CN113652664B - Full-automatic vacuum coating line - Google Patents

Full-automatic vacuum coating line Download PDF

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Publication number
CN113652664B
CN113652664B CN202110824033.8A CN202110824033A CN113652664B CN 113652664 B CN113652664 B CN 113652664B CN 202110824033 A CN202110824033 A CN 202110824033A CN 113652664 B CN113652664 B CN 113652664B
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CN
China
Prior art keywords
frame
fixedly connected
dust removal
box
coating
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Active
Application number
CN202110824033.8A
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Chinese (zh)
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CN113652664A (en
Inventor
李明
柯保卫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Shengde Environmental Engineering Co ltd
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Suzhou Warren Industrial Complete Equipment Co ltd
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Priority to CN202110824033.8A priority Critical patent/CN113652664B/en
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Publication of CN113652664B publication Critical patent/CN113652664B/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Coating Apparatus (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention relates to the technical field of coating equipment and discloses a full-automatic vacuum coating line which comprises a mounting frame, wherein a fixed rail is fixedly arranged on the top surface of the inner surface of the mounting frame, a conveying belt is movably clamped on the inner surface of the fixed rail, a coating box and a dust removal box are fixedly arranged on the bottom surface of the inner surface of the mounting frame in a distributed mode, an air source box is fixedly connected to the bottom surface of the conveying belt, an adsorption pipe is fixedly communicated with the bottom surface of the air source box, and a first chute and a second chute are respectively formed in the top surfaces of the dust removal box and the coating box. This full-automatic vacuum coating line adds the connecting plate through the internal surface at the dust removal case to in the front installation brush of connecting plate, when making the work piece slide in along a spout, the brush of both sides will adhere to inseparable dust and impurity and sweep along work piece surface friction, and cooperate electrostatic precipitator to adsorb the light dust that will sweep, improve work piece surface dust removal effect, improve the coating film quality behind the work piece, excellent in use effect.

Description

Full-automatic vacuum coating line
Technical Field
The invention relates to the technical field of coating equipment, in particular to a full-automatic vacuum coating line.
Background
Vacuum coating refers to a method of forming a thin film by heating a metal or nonmetal material under high vacuum to evaporate and condense the material on the surface of a plating member (metal, semiconductor or insulator). Such as vacuum aluminizing, vacuum chromeplating, and the like.
The existing full-automatic vacuum coating line generally needs to carry out electrostatic dust removal on a workpiece to be coated in the use process, and achieves the coating effect of the workpiece by improving the surface finish of the workpiece to be coated, however, in the actual dust removal process, the removal of impurities attached to the surface of the workpiece cannot be effectively achieved by only one-time electrostatic dust removal operation, so that part of dust and impurities still remain on the surface of the workpiece, the residual impurities have a certain space volume, the flatness after coating is reduced, and the residual dust easily removes the film on the surface of the workpiece after coating, so that the use effect is poor.
In addition, the existing workpiece is required to be subjected to surface preheating after dust removal, and is preheated and fed into a coating box, metal steam is evaporated by high temperature and is attached to the workpiece, and when the workpiece is separated from the dust removal box and placed at a preheating frame in actual use, the workpiece is still in the environment, so that dust suspended in the air in the equipment still has the condition of reattachment to the surface of the workpiece, and the workpiece after actual preheating is easy to be stained with dust, so that the final coating effect is affected.
On the other hand, in the use process, the existing full-automatic vacuum coating line needs to realize evaporation coating in a vacuum environment when a workpiece moves into a coating box, however, in the actual use process, the workpiece and an adsorption piece move along a track, so that a sliding groove is formed in the top surface of the coating box, the sliding groove and the upper part of the workpiece need to be effectively sealed during actual sealing, the vacuum effect is ensured, the existing sealing control effect is poor, the action is not timely, and the use effect is poor.
Disclosure of Invention
The invention provides a full-automatic vacuum coating line, which has the advantages of improving the dust removal effect of a dust removal box, avoiding the pollution of a preheating frame and improving the sealing control effect of a coating box, and solves the problems in the background art.
The invention provides the following technical scheme: the utility model provides a full-automatic vacuum coating line, includes the installing frame, the top surface fixed mounting of installing frame internal surface has fixed rail, fixed rail's internal surface activity joint has the conveyer belt, fixed mounting has coating film case and dust removal case are given to the bottom surface of installing frame internal surface, the bottom surface fixedly connected with air supply case of conveyer belt, the bottom surface fixed intercommunication of air supply case has the adsorption tube, first spout and No. two spouts have been seted up respectively to the top surface of dust removal case and coating film case, the internal surface of dust removal case is fixedly connected with electrostatic precipitator and connecting plate respectively, the positive fixedly connected with brush of connecting plate, the positive activity of dust removal case has cup jointed the collecting frame, the bottom surface fixed mounting of coating film case internal surface has the heater, the internal surface fixed mounting of coating film case has the board of shelving, the side of coating film case is equipped with the vacuum pump.
Preferably, the inner surface of the film plating box is fixedly connected with a connecting plate, the top surface of the connecting plate is fixedly provided with a telescopic rod, the top surface of the telescopic rod is fixedly connected with a sealing table, and the top surface of the sealing table is provided with a sealing port.
Preferably, the front of coating film case fixedly connected with side frame, the quantity of side frame is two, two the activity joint has the slide between the side frame.
Preferably, the slide is provided with a mounting groove on the front surface, and the inner surface of the mounting groove is fixedly connected with a transparent plate.
Preferably, the inner surface fixedly connected with cardboard of dust removal case, the draw-in groove has been seted up to the side of collecting the frame, the inner surface and the cardboard activity joint of draw-in groove.
Preferably, a preheating frame is fixedly connected between the film plating box and the dust removing box, a vent is formed in the bottom surface of the preheating frame, the preheating frame is located on the outer side of the adsorption pipe, and the preheating frame is located below the left side of the first sliding groove.
Preferably, the bottom surface fixedly connected with linking frame of preheating frame, the interior surface fixed mounting heating pipe of linking frame, the inside of linking frame is equipped with the fan that is located the heating pipe below.
The invention has the following beneficial effects:
1. this full-automatic vacuum coating line adds the connecting plate through the internal surface at the dust removal case to in the front installation brush of connecting plate, when making the work piece slide in along a spout, the brush of both sides will adhere to inseparable dust and impurity and sweep along work piece surface friction, and cooperate electrostatic precipitator to adsorb the light dust that will sweep, improve work piece surface dust removal effect, improve the coating film quality behind the work piece, excellent in use effect.
2. This full-automatic vacuum coating line is through seting up the vent in the bottom surface of preheating the frame to connect the connection frame in the bottom surface of preheating the frame, make the inside of connection frame set up heating pipe and fan, utilize the air blow after the heating pipe heating to the surface of work piece realization work piece with the fan preheat, and through utilizing hot-blast impurity and the dust blow away in the frame of will preheating, avoid the dust to adhere to on the work piece surface, improve the surperficial neatness of the work piece in the final entering coating film case, improve the secret effect of work piece degree.
3. This full-automatic vacuum coating line, through add the connecting plate at the internal surface of coating film case, and make the top surface installation telescopic link of connecting plate, and connect sealing platform at the top surface of telescopic link for when the work piece removes directly over the coating film case, sealing platform rises and seals No. two spouts, and the sealed mouth adaptation work piece shape of sealing platform top surface cup joints in the work piece top, improves the sealed convenience of No. two spouts, guarantees the work piece high efficiency and accomplishes the coating film operation.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic cross-sectional view of the structure of the present invention;
FIG. 3 is an exploded view of the dust box of the present invention;
FIG. 4 is an exploded view of the present invention between the side frames and the skateboard;
fig. 5 is an exploded view of the preheating frame of the present invention.
In the figure: 1. a mounting frame; 2. a fixed rail; 3. a conveyor belt; 4. a film plating box; 5. a dust removal box; 6. an air source box; 7. an adsorption tube; 8. a first chute; 9. a second chute; 10. a vacuum pump; 11. a heater; 12. a rest plate; 13. a first connection plate; 14. a telescopic rod; 15. a sealing table; 16. sealing the mouth; 17. an electrostatic precipitator; 18. a collection frame; 19. a second connecting plate; 20. a brush; 21. a clamping plate; 22. a clamping groove; 23. a preheating frame; 24. a vent; 25. a connection frame; 26. heating pipes; 27. a fan; 28. a side frame; 29. a slide plate; 30. a mounting groove; 31. and a transparent plate.
Description of the embodiments
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-5, a full-automatic vacuum coating line comprises a mounting frame 1, a fixed rail 2 is fixedly arranged on the top surface of the inner surface of the mounting frame 1, a conveying belt 3 is movably clamped on the inner surface of the fixed rail 2, the workpiece is driven to move by utilizing the conveying belt 3, dust removal, preheating, coating and other processes of the workpiece are realized, a coating box 4 and a dust removing box 5 are fixedly arranged on the bottom surface of the inner surface of the mounting frame 1, vacuum coating operation is completed by utilizing the coating box 4, an air source box 6 is fixedly connected with the bottom surface of the conveying belt 3, an adsorption pipe 7 is controlled by utilizing the air source box 6 to adsorb and fix the workpiece, an adsorption pipe 7 is fixedly communicated with the bottom surface of the air source box 6, a first sliding chute 8 and a second sliding chute 9 are respectively arranged on the top surfaces of the dust removing box 5 and the coating box 4, the sections of the first sliding chute 8 and the second sliding chute 9 are identical, the workpiece is guaranteed to stably move, the inner surface of the dust removing box 5 is fixedly connected with an electrostatic precipitator 17 and a second connecting plate 19 respectively, the electrostatic precipitator 17 is positioned on an existing electrostatic precipitator mechanism, a brush 20 is fixedly connected with the bottom surface of the second connecting plate 19, the brush 20 utilizes the brushes 20 on two sides to perform vacuum coating operation, the bottom surface is tightly arranged on the bottom surface of the workpiece by utilizing the bottom surface of the vacuum plate 4, the vacuum pump is tightly heated by utilizing the vacuum pump 11, the vacuum pump is fixedly arranged on the bottom surface of the metal plate 4, the vacuum pump is placed on the bottom surface of the vacuum pump 11, and the vacuum pump is placed on the bottom surface of the vacuum tank, and the vacuum pump is completely heated, and the vacuum coating tank is completely heated by the vacuum pump, and the vacuum film has a vacuum film and the vacuum coating film has a vacuum coating film.
Wherein, the internal surface fixedly connected with first connecting plate 13 of coating film case 4, the top surface fixed mounting of first connecting plate 13 has telescopic link 14, and the top surface fixedly connected with sealing platform 15 of telescopic link 14, sealing platform 15's top surface has seted up sealing port 16, utilizes telescopic link 14 to drive sealing platform 15 and rises and seal No. two spout 9, and sealing port 16 passes the work piece, realizes sealedly.
The front surface of the film plating box 4 is fixedly connected with two side frames 28, a sliding plate 29 is movably clamped between the two side frames 28, the front surface of the film plating box 4 is sealed by the sliding plate 29, and metal to be plated can be taken and placed under the condition that the sliding plate 29 is opened.
Wherein, the mounting groove 30 has been seted up in the front to slide 29, and the internal surface fixedly connected with transparent plate 31 of mounting groove 30 utilizes transparent plate 31 to conveniently observe the inside of coating film case 4, in time observes the evaporation condition of taking the metal for the coating film, improves emergency treatment effect.
Wherein, the interior surface fixedly connected with cardboard 21 of dust removal case 5, draw-in groove 22 has been seted up to the side of collecting frame 18, and draw-in groove 22's interior surface and cardboard 21 activity joint for collecting frame 18 can stably roll-in by utilizing the activity joint of cardboard 21 and draw-in groove 22, improves the stability that collecting frame 18 cup jointed.
Wherein, fixedly connected with preheats frame 23 between coating film case 4 and the dust removal case 5, preheats the bottom surface of frame 23 and has seted up vent 24, preheats the outside that frame 23 is located adsorption tube 7, preheats the below that frame 23 is located a spout 8 left side, through setting up the position of preheating frame 23 for work piece displacement effectively removes in preheating frame 23, and has the removal space to be used for hot air heat transfer.
Wherein, the bottom surface fixedly connected with linking frame 25 of preheating frame 23, the interior surface fixed mounting heating pipe 26 of linking frame 25, the inside of linking frame 25 is equipped with the fan 27 that is located heating pipe 26 below, blows the hot air near heating pipe 26 to work piece department through utilizing fan 27, realizes the surface heating of work piece, and blows the dust in the air when fan 27 blows, avoids new dust to adsorb.
The work principle, the conveyer belt 3 removes, make the adsorption tube 7 drive the work piece of absorption to remove to dust removal case 5, work piece along spout 8, slide in, the brush 20 of both sides is along work piece side friction, adhere to inseparable dust and impurity and sweep, great granule drops down on collecting frame 18, start electrostatic precipitator 17, the dust breaks away from the work piece further, the work piece after the dust removal removes to preheating frame 23, start heating pipe 26, make heating pipe 26 department air intensification, start fan 27, make fan 27 blow hot air to the work piece, the dust in the preheating frame 23 blows out, the work piece surface intensification, the work piece after the intensification moves into coating film case 4, telescopic link 14 action, make sealing bench 15 rise, and sealing bench 15 upwards moves through the work piece, start heater 11, make the metal evaporation on the board 12, evaporation metal vapor adheres to the work piece surface, the coating film is accomplished.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (4)

1. The utility model provides a full-automatic vacuum coating line, includes installing frame (1), its characterized in that: the top surface fixed mounting of installing frame (1) internal surface has fixed track (2), the internal surface activity joint of fixed track (2) has conveyer belt (3), the bottom surface of installing frame (1) internal surface is given fixed mounting coating film case (4) and dust removal case (5), the bottom surface fixedly connected with air supply case (6) of conveyer belt (3), the bottom surface fixed intercommunication of air supply case (6) has adsorption tube (7), first spout (8) and No. two spouts (9) have been seted up respectively to the top surface of dust removal case (5) and coating film case (4), the internal surface of dust removal case (5) is fixedly connected with electrostatic precipitator (17) and second connecting plate (19) respectively, the positive fixedly connected with brush (20) of second connecting plate (19), collection frame (18) have been cup jointed in the positive activity of dust removal case (5), the bottom surface fixed mounting of coating film case (4) has heater (11), the internal surface fixed mounting of coating film case (4) has shelves board (12), the side of coating film case (4) is equipped with vacuum pump (10);
the inner surface of the film plating box (4) is fixedly connected with a first connecting plate (13), the top surface of the first connecting plate (13) is fixedly provided with a telescopic rod (14), the top surface of the telescopic rod (14) is fixedly connected with a sealing table (15), and the top surface of the sealing table (15) is provided with a sealing port (16);
a preheating frame (23) is fixedly connected between the film plating box (4) and the dust removal box (5), a ventilation opening (24) is formed in the bottom surface of the preheating frame (23), the preheating frame (23) is positioned at the outer side of the adsorption pipe (7), and the preheating frame (23) is positioned below the left side of the first chute (8);
the bottom surface fixedly connected with connecting frame (25) of preheating frame (23), the interior surface fixed mounting heating pipe (26) of connecting frame (25), the inside of connecting frame (25) is equipped with fan (27) that are located heating pipe (26) below.
2. A fully automatic vacuum coating line according to claim 1, characterized in that: the front of coating box (4) fixedly connected with side frame (28), the quantity of side frame (28) is two, two movable joint has slide (29) between side frame (28).
3. A fully automatic vacuum coating line according to claim 2, characterized in that: the front surface of the sliding plate (29) is provided with a mounting groove (30), and the inner surface of the mounting groove (30) is fixedly connected with a transparent plate (31).
4. A fully automatic vacuum coating line according to claim 1, characterized in that: the dust removal box is characterized in that a clamping plate (21) is fixedly connected to the inner surface of the dust removal box (5), a clamping groove (22) is formed in the side face of the collecting frame (18), and the inner surface of the clamping groove (22) is movably clamped with the clamping plate (21).
CN202110824033.8A 2021-07-21 2021-07-21 Full-automatic vacuum coating line Active CN113652664B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110824033.8A CN113652664B (en) 2021-07-21 2021-07-21 Full-automatic vacuum coating line

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Application Number Priority Date Filing Date Title
CN202110824033.8A CN113652664B (en) 2021-07-21 2021-07-21 Full-automatic vacuum coating line

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CN113652664B true CN113652664B (en) 2023-05-02

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Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62112790A (en) * 1985-11-09 1987-05-23 Anelva Corp Thin film processing device with dust collector
JPH01127676A (en) * 1987-11-12 1989-05-19 Hitachi Maxell Ltd Vacuum evaporator
JPH08144041A (en) * 1994-11-17 1996-06-04 Toppan Printing Co Ltd Winding-type vacuum deposition device
JP2005290499A (en) * 2004-04-01 2005-10-20 Sony Corp Vacuum system
TW201209202A (en) * 2010-08-23 2012-03-01 Hon Hai Prec Ind Co Ltd Vacuum coating system
CN102373422A (en) * 2010-08-24 2012-03-14 鸿富锦精密工业(深圳)有限公司 Vacuum coating system
CN202576557U (en) * 2012-02-14 2012-12-05 厦门建霖工业有限公司 Double-rail multi-module continuous vacuum film-coating device
CN204356394U (en) * 2014-12-15 2015-05-27 旺诠科技(昆山)有限公司 A kind of vacuum plating suction machine
CN211256062U (en) * 2019-09-29 2020-08-14 北京实力源表面技术有限公司 Vacuum coating machine comprising integral in-out rotating frame vehicle device

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62112790A (en) * 1985-11-09 1987-05-23 Anelva Corp Thin film processing device with dust collector
JPH01127676A (en) * 1987-11-12 1989-05-19 Hitachi Maxell Ltd Vacuum evaporator
JPH08144041A (en) * 1994-11-17 1996-06-04 Toppan Printing Co Ltd Winding-type vacuum deposition device
JP2005290499A (en) * 2004-04-01 2005-10-20 Sony Corp Vacuum system
TW201209202A (en) * 2010-08-23 2012-03-01 Hon Hai Prec Ind Co Ltd Vacuum coating system
CN102373422A (en) * 2010-08-24 2012-03-14 鸿富锦精密工业(深圳)有限公司 Vacuum coating system
CN202576557U (en) * 2012-02-14 2012-12-05 厦门建霖工业有限公司 Double-rail multi-module continuous vacuum film-coating device
CN204356394U (en) * 2014-12-15 2015-05-27 旺诠科技(昆山)有限公司 A kind of vacuum plating suction machine
CN211256062U (en) * 2019-09-29 2020-08-14 北京实力源表面技术有限公司 Vacuum coating machine comprising integral in-out rotating frame vehicle device

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Effective date of registration: 20230920

Address after: 215000 No.11 workshop, No.300 Qingchengshan Road, science and Technology City, Suzhou high tech Zone, Jiangsu Province

Patentee after: Suzhou Shengde Environmental Engineering Co.,Ltd.

Address before: 215000 No. 101 Kefa Road, science and Technology City, high tech Zone, Suzhou, Jiangsu

Patentee before: Suzhou Warren industrial complete equipment Co.,Ltd.