CN112974082A

CN112974082A - High-purity target vacuum spraying device

Info

Publication number: CN112974082A
Application number: CN202110170481.0A
Authority: CN
Inventors: 余成有
Original assignee: Xiamen Baishun Xing Automation Technology Co ltd
Current assignee: Xiamen Baishun Xing Automation Technology Co ltd
Priority date: 2021-02-08
Filing date: 2021-02-08
Publication date: 2021-06-18

Abstract

The invention relates to a high-purity target vacuum spraying device, which can comprise: a frame; the horizontal vacuum cylinder is fixedly arranged on the rack, is made of stainless steel, has an inner diameter smaller than 500 mm, is polished on the inner wall, and is provided with a spray gun mounting port, a vacuum tube connector and a smoke exhaust port; the plasma spray gun is fixedly arranged on the spray gun mounting opening, a first water cooling structure is arranged on one section of the cylinder body on the two sides of the plasma spray gun, and a second water cooling structure for cooling the spray nozzle is arranged in the plasma spray gun; the target rotating and travelling mechanism is partially arranged on the rack and partially arranged in the cylinder and used for driving the target fixed on the target mounting tube to travel and rotate in the cylinder, and a third water cooling structure used for cooling the target and the target mounting tube is arranged on the target rotating and travelling mechanism; the vacuumizing assembly is communicated with the vacuum tube interface; and the smoke extraction assembly is arranged on the smoke extraction port and is used for extracting smoke generated in the spraying process in time. The invention can be used for manufacturing qualified high-purity target materials.

Description

High-purity target vacuum spraying device

Technical Field

The invention relates to a vacuum spraying device, in particular to a vacuum spraying device for manufacturing a high-purity target material.

Background

The lower the oxygen content of the target used for vacuum sputtering, the better, and the target having an oxygen content of 1000ppm or less is generally called a high purity target. The vacuum cylinder of the existing vacuum spraying device is a carbon steel cylinder with the diameter of 1.5 meters, the inner wall of the vacuum cylinder is easy to adsorb a large amount of oxygen, and in the spraying process, the oxygen adsorbed on the inner wall can be released at high temperature and further adsorbed on the target material, so that the oxygen content of the target material is high and the requirement of a high-purity target material cannot be met. Therefore, a vacuum spraying device capable of manufacturing high-purity target materials is urgently needed.

Disclosure of Invention

The present invention aims to provide a vacuum spraying apparatus for manufacturing high purity target material to solve the above problems. Therefore, the invention adopts the following specific technical scheme:

a high-purity target vacuum spraying device can comprise:

a frame;

the horizontal vacuum cylinder is fixedly arranged on the rack, is made of stainless steel, has an inner diameter smaller than 500 mm, and has a polished inner wall, and is provided with a spray gun mounting port, a vacuum tube interface and a smoke exhaust port;

the plasma spray gun is fixedly arranged on the spray gun mounting opening, a nozzle of the plasma spray gun is positioned in the horizontal vacuum cylinder, a first water cooling structure for cooling the horizontal vacuum cylinder is arranged on one section of the horizontal vacuum cylinder on two sides of the plasma spray gun, and a second water cooling structure for cooling the nozzle is arranged in the plasma spray gun;

the target rotating and travelling mechanism is partially arranged on the rack and partially arranged in the horizontal vacuum cylinder and is used for driving a target fixed on a target mounting pipe to travel and rotate in the horizontal vacuum cylinder, and a third water cooling structure for cooling the target mounting pipe and the target is arranged on the target rotating and travelling mechanism;

the vacuumizing assembly is communicated with the vacuum tube interface and is used for vacuumizing the horizontal vacuum cylinder;

and the smoke exhaust assembly is arranged on the smoke exhaust port and used for timely exhausting smoke generated in the spraying process.

Furthermore, the smooth finish Ra of the inner wall of the horizontal vacuum cylinder body is less than or equal to 1.5 um.

Furthermore, the horizontal vacuum cylinder is provided with an end cover which can be opened in a rotating mode, and an opening corresponding to the end cover is an inlet and an outlet of the target material.

Further, first water-cooling structure includes ring-shaped end plate, heliciform space bar and overcoat, the overcoat has the water inlet that is located one end below and the delivery port that is located the other end upper end, and ring-shaped end plate, heliciform space bar and overcoat welding are in the same place in order to form the follow the water inlet extremely encircle of delivery port the heliciform passageway of horizontal vacuum cylinder outer wall.

Further, the plasma spray gun is a three-anode plasma spray gun.

Further, the three-anode plasma spray gun is provided with three feed inlets which are uniformly spaced in the circumferential direction, and an anode is arranged between the two feed inlets.

Further, the target material rotation traveling mechanism comprises a first rail, a second rail, a first mounting seat and at least two second mounting seats, a rotating shaft, a first driving device and a second driving device, wherein the first rail and the second rail are respectively arranged on the rack and in the horizontal vacuum cylinder body and are in a straight line, the first mounting seat and the second mounting seat are respectively and slidably jointed on the first rail and the second rail, the rotating shaft is rotatably arranged on the first mounting seat and the second mounting seat, one end of the rotating shaft is in driving connection with the first driving device, the other end of the rotating shaft is connected with one end of the target material mounting tube, the target material is sleeved in and mounted on the target material mounting tube from the other end of the target material mounting tube, the tail end of the rotating shaft is rotatably arranged on the second mounting seat, the first driving device and the second driving device are arranged on the rack, and the first mounting seat and the rotating shaft are respectively in driving connection.

Furthermore, the second water-cooling structure is composed of a water inlet pipe, the target mounting pipe and the rotating shaft, the water inlet pipe is mounted on the second mounting seat and is connected with the target in a sealing mode through a flange, and the free end of the rotating shaft is a water outlet.

Further, the first driving device comprises a first motor, two first synchronous wheels and a first synchronous transmission belt, the first motor is fixed on the rack, the two first synchronous wheels are respectively fixed on an output shaft of the first motor and the rotating shaft, and the first synchronous transmission belt is wound on the two first synchronous wheels; and the second driving device comprises a second motor, two second synchronous wheels and a second synchronous transmission belt, the second motor is fixed on the rack, one of the two second synchronous wheels is fixed on an output shaft of the motor, the other one of the two second synchronous wheels is fixed on the rack, the second synchronous transmission belt is wound on the two second synchronous wheels, and the first mounting seat is fixedly connected with the second synchronous transmission belt.

Furthermore, the vacuum pumping assembly and the smoke pumping assembly respectively comprise T-shaped three-way pipes, a switching device is arranged on each three-way pipe and comprises a cylinder and a valve plate, at least two O-shaped sealing rings are arranged on the circumference of each valve plate, and the cylinder pushes the valve plates to reciprocate so as to seal or open the vacuum pipe interfaces and the smoke pumping interfaces.

By adopting the technical scheme, the invention has the beneficial effects that: the invention adopts the stainless steel vacuum cylinder with the polished inner wall with small diameter, the area of the inner wall is small, and oxygen is not easy to absorb, so that the oxygen absorbed by the inner wall of the vacuum cylinder is greatly reduced, meanwhile, the operation mode that the spray gun is fixed and the target material moves is adopted, so that only the part of the vacuum cylinder around the spray gun is heated, and the part of the vacuum cylinder is provided with the corresponding water cooling structure, so that the temperature is reduced, the release amount of the oxygen absorbed on the inner wall is greatly reduced, therefore, the oxygen content of the target material can be controlled in a lower range, and the requirement of the high-purity target material is. In addition, as the diameter of the vacuum cylinder body is reduced, the occupied space can be greatly reduced.

Drawings

To further illustrate the various embodiments, the invention provides the accompanying drawings. The accompanying drawings, which are incorporated in and constitute a part of this disclosure, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the embodiments. Those skilled in the art will appreciate still other possible embodiments and advantages of the present invention with reference to these figures. Elements in the figures are not drawn to scale and like reference numerals are generally used to indicate like elements.

FIG. 1 is a perspective view of a high purity target vacuum coating apparatus according to the present invention;

FIG. 2 is a perspective view of the high purity target vacuum coating apparatus shown in FIG. 1 with the outer cover removed;

FIG. 3 is an enlarged view at A of FIG. 2 showing a first cooling configuration;

FIG. 4 is a perspective view of a horizontal vacuum cylinder of the high purity target vacuum spraying apparatus shown in FIG. 2;

FIG. 5 is a partially cut-away perspective view of the high purity target vacuum coating apparatus shown in FIG. 1;

FIG. 6 is a perspective view of the high purity target vacuum coating apparatus shown in FIG. 1 after being cut in a centered manner;

FIG. 7 is a front view of the plasma torch of the high purity target vacuum spraying apparatus shown in FIG. 1;

Detailed Description

The invention will now be further described with reference to the accompanying drawings and detailed description.

As shown in fig. 1 to 7, a vacuum spraying apparatus for high purity target material may include a frame 1, a horizontal vacuum cylinder 2, a plasma spray gun 3, a target material rotation traveling mechanism, a vacuum pumping assembly, a smoke pumping assembly, and the like. The frame 1 is welded by steel. The horizontal vacuum cylinder (hereinafter referred to as cylinder) 2 is fixedly installed on the frame 1. The barrel 2 may be made of stainless steel (e.g., 304L) with an inner diameter of less than 500 mm and the inner wall polished to a semi-or specular surface (i.e., a finish Ra ≦ 1.5 um). The cylinder body 2 can be divided into a plurality of sections and assembled together, so that the processing is convenient, and the processing cost is reduced. The cylinder 2 is provided with an operation port, a material inlet and outlet 22, an observation window 23, a spray gun mounting port, a vacuum tube interface 25, a smoke exhaust port 26, a safety valve interface 27 and the like. The operation opening is located on the side of the cylinder body near the left end of the cylinder body 2, and a sealing cover 21 which can be opened in a rotating way is arranged on the operation opening. The sealing cover 21 is opened during feeding and discharging, and at the moment, an operator can connect or disconnect the rotating shaft and the target mounting tube. The feed/discharge port 22 is provided at the right end of the cylinder 2, and a sealing cap (also referred to as an end cap) 220 is rotatably opened and mounted thereon. The end cap 220 is opened during feeding and discharging, and the operator can load the target material which is not sprayed into the cylinder 2 or remove the target material which is sprayed from the cylinder 2. The observation window 23 is installed on the same circumference of the barrel 2 as the torch mounting port, which is located on the side of the barrel 2, for mounting the plasma torch 3. The viewing window 23 forms an angle of approximately 135 degrees with the torch mounting opening to facilitate viewing of the operation of the plasma torch 3. A vacuum tube connection 25 is provided on the bottom of the barrel 2 near the feed and discharge port 22 for mounting a vacuum assembly. The vacuumizing assembly is used for vacuumizing the cylinder body 2. A smoking port 26 is located on the same circumference as the spray gun mounting port and is provided at the bottom of the barrel 2 for mounting a smoking assembly. The smoke exhaust assembly is used for timely exhausting smoke generated in the spraying process. The safety valve interfaces 27 are disposed at both ends of the cylinder 2 for installing the safety valves 7, and the safety valves 7 are used for preventing accidents caused by excessive internal pressure when the cylinder 2 is filled with nitrogen.

The plasma spray gun 3 is fixedly arranged on the spray gun mounting opening, and the nozzle of the plasma spray gun is positioned in the horizontal vacuum cylinder body so as to carry out plasma vacuum spraying on the target material. Since a large amount of heat is generated during the spraying, the heat is transferred to the cylinder 2, and oxygen adsorbed on the inner wall of the cylinder 2 is released, and the released oxygen is incorporated into the target. In order to reduce the oxygen release amount, the cylinder 2 needs to be cooled. Therefore, the first water cooling structure for cooling the section of the cylinder 2 is arranged on the section of the cylinder 2 at two sides of the plasma spray gun 3. Specifically, the first water-cooled structure includes an annular end plate 280, helical spacer bars 281, and an outer jacket 282. Wherein the ring-shaped end plates 280 are welded to both ends of the outer sleeve 282. The spiral spacer 281 is welded to the outer wall of the barrel 2. The housing 282 has a water inlet (not shown) at a lower end of one end and a water outlet 283 at an upper end of the other end. The annular end plate 280, the helical spacer 281 and the jacket are welded together to form a helical channel around the outer wall of the bowl 2 from the inlet to the outlet. Cold water may flow along the helical path to cool the cylinder 2, thereby reducing the amount of oxygen released.

A second water cooling arrangement (not shown) is provided within the plasma torch 3 for cooling the nozzle 31 to avoid overheating of the nozzle 31. The second water-cooling structure is well known and will not be described here. Preferably, the plasma torch 3 is a three-anode torch. Specifically, the plasma torch 3 has three feed ports 32 uniformly spaced in the circumferential direction, and one anode 33 is provided between each two feed ports 32, as shown in fig. 6.

The target rotating and travelling mechanism is partially arranged on the frame 1 and partially arranged in the cylinder 2 and is used for driving the target fixed on the target mounting tube 40 to travel and rotate in the cylinder 2. Specifically, the target rotation traveling mechanism includes a first rail 41, a second rail 42, a first mounting base 43 and at least two second mounting bases 44 (3 are shown), a hollow rotating shaft 45, a first driving device and a second driving device. The first rail 41 and the second rail 42 are installed on the frame 1 and in the cylinder 2, respectively, and are aligned. The first and

second mounts

43, 44 are slidably engaged on the first and

second rails

41, 42, respectively. That is, the first mounting seat 43 is located outside the cylinder 2, and the second mounting seat 44 is located inside the cylinder 2. The first and second mounting

seats

43 and 44 have the same structure, are in the form of a cart, and can travel along the first and

second rails

41 and 42. In order to prevent the first mounting seat 43 and the second mounting seat 44 from jumping during walking, a roller 48 is further fixed on the top of the first mounting seat 43 and the second mounting seat 44, and the roller 48 is matched with a pressure rod 49 above the roller 48. The rotating shaft 45 is rotatably mounted (via corresponding bearings and bearing seats) on the first mounting seat 43 and the second mounting seat 44, and has one end connected to one end of the target mounting tube 40 and the other end as a free end. The rotating shaft 45 can be divided into multiple sections and then connected together through flanges, so that the processing is convenient, and the processing cost is reduced. The other end of the target mounting tube 40 is a free end, so that the target 100 can be sleeved in and mounted on the target mounting tube 40 from the free end of the target mounting tube 40, and the tail end of the target 100 is rotatably mounted on the second mounting seat 44 at the tail end. The first driving device and the second driving device are installed on the rack and are in driving connection with the rotating shaft and the first installation seat respectively. Therefore, the first driving device drives the target material 100 to rotate so as to realize circumferential spraying of the target material 100, and after one circle of spraying is finished, the second driving device drives the target material 100 to move one position along the axial direction for the next circle of spraying, and the steps are repeated until the whole target material 100 is sprayed.

As shown in fig. 2, the first driving means includes a first motor 461, two first synchronizing wheels 462a and 462b, and a first synchronizing belt 463. The first motor 461 is fixed to the frame 1 below the rotating shaft 45. Two first synchronous wheels 462a and 462b are fixed to the output shaft of the first motor 461 and the rotating shaft 45, respectively. Two first synchronizing wheels 462a and 462b are disposed one above the other. A first timing belt 463 is looped around the two first timing wheels 462a and 462 b. The first motor 461 rotates to drive the rotating shaft 45 to rotate through the first synchronous transmission belt 463, and further drive the target 100 to rotate. Likewise, the second driving means includes a second motor 471, two

second timing wheels

472a and 472b and a second timing belt 473. A second motor 471 is fixed to the frame 1, one 472a of the two

second synchronizing wheels

472a and 472b is fixed to an output shaft of the second motor 471, and the other 472b is fixed to the frame 1. Two

second synchronizing wheels

472a and 472b are arranged left and right (in the length direction of the frame 1). The second timing belt 473 is looped around the two

second timing wheels

472a and 472b, and the first mount 43 is fixedly connected to the second timing belt 473. Therefore, the second motor 4 rotates to drive the first mounting seat 43 to move along the first rail 41 through the second synchronous transmission belt 473, and further drive the target 100 to move along the second rail 42 in the cylinder. The first motor 461 and the second motor 471 may be servo motors.

Since the temperature of the target material 100 is increased during the spraying process and the temperature of the target material mounting tube 40 is also increased, oxygen adsorbed on the target material mounting tube 40 is released. It needs to be cooled. Correspondingly, the target rotating and traveling mechanism is provided with a third water cooling structure for cooling the target mounting tube 40 and the target 100, specifically, the second water cooling structure is composed of a water inlet tube 410, the target 100, the target mounting tube 40 and a rotating shaft 45, the water inlet tube 410 is mounted on the second mounting seat 44 and is hermetically connected with the target 100 through a flange, and the free end 450 of the rotating shaft 45 is a water outlet. That is, the water inlet pipe 410, the target material 100, the target material mounting pipe 40 and the rotating shaft 45 are hermetically connected to each other, a water passage is formed by the central through hole thereof, and cold water enters from the water inlet pipe 410, sequentially passes through the target material 100, the target material mounting pipe 40 and the rotating shaft 45, and flows out from the free end of the rotating shaft 45 to cool the target material mounting pipe 40 and the target material 100, while the oxygen release amount of the target material mounting pipe 40 can be reduced.

As shown in fig. 2 and 6, the evacuation and smoking assemblies each include a T-tee 51 (illustrated here as a smoking assembly, which is similar). The tee pipe 51 includes three ports (a middle port for connecting an air suction device (not shown), such as a blower or a blower and a filter, and two ports, one of which is used for connecting a pipe communicated with the smoke exhaust port 26, and the other of which is provided with a switching device, the switching device includes a cylinder 52 and a valve plate 53, a plurality of gasket mounting grooves 531 (two shown) are provided on the circumference of the valve plate 53, and one O-ring (not shown) can be mounted on each gasket mounting groove 531. That is, at least two O-rings are installed on the circumference of the valve plate 53, and thus, a good sealing function can be achieved. The cylinder 52 pushes the valve plate 53 to reciprocate, opening or closing the smoke evacuation port 26. When a vacuum is drawn, the vacuum tube connector 25 is opened and the smoke vent 26 is closed. During the spraying operation, the vacuum tube connection 25 is closed and the smoke evacuation port 26 is opened.

In addition, an oxygen meter (not shown) is provided in the cylinder 2, and when the oxygen content in the cylinder exceeds a predetermined value, the spraying operation is automatically stopped.

As shown in fig. 1, the cylinder 2 is further provided with a corresponding openable shield 20 to protect the safety of the worker.

Further, as shown in fig. 2 and 5, a vacuum coating apparatus for high purity target material further comprises a feeding and discharging mechanism movably disposed on the side of the feeding and discharging port 22 of the cylinder 2, and comprising a movable support 81, a third rail 82 mounted on the movable support, and a moving carriage 83 slidably engaged with the third rail 82, the moving carriage 83 being controllable by a remote controller. The third track 82 may be connected to the second track 42. The traveling carriage 83 is provided with a structure (e.g., pin hole fitting) for quick removal connection with the second mount 44. During feeding, the movable support 81 moves to the feeding and discharging port 22, so that the third rail 82 is connected with the second rail 42, the movable trolley 83 is connected with the second mounting seat 44, the second mounting seat 44 filled with the target material 100 to be sprayed is moved to the second rail 42 from the third rail 82, and after the movable trolley is moved in place, the movable trolley is separated from the second mounting seat 44, and the rotating shaft and the target material mounting pipe are connected at an operation window; during discharging, the rotating shaft and the target mounting tube are disconnected at the operation window, the movable trolley is connected with the second mounting seat 44, the target 100 is moved out of the cylinder 2 by controlling the movable trolley, too much operation is not required to be performed in the cylinder 2, and the labor intensity of workers is reduced.

The invention adopts the stainless steel vacuum cylinder with the polished inner wall with small diameter, the area of the inner wall is small, and oxygen is not easy to absorb, so that the oxygen absorbed by the inner wall of the vacuum cylinder is greatly reduced, meanwhile, the operation mode that the spray gun is fixed and the target material moves is adopted, so that only the part of the vacuum cylinder around the spray gun is heated, and the part of the vacuum cylinder is provided with the corresponding water cooling structure, so that the temperature is reduced, the release amount of the oxygen absorbed on the inner wall is greatly reduced, therefore, the oxygen content of the target material can be controlled in a lower range, and the requirement of the high-purity target material is. In addition, as the diameter of the vacuum cylinder body is reduced, the occupied space can be greatly reduced.

While the invention has been particularly shown and described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

Claims

1. A high-purity target vacuum spraying device is characterized by comprising:

a frame;

2. The high purity target vacuum spraying apparatus according to claim 1, wherein: the smooth finish Ra of the inner wall of the horizontal vacuum cylinder body is less than or equal to 1.5 um.

3. The high purity target vacuum spraying apparatus according to claim 1, wherein: the horizontal vacuum cylinder is provided with an end cover which can be opened in a rotating mode, and an opening corresponding to the end cover is an inlet and an outlet of the target material.

4. The high purity target vacuum spraying apparatus according to claim 1, wherein: first water-cooling structure includes ring end plate, heliciform space bar and overcoat, the overcoat has the water inlet that is located one end below and the delivery port that is located the other end upper end, and ring end plate, heliciform space bar and overcoat welding are in the same place in order to form the follow the water inlet extremely encircle of delivery port the heliciform passageway of horizontal vacuum cylinder outer wall.

5. The high purity target vacuum spraying apparatus according to claim 1, wherein: the plasma spray gun is a three-anode plasma spray gun.

6. The high purity target vacuum spraying apparatus according to claim 5, wherein: the three-anode plasma spray gun is provided with three feed inlets which are uniformly spaced in the circumferential direction, and an anode is arranged between the two feed inlets.

7. The high purity target vacuum spraying apparatus according to claim 1, wherein: the target material rotating and traveling mechanism comprises a first rail, a second rail, a first mounting seat, at least two second mounting seats, a hollow rotating shaft, a first driving device and a second driving device, wherein the first rail and the second rail are respectively arranged on a rack and in the horizontal vacuum cylinder body and are in a straight line, the first mounting seat and the second mounting seat are respectively and slidably jointed on the first rail and the second rail, the rotating shaft is rotatably arranged on the first mounting seat and the second mounting seat, one end of the rotating shaft is in driving connection with the first driving device, the other end of the rotating shaft is connected with one end of the target material mounting tube, the target material is sleeved in the target material mounting tube from the other end of the target material mounting tube and is arranged on the target material mounting tube, the tail end of the rotating shaft is arranged on the second mounting seat, the first driving device and the second driving device are arranged on the rack, and the first mounting seat and the rotating shaft are respectively in driving connection.

8. The high purity target vacuum spraying apparatus according to claim 7, wherein: the third water-cooling structure is composed of a water inlet pipe, the target, a target mounting pipe and the rotating shaft, the water inlet pipe is mounted on the second mounting seat and is in sealing connection with the target through a flange, and the free end of the rotating shaft is a water outlet.

9. The high purity target vacuum spraying apparatus according to claim 7, wherein: the first driving device comprises a first motor, two first synchronous wheels and a first synchronous transmission belt, the first motor is fixed on the rack, the two first synchronous wheels are respectively fixed on an output shaft of the first motor and the rotating shaft, and the first synchronous transmission belt is wound on the two first synchronous wheels; and the second driving device comprises a second motor, two second synchronous wheels and a second synchronous transmission belt, the second motor is fixed on the rack, one of the two second synchronous wheels is fixed on an output shaft of the second motor, the other one of the two second synchronous wheels is fixed on the rack, the second synchronous transmission belt is wound on the two second synchronous wheels, and the first mounting seat is fixedly connected with the second synchronous transmission belt.

10. The high purity target vacuum spraying apparatus according to claim 1, wherein: the vacuum pumping assembly and the smoke pumping assembly respectively comprise T-shaped three-way pipes, a switching device is arranged on each three-way pipe and comprises a cylinder and a valve plate, at least two O-shaped sealing rings are arranged on the circumference of each valve plate, and the cylinder pushes the valve plates to reciprocate so as to seal or open the vacuum pipe interfaces and the smoke pumping ports.