JPS62112790A - Thin film processing device with dust collector - Google Patents

Abstract

PURPOSE:To decrease dust stuck on a base plate remarkably by providing a dust collector utilizing electrostatic force or magnetic force or both the two in the vicinity of a member which constitutes a movable mechanism and is accompanied with deformation, sliding, attaching and detaching. CONSTITUTION:Each shaft, a bearing, each belt and a pulley are provided to convey a silicon base plate 5. Deformation, sliding, attaching and detaching motion are generated between these movable mechanism 2 and the belts 222, 233 and the silicon base plate 5. DC high voltage is impressed between a vacuum chamber 1 and a dust collection cover 31 by means of a DC electric power source 30 for dust collection and fine dust generated in the movable mechanism 2 is attracted to the dust collection cover 31 by electrostatic force and stuck thereon. Furthermore when the generated fine dust is a magnetic material, it is adsorbed by the square bar-shaped permanent magnets 41a, 41b. By this constitution, thin film processing wherein dust stuck on the base plate is decreased remarkably can be performed.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to sputtering equipment, plasma CVD equipment,
The present invention relates to a single-film processing device equipped with a dust collector, which is particularly effective in devices where dust adhesion is averse, such as evaporation devices and dry etching devices.

(Prior art) Conventionally, in the above-mentioned thin film processing equipment for manufacturing LS r and VLSI, in order to prevent the generation of harmful dust, operations that involve deformation, sliding, and attachment/detachment, which are the main causes of dust generation, have been conducted. Consideration was given to the design to avoid these problems and to reduce the number of movable mechanical parts.

(Problems to be solved by the present invention) However, as the demands for unmanned operation, mass production, and high-speed processing continue to increase, the frequency of handling of substrates to be processed continues to increase, and the conventional way of thinking is gradually becoming incapable of dealing with this. It's getting difficult.

Moreover, in recent VLSIs, manufacturing yields tend to deteriorate significantly due to miniaturization of wiring width, high density, and minute dust, making it absolutely urgent to achieve a high degree of dust-free production. It becomes.

SUMMARY OF THE INVENTION An object of the present invention is to provide a thin film processing apparatus with extremely little dust adhering to a substrate to be processed.

(Means for Solving the Problems) In order to achieve the above object, the present invention provides a means for deforming, sliding, and attaching/detaching members among the members constituting the movable mechanism in the thin film processing apparatus. The structure is such that a dust collecting means that utilizes electrostatic force, magnetic force, or both is provided near the attachment/detachment location.

(Example) The present invention will be explained in detail below using the figures.

FIG. 1 shows a cross-sectional view of an embodiment of the present invention, in which a movable mechanism 2 for transporting a silicon substrate 5, which is a substrate to be processed, is shown in an interior 1a of a vacuum chamber 1 (1b on the atmospheric side). A rotating shaft 201 (bearing 21
1,212) is rotated by pulleys 221,222
is transmitted to the rotating shaft 202 (supported by a bearing 213) by the belt 231, and the silicon substrate 5 placed on the two belts 232 and 233 hanging on the pulleys 222 and 223 of this shaft is conveyed in a direction perpendicular to the plane of the paper. However, each shaft/bearing, each belt/pulley, and the belt/substrate undergo sliding and attachment/detachment movements, which generate extremely fine dust due to wear. Furthermore, deformation of various parts, especially curvature of the belt, also becomes a source of fine dust.

As mentioned above, in the past, no direct measures were taken against the generation of fine dust, and efforts were made solely to reduce the number of movable mechanical parts.

In the embodiment, a dust collection means using electrostatic force and magnetic force is added to prepare for these fine dusts. .

The dust collection DC power supply 30 applies a high DC voltage between the vacuum chamber 1 and a conductive dust collection cover 31 attached to the vacuum chamber 1 with an insulator 32 to cover the above-mentioned movable mechanism 2. The fine dust generated by the movable mechanism 2 is attracted to the dust collecting cover 31 by electrostatic force and is made to adhere thereto. The window 33 of the dust collection cover 31 is opened for the purpose of sending out the silicon substrate 5 rearward perpendicularly to the plane of the paper. Note that each conductive member of the movable mechanism 2 is treated to have the same potential as the vacuum chamber 1.

Furthermore, the square rod-shaped permanent magnets 41a and 41b are
22, 223 (and the pulley hidden behind these pulleys on which the belts 232, 233 are hung).
When the generated fine dust is magnetic, the magnetic force of these permanent magnets acts to attract and adhere the fine dust to the surfaces of these magnets 41a and 41b. .

Next, FIG. 2a shows a sectional view of another embodiment, and FIG. 2b shows its 6-6 arrow sectional view.

The same members as in FIG. 1 are given the same reference numerals. The movable mechanism 2 shown in FIG.
.
It drives in the 0 direction. The upper part of the movable body 25 is connected to a predetermined part of a transport device (not shown).

In the case of this diagram, each shaft/bearing, between the bevel gears, screw feed,
There is sliding and attachment/detachment movement between the movable body 25 and the guide 253, which generates fine dust. In order to attract and adhere this fine dust, a dust collection bar 31 is attached to the vacuum chamber 1 with an insulator 32 so as to cover the movable mechanism 2, and a DC high voltage is applied from a DC power source 30. The window 33 of the dust collection cover 31 is slightly opened so as not to hinder the movement of the movable body 25. Furthermore, long strip-shaped permanent magnets 41C, 41
d is glued to both sides of the open end of the window 33 along the threaded portion,
In addition, the rectangular parallelepiped permanent magnet 41e connects the magnetic poles to the bevel gears 241, 2.
42 and is fixed close to the engaging portion.

By adding the dust collecting means that utilizes electrostatic force and magnetic force in each of the embodiments described above, fine dust can be effectively removed, especially at its source, and an excellent dustproof effect can be achieved. It is also clear that these dust collection means are effective against floating dust in the vacuum chamber 1a and exhibit a cleaning effect.

Note that when an insulating film (a film that does not emit gas) is added to the surface of the dust collecting cover 31, there is an effect that the suction and adhesion due to electrostatic force is perfect for metal powder.

(Effects of the Invention) The present invention has the effect of providing a thin film processing apparatus with very little dust adhering to a substrate to be processed.

[Brief explanation of drawings]

FIG. 1 is a sectional view of an embodiment of the present invention. Fig. 2a is a sectional view of another embodiment, and Fig. 2b is a 6-
It is a 6 arrow sectional view. 1-111 vacuum chamber, 2--1 movable mechanism, 3-1--dust collecting means using electrostatic force, 41a, ~41e
----- Dust collection means that uses magnetic force.

Claims (1)

[Claims] In a thin film processing device having a movable mechanism inside the device,
Among the members constituting the movable mechanism, a dust collecting means that utilizes electrostatic force or magnetic force or both is provided near the location of the deformation, sliding, or attachment/detachment of a member that is subject to deformation, sliding, or attachment/detachment. A thin film processing device with a dust collector, characterized by: