven shaft 2921 drives power wheel 2922 to rotate, main drive shaft 2911 and driven shaft 2921 are arranged on the both sides of magnetic coupler 293, and magnetic coupler 293 connects main drive shaft 2911 and driven shaft 2921.
Driving component 291 comprises belt wheel 2912 and belt 2913 (not shown) further, belt wheel 2912 is arranged on main drive shaft 2911, belt 2913 connects the motor in plated film flowing water 20 and the belt wheel 2912 on main drive shaft 2911, and main drive shaft 2911 drives by motor in plated film flowing water 20.
Main drive shaft 2911 comprises main drive shaft first end 29111, main drive shaft the second end 29112 and an active axis body 29113, extend to form initiatively axis body 29113 from main drive shaft first end 29111 to main drive shaft the second end 29112, main drive shaft the second end 29112 contacts with magnetic coupling 293.
Figure 15 is the sectional view A-A for hand-set lid protection screen continuous coating production line transmission rig provided by the invention, and belt wheel 12 is arranged on main drive shaft first end 111 and is connected by key.As shown in figure 15, driving component 291 comprises at least one initiatively axle key 2914 further, and initiatively axle key 2914 is arranged between belt wheel 2912 and main drive shaft first end 29111.Main drive shaft first end 29111 is provided with at least one main drive shaft keyway 291111, the width of main drive shaft keyway 291111 is consistent with the width of active axle key 2914, belt wheel 2912 comprises further a belt wheel inner hole 29121 and at least one band wheel key way 29122, the internal diameter of belt wheel inner hole 29121 is consistent with the diameter of main drive shaft first end 29111, band wheel key way 29122 is removed material and is formed in belt wheel inner hole 29121, and the width of band wheel key way 29122 is consistent with the width of active axle key 2914.
When belt wheel 2912 is arranged on main drive shaft first end 29111, main drive shaft keyway 291111 is communicated with band wheel key way 29121, initiatively axle key 2914 is placed between main drive shaft keyway 291111 and band wheel key way 29121, and the degree of depth of main drive shaft keyway 291111 and band wheel key way 29121 is not less than the thickness of initiatively axle key 2914.When belt wheel 2912 drives by belt 2913, belt wheel 2912 rotates, rotate with the active axle key 2914 in wheel key way 29121 in belt wheel 2912, initiatively axle key 2914 has the initiative in shaft key groove 291111 simultaneously, main drive shaft 2911 is driven to rotate when such active axle key 2914 rotates, therefore electric machine rotation passes motion to the belt wheel 2912 on main drive shaft 2911 by belt 2913, and belt wheel 2912 drives main drive shaft 2911 rotary motion.
When main drive shaft 2911 rotates by motor in vacuum coating production line drives, the rotation of main drive shaft 2911, in the both sides of magnetic coupling 293, by bonding force, is passed to driven shaft 2921 by main drive shaft 2911 and driven shaft 2921.
Vacuum coating production line transmission rig comprises a tongued and grooved flanges 294 further, tongued and grooved flanges 294 is arranged on magnetic coupling 293, tongued and grooved flanges 294 comprises seal washer 2941 and a gasket groove 2942 further, and seal washer 2941 is placed in gasket groove 2942.Magnetic coupling 293 is arranged in vacuum plating line by tongued and grooved flanges 294, prevents magnetic coupling 293 from coming off.
Driven shaft 2921 comprises driven shaft first end 29211, driven shaft the second end 29212 and a driven axis body 29213 further, driven shaft first end 29211 extends to form driven axis body 29213 to driven shaft the second end 29212, and driven shaft first end 29211 is connected with magnetic coupling 2930.
Figure 16 is the sectional view B-B for hand-set lid protection screen continuous coating production line transmission rig provided by the invention; As shown in figure 16, power wheel 2922 is arranged on driven shaft 2921, and power wheel 2922 is connected by key with driven shaft 2921.
Driven subassembly 292 comprises at least one driven shaft key 2923 further, and driven shaft key 2923 is arranged between driven shaft 2921 and power wheel 2922.Driven shaft 2921 comprises at least one driven shaft keyway 29214 further, and driven shaft keyway 29214 is removed material from driven shaft the second end 29212 and formed, and the width of driven shaft keyway 29214 is consistent with the width of driven shaft key 2923.
Power wheel 2922 comprises power wheel endoporus 29221 and at least one power wheel keyway 29222 further, power wheel keyway 29222 is removed material and is formed on power wheel endoporus 29221, the diameter of power wheel endoporus 29221 is consistent with the diameter of driven shaft the second end 29212, and the width of power wheel keyway 29222 is consistent with the width of driven shaft key 2923.
Driven subassembly 292 comprises a power wheel permanent seat 2924 further, and power wheel permanent seat 2924 is arranged on driven shaft 2921, and power wheel 2922 and power wheel permanent seat 2924 are bolted, and prevent power wheel 2922 from coming off from driven shaft 2921.
When power wheel 2922 is arranged on driven shaft the second end 29212, driven shaft keyway 29214 on driven shaft 2921 is communicated with power wheel keyway 29222, driven shaft key 2923 is placed between driven shaft keyway 29214 and power wheel keyway 29222, and the degree of depth of driven shaft keyway 29214 and power wheel keyway 29214 is not less than the thickness of driven shaft key 2923.When driven shaft 2921 rotates, in driven shaft 2921, in driven shaft keyway 29214, driven shaft key 2923 rotates, driven shaft key 2923 is in power wheel keyway 29214 simultaneously, and such driven shaft key 2923 drives power wheel 2922 to rotate, and therefore driven shaft 2921 drives power wheel 2922 to rotate.
Electric motor starting in plated film streamline 20, motor is connected with main drive shaft 2911 upper belt-wheel 12 by belt 2913, belt wheel 2912 drives by belt 2913, belt wheel 2912 rotates, rotate with the active axle key 2914 in wheel key way 29121 in belt wheel 2912, initiatively axle key 2914 has the initiative in shaft key groove 291111 simultaneously, drives main drive shaft 2911 to rotate when initiatively axle key 2914 rotates, and now motor drives main drive shaft 2911 to rotate; The rotation of main drive shaft 2911, in the both sides of magnetic coupling 2930, by bonding force, is passed to driven shaft 2921 by main drive shaft 2911 and driven shaft 2921; When driven shaft 2921 rotates because of the rotation of the transmission main drive shaft 2911 of magnetic coupling 293, in driven shaft 2921, in driven shaft keyway 29214, driven shaft key 2923 rotates, driven shaft key 2923 is in power wheel keyway 29214 simultaneously, such driven shaft key 2923 drives power wheel 2922 to rotate, and driven shaft 2921 drives power wheel 2922 to rotate; In plated film streamline 20, loading device 12 is rotated by power wheel 2922 and moves in each chamber in plated film streamline 20.
Figure 17 is the structure iron for pipeline coupling assembly in hand-set lid protection screen continuous coating production line provided by the invention; State graph when Figure 18 is the folding for pipeline coupling assembly in hand-set lid protection screen continuous coating production line provided by the invention; Figure 19 is provided by the invention for state graph during pipeline coupling assembly in hand-set lid protection screen continuous coating production line closed.As shown in Figure 17 to 19, molecular pump or other pipeline separation automations when detecting to make this production line and easy to operate, this plated film streamline 20 comprises a pipeline coupling assembly 201 further, the coupling of this pipeline fills 201 and comprises male part 2011 and lower male part 2012, upper and lower male part 2011,2012 is flexibly connected and seals, and upper and lower male part 2011,2012 is fixedly connected with same pipeline respectively; When upper and lower male part 2011,2012 is coupled and seals, pipeline communication; When upper and lower male part 2011,2012 is separated, pipeline disconnects.
Upper male part 2011 comprises mounting flange 20111 and upper pipeline connection 20112, wherein goes up mounting flange 20111 and upper pipeline connection 20112 is fixedly connected, and junction sealing.Lower male part 2012 comprises coupling flange 20121, corrugated tube 20122, lower mounting flange 20123 and lower pipeline connection 20124, wherein be coupled flange 20121, corrugated tube 20122, lower mounting flange 20123 is connected successively with lower pipeline connection 20124 and communicates, and each junction all seals.Corrugated tube 20122 is fixed by briquetting with the flange 20121 that is coupled.In upper male part 10 and lower male part 20, the sealing of each junction preferably adopts welded seal mode.
Upper and lower male part 2011,2012 through upper mounting flange 20111 and the flange 20121 that is coupled be coupled seal realize both be coupled and seal.
Lower mounting flange 20123 is connected with a moving assembly, and mounting flange 20123 makes lower male part 2012 move under moving assembly effect underdrive; Wherein moving assembly can adopt the various ways such as rotating shaft of the prior art or metal arm, does not repeat at this.
In order to realize automatic coupling or the separation of this pipeline coupling assembly, pipeline coupling assembly 201 comprises at least one cylinder 2013 further, cylinder 2013 is arranged on coupling flange 20121 and lower mounting flange 20123 chien shih coupling the moving up and down of flange 20121, with realize being coupled flange 20121 and upper mounting flange 20111 deciliter.Cylinder 2013 is two, is divided into the both sides of corrugated tube 20122.Cylinder 2013 is preferably thin cylinder, and corrugated tube 20122 is preferably compressible metallic bellows.Cylinder 2013 comprises a tracheae web member 20131, and cylinder 2013 is connected with coupling flange 20121 by tracheae web member 20131.Coupling flange 20121 opening part is provided with filter screen 201211, to prevent from falling into foreign matters from being blocked pipeline in lower male part 2012.Each junction is equipped with seal washer.
When the room door of vacuum plating chamber is in closing condition, cylinder 2013 moves upward, tracheae web member 20131 moves upward thereupon, tracheae web member 20131 is connected with coupling flange 20121, coupling flange 20121 is driven to move upward closed with upper mounting flange 20111 phase of upper male part 2011, now whole pipeline coupling assembly 201 is communicated with, and can deflate, make chamber be in vacuum state in chamber.When the door of vacuum plating chamber prepares to open, cylinder 2013 moves downward, tracheae web member 20131 moves downward thereupon, coupling flange 20121 is driven to be separated with the upper mounting flange 20111 of upper male part 2011, now whole pipeline coupling assembly 201 disconnects, in chamber, inject air, chamber door just can be opened.
Figure 20 is the exchange door for door body structure in hand-set lid protection screen continuous coating production line provided by the invention assembling schematic diagram; Figure 21 is the single door body schematic diagram for door body structure in hand-set lid protection screen continuous coating production line provided by the invention; Figure 22 is the stereographic map for the hinged component of door body structure in hand-set lid protection screen continuous coating production line provided by the invention; Figure 23 is the skeleton view for the hinged component of door body structure in hand-set lid protection screen continuous coating production line provided by the invention; Figure 24 is the structure iron for the tight latch fitting of door body structure in hand-set lid protection screen continuous coating production line provided by the invention.As shown in Figure 20 to Figure 24, in order to improve practicality and the universality of this production line, this plated film streamline 20 comprises a door body structure 202 further, this door body structure 202 is configured at each function chamber, comprise room door 2021 and doorframe 2022, the both sides of room door 2021 are all flexibly connected with doorframe 2022, the door body structure size of each function chamber configuration and to configure the mode of each function chamber all consistent.
Vacuum coating production line door body structure 202 comprises many group seal assemblies 2023 further, and the both sides of room door 2021 are passed through to organize seal assembly 2023 with doorframe 2022 more and are detachably flexibly connected with doorframe 2022, are preferably spirally connected.Seal assembly 2023 position of room door 2021 both sides is corresponding.
Seal assembly 2023 comprises hinged component 202310 and tight latch fitting 202320, and hinged component 310 connects room door 2021 and the doorframe 2022 of each function chamber in vacuum coating production line, and room door is through hinged component 310 folding, and tight latch fitting 320 is arranged on doorframe 2022.
Hinged component 202310 comprises the first hinged component 202311, second hinged component 202312 and secondary hinge part 202313, wherein the first hinged component 202311 is connected with room door 2021, second hinged component 202312 is connected with doorframe 2022, and secondary hinge part 202313 connects the first hinged component 202311 and the second hinged component 202312 respectively; First hinged component 202311 comprises the first hinge seat 2023111 and the first hinge axis 2023112 further, second hinged component 202312 comprises the second hinge seat 2023121 and the second hinge axis 2023122, first hinge seat 2023111 and secondary hinge part 202313 rotate with the first hinge axis 2023112, second hinge seat 2023121 and secondary hinge part 202313 rotate with the second hinge axis 2023122, and be provided with bearing 202314 between the second hinge seat 2023122 and secondary hinge part 202313, be preferably surface bearing.
In order to make hinged component 202310 structure more compact and reasonable, first hinge seat 2023111 is removed material according to secondary hinge part 202313 shape and is become the first groove 20231111, and secondary hinge part 202313 embeds in the first groove 20231111 and rotates with the first hinge axis 2023112 with the first hinge seat 2023111; Correspondingly, the second hinge seat 2023121 is removed material according to secondary hinge part 202313 shape and is become the second groove 20231211, and secondary hinge part 202313 embeds in the second groove 20231211 and rotates with the second hinge axis 2023122 with the second hinge seat 2023121; It should be noted that the first groove 20231111 is contrary with the second groove 20231211 opening direction, the width of the two is consistent with the width of secondary hinge part 202313.
More preferably, the first hinge seat 2023111 and the second hinge seat 2023121 contour isometric, the first hinge seat 2023111 and the second hinge seat 2023121 not wide, in other words, the second hinge seat 2023121 is thicker than the first hinge seat 2023111; When this thickness difference can realize becoming vacuum state in vacuum coating production line chamber, avoiding external atmosphere pressure room door 2021 to be provided with the side of hinged component 202310 cannot be evenly airtight, make the process that closes of whole room door 2021 stressed more average, room door 2021 good seal performance.
First groove 20231111 is arranged on the stage casing of the first hinge seat 2023111, and similarly, the second groove 20231211 is arranged on the stage casing of the second hinge seat 2023121.
In order to make the process that closes of whole room door 2021 stressed more average, fixed by a bolt between the first hinge seat 2023111 and secondary hinge part 202313, and this bolt is connected with room door 2021, by this bolt adjustment secondary hinge part 202313, secondary hinge part 202313 is not swung in rotation process, and in rotation process, confinement cells door 2021 is along with the gap wobble of secondary hinge part 202313 and the first hinge seat 2023111, but room door 2021 is rotated along with secondary hinge part 202313, this bolt is preferably countersunk screw.
Tight latch fitting 202320 comprises permanent seat 202321, retaining element 202322 and a thrust screw 202323, permanent seat 202321 is bolted on the doorframe of each function chamber of coating film production line, and retaining element 202322 is movably arranged on permanent seat 202321 by thrust screw 202323.Be flexibly connected between thrust screw 202323 with retaining element 202322, retaining element 202322 is rotatable when thrust screw 202323 is arranged on doorframe.When room door 2021 closes, rotate retaining element 202322, retaining element 202322 is pressed on room door 2021, then is fixed element 20222 further through thrust screw 20223, realize room door 2021 and be more close to doorframe 2022.
Retaining element 202322 can adopt various locking plate of the prior art or chain structure, as a kind of preferred version, retaining element 202322 is the cam-like of a removal material, retaining element 202322 is rotated by a screw, when retaining element 202322 remove material side overlap with doorframe 2022 time, room door 2021 can be opened; When retaining element 202322 do not remove material side be close to room door 2021 time, room door 2021 is locked.
When each function chamber of coating film production line needs to seal, room door 2021 is closed, first hinged component 202311 is connected with room door 2021, second hinged component 202312 is connected with doorframe 2022, secondary hinge part 202313 connects the first hinged component 202311 and the second hinged component 202312 respectively, such first hinged component 202311 moves along with room door 2021, secondary hinge part 202313 is connected with the second hinge axis 2023122 of the second hinged component 202312, this specimen chamber door 2021 rotates centered by the second hinge axis 2023122 together with secondary hinge part 202313, until room door 2021 closes, after room door 2021 closes, room door 2021 is close to doorframe 2022 away from the side of seal assembly 2023, and gap is also left in the side being close to seal assembly 2023, promote room door 2021 to the lateral movement near doorframe 2022, because secondary hinge part 202313 is connected with the first hinge axis 2023112 of the first hinged component 202311, promoting room door 2021 in the side moving process near doorframe 2022, room door 2021 rotates centered by the first hinge axis 2023112 of the first hinged component 202311, the doorframe 2022 until room door 2021 is fitted.After room door 2021 fits doorframe 2022, rotate the retaining element 202322 in tight latch fitting 202320, make retaining element 202322 not remove material side and be close to room door 2021, room door 2021 is locked.
Figure 25 is the assembling schematic diagram of vacuum coating production line cathode assembly provided by the invention; Figure 26 is the vertical view cutaway drawing of vacuum coating production line cathode assembly provided by the invention; Figure 27 is that sectional view is looked on a left side for vacuum coating production line cathode assembly provided by the invention; Figure 28 is the enlarged view of moving portion A-A in vacuum coating production line cathode assembly provided by the invention.As shown in Figure 25 to 28, in plated film streamline 20, plated film chamber 24 is provided with a moving cathode device 241 further, the target bombardment track on-fixed of this moving cathode device 241, so the magnetic field width of this negative electrode increases, increase target etch areas, improve target utilization.
This moving cathode device 241 comprises cathode assembly 2411 and translation assembly 2412, and cathode assembly 2411 is fixedly connected with translation assembly 2412 and with the motion translation of translation assembly 2412, wherein negative electrode is planar magnetic control sputtering cathode; Cathode assembly 2411 is connected by an insulating part 2413 with translation assembly 2412.
Figure 26 is the vertical view cutaway drawing of vacuum coating production line cathode assembly provided by the invention; Figure 27 is that sectional view is looked on a left side for vacuum coating production line cathode assembly provided by the invention.As shown in Figure 26 and Figure 27, cathode assembly 2411 is followed successively by target 24111, target backboard 24112, magnet 24113 and yoke 24114 from outside to inside, insulating mat 24115 is provided with between target backboard 24112 and magnet 24113, target 24111 is fixedly connected with target backboard 24112, magnet 24113 is fixed on yoke 24114, and yoke 24114 connects insulating part 2413.Entering electricity when target backboard 24112 sputters is negative electrode, the casing of the plated film chamber 24 now in production line is anode, this insulating mat 24115 insulate with casing for realizing target backboard 24112 with in prior art, and in whole cathode assembly 241, only target backboard 24112 is charged.
The insulating material that insulating part 2413 and insulating mat 24115 preferably adopt is selected from as tetrafluoroethylene, synthetic glass or nylon.
Target backboard 24112 and magnet 24113 opposite face have a groove 241121, and magnet 24113 is positioned at groove 241121 but does not contact described target backboard 24112.
Magnet 24113 with translation assembly 2412 translation in groove 241121, thus realizes width increase in magnetic field in cathode assembly 2411, increases target etch areas, improves target utilization, fix this defect with the bombardment track overcoming prior art midplane negative electrode; And pass through the translation in the groove 241121 that target backboard 24112 has of magnet battle array, the target-substrate distance in original planar cathode and target surface magneticstrength can be maintained, and make this cathode assembly 241 space structure compact, the thickness of whole cathode assembly 241 can with do not improve front close, without the need to adjusting plated film chamber 24 and even whole production line because of cathode assembly 241 of the present invention; In addition, in this cathode assembly 241, target 24111 is still fixing, thus can avoid moving due to target 24111 uncertain factor brought and causing the instability of production line.
Magnet 24113 in cathode assembly 2411 can select various magnet battle array of the prior art, or multiple magnet arrangement forms, or customizes shaping magnet and form.Target 24111 is fixedly connected with target backboard 24112, and magnetic stripe 24113 is realized by countersunk screw with being fixedly connected with of yoke 24114.
Figure 28 is the enlarged view of moving portion C-C in vacuum coating production line cathode assembly provided by the invention.As shown in Figure 26 to Figure 28, translation assembly 2412 comprises moving member 24121, slide rail part 24122, ball-screw part 24123, fabricated section 24124 and a strut member 24125; Slide rail part 24122 comprises slide block 241221 and a slide rail 241222, and slide block 241221 coordinates with slide rail 241222, and slide block 241221 slides on slide rail 241222; Ball-screw part 24123 comprises nut 241231, screw rod 241232 and a mount pad 241233, screw rod 241232 is arranged on mount pad 241233, screw rod 241232 coordinates with nut 241231, and when screw rod 241232 rotates, nut 241231 can move along screw rod 241232; Slide block 241221 on moving member 24121 in difference connecting sliding rail part 24122 and the nut 241231 of ball-screw part 24123, when nut 241231 translation of ball-screw 24123, moving member 24121 translation, moving member 24121 is connected with slide block 241221, and such moving member 24121 is with movable slider 241221 to move on slide rail 241222; Slide rail 241222 in fabricated section 24124 difference connecting sliding rail part 24122 and the mount pad 241233 of ball-screw part 24123; Moving member 24121 translation under the common effect of slide rail part 24122 and ball-screw 24123, wherein ball-screw part 24123 is as the main driving of moving member 24121 translation, slide rail part 24122 as moving member 24121 translation from driving and become load bearing support.
Insulating part 2413 is connected with the yoke 24114 of cathode assembly 2411 and the moving member 24121 of translation assembly 2412 simultaneously.Preferably, insulating part 2413 is connected by countersunk screw with the yoke 24114 of cathode assembly 2411 and the moving member 24121 of translation assembly 2412.
In order to realize the automatization campaign of translation assembly 2412, translation assembly 2412 comprises a motor 24126 further, ball-screw part 24123 is electrically connected a motor 24126, the screw rod 241232 in ball-screw part 24123 is driven to rotate by motor 24126, then nut 241231 translation on screw rod 241232 is made, then the slide block 241221 in transmission slide rail part 24122, to realize the translation of cathode assembly 2411.Motor 24126 is preferably a servomotor, by a toothed belt transmission ball-screw part 24123.
The slide rail part 24122 of translation assembly at least comprises two slide rail parts 241222 and is distributed in the both sides of ball-screw part 24123.
Translation assembly 2412 also comprises a photoelectric sensor 24127, is divided into the both sides of the screw rod 241232 of ball-screw part 24123, automatically comes and goes translation to realize nut 241221 on screw rod 241222; Realized by the turning direction controlling screw rod 241222 after induction nut 241221 position signal especially by by photoelectric sensor 24127.
Easily be installed in this production line to realize this cathode assembly, and the negative electrode needed for can configuring according to production line demand, this cathode assembly 2411 also comprises a connection piece 24116, this web member 24116 is flexibly connected with the casing of the plated film chamber in vacuum coating production line, and translation assembly 2412 connects this web member 24116.This web member 24116 is flexibly connected with the casing of the plated film chamber in vacuum coating production line, and this flexible connection is preferably hinged, specifically realizes by a hinge 24128.When this cathode assembly is multiple, this web member 24116 is same a connection piece, and now, multiple cathode assembly is connected on this web member 24116 altogether, and web member 24116 is preferably a back up pad 241161.As one preferably embodiment, this back up pad 241161 is bolted with strut member 24125.It should be noted that, gap between back up pad 241161 to strut member 24125 is directly proportional to cathode sputtering intensity, when distance between back up pad 241161 and strut member 24125 is larger, cathode sputtering intensity enhancing, distance between back up pad 241161 and strut member 24125 more hour, cathode sputtering strength reduction.Therefore, this cathode assembly can ensure the plated film homogeneity in production line and stability according to the magnetic intensity of target fine setting back up pad 241161 with strut member 24125 spacing h, in addition, after target uses for some time, target need not be changed by reducing h and still can maintain magnetic intensity needed for target, improve the utilization ratio of target.
The course of action of this cathode assembly is: motor 24126 drives the screw rod 241232 in ball-screw part 24123 to rotate, nut 241231 in ball-screw 24123 is along screw rod 241232 translation, nut 241231 is connected with moving member 24121, nut 241231 drives moving member 24121 to move, moving member 24121 is connected with cathode assembly 2411 by insulating part 2413, and such moving member 24121 drives cathode assembly 2411 to move; Nut 241231 due to ball-screw part 24123 can not bear the weight of cathode assembly 2411, moving member 24121 is connected with the slide block 241221 of slide rail part 24122, slide block 241221 coordinates with slide rail 241222, like this when nut 241231 drives moving member 24121 to move, slide block 241221 on moving member 24121 moves along slide rail 241222, alleviates the weight that nut 241231 bears.
The working process of whole coating film production line is: regulate the position of beam 1321 and setting element 1322 to be arranged on device 13 by substrate by regulating in loading device 12, loading device moves on delivery vehicle 112 by the transport unit 127 on delivery vehicle 112 by loading device 12, and delivery vehicle 112 is rolled by wheel 1122 and moved on track 111, when loading device 12 is transported on rotating platform mechanism 14 by delivery vehicle 112, loading device 12 moves on rotating disk 1422, after rotating disk 1422 rotates 180 degree, after limiting angle of rotation by limit assembly 143, loading device 12 aims at the rotation family of power and influence 28 of the snout cavity 21 of plated film streamline 20, rotate the family of power and influence 28 and drive the family of power and influence 2811 by cylinder 2821, after the family of power and influence 2811 opens to 90 degree, after loading device 12 enters snout cavity 21, rotate the family of power and influence 28 to close, loading device 12 is through each chamber indoor moving of transmission rig 29 at plated film streamline 20, in plated film chamber 24 after film coating apparatus 241 plated film, shift out from plated film streamline 20 after the rotation family of power and influence 28 of outlet plenum 27, enter in transmission class waterline 10 and unload subtegulum.
It is worth mentioning that, in whole coating film production line process, substrate all keeps vertical state.For making substrate keep vertical state, and do not have any infringement to substrate, whole coating film production line comprises a guidance system 30 further, and guidance system 30 is arranged on transmission class waterline 10 and plated film streamline 20, and this guidance system 30 directly contacts without any with substrate.Guidance system 30 comprises positioning guide 31 and a load guide 32, positioning guide 31 and load guide 32 coordinate, load guide 32 is arranged on loading device 12, and positioning guide 31 is arranged in each chamber of delivery vehicle 112, rotating platform mechanism 14 and plated film streamline 20.
Load guide 32 is arranged on the first baffle plate 1211, load guide 32 comprises one first director element 321, second director element 322 and the 3rd director element 323 further, second director element 322 is connected with the first baffle plate 1211, first director element 321 is flexibly connected with the second director element 322, and the 3rd director element 323 is arranged between the first director element 321 and the second director element 322.
Positioning guide 31 comprises guiding trestle 311 and a setting element 312, and setting element 312 is arranged on guiding trestle 311, and guiding trestle 311 is arranged in each chamber of delivery vehicle 112, rotating platform mechanism 14 and plated film streamline 20.
When load guide 32 coordinates with positioning guide 31, setting element 312 coordinates with the 3rd director element 323.
Setting element 312 repels with the 3rd director element 323 phase, and setting element and the 3rd director element are all magnetics and with magnetic pole in other words, two magneticss are all N pole or are all S pole.
Setting element 312 attracts with the 3rd director element 323 phase, setting element 312 and the 3rd director element 323 is all magnetics and magnetic pole is different.
Setting element 312 attracts with the 3rd director element 323 phase, and setting element 312 is magnetics, and the 3rd director element 323 is made for iron material.
Setting element 312 attracts with the 3rd director element 323 phase, and the 3rd director element 323 is magnetics, and setting element 312 is made for iron material.
In addition, in order to control the speed of delivery vehicle and specify delivery vehicle to stop the position of lade, coating film production line is provided with production line monitoring system; This supervisory system, produces the working order of system, device for monitoring plated film; This system comprises display module, processing module, data memory module, communication interface module, data conversion module and distribution each monitor component on a production line; Described display module connects described processing module, and described processing module connects described data memory module, and described data memory module is connected with described data conversion module by described communication interface module; Described data conversion module, by fieldbus, communicates with distribution each monitor component on a production line; Described data conversion module is gathered the data in affiliated monitor component by described fieldbus, and row format of going forward side by side transforms, to form unified data and to be sent to described data memory module by described communication interface module; Described data memory module is for storing the data sent; Described processing module reads the data in described data memory module and processes, and is then sent to the display of described display module.Described monitor component mainly comprises monitoring position assembly and speed monitoring assembly; Whether described monitoring position assembly runs to specified location at least one equipment judges; Described speed monitoring assembly carries out identification to the travelling speed of at least one equipment and judges.Described monitoring position assembly is photosignal induction installation.Described speed monitoring assembly is speed sensor.
As one preferably embodiment, described supervisory system also comprises a Controlling System; Described Controlling System and speed monitoring system wireless connections, to the speed signal fed back after judging to identify, pass to Controlling System, Controlling System sends command adapted thereto again, controls after supervisory system accepts instruction to the travelling speed of equipment.
Photoelectric signal device can select infrared electro inductor block, and means of identification can carry out infrared rays identification to it; This inductor block is installed on the import and export place of above-mentioned seven chambers respectively, delivery vehicle 112 is at least provided with two groups of different photosignal induction installations, and slowing down respectively as delivery vehicle controls, and delivery vehicle 112 stops controlling.
The working process of this supervisory system is as follows: when delivery vehicle 112 is by when needing the substrate of plated film to bring this production line into, the particular location of delivery vehicle 112 place production line is obtained in real time respectively by corresponding photosignal induction installation, and the adjustment of travelling speed is made according to delivery vehicle position, as when plated film chamber, will the speed of delivery vehicle 112 be made extremely slow; In addition, in order to mate the operational requirements of corresponding station, also can set up corresponding stop signal projector at each station, when the photosignal induction installation on delivery vehicle 112 obtains corresponding stop signal, this supervisory system will be had to control it and automatically stop at corresponding station.In addition, wherein especially plated film chamber is operationally for plated film streamline, will the loading device 12 of uniform speed slow, now optoelectronic induction is for responding to the effect of pedestal position, and being only stuck in or falling down power wheel at loading device 12, when loading device 12 bumps against, carrying out maintenance of equipment needs to stop loading device 12 to run, all the other time plated film streamline photoelectricity only sensed position, by the change of the control speed speed of surge chamber.
Workflow brief description for hand-set lid protection screen continuous coating production line provided by the invention is as follows:
After the substrate of required plated film is loaded loading device, supervisory system detects that loading device has arrived plated film streamline ingress, the rotation family of power and influence controlling ingress is opened, loading device 12 will enter plated film streamline 20 under transmission rig 29 drives, now supervisory system is by the vacuum tightness of the chamber at Real-Time Monitoring substrate place and other technic indexs, and the index all recorded adjustment correlation parameter; After plated film terminates, the loading device of plated film arrives the exit of plated film streamline, and now with the rotation family of power and influence of ingress, the rotation family of power and influence in exit opens, and substrate shifts out plated film streamline 20; By mechanical manipulator or manual operation, substrate is put on rotating platform structure 14, after band rotating platform mechanism 14 rotates 180 °, substrate enters transmission class waterline 10, then transport unit 11 is had to continue transport substrate, now, the effect of substrate coating can being detected, as needed to enter plated film streamline 20 further again, after 180 ° can being rotated by rotating platform mechanism again, again entering plated film streamline 20; Or plated film is complete, packaging is dispatched from the factory.
It should be noted herein, in order to give prominence to and simplify the constructional feature of production line provided by the invention, to eliminate in production line structure or the equipment of other and prior art, this production line can adjust flexibly according to the demand of coated product, mate with all kinds of standard films of prior art and use, therefore not to repeat here.
Target utilization and plated film stability and homogeneity test experience
Metal targets-niobium target is adopted to be example, adopt the method (Zhao Jiaxue etc. calculating target utilization in prior art, the discussion of common magnetic control spattering target utilization ratio and method of calculation thereof, nucleosynthesis and plasma physics, in March, 2007), calculate the same target utilization in the cathode assembly of the production line of multiple identical said structure and target replacement cycle, concrete data are as shown in table 1:
Table 1
| Numbering | Target utilization | Replacement cycle |
| Production line 1 | 35％ | 7 days |
| Production line 2 | 38％ | 9 days |
| Production line 3 | 35％ | 8 days |
| Production line 4 | 36％ | 9 days |
| Production line 5 | 40％ | 10 days |
Figure 30 is the etching figure (using after 3 ~ 4 days) of the target surface of above-mentioned production line 1, Figure 31 is the target surface etching figure of the same metal target adopting fixed planar cathode, Figure 30 and Figure 31 compares, the etch areas of the target in this cathode assembly obviously increases, and whole target surface all can sputter; Figure 32 is that (a-quadrant is prior art target section to the target Profile Correlation schematic diagram of above-mentioned two negative electrodes when need change target, B region is target section of the present invention), as shown in figure 32, the target utilization of cathode assembly provided by the invention is obviously better than prior art midplane negative electrode (through contrast of weighing, it is more complete that target of the present invention uses), and whole etch areas is more even, the etching curvilinear slope of target obviously reduces, and sputters more uniform and stable.In addition, detect the coating effects in above-mentioned production line respectively, compared with the planar cathode of prior art, no significant difference, stability and the homogeneity of the plated film of the vacuum coating production line of this cathode assembly are good.
Finally be necessary described herein: above embodiment is only for being described in more detail technical scheme of the present invention; can not be interpreted as limiting the scope of the invention, some nonessential improvement that those skilled in the art's foregoing according to the present invention is made and adjustment all belong to protection scope of the present invention.
Claims (10)
1. one kind for hand-set lid protection screen continuous coating production line, described production line is vertical vacuum sputter coating production line, it is characterized in that, comprise: a transmission class waterline and a plated film streamline, plated film streamline is connected with transmission class waterline, transmission class waterline transmits substrate, plated film streamline comprises inlet plenum, import transition chamber thereof, import buffer chamber, plated film chamber, outlet buffer chamber, outlet transition chamber and outlet chamber, described inlet plenum, import transition chamber thereof, import buffer chamber, plated film chamber, outlet buffer chamber, outlet transition chamber and outlet chamber successively head and the tail are connected, described substrate enters plated film streamline by inlet plenum from transmission class waterline, shifted out from plated film streamline by outlet chamber, described transmission class waterline and plated film streamline be arranged in parallel.
2. as claimed in claim 1 for hand-set lid protection screen continuous coating production line, it is characterized in that: in plated film chamber, be provided with a moving cathode device, the target bombardment track on-fixed of the cathode assembly of described movable type.
3. as claimed in claim 2 for hand-set lid protection screen continuous coating production line, it is characterized in that: described moving cathode device comprises cathode assembly and translation assembly, described cathode assembly is fixedly connected with translation assembly and with the motion translation of translation assembly, wherein negative electrode is planar magnetic control sputtering cathode; Described cathode assembly is connected by an insulating part with translation assembly.
4. as claimed in claim 3 for hand-set lid protection screen continuous coating production line; it is characterized in that: described translation assembly is followed successively by moving member, ball-screw part, fabricated section and strut member from outside to inside; wherein moving member is connected with the nut in insulating part and ball-screw part respectively; fabricated section is connected with the mounting block in ball-screw part, and fabricated section is connected with strut member.
5. as claimed in claim 1 for hand-set lid protection screen continuous coating production line; it is characterized in that: described plated film streamline is provided with at least one transmission rig; described transmission rig is arranged at each chamber of plated film streamline, and substrate is transported by transmission rig in each chamber of plated film streamline.
6. as claimed in claim 2 for hand-set lid protection screen continuous coating production line; it is characterized in that: described plated film streamline is provided with the door body structure flux matched with each functional chamber number of chambers; described door body structure is configured at each function chamber; comprise room door and doorframe; the both sides of room door are all flexibly connected with doorframe, the door body structure size of each function chamber configuration and to configure the mode of each function chamber all consistent.
7. as claimed in claim 2 for hand-set lid protection screen continuous coating production line, it is characterized in that: described plated film streamline comprises at least one pipeline coupling assembly, described pipeline coupling assembly comprises male part and lower male part, upper and lower male part is flexibly connected and seals, and upper and lower male part is fixedly connected with same pipeline respectively; During upper and lower male part coupling sealing, pipeline communication; When upper and lower male part is separated, pipeline disconnects.
8. as claimed in claim 2 for hand-set lid protection screen continuous coating production line; it is characterized in that: describedly comprise at least one loading device for hand-set lid protection screen continuous coating production line; described loading device comprises a fixation kit and an adjusting part; adjusting part is arranged on fixation kit, by the substrate regulating the position of adjusting part to install different size.
9. as claimed in claim 2 for hand-set lid protection screen continuous coating production line; it is characterized in that: described plated film streamline comprises at least two and rotates the family of power and influence; the described rotation family of power and influence is arranged on the chamber wall that inlet plenum and outlet chamber contact with transmission class waterline; rotate the family of power and influence and comprise family of power and influence's assembly and family of power and influence's driven unit; family of power and influence's driven unit is connected with family of power and influence's assembly one end, is rotated by family of power and influence's driven unit driving gate valve module.
10. as claimed in claim 2 for hand-set lid protection screen continuous coating production line, it is characterized in that: described transmission class waterline comprises transport unit described at least one transport unit and comprises track and at least one delivery vehicle, track is charged, delivery vehicle comprises at least two electrode lead-throughs, and electrode lead-through is electrically connected with track and drives delivery vehicle to orbit; Loading device is arranged on transport unit.
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| CN201610072203.0A CN105543801B (en) | 2013-12-16 | 2013-12-16 | One kind being used for hand-set lid protection screen continuous coating production line |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310690991.6A CN104004999B (en) | 2013-12-16 | 2013-12-16 | A kind of vertical vacuum sputter coating production line |
| CN201610072203.0A CN105543801B (en) | 2013-12-16 | 2013-12-16 | One kind being used for hand-set lid protection screen continuous coating production line |
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| CN201310690991.6A Division CN104004999B (en) | 2013-12-16 | 2013-12-16 | A kind of vertical vacuum sputter coating production line |
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| CN105543801B CN105543801B (en) | 2018-12-21 |
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| CN201610072203.0A Active CN105543801B (en) | 2013-12-16 | 2013-12-16 | One kind being used for hand-set lid protection screen continuous coating production line |
| CN201310690991.6A Active CN104004999B (en) | 2013-12-16 | 2013-12-16 | A kind of vertical vacuum sputter coating production line |
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| CN110129743A (en) * | 2019-01-04 | 2019-08-16 | 东莞市鸿瀚电子材料有限公司 | A kind of mobile phone camera eyeglass plating AR membrane process |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN104004999B (en) | 2016-03-09 |
| CN104004999A (en) | 2014-08-27 |
| CN105543801B (en) | 2018-12-21 |
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