CN104862662A - Multi-function continuous type vacuum plasma film coating system - Google Patents
Multi-function continuous type vacuum plasma film coating system Download PDFInfo
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- CN104862662A CN104862662A CN201510260335.1A CN201510260335A CN104862662A CN 104862662 A CN104862662 A CN 104862662A CN 201510260335 A CN201510260335 A CN 201510260335A CN 104862662 A CN104862662 A CN 104862662A
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Abstract
The invention relates to a multi-function continuous type vacuum plasma film coating system. The system comprises an unwinding device, a winding device, a vacuum plasma film coating device and a control device, and is characterized in that the unwinding device is located in front of the vacuum plasma film coating device, the winding device is located behind the vacuum plasma film coating device, and the unwinding device, the winding device and the vacuum plasma film coating device are independent separate structures; anti-venting structures are arranged at a workpiece inlet and a workpiece outlet of the vacuum plasma film coating device respectively; a workpiece tail end detector is arranged at the workpiece inlet of the vacuum plasma film coating device, a signal output end of the workpiece tail end detector is connected with a signal input end of the control device, and control signal input ends of the unwinding device and the winding device are connected with one control signal output end of the control device respectively; a roll material is sent out from the unwinding device, is subjected to film coating by the vacuum plasma film coating device and then enters the winding device, and the roll material workpiece is kept in a tensioning state all along in the whole process. The length of the strip-shaped workpiece is not limited and the system has the benefits of low energy consumption, cleanliness, pollution prevention, improvement of working efficiency and the like.
Description
Technical field
The present invention relates to a kind of Multifunctional continuous vacuum plasma coating system, belong to vacuum plasma filming equipment technical field.
Background technology
Existing technology carries out the vacuum plasma filming equipment of plated film processing to continuous band-shaped or plate-like product, backward in technique, energy consumption is high, membrane thickness unevenness, the shortcoming such as yield poorly, and the equipment processing this series products generally comprises periodic vacuum plasma filming equipment and continuous vacuum plasma coating equipment two kinds:
One, so-called periodic vacuum plasma filming equipment, the mode coming from its process for processing product is produced as a production cycle in the mode of a small amount of single charge, and product placement amount is fewer, and size is less, lighter in weight, sum up gained this kind of following shortcoming of equipment ubiquity:
1, production efficiency is low, and often producing a heat will again heat up and vacuumize, and the production cycle is long, and output is few.2, energy consumption is high, often produces a heat and all will again heat up and vacuumize, consume a large amount of electric energy; Simultaneously gas consumption is higher, often produces the process gas that a heat all will open firedoor handle unnecessary and bleeds off, and then is filled with new process gas and supplements furnace chamber.3, frock clamp is complicated, and make the product in stove (as banded or tabular) held stationary and do not encounter cavity inner wall in the process rotated, the frock clamp that design complexity fixes it.4, each tabular (such as stainless steel plate) is produced or banded (such as Stainless Steel Band) product utilization rate is low, due to the relation of frock clamp, as band-type product or plate-like product always will have the place be connected with frock, and these places are often blocked or have technique connecting hole, so that plated film is not plated to or has the place of technique connecting hole to remove, cause waste.5, target utilization is low, because frock clamp is more, so each plated film frock clamp to plating, can consume unnecessary target.6, reprocess utilization ratio low, product reprocessing narrow range, because as limited in tabular product length, width is also narrow, can not shape the product of large part, can only be used for shaping of smallclothes.
Two, as Fig. 8-1, shown in Fig. 8-2, continuous vacuum plasma coating equipment completes exactly and unreels in same sealed vacuum chamber, the equipment of plated film and rolling Continuous maching operation, the process section of plated film and the rotational power section design of transmission are at same vacuum chamber, in order to reduce the volume of vacuum chamber, often the vacuum cavity of the power section of transmission to be reduced as far as possible, thus the space can feeded is also smaller, the stocking space that result in processing is restricted, can not be used for thick in band that is heavy type, such as stainless steel plate, film or the band of lightweight rouleau can only be used for, other functions can not be expanded, plant factor is low, yield poorly.
Summary of the invention
Object of the present invention, be in order to solve existing for existing periodic and continuous vacuum plasma coating equipment can not be used for thick in band that is heavy type (such as stainless strip), the plated film processing of sheet material, the function of device extension is less, plant factor is low, the problems such as energy consumption is high, provide one to be mainly used in the Multifunctional continuous vacuum plasma coating system of thick and heavy band (such as stainless strip).
Object of the present invention can by taking following technical scheme to reach:
Multifunctional continuous vacuum plasma coating system, comprise unwinding device, wrap-up, vacuum plasma film coating apparatus and control device, its constructional feature is: unwinding device is positioned at before vacuum plasma film coating apparatus, wrap-up is positioned at after vacuum plasma film coating apparatus, and three is independent separate body structure; The workpiece import and export place of vacuum plasma film coating apparatus is respectively provided with anti-bleed structure, leaks to stop processing atmosphere; Workpiece end detector is provided with in the workpiece ingress of vacuum plasma film coating apparatus, the signal input part of the signal output part connection control device of described workpiece end detector, control device is provided with several signal output parts, a control signal output terminal of each connection control device of control signal input terminus of unwinding device, wrap-up, to control unwinding device, the feeding of wrap-up and rewinding by detecting the end of workpiece; Unwinding device has the structure of carrying and conveying 10-10000 rice coiled material, wrap-up has the structure of carrying and rolling 10-10000 rice coiled material, coiled material is sent from unwinding device, wrap-up is entered again after vacuum plasma film coating apparatus plated film, whole process remains that coiled material workpiece is in tensioning state, and these main component devices and electric control system finally define continuous vacuum plasma coating system.
Object of the present invention reaches mainly through taking following technical scheme:
Further, be provided with coding type to test the speed dress device in the workpiece exit of vacuum plasma film coating apparatus, the signal input part of the signal output part connection control device of coding type velometer, control device controls the rolling speed of wrap-up according to the coding tachometer signal received, thus form the control texture of continous way band plated film identical tension, after coiled material is sent from unwinding device through vacuum plasma film coating apparatus plated film to entering wrap-up, whole process remains that coiled material workpiece is in tensioning state.
Further, grating detector is set at the exit end unreeling position, whether walks end to detect band, the signal input part of the signal output part connection control device of grating detector, form workpiece end and detect and monitoring structure.
Further, arc power, bracing frame, water coolant inlet and outlet piping, pumping equipment and process gas intake ducting is provided with in vacuum plasma film coating apparatus, tape guide roller is provided with in the workpiece ingress of vacuum plasma film coating apparatus, strip-shaped piece exports from the outlet of unwinding device, the process section entering vacuum plasma film coating apparatus through tape guide roller carries out coating film treatment, outputs to wrap-up from the workpiece outlet of vacuum plasma film coating apparatus; In unwinding device, be provided with preheating, be provided with heating and insulation at process section, form the type of heating of continous way, while making the preheating of product energy, can also plated film be heated.
Further, described unwinding device comprises and unreels input driving motor, unreels input step-down gear, unreels shaft coupling, unreels device for sealing magnetic fluid, unreels speed-changing gear box, unreels harmomegathus head, unreels temperature-control heat couple, unreel heat-generating pipe and unreel vaccum case, unreels vaccum case door and unreels vision slit unreeling vaccum case is provided with.
Further, described wrap-up comprises rolling input driving motor, rolling input step-down gear, rolling shaft coupling, rolling device for sealing magnetic fluid, rolling speed-changing gear box, rolling harmomegathus head and rolling vacuum chamber housing, and rolling vacuum chamber housing is provided with rolling vacuum chamber housing door and rolling vision slit.
Further, described vacuum plasma film coating apparatus comprises technique vaccum case, technique water jacket, the joint flange cover being with cooling, cover plate, process heat galvanic couple, target assembly and target, technique heat-generating pipe, vacuumometer, joint flange and technique intake ducting, and technique vaccum case is provided with technique vision slit.
Further, described anti-bleed structure is made up of adjustable shutter.
Further, arrange two guide rails and two dismountable dollies at vacuum plasma film coating apparatus, described dolly is provided with 360 ° of rotating mechanisms, forms tubing vacuum plasma film coating apparatus; Described dolly comprises walking wheel, transmission link gear and rotor wheel, umbrella gear and carriage walking transmission input motor.
Further, many dollies are set at vacuum plasma film coating apparatus, form the vacuum plasma film coating apparatus of small workpiece; The dolly hanging workpiece comprises walking guide rail, walking wheel, transmission link gear, Rotatable umbrella tooth, bracing frame, gear, transmission rod and gear, linkage gear, workpiece transmission rod and bearing.
The present invention has following outstanding beneficial effect:
1, the present invention includes unwinding device, wrap-up, vacuum plasma film coating apparatus and control dress.Unwinding device is positioned at before vacuum plasma film coating apparatus, wrap-up is positioned at after vacuum plasma film coating apparatus, three is independent separate body structure, therefore, the length of the strip-shaped piece processed is unrestricted, and vacuum chamber volume is little, the kind being applicable to the workpiece of processing is more, there is energy consumption low, clean, pollution-free, output is high, use range is wide, rate of utilization is high, without complicated frock clamp, target utilization is high, improve the utilization ratio of heat, reduce the work period, improve the beneficial effects such as working efficiency, the requirement of the energy-saving and emission-reduction of country can be met comprehensively.
2, the present invention utilizes the design ap-plication of continous way band plated film identical tension and the use of tension control system, make band before plated film and be all a neat coiled strip after plated film, coiled material can be prevented loose and uneven, prevent band from damaging in lifting and transportation.The Grating examinations structure unreeling position and arrange, accurately can detect band and whether go to this when again changing steel coil strip, this system is installed simple, easy to use, and information feed back is timely, improves level of automation.The vision slit design at retractable volume two ends of the present invention wanders off as band and observes the viewing window changed in coating process process, makes personnel carry out timely adjusting process and regulate the constant tension system of unwinding and rewinding.
3, the present invention is provided with primary heater unit in unwinding device, is provided with heating and attemperator at process section, forms the type of heating of continous way, makes product can also heat plated film while preheating, has the beneficial effect improving thermo-efficiency.Because the present invention adopts horizontal type structure; namely target sputtering apparatus is positioned over below the plane of band; can prevent the larger particles that produces in ion sputtering process or the metallic dust that is not deposited on strip surface from dropping in the coat side of band, to ensure the high quality of product.
4, the present invention adopts the frame mode of insulation harmomegathus head, make entire volume band be put into above be unlikely to and housing contacts, this harmomegathus head adopts high temperature resistant, the insulating material of wear-resisting and high strength, enable entire volume band continuous coating, solve the technical problem of continuous coating medium power and band insulation.Vacuum plasma film coating apparatus (process section) two ends are for regulating the design of adjustable window shutter of vacuum pumping speed, decrease the consumption of process gas and improve gas homogeneity in process section, thus the film uniformity of entire volume band is improved.
5, the present invention adopts circular and is distributed in the design bottom process section, makes maintenance maintenance convenient, if certain target can not work simultaneously, does not affect the production of sliver, decreases maintenance time and cycle.By adopting modular design, have dismounting and easy to loading and unloading, adjustment spacial ability is large, safeguard and the beneficial effect such as convenient transportation.
Accompanying drawing explanation
Fig. 1-1 is the structural front view of the specific embodiment of the invention 1.
Fig. 1-2 is the structure vertical view of the specific embodiment of the invention 1.
Fig. 1-3 is structure left views of the specific embodiment of the invention 1.
Fig. 2-1 is the unwinding device structure vertical view of the specific embodiment of the invention 1.
Fig. 2-2 is wrap-up structure vertical views of the specific embodiment of the invention 1.
Fig. 3-1 is the structural front view of the vacuum plasma film coating apparatus of the specific embodiment of the invention 1.
Fig. 3-2 is structure vertical views of the vacuum plasma film coating apparatus of the specific embodiment of the invention 1.
Fig. 3-3 is structure left views of the vacuum plasma film coating apparatus of the specific embodiment of the invention 1.
Fig. 4-1 is the structural front view of the specific embodiment of the invention 2.
Fig. 4-2 is structure vertical views of the specific embodiment of the invention 2.
Fig. 5-1 is the vehicle structure front view of the specific embodiment of the invention 2.
Fig. 5-2 is vehicle structure vertical views of the specific embodiment of the invention 2.
Fig. 5-3 be in Fig. 5-1 A to structural representation.
Fig. 6-1 is the structural front view of the specific embodiment of the invention 3.
Fig. 6-2 is structure vertical views of the specific embodiment of the invention 3.
Fig. 7-1 is the suspension member vehicle structure front view of the specific embodiment of the invention 3.
Fig. 7-2 is suspension member vehicle structure vertical views of the specific embodiment of the invention 3.
Fig. 7-3 be in Fig. 7-1 B to structural representation.
Fig. 8-1 is the continuous vacuum plasma coating machine structural front view of prior art.
Fig. 8-2 is continuous vacuum plasma coating machine structure vertical views of prior art.
Fig. 9-1 is the periodic vacuum plasma coating equipment structural front view of prior art.
Fig. 9-2 is periodic vacuum plasma coating equipment structure vertical views of prior art.
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in further detail:
Specific embodiment 1:
With reference to Fig. 1-1, Fig. 1-2 and Fig. 1-3, the Multifunctional continuous vacuum plasma coating system that the present embodiment relates to, comprise unwinding device 1, wrap-up 2, vacuum plasma film coating apparatus 3 and control device 10, unwinding device 1 is positioned at before vacuum plasma film coating apparatus 3, wrap-up 2 is positioned at after vacuum plasma film coating apparatus 3, and three is independent separate body structure; The workpiece import and export place of vacuum plasma film coating apparatus 3 is respectively provided with anti-bleed structure 4, leaks to stop processing atmosphere; Workpiece end detector 8 is provided with in the workpiece ingress of vacuum plasma film coating apparatus 3, the signal input part of the signal output part connection control device 10 of described workpiece end detector 8, control device 10 is provided with several signal output parts, a control signal output terminal of each connection control device 10 of control signal input terminus of unwinding device 1, wrap-up 2, to control unwinding device 1, the feeding of wrap-up 2 and rewinding by detecting the end of workpiece; Unwinding device 1 has the structure of carrying and conveying 10-10000 rice coiled material, wrap-up 2 has the structure of carrying and rolling 10-10000 rice coiled material, coiled material is sent from unwinding device 1 and is entered wrap-up 2 through vacuum plasma film coating apparatus 3 plated film, whole process keeps coiled material workpiece to be in tensioning state, forms continuous vacuum plasma coating system.
In the present embodiment:
Coding type velometer 5 is provided with in the workpiece exit of vacuum plasma film coating apparatus 3, the signal input part of the signal output part connection control device 10 of coding type velometer 5, control device 10 controls the rolling speed of wrap-up 2 according to coding tachometer signal, form the control texture of continous way band plated film identical tension, coiled material is sent from unwinding device 1 and enters wrap-up 2 through vacuum plasma film coating apparatus 3 plated film, whole process keeps coiled material workpiece to be in tensioning state.
Grating detector is set at the exit end unreeling position 1, whether goes to end to detect band, the signal input part of the signal output part connection control device 10 of grating detector, form workpiece end and detect and monitoring structure.
Arc power, bracing frame 6, water coolant inlet and outlet piping 7, pumping equipment 11 and process gas intake ducting 12 is provided with in vacuum plasma film coating apparatus 3, tape guide roller 9 is provided with in the workpiece ingress of vacuum plasma film coating apparatus 3, strip-shaped piece 13 exports from the outlet of unwinding device 1, the process section entering vacuum plasma film coating apparatus 3 through tape guide roller 9 carries out coating film treatment, outputs to wrap-up 2 from the workpiece outlet of vacuum plasma film coating apparatus 3; In unwinding device, be provided with preheating, be provided with heating and insulation at process section, form the type of heating of continous way, while making the preheating of product energy, can also plated film be heated.
With reference to Fig. 2-1, described unwinding device 1 comprises and unreels input driving motor 1-1, unreels input step-down gear 1-2, unreels shaft coupling 1-3, unreels device for sealing magnetic fluid 1-4, unreels speed-changing gear box 1-5, unreels harmomegathus head 1-6, unreels temperature-control heat couple 1-7, unreel heat-generating pipe 1-8 and unreel vaccum case 1-9, unreels vaccum case door 1-10 and unreels vision slit 1-11 unreeling vaccum case 1-9 is provided with.
With reference to Fig. 2-2, described wrap-up 2 comprises rolling input driving motor 2-1, rolling input step-down gear 2-2, rolling shaft coupling 2-3, rolling device for sealing magnetic fluid 2-4, rolling speed-changing gear box 2-5, rolling harmomegathus head 2-6 and rolling vaccum case 2-7, and rolling vaccum case is provided with rolling vaccum case door 2-8 and rolling vision slit 2-9.
With reference to Fig. 3-1, Fig. 3-2 and Fig. 3-3, described vacuum plasma film coating apparatus 3 comprises technique vaccum case 3-6, technique water jacket 3-2, the joint flange of band cooling overlaps 3-3, cover plate 3-4, process heat galvanic couple 3-5, target assembly and target 3-7, technique heat-generating pipe 3-8, vacuumometer 3-9, joint flange 3-10 and technique intake ducting 3-11, and technique vaccum case is provided with technique vision slit 3-1.
Described anti-bleed structure 4 is made up of adjustable shutter.Control device 10 is made up of the PLC control device of routine, technique water jacket 3-2, process heat galvanic couple 3-5, target assembly and target 3-7, technique heat-generating pipe 3-8, is made up of the water jacket of routine techniques, thermopair, target assembly and target, heat-generating pipe.
Unreel input driving motor 1-1, unreel input step-down gear 1-2, unreel shaft coupling 1-3, unreel device for sealing magnetic fluid 1-4, unreel speed-changing gear box 1-5, unreel harmomegathus head 1-6, unreel temperature-control heat couple 1-7, unreel heat-generating pipe 1-8 and be respectively made up of motor, step-down gear, shaft coupling, device for sealing magnetic fluid, speed-changing gear box, harmomegathus head, temperature-control heat couple, heat-generating pipe.
Rolling input driving motor 2-1, rolling input step-down gear 2-2, rolling shaft coupling 2-3, rolling device for sealing magnetic fluid 2-4, rolling speed-changing gear box 2-5, rolling harmomegathus head 2-6 are respectively made up of the motor of routine techniques, step-down gear, shaft coupling, device for sealing magnetic fluid, speed-changing gear box, harmomegathus head.
Described anti-bleed structure 4 is made up of adjustable shutter.
The principle of work of the present embodiment is as follows:
The mode of operation of the present embodiment 1, that the crane of entire volume band material fork truck or band suspension hook drops it off and unreels on harmomegathus head 1-6 in unwinding device 1, then pull down on rolling harmomegathus head 2-6 in the traction of leader tape and tighten up, start receipts, the input driving motor of unwinding device, PLC is utilized to control, tension band material, band material is made to be level at process section, then close upper furnace door and lock, start pumping equipment, start to vacuumize, make heat-generating pipe be energized to heat simultaneously, the temperature of setting temp controlled meter, the band material of heating unreeling machine, after the band material of unreeling machine reaches design temperature, and connect the heat-generating pipe of process section simultaneously, and heat, after setting technological temperature is also stablized, start rolling-up mechanism and unreeling structure, band material is made to pass through process section by the speed of setting, the all target sputtering apparatus of process section will be opened at the same time, regulate electric current, arc power is energized and excites the atom of target, and the band material dropping on process section on the surface, the flow of process gas is through mass flowmeter to control, make to keep stable vacuum tightness in vacuum chamber, and then carry out coating process, metal ion is deposited on the surface of band material together with gas ionic bond simultaneously, process gas must be passed into before doing technique, as argon gas, the gas of the technique of nitrogen or acetylene, different process gas knows from experience the color of influence zone material, form the band material surface varied in color.The effect of temperature does not mainly increase sticking power, and make the combination of settling and stainless steel base more firm, bonding force is higher, easy to wear and peel off.When vacuumizing and add gas, prevent fluctuation vacuum larger, adjustable window shutter is devised at the two ends of process section, be used for regulating the pumping speed of pumping equipment, ensure that process section has the uniform gas of uninterrupted to be uniformly distributed at whole process section, the amount that in the process of production, gas and metal ion combine is made to be basically identical, so the color of every section is all homogeneous.Band material is stable in the operation of unwinding and rewinding, and be unlikely to wander off, the mode of encoder acquired signal is adopted to carry out regulating the tension force between unwinding and rewinding to collect band material, advanced LC integrated system, automatic adjustment of tonicity has carried out the folding and unfolding task of band material, magnetic tape trailer detection system is set at the upper surface unreeled simultaneously, whether this system energy detection zone material is covered, the such as raster mode of magnetic tape trailer detection system, what it sent plane by the object that one side is luminous penetrates light, namely another side is used for receiving this light source, they are arranged on the top and bottom of band material respectively, utilize band material to block the light simultaneously sent to judge, simultaneously will band material be placed on unreel harmomegathus head before should stamp several hole at band material by this one end caudal, the position of grating is run to once this hole, the light that grating sends will be mapped on another receiving plane of grating by the hole of band material, this receiving plane will produce signal notice PLC control system, unwinding and rewinding are controlled simultaneously, stop the operation of unwinding and rewinding motor, and keep tension force, meanwhile also to signal to arc power, make arc power power-off, target as sputter stops, control pumping equipment simultaneously, make the Stainless Steel Band furnace cooling in vacuum chamber, final stopping vacuumizes afterwards, and pass into air, open purging valve, the vacuum lumen room pressure of the process section of vacuum and unwinding and rewinding is made to reach normal atmosphere, then open unwinding and rewinding to carry out product and come out of the stove, and complete the process of shove charge again, and then repeat above process and produce.
Specific embodiment 2:
With reference to Fig. 4-1, Fig. 4-2 and Fig. 5-1, Fig. 5-2, Fig. 5-3, the feature of the present embodiment 2 is: arrange two guide rails 14 and two dismountable dollies 15 at vacuum plasma film coating apparatus 3, described dolly is provided with 360 ° of rotating mechanisms 16, forms tubing vacuum plasma film coating apparatus.Described dolly 15 comprises walking wheel, transmission link gear and rotor wheel, umbrella gear and carriage walking transmission input motor.Described anti-bleed structure 4 was both made up of adjustable shutter, also can be made up of felt sealing strip or other joint filling materials.Other is identical with embodiment 1.
The present embodiment 2 can plate tubing, because we arrange two guide rails and two dismountable dollies at process section.During plating pipe, dolly is put into above track, then on dolly, stainless steel tube is put, there are two dollies at the two ends of a general pipe, this dolly both can carry out fallback and move on the track of process section, simultaneously 360 ° of rotations can also be placed on tubing above it, so just make the tubing of whole piece be all same color and unified coating film thickness.If plate band, as long as this dolly is taken off.
Specific embodiment 3:
With reference to Fig. 6-1, Fig. 6-2 and Fig. 7-1, Fig. 7-2, Fig. 7-3, the feature of the present embodiment 3 is: arrange many dollies 15 at vacuum plasma film coating apparatus 3, forms the vacuum plasma film coating apparatus of small workpiece.The dolly hanging workpiece comprises walking guide rail, walking wheel, transmission link gear, Rotatable umbrella tooth, bracing frame, gear, transmission rod and gear, linkage gear, workpiece transmission rod and bearing.Described anti-bleed structure 4 was both made up of adjustable shutter, also can be made up of felt sealing strip or other closure materials.Other is identical with embodiment 1.
The present embodiment 3 can plate some small workpiece, as long as arrange several dollies, then hangs up workpiece, drives dolly process section running back and forth, just carries out coating process by the 360 ° of rotations of transmission rig drive workpiece.
Above embodiment effect:
1, continuous band continuous print plated film mode, improves production efficiency, shortens process cycle.Can process according to the usage quantity of domestic band-type product, as plated film stainless steel, plated film film, the color of processing and film plating can be changeable, bright in luster, anticorrosion antiwear, uniform color, makes its use range wider, more diversified, more high-endization.
2, the type of heating of continous way preheating and the insulation of plated film limit, limit, decreases heat loss and heat effectively utilizes, and energy-saving effect is obvious.
3, the mode of production of continous way, decreases the frequent switch of pumping equipment, improves work-ing life and the service efficiency of pumping equipment.
4, improve the degree of automatization, reduce labour intensity.This system adopts PLC and touch-screen control integration system, and each action can send instruction one by one by PLC system, and each action is carried out continuously in order.
5, the minimizing of frock clamp, improves the utilization ratio of target, decreases the production cost making frock clamp simultaneously.
6, versatility and practical, this equipment can process the band of different in width, can also plate the tubing of tubing and some overlength simultaneously, expand the useful application scope of equipment, decrease the input cost of equipment.
7, the weight can loaded is large especially, existing domestic general band is all tens kilograms of disposable chargings, and this equipment disposablely can fill 10 tons, and length reaches myriametre especially, and width can be widened as requested, can the width of domestic band be applicable to completely and design arbitrarily.
The above; be only the present invention's preferably specific embodiment; but protection scope of the present invention is not limited thereto; anyly be familiar with those skilled in the art in the scope that the present invention discloses; be equal to according to technical scheme of the present invention and inventive concept thereof and replace or change, all belonged to protection scope of the present invention.
Claims (10)
1. Multifunctional continuous vacuum plasma coating system, comprise unwinding device (1), wrap-up (2), vacuum plasma film coating apparatus (3) and control device (10), it is characterized in that: unwinding device (1) is positioned at before vacuum plasma film coating apparatus (3), wrap-up (2) is positioned at after vacuum plasma film coating apparatus (3), and three is independent separate body structure; The workpiece import and export place of vacuum plasma film coating apparatus (3) is respectively provided with anti-bleed structure (4), leaks to stop processing atmosphere; Workpiece end detector (8) is provided with in the workpiece ingress of vacuum plasma film coating apparatus (3), the signal input part of the signal output part connection control device (10) of described workpiece end detector (8), control device (10) is provided with several signal output parts, a control signal output terminal of each connection control device (10) of control signal input terminus of unwinding device (1), wrap-up (2), to control unwinding device (1), the feeding of wrap-up (2) and rewinding by detecting the end of workpiece; Unwinding device (1) has the structure of carrying and conveying 10-10000 rice coiled material, wrap-up (2) has the structure of carrying and rolling 10-10000 rice coiled material, coiled material is sent from unwinding device (1) and is entered wrap-up (2) through vacuum plasma film coating apparatus (3) plated film, whole process keeps coiled material workpiece to be in tensioning state, forms continuous vacuum plasma coating system.
2. Multifunctional continuous vacuum plasma coating system according to claim 1, it is characterized in that: be provided with coding type velometer (5) in the workpiece exit of vacuum plasma film coating apparatus (3), the signal input part of the signal output part connection control device (10) of coding type velometer (5), control device (10) controls the rolling speed of wrap-up (2) according to coding tachometer signal, form the control texture of continous way band plated film identical tension, coiled material is sent from unwinding device (1) and enters wrap-up (2) through vacuum plasma film coating apparatus (3) plated film, whole process remains that coiled material workpiece is in tensioning state.
3. Multifunctional continuous vacuum plasma coating system according to claim 1, it is characterized in that: grating detector is set at the exit end unreeling position (1), whether goes to end to detect band, the signal input part of the signal output part connection control device (10) of grating detector, forms workpiece end and detects and monitoring structure.
4. the Multifunctional continuous vacuum plasma coating system according to Claims 2 or 3, it is characterized in that: in vacuum plasma film coating apparatus (3), be provided with arc power, bracing frame (6), water coolant inlet and outlet piping (7), pumping equipment (11) and process gas intake ducting (12), tape guide roller (9) is provided with in the workpiece ingress of vacuum plasma film coating apparatus (3), strip-shaped piece (13) exports from the outlet of unwinding device (1), the process section entering vacuum plasma film coating apparatus (3) through tape guide roller (9) carries out coating film treatment, wrap-up (2) is outputted to from the workpiece outlet of vacuum plasma film coating apparatus (3), in unwinding device, be provided with preheating, be provided with heating and insulation at process section, form the type of heating of continous way, while making the preheating of product energy, can also plated film be heated.
5. the Multifunctional continuous vacuum plasma coating system according to Claims 2 or 3, it is characterized in that: described unwinding device (1) comprise unreel input driving motor (1-1), unreel input step-down gear (1-2), unreel shaft coupling (1-3), unreel device for sealing magnetic fluid (1-4), unreel speed-changing gear box (1-5), unreel harmomegathus head (1-6), unreel temperature-control heat couple (1-7), unreel heat-generating pipe (1-8) and unreel vaccum case (1-9), unreel vaccum case door (1-10) and unreel vision slit (1-11) unreeling vaccum case (1-9) is provided with.
6. the Multifunctional continuous vacuum plasma coating system according to Claims 2 or 3, it is characterized in that: described wrap-up (2) comprises rolling input driving motor (2-1), rolling input step-down gear (2-2), rolling shaft coupling (2-3), rolling device for sealing magnetic fluid (2-4), rolling speed-changing gear box (2-5), rolling harmomegathus head (2-6) and rolling vaccum case (2-7), and rolling vaccum case is provided with rolling vaccum case door (2-8) and rolling vision slit (2-9).
7. the Multifunctional continuous vacuum plasma coating system according to Claims 2 or 3, it is characterized in that: described vacuum plasma film coating apparatus (3) comprises technique vaccum case (3-6), technique water jacket (3-2), the joint flange cover (3-3) of band cooling, cover plate (3-4), process heat galvanic couple (3-5), target assembly and target (3-7), technique heat-generating pipe (3-8), vacuumometer (3-9), joint flange (3-10) and technique intake ducting (3-11), technique vaccum case is provided with technique vision slit (3-1).
8. the Multifunctional continuous vacuum plasma coating system according to Claims 2 or 3, is characterized in that: described anti-bleed structure (4) is made up of adjustable shutter.
9. Multifunctional continuous vacuum plasma coating system according to claim 1, it is characterized in that: at vacuum plasma film coating apparatus (3), two guide rails and two dismountable dollies are set, described dolly is provided with 360 ° of rotating mechanisms, forms tubing vacuum plasma film coating apparatus; Described dolly comprises walking wheel, transmission link gear and rotor wheel, umbrella gear and carriage walking transmission input motor.
10. Multifunctional continuous vacuum plasma coating system according to claim 1, is characterized in that: arrange many dollies at vacuum plasma film coating apparatus (3), forms the vacuum plasma film coating apparatus of small workpiece; The dolly hanging workpiece comprises walking guide rail, walking wheel, transmission link gear, Rotatable umbrella tooth, bracing frame, gear, transmission rod and gear, linkage gear, workpiece transmission rod and bearing.
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| CN104862662B (en) | 2018-04-20 |
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Address after: 528313, Stone Industrial Park, Chencun Town, Shunde District, Guangdong, Foshan, 32 Patentee after: Guangdong Shi Chuan metal Science and Technology Co., Ltd. Address before: 510450 No. 15, Guangzhou economic and Technological Development Zone, Guangzhou, Guangdong, Qingnian Road Patentee before: Guangdong Shi Chuan metal Science and Technology Co., Ltd. |