CN109576660A - Steel pipe continuous sputtering coating machine - Google Patents
Steel pipe continuous sputtering coating machine Download PDFInfo
- Publication number
- CN109576660A CN109576660A CN201910038136.4A CN201910038136A CN109576660A CN 109576660 A CN109576660 A CN 109576660A CN 201910038136 A CN201910038136 A CN 201910038136A CN 109576660 A CN109576660 A CN 109576660A
- Authority
- CN
- China
- Prior art keywords
- chamber
- steel pipe
- soak
- transition
- continuous sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 title claims abstract description 40
- 238000000576 coating method Methods 0.000 title claims abstract description 40
- 229910000831 Steel Inorganic materials 0.000 title claims abstract description 20
- 238000004544 sputter deposition Methods 0.000 title claims abstract description 20
- 239000010959 steel Substances 0.000 title claims abstract description 20
- 230000005540 biological transmission Effects 0.000 claims abstract description 32
- 239000012528 membrane Substances 0.000 claims abstract description 9
- 238000007747 plating Methods 0.000 claims abstract description 5
- 230000007246 mechanism Effects 0.000 claims abstract description 4
- 230000007704 transition Effects 0.000 claims description 37
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000011534 incubation Methods 0.000 claims description 3
- 239000002184 metal Substances 0.000 description 11
- 238000005516 engineering process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000011533 pre-incubation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 238000003303 reheating Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of steel pipe continuous sputtering coating machines, including several interconnected first chambers and second chamber, preceding gate valve and rear gate valve are separately installed in two first chambers from beginning to end, vacuum pump group is connected in the first chamber of part, it is connected in the first chamber of vacuum pump group and is respectively equipped with two transmission components, the transmission component is equipped with the first gear being meshed with travelling bogie bottom rack gear, and the transmission component is equipped with travel switch mechanism in place；The running rail of travelling bogie is equipped in the first chamber, the second chamber is equipped with backhaul transportation system, and the backhaul transportation system is equipped with the second gear being meshed with travelling bogie bottom rack gear.The invention has the advantages that: plating membrane efficiency can not only be improved, and keep quality of forming film good, while membrane uniformity is high and target utilization is high.
Description
Technical field
The present invention relates to coating technique fields, it particularly relates to a kind of steel pipe continuous sputtering coating machine.
Background technique
Current metal tube coating machine is single-chamber room coating machine, wherein single-chamber cell-type coating machine, each input and output material chamber need
Atmosphere is exposed, causes that film quality is unstable, the pumpdown time is long, production capacity is low, and is difficult the metal tube of compatible many kinds of specification,
The especially metal tube of different length, and being limited by target, be difficult be more than 4m to length pipe plated film, target utilization
It is not high.
For the problems in the relevant technologies, currently no effective solution has been proposed.
Summary of the invention
For above-mentioned technical problem in the related technology, the present invention proposes a kind of steel pipe continuous sputtering coating machine, not only
It can be improved plating membrane efficiency, and keep quality of forming film good, while membrane uniformity is high and target utilization is high.
To realize the above-mentioned technical purpose, the technical scheme of the present invention is realized as follows:
A kind of steel pipe continuous sputtering coating machine, including several interconnected first chambers and second chamber, two institutes of head and the tail
It states and is separately installed with preceding gate valve and rear gate valve in first chamber, be connected with vacuum pump group in the first chamber of part, be connected with
Two transmission components are respectively equipped in the first chamber of vacuum pump group, the transmission component is equipped with and travelling bogie bottom
The first gear that rack gear is meshed, the transmission component are equipped with travel switch mechanism in place；Fortune is equipped in the first chamber
The running rail of defeated trolley, the second chamber are equipped with backhaul transportation system, and the backhaul transportation system is equipped with and transport
The second gear that trolley bottom rack gear is meshed.
Further, the first chamber includes successively interconnected First Transition chamber, preheating chamber, the first heat preservation
Chamber, coating chamber, the second soak chamber, transmission chamber and the second transition chamber thereof, wherein the preceding gate valve is set to described first
Transition chamber thereof front end, the rear gate valve are set to second transition chamber thereof rear end.
Further, the vacuum pump group respectively with the First Transition chamber, preheating chamber, the first soak chamber, pass
Defeated chamber and the second transition chamber thereof are connected.
Further, two transmission components are respectively provided at the First Transition chamber, preheating chamber, the first incubation cavity
Room, transmission chamber and the second transition chamber thereof bottom.
Further, armouring heating component is respectively equipped in first soak chamber and the second soak chamber.
Further, the cavity top surface of the coating chamber is equipped with several magnetic control targets.
Further, pass through between the first soak chamber and coating chamber and between coating chamber and the second soak chamber
Flanged joint.
Further, the First Transition chamber, preheating chamber, the first soak chamber, coating chamber, the second incubation cavity
Room, transmission chamber and the second transition chamber thereof bottom end are respectively equipped with chamber bracket.
Further, chamber bracket bottom end is equipped with supporting element.
Beneficial effects of the present invention: can not only improve plating membrane efficiency, and keep quality of forming film good, while membrane uniformity
High and target utilization is high.
Detailed description of the invention
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the invention
Example, for those of ordinary skill in the art, without creative efforts, can also obtain according to these attached drawings
Obtain other attached drawings.
Fig. 1 is one of the schematic diagram of the steel pipe continuous sputtering coating machine described according to embodiments of the present invention；
Fig. 2 is the two of the schematic diagram of the steel pipe continuous sputtering coating machine described according to embodiments of the present invention；
Fig. 3 is the top view of the steel pipe continuous sputtering coating machine described according to embodiments of the present invention.
In figure: 1, chamber bracket；2, First Transition chamber；3, preheating chamber；4, the first soak chamber；5, coating chamber；
6, the second soak chamber；7, transmission chamber；8, the second transition chamber thereof；9, travelling bogie；10, feeding system；11, blanking system；
12, backhaul transportation system；13, preceding gate valve；14, rear gate valve；15, vacuum pump group；16, supporting element.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art's every other embodiment obtained belong to what the present invention protected
Range.
As shown in Figure 1-3, a kind of steel pipe continuous sputtering coating machine described according to embodiments of the present invention, including several phases
Intercommunicated first chamber and second chamber is separately installed with preceding gate valve 13 and rear gate valve in two first chambers from beginning to end
14, vacuum pump group 15 is connected in the first chamber of part, is connected in the first chamber of vacuum pump group 15 and is set respectively
There are two transmission components, i.e., each vacuum chamber is equipped with two transmission components, and there is rack gear in 9 bottom of travelling bogie, passes through transmission group
There are idler wheel in first gear gear motion on part, 9 bottom of travelling bogie, roll in the running rail in first chamber, transmission
Motor in component is mounted on the side of each vacuum chamber；The transmission component is equipped with and 9 bottom rack gear phase of travelling bogie
The first gear of engagement, the transmission component are equipped with travel switch mechanism in place；Travelling bogie 9 is equipped in the first chamber
Running rail, the second chamber be equipped with backhaul transportation system 12, the backhaul transportation system 12 be equipped with transport it is small
The second gear that 9 bottom rack gear of vehicle is meshed.
In one particular embodiment of the present invention, the first chamber includes successively interconnected First Transition chamber
2, preheating chamber 3, the first soak chamber 4, coating chamber 5, the second soak chamber 6, transmission chamber 7 and the second transition chamber thereof 8,
In, the preceding gate valve 13 is set to 2 front end of First Transition chamber, after the rear gate valve 14 is set to second transition chamber thereof 8
End, between First Transition chamber 2 and preheating chamber 3, between preheating chamber 3 and the first soak chamber 4 and transmission chamber 7 and the
Vacuum valve is equipped between two transition chamber thereofs 8；Metal tube is placed on travelling bogie 9, the preceding unlatching of gate valve 2, travelling bogie 9
Into transition chamber thereof 1, subsequently enter preheating chamber 3, be heated to technological temperature, travelling bogie 9 successively the first soak chamber 4,
It is moved back and forth between coating chamber 5 and the second soak chamber 6, to guarantee the uniformity of plated film；After the completion of plated film, travelling bogie
9 sequentially enter transmission chamber 7 and the second transition chamber thereof 8, and after unloading pipe, travelling bogie 9 is moved to second chamber entrance, by returning
Journey transportation system 12, before travelling bogie 9 is transported to First Transition chamber 2, to tubulature, backhaul transportation system 12 is by roller gear
Driving is engaged with 9 bottom rack gear of travelling bogie.
In one particular embodiment of the present invention, the vacuum pump group 15 respectively with the First Transition chamber 2, preheating
Chamber 3, the first soak chamber 4, transmission chamber 7 are connected with the second transition chamber thereof 8.
In one particular embodiment of the present invention, two transmission components be respectively provided at the First Transition chamber 2,
Preheating chamber 3, the first soak chamber 4, transmission chamber 7 and the second transition chamber thereof 8 bottom.
In one particular embodiment of the present invention, it is respectively equipped in first soak chamber 4 and the second soak chamber 6
Armouring heating component is used for metal tube plated film preincubation by armouring heating component.
In one particular embodiment of the present invention, the cavity top surface of the coating chamber 5 is provided with multiple magnetic control target installations
Flange can install target.
In one particular embodiment of the present invention, between the first soak chamber 4 and coating chamber 5 and coating chamber 5
And second pass through flanged joint between soak chamber 6.
In one particular embodiment of the present invention, the First Transition chamber 2, preheating chamber 3, the first soak chamber 4,
Coating chamber 5, the second soak chamber 6, transmission chamber 7 and 8 bottom end of the second transition chamber thereof are respectively equipped with chamber bracket 1, transit chamber
Room bracket 1 improves its reliability and stability.
In one particular embodiment of the present invention, 1 bottom end of chamber bracket is equipped with supporting element 16, passes through supporting element 16
Further increase its reliability and stability.
In order to facilitate understanding above-mentioned technical proposal of the invention, below by way of in specifically used mode to of the invention above-mentioned
Technical solution is described in detail.
When specifically used, steel pipe continuous sputtering coating machine according to the present invention, travelling bogie 9 can place 12
Root metal tube, 12 metal tubes are horizontal positioned, can be 2 meters -5 meters of length of tube of compatible metal, metal pipe diameter 40mm-105mm, utilize
Metal tube is placed on travelling bogie 9 by feeding system 10, gate valve 2 before opening, and travelling bogie 9 successively drives into interconnected the
One chamber successively heated, plated film and reheating, and after the completion of plated film, travelling bogie 9 is driven out to from first chamber to carry out unloading pipe
It is transported using blanking system 11, unloads and travelling bogie 9 is moved to second chamber import after pipe, will transported by backhaul transportation system 12
Defeated 9 backhaul of trolley, then travelling bogie 9 is moved to first chamber entrance and loads metal tube.
In conclusion by means of above-mentioned technical proposal of the invention plating membrane efficiency can not only be improved, and make into film quality
It measures, while membrane uniformity is high and target utilization is high.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Within mind and principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (9)
1. a kind of steel pipe continuous sputtering coating machine, which is characterized in that including several interconnected first chambers and the second chamber
Room is separately installed with preceding gate valve (13) and rear gate valve (14) in two first chambers of head and the tail, in the first chamber of part
Vacuum pump group (15) are connected with, is connected in the first chamber of vacuum pump group (15) and is respectively equipped with two transmission components, institute
It states transmission component and is equipped with the first gear being meshed with travelling bogie (9) bottom rack gear, the transmission component is equipped in place
Travel switch mechanism；The running rail of travelling bogie (9) is equipped in the first chamber, it is defeated that the second chamber is equipped with backhaul
It send system (12), the backhaul transportation system (12) is equipped with the second gear being meshed with travelling bogie (9) bottom rack gear.
2. steel pipe continuous sputtering coating machine according to claim 1, which is characterized in that the first chamber includes successively
Interconnected First Transition chamber (2), preheating chamber (3), the first soak chamber (4), coating chamber (5), the second incubation cavity
Room (6), transmission chamber (7) and the second transition chamber thereof (8), wherein the preceding gate valve (13) is set to the First Transition chamber (2)
Front end, the rear gate valve (14) are set to the second transition chamber thereof (8) rear end.
3. steel pipe continuous sputtering coating machine according to claim 2, which is characterized in that the vacuum pump group (15) is respectively
With the First Transition chamber (2), preheating chamber (3), the first soak chamber (4), transmission chamber (7) and the second transition chamber thereof
(8) it is connected.
4. steel pipe continuous sputtering coating machine according to claim 2, which is characterized in that two transmission component difference
It is located at the First Transition chamber (2), preheating chamber (3), the first soak chamber (4), transmission chamber (7) and the second transition chamber thereof
(8) bottom.
5. steel pipe continuous sputtering coating machine according to claim 2, which is characterized in that first soak chamber (4)
With the second soak chamber (6) in be respectively equipped with armouring heating component.
6. steel pipe continuous sputtering coating machine according to claim 2, which is characterized in that the chamber of the coating chamber (5)
Body top surface is equipped with several magnetic control targets.
7. steel pipe continuous sputtering coating machine according to claim 2, which is characterized in that the first soak chamber (4) and plating
Pass through flanged joint between membrane cavity room (5) and between coating chamber (5) and the second soak chamber (6).
8. according to the described in any item steel pipe continuous sputtering coating machines of claim 2-7, which is characterized in that the First Transition
Chamber (2), preheating chamber (3), the first soak chamber (4), coating chamber (5), the second soak chamber (6), transmission chamber (7) and
Second transition chamber thereof (8) bottom end is respectively equipped with chamber bracket (1).
9. steel pipe continuous sputtering coating machine according to claim 8, which is characterized in that chamber bracket (1) bottom end
Equipped with supporting element (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910038136.4A CN109576660A (en) | 2019-01-16 | 2019-01-16 | Steel pipe continuous sputtering coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910038136.4A CN109576660A (en) | 2019-01-16 | 2019-01-16 | Steel pipe continuous sputtering coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109576660A true CN109576660A (en) | 2019-04-05 |
Family
ID=65916604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910038136.4A Pending CN109576660A (en) | 2019-01-16 | 2019-01-16 | Steel pipe continuous sputtering coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109576660A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112962081A (en) * | 2021-02-01 | 2021-06-15 | 肇庆宏旺金属实业有限公司 | Continuous coating production line and coating process for steel plate |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104004999A (en) * | 2013-12-16 | 2014-08-27 | 湘潭宏大真空技术股份有限公司 | Vertical vacuum sputtering coating production line |
| CN107058947A (en) * | 2016-11-09 | 2017-08-18 | 上海交通大学 | For preparing fuel battery metal double polar plate amorphous carbon-film magnetron sputtering continuous lines |
| CN108570651A (en) * | 2018-06-13 | 2018-09-25 | 广东振华科技股份有限公司 | A kind of horizontal magnetron sputtering film production line of multi-chamber and its film plating process |
| CN209636309U (en) * | 2019-01-16 | 2019-11-15 | 北京奥普科星技术有限公司 | Steel pipe continuous sputtering coating machine |
-
2019
- 2019-01-16 CN CN201910038136.4A patent/CN109576660A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104004999A (en) * | 2013-12-16 | 2014-08-27 | 湘潭宏大真空技术股份有限公司 | Vertical vacuum sputtering coating production line |
| CN107058947A (en) * | 2016-11-09 | 2017-08-18 | 上海交通大学 | For preparing fuel battery metal double polar plate amorphous carbon-film magnetron sputtering continuous lines |
| CN108570651A (en) * | 2018-06-13 | 2018-09-25 | 广东振华科技股份有限公司 | A kind of horizontal magnetron sputtering film production line of multi-chamber and its film plating process |
| CN209636309U (en) * | 2019-01-16 | 2019-11-15 | 北京奥普科星技术有限公司 | Steel pipe continuous sputtering coating machine |
Non-Patent Citations (1)
| Title |
|---|
| 钱志屏编著: ""塑料制品设计与制造"", 31 May 1993, 同济大学出版社, pages: 318 - 319 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112962081A (en) * | 2021-02-01 | 2021-06-15 | 肇庆宏旺金属实业有限公司 | Continuous coating production line and coating process for steel plate |
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