CN202576557U - Double-rail multi-module continuous vacuum film-coating device - Google Patents
Double-rail multi-module continuous vacuum film-coating device Download PDFInfo
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- CN202576557U CN202576557U CN 201220046923 CN201220046923U CN202576557U CN 202576557 U CN202576557 U CN 202576557U CN 201220046923 CN201220046923 CN 201220046923 CN 201220046923 U CN201220046923 U CN 201220046923U CN 202576557 U CN202576557 U CN 202576557U
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Abstract
The utility model provides a double-rail multi-module continuous vacuum film-coating device and relates to a vacuum film-coating device. The double-rail multi-module continuous vacuum film-coating device comprises a first valve, a piece inlet vacuum room, a second valve, a piece inlet vacuum transition room, a third valve, a first film-coating room, a fourth valve, a second film-coating room, a fifth valve, a piece outlet vacuum transition room, a sixth valve, a piece outlet vacuum room and a seventh valve. The first valve, the piece inlet vacuum room, the second valve, the piece inlet vacuum transition room, the third valve, the first film-coating room, the fourth valve, the second film-coating room, the fifth valve, the piece outlet vacuum transition room, the sixth valve, the piece outlet vacuum room and the seventh valve are sequentially connected in series. The first film-coating room is provided with at least two magnetic-control spurting column-shaped targets. Two sides of the second film-coating room are provided with at least two multiple arc targets. The piece inlet vacuum room, the piece inlet vacuum transition room, the first film-coating room, the second film-coating room, the piece outlet vacuum transition room, and the piece outlet vacuum room are respectively connected with an independent vacuum-evacuating device.
Description
Technical field
The utility model relates to a kind of vacuum coating film equipment, especially relates to a kind of double track multimode continuous vacuum coating device.
Background technology
Vacuum plating be in atmospheric vacuum environment to carried out the plated film mode of plated film by plated product.China utility model patent CN200974865Y discloses a kind of continuous vacuum coating device, and this device comprises vacuum plating unit, sealing several of two ends that are serially connected in this vacuum plating unit advance the part vacuum transition chamber and several go out the part vacuum transition chamber respectively; This advances part vacuum transition chamber, this vacuum plating unit and this goes out between the part vacuum transition chamber to be penetrated with work handling device; Between the vacuum transition chamber that links to each other and and vacuum plating unit between be equipped with sealing moving door device; Wherein, saidly advance the part vacuum transition chamber and said to go out part vacuum transition chamber quantity identical, along said vacuum plating unit symmetric each this is advanced part vacuum transition chamber and said go out the part vacuum transition chamber and be interconnected and be communicated with vacuum extractor.After adopting said structure, make the unlatching of corresponding sealing moving door device and the vacuum pumping of corresponding vacuum transition chamber can coordinate, carry out synchronously, the rhythm of continuous vacuum coating process is controlled easily.What lack is single track conveying work pieces just, and is that workpiece is unidirectional advancing, and can not self carry out rotation, can not control by the time for its plated film quality of three-dimensional objects at plated film.
Chinese invention patent ZL200610145988 discloses a kind of flexible conveying device and the method for use in continuous vacuum coating thereof.E Foerderanlage comprises power-driven system, guide rail and conveying belt, and described guide rail is circular arc or tubular shape in the plated film storehouse of vacuum coating film equipment; Guide rail is a kind of cavity design, and it is inner that the part of conveying belt on width gets into guide rail, and another part that conveying belt is exposed at the opening below outward is used to carry workpiece, and conveying belt keeps rigidity at width, on thickness direction, demonstrates flexibility.Send out this bright e Foerderanlage and can be used for vertical or horizontal, single or multiple lift, perhaps many storehouses various combination in the revolution storehouse of two and two above difference in functionalitys or straight line storehouse forms multiple vacuum coating film equipments such as tinuous production.The e Foerderanlage of this invention exists transmission to have some setbacks in actual use, and the chain jamming bar is serious, has a strong impact on the normal use of plated film and equipment.
Summary of the invention
The purpose of the utility model is to provide a kind of double track multimode continuous vacuum coating device.
The utility model is provided with the 1st valve, advances the part Vakuumkammer, the 2nd valve, advance part vacuum transition chamber, the 3rd valve, the 1st coating chamber, the 4th valve, the 2nd coating chamber, the 5th valve, go out part vacuum transition chamber, the 6th valve, go out part Vakuumkammer and the 7th valve; Said the 1st valve, advance part Vakuumkammer, the 2nd valve, advance the part vacuum transition chamber, the 3rd valve, the 1st coating chamber, the 4th valve, the 2nd coating chamber, the 5th valve, go out part vacuum transition chamber, the 6th valve, go out the part Vakuumkammer and the 7th valve is connected successively; Said the 1st coating chamber is provided with at least 2 magnetron sputtering Style Columu Talget; Be provided with at least 2 multiple arc targets in the both sides of the 2nd coating chamber; Saidly advance the part Vakuumkammer, advance part vacuum transition chamber, the 1st coating chamber, the 2nd coating chamber, go out the part vacuum transition chamber and go out the part Vakuumkammer and be connected with vacuum extractor independently respectively.
Said the 1st valve, the 2nd valve, the 3rd valve, the 4th valve, the 5th valve, the 6th valve and the 7th valve all can adopt push-pull valve or flap valve etc.
Said at least 2 magnetron sputtering Style Columu Talget can be located at the inside or the both sides of the 1st coating chamber, can be provided with 3～8 magnetron sputtering Style Columu Talget in the middle, inside of the 1st coating chamber.Said magnetron sputtering Style Columu Talget can adopt two-way sputter magnetron sputtering Style Columu Talget or omnidirectional's sputter magnetron sputtering Style Columu Talget;
Preferably be provided with 2～20 multiple arc targets in the both sides of the 2nd coating chamber.
Saidly advance the part Vakuumkammer, advance the part vacuum transition chamber, go out the part vacuum transition chamber and go out the part Vakuumkammer all to adopt vertical vacuum chamber or horizontal vacuum chamber.
The utility model is through the valve series connection; And the other a plurality of Vakuumkammers that connect vacuum suction device; Each Vakuumkammer all is connected with independently vacuum extractor (comprising elementary pumped vacuum systems and smart pumped vacuum systems), and the workpiece to be plated between each Vakuumkammer adopts the double track transmission to advance, and each coating chamber all is connected with vacuum extractor; In workpiece to be plated advanced process, workpiece to be plated can self revolve round the sun through mechanism control.
The utility model can will automatically spray the workpiece transfer to be plated that the primary coat line sprayed priming paint through the mode of manual work or mechanical manipulator and carry out plated film to double track multimode continuous coating apparatus; To plate workpiece after plated film is accomplished again transfers to the full-automatic spray plane that needs topcoating through the mode of manual work or mechanical manipulator and is coated with line and carries out spraying operation; Whole process of production is worked continuously, and accomplishes required action automatically.Workpiece to be plated adopts the double track transmission to advance, and in workpiece to be plated advanced process, workpiece to be plated can self revolve round the sun through mechanism control, and the workpiece to be plated that transmits at double track carries out corresponding technical process synchronously; Transmission manner can be that flowing-type is carried, a kind of in the beat-type transmission.
Said magnetron sputtering can the high power DC magnetron sputtering, a kind of in the high-power medium frequency magnetron sputtering; Described magnetron sputtering and multiple arc target, its material comprises: fine copper, silver, indium, tin, aluminium, chromium, titanium, zirconium, niobium, gold, molybdenum, tungsten, tantalum and the alloy between them; Magnetron sputtering and multi sphere plated film intersection are carried out.
The utility model can adopt full-automatic spray primary coat line, and said full-automatic spray primary coat line can adopt a kind of in ultraviolet light polymerization (UV) spraying coating line, the fast dried Baking finish line; Described full-automatic spray plane is coated with line and can be a kind of in ultraviolet light polymerization (UV) spraying coating line, the fast dried Baking finish line.
Compared with prior art, the utlity model has following advantage:
1) adopt double track to transmit workpiece to be plated, and workpiece to be plated workpiece to be plated can self revolution through mechanism control, carry out corresponding technical process synchronously at the workpiece to be plated of double track transmission, coatings is even, the production efficiency height, and production capacity is big.
2) will automatically spray the workpiece transfer to be plated that the primary coat line sprayed priming paint through the mode of manual work or mechanical manipulator and carry out plated film to double track multicell continuous coating device device; To plate workpiece after plated film is accomplished again transfers to the full-automatic spray plane that needs topcoating through the mode of manual work or mechanical manipulator and is coated with line and carries out spraying operation; Whole process of production is worked continuously; Automatically accomplish required action, whole production line can be to operate in 10,000 grades of clean environment at cleanliness factor, and the product good article rate is high.
3) each section speed of whole production line adopts frequency control motor to drive, and the travelling speed adjustable can be good at coordinative operation.
4) but but both also collaborative simultaneously transmission of two-orbit of the modular transmission of car load of the transmission of workpiece.
Description of drawings
Fig. 1 is that the structure of the utility model embodiment 1 is formed synoptic diagram.
Fig. 2 is that the structure of the utility model embodiment 2 is formed synoptic diagram.
In Fig. 1 and 2; Respectively be labeled as: the 1st valve 1, advance part Vakuumkammer the 2, the 2nd valve 3, advance part vacuum transition chamber the 4, the 3rd valve the 5, the 1st coating chamber the 6, the 4th valve the 7, the 2nd coating chamber the 8, the 5th valve 9, go out part vacuum transition chamber the 10, the 6th valve 11, go out part Vakuumkammer the 12, the 7th valve the 13, the 1st Style Columu Talget the 14, the 2nd Style Columu Talget the 15, the 3rd Style Columu Talget 16, the 1 vacuum extractors 17, the 2 vacuum extractors 18; The 3rd vacuum extractor 19; The 4th vacuum extractor 20, the 5 vacuum extractors 21, the 6 vacuum extractors 22; The 1st multiple arc target the 23, the 2nd multiple arc target the 24, the 3rd multiple arc target 25 and the 4th multiple arc target 26; The 4th Style Columu Talget 27, the 5 Style Columu Talget 28, the 6 Style Columu Talget 29.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment the utility model and application are described further.
As shown in Figure 1, the utility model is provided with the 1st valve 1, advance part Vakuumkammer the 2, the 2nd valve 3, advance part vacuum transition chamber the 4, the 3rd valve the 5, the 1st coating chamber the 6, the 4th valve the 7, the 2nd coating chamber the 8, the 5th valve 9, go out part vacuum transition chamber the 10, the 6th valve 11, go out part Vakuumkammer 12 and the 7th valve 13; Said the 1st valve 1, advance part Vakuumkammer the 2, the 2nd valve 3, advance part vacuum transition chamber the 4, the 3rd valve the 5, the 1st coating chamber the 6, the 4th valve the 7, the 2nd coating chamber the 8, the 5th valve 9, go out part vacuum transition chamber the 10, the 6th valve 11, go out part Vakuumkammer 12 and the 7th valve 13 is connected successively; Middle in the 1st coating chamber 6 is equiped with 3 magnetron sputtering Style Columu Talget, i.e. the 1st Style Columu Talget the 14, the 2nd Style Columu Talget 15 and the 3rd Style Columu Talget 16; Be provided with 4 multiple arc targets in the both sides of the 2nd coating chamber 8, i.e. the 1st multiple arc target the 23, the 2nd multiple arc target the 24, the 3rd multiple arc target 25 and the 4th multiple arc target 26.Saidly advance part Vakuumkammer 2, advance part vacuum transition chamber the 4, the 1st coating chamber the 6, the 2nd coating chamber 8, go out part vacuum transition chamber 10 and go out part Vakuumkammer 12 and be connected with vacuum extractor independently respectively.
Said the 1st valve the 1, the 2nd valve the 3, the 3rd valve the 5, the 4th valve the 7, the 5th valve the 9, the 6th valve 11 and the 7th valve 13 all can adopt push-pull valve or flap valve etc.
Said magnetron sputtering Style Columu Talget can adopt two-way sputter magnetron sputtering Style Columu Talget or omnidirectional's sputter magnetron sputtering Style Columu Talget;
Connect through push-pull valve between each Vakuumkammer; The two ends of production line; The outlet of promptly advancing the inlet of part Vakuumkammer 2 and going out part Vakuumkammer 12; Push-pull valve also is installed, and valve is followed successively by like this: the 1st valve the 1, the 2nd valve the 3, the 3rd valve the 5, the 4th valve the 7, the 5th valve the 9, the 6th valve 11 and the 7th valve 13; Along the working direction of workpiece to be plated, install the Vakuumkammer of said sequence, and the valve between Vakuumkammer and the Vakuumkammer.Each above-mentioned Vakuumkammer all is connected with independently vacuum extractor (seeing the 1st vacuum extractor the 17, the 2nd vacuum extractor the 18, the 3rd vacuum extractor the 19, the 4th vacuum extractor the 20, the 5th vacuum extractor 21 and the 6th vacuum extractor 22 among Fig. 1); Each vacuum extractor can comprise elementary pumped vacuum systems and smart pumped vacuum systems; Workpiece to be plated between each Vakuumkammer adopts the double track transmission to advance; In workpiece to be plated advanced process, workpiece to be plated can self revolve round the sun through mechanism control.Workpiece to be plated in the double track transmission carries out corresponding technical process synchronously; Transmission manner can be that flowing-type is carried, a kind of in the beat-type transmission.
The magnetron sputtering of coating chamber can adopt the high power DC magnetron sputtering, also can adopt high-power medium frequency magnetron sputtering to carry out plated film, and its supply current can be 50～200A, and voltage is 400～800V; Above-mentioned magnetron sputtering and multiple arc target, its material can be fine copper, silver, indium, tin, aluminium, chromium, titanium, zirconium, niobium, gold, molybdenum, tungsten, tantalum and the alloy between them; Magnetron sputtering and multi sphere plated film can intersect and carry out plated film, the requirement of production technique also can be installed alone carry out plated film work.
It is said that to advance part Vakuumkammer 2, advance part vacuum transition chamber 4, go out part vacuum transition chamber 10 and go out part Vakuumkammer 12 can be vertical vacuum chamber or horizontal vacuum chamber according to the size design of production line production capacity all.
Referring to Fig. 2; Similar with embodiment 1; Its difference is a side that the 1st Style Columu Talget the 14, the 2nd Style Columu Talget 15 among Fig. 1 and the 3rd Style Columu Talget 16 are located at the 1st coating chamber 6, is provided with the 4th Style Columu Talget the 27, the 5th Style Columu Talget 28 and the 6th Style Columu Talget 29 at the opposite side of the 1st coating chamber 6.In Fig. 2, other mark is identical with Fig. 1.
Below provide and adopt the utility model to combine spraying coating line to accomplish the flow process of the absolutely dry method surface treatment production of plastic cement or metal works:
Workpiece is through after being installed on the hanger; Get into full-automatic spray base line and spray effect; Its working is followed successively by dry type and cleans oil removing (like flame treating, the hydrocarbon cleaning of vacuum), sprays optical curing of UV priming paint again, behind levelling, ultraviolet light polymerization; Mode through manual work or mechanical manipulator turns linked to workpiece respectively carries out plated film on the double track that is installed to the utility model; Its technical process is: workpiece is delivered to into the part vacuum transition chamber carry out the plasma body aura and clean through advancing the part Vakuumkammer, carry out after high-power magnetron sputtering, sputter finish at the 1st coating chamber then, get into the 2nd coating chamber and carry out after multi-arc ion plating film, multi-arc ion plating film accomplish; Workpiece gets into out the part vacuum transition chamber, last workpiece passing piece Vakuumkammer come out to carry out manual work perhaps mechanical manipulator turn linked to full automatic finish paint production line and carry out topcoating; The technical process of topcoating is: behind electrostatic precipitation, spray UV finish paint, levelling, the ultraviolet light polymerization, under flow line, hang, detect, be packaged as finished product.Promptly accomplish the whole production operation.Above-mentioned full-automatic spray primary coat line except that ultraviolet light polymerization (UV) spraying coating line, can also be designed to fast dried Baking finish line; Above-mentioned full-automatic spray plane be coated with line except that ultraviolet light polymerization (UV) spraying coating line, can also be designed to fast dried Baking finish line.
Whole production line has the following advantages:
1) adopt double track to transmit workpiece to be plated, and workpiece to be plated workpiece to be plated can self revolution through mechanism control, carry out corresponding technical process synchronously at the workpiece to be plated of double track transmission, coatings is even, the production efficiency height, and production capacity is big.
2) will automatically spray the workpiece transfer to be plated that the primary coat line sprayed priming paint through the mode of manual work or mechanical manipulator and carry out plated film to double track multicell continuous coating device device; To plate workpiece after plated film is accomplished again transfers to the full-automatic spray plane that needs topcoating through the mode of manual work or mechanical manipulator and is coated with line and carries out spraying operation; Whole process of production is worked continuously; Automatically accomplish required action, whole production line can be to operate in 10,000 grades of clean environment at cleanliness factor, and the product good article rate is high.
3) each section speed of whole production line adopts frequency control motor to drive, and the travelling speed adjustable can be good at coordinative operation.
Claims (7)
1. double track multimode continuous vacuum coating device is characterized in that being provided with the 1st valve, advances the part Vakuumkammer, the 2nd valve, advances part vacuum transition chamber, the 3rd valve, the 1st coating chamber, the 4th valve, the 2nd coating chamber, the 5th valve, goes out part vacuum transition chamber, the 6th valve, goes out part Vakuumkammer and the 7th valve; Said the 1st valve, advance part Vakuumkammer, the 2nd valve, advance the part vacuum transition chamber, the 3rd valve, the 1st coating chamber, the 4th valve, the 2nd coating chamber, the 5th valve, go out part vacuum transition chamber, the 6th valve, go out the part Vakuumkammer and the 7th valve is connected successively; Said the 1st coating chamber is provided with at least 2 magnetron sputtering Style Columu Talget; Be provided with at least 2 multiple arc targets in the both sides of the 2nd coating chamber; Saidly advance the part Vakuumkammer, advance part vacuum transition chamber, the 1st coating chamber, the 2nd coating chamber, go out the part vacuum transition chamber and go out the part Vakuumkammer and be connected with vacuum extractor independently respectively.
2. a kind of double track multimode continuous vacuum coating device as claimed in claim 1 is characterized in that said the 1st valve, the 2nd valve, the 3rd valve, the 4th valve, the 5th valve, the 6th valve and the 7th valve all adopt push-pull valve or flap valve.
3. a kind of double track multimode continuous vacuum coating device as claimed in claim 1 is characterized in that said at least 2 magnetron sputtering Style Columu Talget are located at the inside or the both sides of the 1st coating chamber.
4. a kind of double track multimode continuous vacuum coating device as claimed in claim 1 is characterized in that being provided with 3～8 magnetron sputtering Style Columu Talget in the middle, inside of the 1st coating chamber.
5. like claim 1 or 3 described a kind of double track multimode continuous vacuum coating devices, it is characterized in that said magnetron sputtering Style Columu Talget adopts two-way sputter magnetron sputtering Style Columu Talget or omnidirectional's sputter magnetron sputtering Style Columu Talget.
6. a kind of double track multimode continuous vacuum coating device as claimed in claim 1 is characterized in that being provided with in the both sides of the 2nd coating chamber 2～20 multiple arc targets.
7. a kind of double track multimode continuous vacuum coating device as claimed in claim 1 is characterized in that saidly advancing the part Vakuumkammer, advancing the part vacuum transition chamber, go out the part vacuum transition chamber and go out the part Vakuumkammer all to adopt vertical vacuum chamber or horizontal vacuum chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220046923 CN202576557U (en) | 2012-02-14 | 2012-02-14 | Double-rail multi-module continuous vacuum film-coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220046923 CN202576557U (en) | 2012-02-14 | 2012-02-14 | Double-rail multi-module continuous vacuum film-coating device |
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| Publication Number | Publication Date |
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| CN202576557U true CN202576557U (en) | 2012-12-05 |
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| CN 201220046923 Expired - Lifetime CN202576557U (en) | 2012-02-14 | 2012-02-14 | Double-rail multi-module continuous vacuum film-coating device |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104858092A (en) * | 2015-06-02 | 2015-08-26 | 周健华 | Vacuum plating paint spraying process and system |
| CN104862662A (en) * | 2015-05-19 | 2015-08-26 | 广东世创金属科技股份有限公司 | Multi-function continuous type vacuum plasma film coating system |
| CN105887037A (en) * | 2014-09-29 | 2016-08-24 | 浙江经立五金机械有限公司 | Vacuum film coating machine with automatic conveying function |
| CN106319467A (en) * | 2016-10-20 | 2017-01-11 | 湖南省霖辉高新材料科技有限公司 | Vacuum coating equipment suitable for surface coating |
| CN113061870A (en) * | 2021-04-02 | 2021-07-02 | 泸州韶光智造科技有限公司 | Continuous vacuum coating production line and method for optical thin film component |
| CN113637951A (en) * | 2021-08-27 | 2021-11-12 | 森科五金(深圳)有限公司 | Pipeline transmission continuous vacuum coating production line structure and production method thereof |
| CN113652664A (en) * | 2021-07-21 | 2021-11-16 | 苏州沃伦工业成套设备有限公司 | Full-automatic vacuum coating line |
| CN114471985A (en) * | 2022-02-14 | 2022-05-13 | 安徽佳峰汽车部件有限公司 | Static powder spraying equipment for processing automobile parts |
-
2012
- 2012-02-14 CN CN 201220046923 patent/CN202576557U/en not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105887037A (en) * | 2014-09-29 | 2016-08-24 | 浙江经立五金机械有限公司 | Vacuum film coating machine with automatic conveying function |
| CN104862662A (en) * | 2015-05-19 | 2015-08-26 | 广东世创金属科技股份有限公司 | Multi-function continuous type vacuum plasma film coating system |
| CN104858092A (en) * | 2015-06-02 | 2015-08-26 | 周健华 | Vacuum plating paint spraying process and system |
| CN106319467A (en) * | 2016-10-20 | 2017-01-11 | 湖南省霖辉高新材料科技有限公司 | Vacuum coating equipment suitable for surface coating |
| CN113061870A (en) * | 2021-04-02 | 2021-07-02 | 泸州韶光智造科技有限公司 | Continuous vacuum coating production line and method for optical thin film component |
| CN113652664A (en) * | 2021-07-21 | 2021-11-16 | 苏州沃伦工业成套设备有限公司 | Full-automatic vacuum coating line |
| CN113652664B (en) * | 2021-07-21 | 2023-05-02 | 苏州沃伦工业成套设备有限公司 | Full-automatic vacuum coating line |
| CN113637951A (en) * | 2021-08-27 | 2021-11-12 | 森科五金(深圳)有限公司 | Pipeline transmission continuous vacuum coating production line structure and production method thereof |
| CN114471985A (en) * | 2022-02-14 | 2022-05-13 | 安徽佳峰汽车部件有限公司 | Static powder spraying equipment for processing automobile parts |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 361000 Tianfeng Road, Jimei District, Xiamen, Fujian Province, No. 69 Patentee after: Xiamen Jian Lin health home Limited by Share Ltd Address before: Room 1208, 12th floor, Lianqian Building, 859 Lianqian Road, Xiamen City, Fujian Province Patentee before: Xiamen Runner Industrial Corporation |
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| CP03 | Change of name, title or address | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121205 |
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| CX01 | Expiry of patent term |