CN220202020U - Multi-functional PVD cavity installation framework - Google Patents
Multi-functional PVD cavity installation framework Download PDFInfo
- Publication number
- CN220202020U CN220202020U CN202321621172.1U CN202321621172U CN220202020U CN 220202020 U CN220202020 U CN 220202020U CN 202321621172 U CN202321621172 U CN 202321621172U CN 220202020 U CN220202020 U CN 220202020U
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- China
- Prior art keywords
- cavity
- installation framework
- fixedly connected
- pvd
- cavity installation
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Links
- 238000009434 installation Methods 0.000 title claims abstract description 83
- 238000000034 method Methods 0.000 claims abstract description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 31
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 26
- 239000007789 gas Substances 0.000 claims description 15
- 229910052786 argon Inorganic materials 0.000 claims description 13
- 239000001307 helium Substances 0.000 claims description 13
- 229910052734 helium Inorganic materials 0.000 claims description 13
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 13
- 238000001514 detection method Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 238000005240 physical vapour deposition Methods 0.000 description 20
- 238000004544 sputter deposition Methods 0.000 description 3
- 235000004443 Ricinus communis Nutrition 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Containers, Films, And Cooling For Superconductive Devices (AREA)
Abstract
The utility model discloses a multifunctional PVD cavity installation structure, which is characterized in that: comprising a PVD cavity; comprising a PVD cavity; the cavity installation framework is positioned below the PVD cavity and fixedly connected with the PVD cavity; the process gas pipeline is positioned at the lower part of the PVD cavity and fixedly communicated with the PVD cavity; the cavity installation framework panel is positioned at one side of the cavity installation framework and is fixedly connected with the cavity installation framework; the electric control box is positioned on the other side of the cavity installation framework and is fixedly connected with the cavity installation framework. The utility model relates to the technical field of semiconductors, in particular to a multifunctional PVD cavity installation structure. The utility model aims to solve the technical problem of providing a multifunctional PVD cavity installation framework which not only can position a cavity in place, but also can integrate and install related process equipment parts inside, thereby achieving compact structure and convenient and reliable installation of each part.
Description
Technical Field
The utility model relates to the technical field of semiconductors, in particular to a multifunctional PVD cavity installation structure.
Background
The vacuum coating technology belongs to a physical vapor deposition film forming method, has the advantages of simple operation, high sputtering rate, compact film layer and the like, and has wide application in scientific research and production.
The existing PVD sputtering equipment, a main machine table and a process cavity are fixedly connected. Under different process conditions, the cavity needs to be replaced, and the existing equipment is inconvenient to replace the process cavity.
If the pipeline between the cavity and the machine can be solved through the structure and the appearance design, the arrangement and the connection of the electric and process parts are realized; will become the infrastructure of the new modular PVD apparatus. When the cavities are replaced by different processes, the cavity can be conveniently and quickly installed in place.
Disclosure of Invention
The utility model aims to solve the technical problem of providing a multifunctional PVD cavity installation framework which not only can position a cavity in place, but also can integrate and install related process equipment parts inside, thereby achieving compact structure and convenient and reliable installation of each part.
The utility model adopts the following technical scheme to realize the aim of the utility model:
a multi-functional PVD cavity installation structure, characterized by: comprising a PVD cavity; the cavity installation framework is positioned below the PVD cavity and fixedly connected with the PVD cavity; the process gas pipeline is positioned at the lower part of the PVD cavity and fixedly communicated with the PVD cavity; the cavity installation framework panel is positioned at one side of the cavity installation framework and is fixedly connected with the cavity installation framework; the electric control box is positioned at the other side of the cavity installation framework and is fixedly connected with the cavity installation framework; the valve island is positioned in the middle of the cavity installation framework and is fixedly connected with the cavity installation framework; and the pipeline assembly is positioned on the upper side of the cavity installation framework bottom plate.
As a further limitation of the present technical solution, the pipeline assembly includes a water inlet pipe, a water return pipe, a vacuum pipe, an argon gas pipe, and a helium gas pipe.
As a further limitation of the technical scheme, the water inlet pipe is fixedly connected with the cavity installation framework panel, the water inlet pipe is fixedly connected with a group of water inlet pneumatic control valves and electric control three-way valves, the water inlet pneumatic control valves and the electric control three-way valves are respectively and fixedly connected with the cavity installation framework, the water return pipe is fixedly connected with the cavity installation framework panel, the water return pipe is fixedly connected with a group of water flow meters, and the water flow meters are fixedly connected with the cavity installation framework.
As a further limitation of the technical scheme, the vacuum tube, the argon tube and the helium tube respectively penetrate through the notch on the panel of the cavity installation framework, the vacuum tube, the argon tube and the helium tube are respectively and fixedly connected with the vertical plate of the cavity installation framework, the argon tube and the helium tube are respectively and fixedly communicated with the gas flow controllers, and the two gas flow controllers are respectively and fixedly connected with the cavity installation framework.
As a further limitation of the present solution, the pipeline assembly further comprises a compressed air inlet fixedly connected to the cavity mounting frame panel.
As a further limitation of the technical scheme, the electrical control box is fixedly connected with the electrical connector assembly.
As a further limitation of the technical scheme, the electrical control box is fixedly connected with an electrical heavy-duty socket.
As a further limitation of the technical scheme, the cavity installation framework is fixedly connected with the water leakage detection port.
As a further limitation of the technical scheme, the cavity mounting framework and the electric control box are respectively and fixedly connected with a group of symmetrical balance casters.
As a further limitation of the technical scheme, the cavity installation framework and the electric control box are respectively and fixedly connected with a group of symmetrical pad feet.
Compared with the prior art, the utility model has the advantages and positive effects that:
the utility model solves the problems of arrangement and connection of pipelines, electric and process parts between the cavity and the machine by structural and appearance design; becomes the basic structure of the novel modularized PVD equipment. The mounting framework of the machine and each process cavity is designed for the novel modularized PVD sputtering platform, and the machine can be conveniently and quickly mounted in place when the cavities are replaced by different processes.
Drawings
FIG. 1 is a component distribution within the structural side of the cavity mounting architecture of the present utility model.
Fig. 2 is a layout of a front elevation of the cavity mounting structure of the present utility model.
Fig. 3 is a schematic perspective view of the present utility model.
Fig. 4 is a schematic perspective view of a second embodiment of the present utility model.
In the figure: 1. PVD cavity, 2, process gas pipeline, 3, valve island, 4, cavity installation framework, 5, balance castor, 6, electric control box, 7, electric heavy-duty socket, 8, cavity installation framework panel, 9, inlet tube, 10, inlet air control valve, 11, automatically controlled three-way valve, 12, electric connector assembly, 13, leak detection port, 14, water flowmeter, 15, wet return, 16, vacuum tube, 17, argon gas pipe, 18, helium gas pipe, 19, compressed air inlet, 20, gas flow controller, 21, foot pad.
Detailed Description
The following detailed description of embodiments of the utility model is, therefore, to be taken in conjunction with the accompanying drawings, and it is to be understood that the scope of the utility model is not limited to the specific embodiments.
The utility model comprises a PVD chamber 1; the cavity installation framework 4 is positioned below the PVD cavity 1 and is fixedly connected with the PVD cavity 1; the process gas pipeline 2 is positioned at the lower part of the PVD cavity 1 and fixedly communicated with the PVD cavity 1; the cavity installation framework panel 8 is positioned at one side of the cavity installation framework 4 and is fixedly connected with the cavity installation framework 4; the electric control box 6 is positioned at the other side of the cavity installation framework 4 and is fixedly connected with the cavity installation framework 4; the valve island 3 is positioned in the middle of the cavity installation framework 4 and is fixedly connected with the cavity installation framework 4; and the pipeline assembly is positioned on the upper side of the bottom plate of the cavity installation framework 4.
The pipeline assembly comprises a water inlet pipe 9, a water return pipe 15, a vacuum pipe 16, an argon pipe 17 and a helium pipe 18.
The water inlet pipe 9 is fixedly connected with the cavity installation framework panel 8, the water inlet pipe 9 is fixedly connected with a group of water inlet pneumatic control valves 10 and electric control three-way valves 11, the water inlet pneumatic control valves 10 and the electric control three-way valves 11 are respectively and fixedly connected with the cavity installation framework 4, the water return pipe 15 is fixedly connected with the cavity installation framework panel 8, the water return pipe 15 is fixedly connected with a group of water flow meters 14, and the water flow meters 14 are fixedly connected with the cavity installation framework 4.
The vacuum tube 16, the argon tube 17 and the helium tube 18 respectively penetrate through the notch on the cavity installation framework panel 8, the vacuum tube 16, the argon tube 17 and the helium tube 18 are respectively and fixedly connected with the vertical plates of the cavity installation framework 4, the argon tube 17 and the helium tube 18 are respectively and fixedly communicated with the gas flow controllers 20, and the two gas flow controllers 20 are respectively and fixedly connected with the cavity installation framework 4.
The pipeline assembly further comprises a compressed air inlet 19, and the compressed air inlet 19 is fixedly connected with the cavity installation framework panel 8.
The electrical control box 6 is fixedly connected with the electrical connector assembly 12.
The electric control box 6 is fixedly connected with an electric heavy-duty socket 7.
The cavity installation framework 4 is fixedly connected with the water leakage detection port 13.
The cavity mounting framework 4 and the electric control box 6 are respectively and fixedly connected with a group of symmetrical balance casters 5.
The cavity mounting structure 4 and the electrical control box 6 are respectively and fixedly connected with a group of symmetrical pad feet 21.
As shown in fig. 1, the cavity installation structure 4 is designed with three U-shaped columns, which is convenient for arranging pipelines and electric cables therein and integrating the installation of the valve island 3 and other components; the electric control box 6 with the extended framework effectively solves the problem that the framework is balanced in load, and the balance casters 5 are detachably arranged in cooperation with the bottom, so that convenience and safety are brought to the whole transportation of equipment.
As shown in fig. 2, a cavity installation framework panel 8 is configured, so that the equipment installation is quick and simple, and the trend of the application of each pipeline can be clearly reflected; the electrical control box 6 is provided with the electrical heavy-duty socket 7 and the electrical connector assembly 12, so that the strong and weak cables are effectively shielded without occupying space, and the electrical control box meets the electrical safety specification.
As shown in fig. 3, the layout and arrangement of various process pipelines at the bottom of the cavity installation framework structure 4; through layout design, various pipelines are fully integrated by utilizing space, so that convenience in installation and subsequent maintenance can be highlighted, and enough observation and inspection space can be reserved in equipment operation; meanwhile, as the cooling water pipeline (the water inlet pipe 9 and the water return pipe 15) is arranged at the position, the possibility of leakage exists in the running process of the equipment, and the leakage state can be effectively and timely detected by installing the water leakage detection belt port 13 at the bottom of the area, so that the safety interlocking of the equipment is realized.
The reasonable layout and clear identification of the cavity installation framework panel 8 facilitate field installation and debugging, and provide convenience for rapid fault judgment in subsequent overhauling.
The above disclosure is only one specific embodiment of the present utility model, but the present utility model is not limited thereto, and any changes that can be thought by those skilled in the art should fall within the protection scope of the present utility model.
Claims (10)
1. A multi-functional PVD cavity installation structure, characterized by: comprising a PVD chamber (1);
the cavity installation framework (4) is positioned below the PVD cavity (1) and is fixedly connected with the PVD cavity (1);
the process gas pipeline (2) is positioned at the lower part of the PVD cavity (1) and fixedly communicated with the PVD cavity (1);
a cavity installation framework panel (8) which is positioned at one side of the cavity installation framework (4) and fixedly connected with the cavity installation framework (4);
the electric control box (6) is positioned at the other side of the cavity installation framework (4) and is fixedly connected with the cavity installation framework (4);
the valve island (3) is positioned in the middle of the cavity installation framework (4) and is fixedly connected with the cavity installation framework (4);
and the pipeline assembly is positioned on the upper side of the bottom plate of the cavity installation framework (4).
2. The multi-functional PVD cavity mounting architecture of claim 1, wherein: the pipeline assembly comprises a water inlet pipe (9), a water return pipe (15), a vacuum pipe (16), an argon pipe (17) and a helium pipe (18).
3. The multi-functional PVD cavity mounting architecture of claim 2, wherein: inlet tube (9) fixed connection cavity installation framework panel (8), inlet tube (9) fixed intercommunication a set of inlet air control valve (10) and automatically controlled three-way valve (11), inlet air control valve (10) reaches automatically controlled three-way valve (11) fixed connection respectively cavity installation framework (4), wet return (15) fixed connection cavity installation framework panel (8), wet return (15) fixed intercommunication a set of water flow meter (14), water flow meter (14) fixed connection cavity installation framework (4).
4. The multi-functional PVD cavity mounting architecture of claim 2, wherein: the vacuum tube (16), the argon tube (17) and the helium tube (18) respectively penetrate through the notch on the cavity installation framework panel (8), the vacuum tube (16), the argon tube (17) and the helium tube (18) are respectively and fixedly connected with the vertical plates of the cavity installation framework (4), the argon tube (17) and the helium tube (18) are respectively and fixedly connected with the gas flow controllers (20), and the two gas flow controllers (20) are respectively and fixedly connected with the cavity installation framework (4).
5. The multi-functional PVD cavity mounting architecture of claim 2, wherein: the pipeline assembly further comprises a compressed air inlet (19), and the compressed air inlet (19) is fixedly connected with the cavity installation framework panel (8).
6. The multi-functional PVD cavity mounting architecture of claim 1, wherein: the electric control box (6) is fixedly connected with the electric connector assembly (12).
7. The multi-functional PVD cavity mounting architecture of claim 1, wherein: the electric control box (6) is fixedly connected with an electric heavy-duty socket (7).
8. The multi-functional PVD cavity mounting architecture of claim 1, wherein: the cavity installation framework (4) is fixedly connected with the water leakage detection port (13).
9. The multi-functional PVD cavity mounting architecture of claim 1, wherein: the cavity installation framework (4) and the electric control box (6) are respectively and fixedly connected with a group of symmetrical balance casters (5).
10. The multi-functional PVD cavity mounting architecture of claim 1, wherein: the cavity installation framework (4) and the electric control box (6) are respectively and fixedly connected with a group of symmetrical pad feet (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321621172.1U CN220202020U (en) | 2023-06-26 | 2023-06-26 | Multi-functional PVD cavity installation framework |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321621172.1U CN220202020U (en) | 2023-06-26 | 2023-06-26 | Multi-functional PVD cavity installation framework |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220202020U true CN220202020U (en) | 2023-12-19 |
Family
ID=89141460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321621172.1U Active CN220202020U (en) | 2023-06-26 | 2023-06-26 | Multi-functional PVD cavity installation framework |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220202020U (en) |
-
2023
- 2023-06-26 CN CN202321621172.1U patent/CN220202020U/en active Active
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