CN209508399U - A kind of vacuum coating production line - Google Patents
A kind of vacuum coating production line Download PDFInfo
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- CN209508399U CN209508399U CN201821812048.2U CN201821812048U CN209508399U CN 209508399 U CN209508399 U CN 209508399U CN 201821812048 U CN201821812048 U CN 201821812048U CN 209508399 U CN209508399 U CN 209508399U
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Abstract
The utility model belongs to field of vacuum coating more particularly to a kind of vacuum coating production line.The vacuum coating production line include at least one workpiece trolley, at least one be set side by side with into piece chamber and out the vacuum chamber of piece chamber, be separately positioned on into piece is intracavitary and slice is intracavitary the first transport mechanism and the second transport mechanism, translation room, the vacuum chamber is connect with room is translated.It is described that the first transport mechanism and the second transport mechanism is respectively set into piece chamber and slice are intracavitary by being set side by side in a vacuum chamber into piece chamber and piece chamber out, two processes can be completed in a vacuum chamber, the effective usage quantity for reducing vacuum chamber；Again by one translation room being connect with vacuum chamber of setting, the workpiece trolley for flowing out producing line can be turned to and be transmitted back in producing line, the effective occupied area for reducing trolley return mechanism；The advantages that the utility model has structure simple, and occupied area is small, and cost of investment is low, and work efficiency is high.
Description
Technical field
The utility model belongs to field of vacuum coating more particularly to a kind of vacuum coating production line.
Background technique
Vacuum coating technology have developed rapidly, from evaporation coating to magnetron sputtering plating, multi-arc ion plating film etc.；Application range
Also it is more and more extensive such as: building glass field, field of solar energy, electricity product scope, cutter production field etc. are applied to true
Empty coating technique；Vacuum coating equipment also develops to the production of multicell continuous vacuum coating from single chamber intermittent vacuum coating machine
Line.
The prior art than more typical vertical continuous vacuum coating production line include: sequentially connected preceding traverse displacement unit, into
Horse takes out room into piece room, preceding essence, preceding transition chamber, coating chamber (coating chamber may have several), rear transition chamber, rear essence pumping room, goes out
Piece room goes out horse, rear traverse displacement unit and workpiece trolley return mechanism, and above-mentioned each room is referred to as " vacuum chamber "；Certain vacuum
The junction of room is provided with vacuum lock, and (a kind of flap valve, when closing, can separate the gas passage between two vacuum chambers, when unlatching
Workpiece trolley can be allowed to pass through from the feeding inlet that goes out of valve) and pumping unit (vacuum chamber is made to obtain the device of certain negative pressure)；Each
Vacuum chamber, preceding traverse displacement unit, into horse, go out horse, rear traverse displacement unit and workpiece trolley return assembly be provided with driving workpiece
Trolley makees the workpiece trolley transmission device of translational motion；Forward and backward traverse displacement unit can also drive workpiece trolley to move left and right.
Automatic film coating process: on workpiece trolley return mechanism workpiece trolley (for carry by the workpiece of plated film such as glass,
Offset plate etc.) traverse displacement unit is into horse loading workpiece before menstruation, and when opening into piece room vacuum lock, workpiece trolley enters into piece room,
It when workpiece is completely into closing behind piece room into piece room vacuum lock, is evacuated into piece room pumping unit into piece room, when into piece room gas
Essence takes out room vacuum lock before pressure is opened when reaching certain numerical value (usually 3 pa), and workpiece trolley enters preceding essence and takes out room；Work like this
Part trolley sequentially enters each vacuum chamber, and the corresponding unit that is evacuated of each vacuum chamber is evacuated by certain program；When workpiece trolley
Workpiece pass by and be just coated with one or more layers film after coating chamber, then walk out other vacuum chambers through certain program and come out
At this moment horse can remove workpiece from workpiece trolley；Workpiece trolley comes into rear traverse displacement unit after taking workpiece, then small through workpiece
Vehicle return mechanism is come into one working cycles of rear traverse displacement unit completion and (on production line while being set to reach quantity-produced purpose
It is equipped with more workpiece trolleies).
The vacuum chamber of the vertical continuous vacuum coating production line of the prior art is relatively more, is additionally provided with special workpiece trolley and returns
Return device, has that labyrinth is complicated, takes up a large area, the deficiencies of cost of investment is big place.
Utility model content
The technical problem to be solved by the present invention is in view of the above drawbacks of the prior art, provide a kind of Vacuum Deposition
The problems such as film production line, overcoming existing vacuum coating production line, structure is complicated, takes up a large area, and cost of investment is big.
The technical scheme adopted by the utility model to solve the technical problem is as follows: providing a kind of vacuum coating production line, wrap
Include at least one for fix workpiece workpiece trolley, at least one be set side by side with into piece chamber and out the vacuum chamber of piece chamber, point
Be not arranged in into piece is intracavitary and slice it is intracavitary for the first transport mechanism of transmitting workpiece trolley and the second transport mechanism, for general
The translation room of piece chamber is conveyed into out from the workpiece trolley flowed out into piece chamber, the vacuum chamber is connect with translation room.
The still more preferably scheme of the utility model is: the vacuum coating production line further includes for will be from piece chamber out
The workpiece trolley of outflow is conveyed into the translation component into piece chamber, and the translation component, translation room are separately positioned on vacuum chamber two
End.
The still more preferably scheme of the utility model is: the vacuum coating production line further includes for workpiece loading and unloading
Handling horse, handling horse setting is between translation component and vacuum chamber.
The still more preferably scheme of the utility model is: the translation room includes the translation warehouse with vacuum chamber,
It is slidably arranged on translation warehouse for fixing the first translating bracket of workpiece trolley, for driving the first translating bracket to move
Third transport mechanism of the first translating bracket lower part for transmitting workpiece trolley is arranged in first translation driving device；It is described flat
It moves and offers feed inlet and outlet, the translation direction and workpiece trolley of first translating bracket on warehouse with the position of vacuum chamber cooperation
The direction for entering and leaving translation warehouse is vertical.
The still more preferably scheme of the utility model is: the third transport mechanism includes being rotatably arranged on the first translation
It is flat to pass through translation warehouse connection first for multiple friction pulleys of bracket lower part, the first transport motor for driving friction pulley to rotate
The axle sleeve for moving bracket and the first transport motor, across the transmission component of axle sleeve connection the first transport motor and friction pulley.
The still more preferably scheme of the utility model is: first translation driving device includes and the first transport motor
First swivel nut of connection, the first screw rod being threadedly engaged with the first swivel nut, the first translation electricity for driving the first screw rod to rotate
Machine, first translation motor are arranged in the first transport motor side.
The still more preferably scheme of the utility model is: being provided between the translation warehouse and the first translating bracket flat
Move guiding mechanism.
The still more preferably scheme of the utility model is: the third transport mechanism further includes for guiding workpiece trolley
First transmission guiding mechanism of direction of transfer, the first transmission guiding mechanism are arranged on the first translating bracket top.
The still more preferably scheme of the utility model is: the translation component includes the translation that vacuum chamber side is arranged in
Component chassis is slidably arranged on translation component chassis for adjusting the second translating bracket of the small truck position of workpiece, for driving
Second translating bracket does the second translation driving device of translational motion, is arranged on the second translating bracket and is used for transmitting workpiece trolley
The 4th transport mechanism, the translation direction of second translating bracket and workpiece trolley enter or leave the side of translation component chassis
To being mutually perpendicular to.
The still more preferably scheme of the utility model is: being provided in the middle part of the workpiece trolley for vertically-mounted workpiece
Workpiece installation through-hole.
The utility model has the beneficial effects that: by being set side by side in a vacuum chamber into piece chamber and piece chamber out, institute
It states into piece chamber and slice are intracavitary and the first transport mechanism and the second transport mechanism is respectively set, two can be completed in a vacuum chamber
A process, the effective usage quantity for reducing vacuum chamber；Again by one translation room being connect with vacuum chamber of setting, can will flow
The workpiece trolley steering of producing line is transmitted back in producing line out, the effective occupied area for reducing trolley return mechanism；This is practical new
The advantages that type has structure simple, and occupied area is small, and cost of investment is low, and work efficiency is high.
Detailed description of the invention
Utility model is described further below in conjunction with accompanying drawings and embodiments, in attached drawing:
Fig. 1 is the structural schematic diagram of the utility model vacuum coating production line；
Fig. 2 is the partial enlarged view of the utility model vacuum coating production line；
Fig. 3 is the cross-sectional view of the utility model translation room；
Fig. 4 is the cross-sectional view of the utility model translation room other direction；
Fig. 5 is that the schematic diagram of internal structure translated at the top of warehouse is removed in the utility model translation room；
Fig. 6 is the enlarged partial sectional view of the utility model translation room；
Fig. 7 is the cross-sectional view of the utility model seal assembly；
Fig. 8 is the cross-sectional view of the utility model transmission component；
Fig. 9 is the cross-sectional view of the utility model translation component.
Specific embodiment
Now in conjunction with attached drawing, elaborate to the preferred embodiment of the utility model.
As shown in Figure 1 and Figure 2, a kind of vacuum coating production line of the present embodiment, including at least one for fixing workpiece
Workpiece trolley 1, at least one be set side by side with into piece chamber 21 and out the vacuum chamber 2 of piece chamber 22, be separately positioned on into piece chamber 21
Out for the first transport mechanism of transmitting workpiece trolley 1 and the second transport mechanism, for that will be flowed from into piece chamber 21 in piece chamber 22
Workpiece trolley 1 out is conveyed into out the translation room 4 of piece chamber 22, and the vacuum chamber 2 is connect with translation room 4.By true at one
It is set side by side in empty room 2 into piece chamber 21 and piece chamber 22 out, it is described that the first conveyer is respectively set into piece chamber 21 and out in piece chamber 22
Structure and the second transport mechanism can complete two processes in a vacuum chamber 2, the effective usage quantity for reducing vacuum chamber 2；
Again by one translation room 4 being connect with vacuum chamber 2 of setting, the workpiece trolley 1 for flowing out producing line can be turned to and be transmitted back to production
On line, the effective occupied area for reducing trolley return mechanism；The utility model has structure simple, and occupied area is small, investment
It is at low cost, the advantages that work efficiency is high.
Further, as shown in Figure 1 and Figure 2, the vacuum coating production line further includes for will flow out from piece chamber 22 out
Workpiece trolley 1 is conveyed into the translation component 5 into piece chamber 21, and the translation component 5, translation room 4 are separately positioned on vacuum chamber 2
Both ends.It is used to for the workpiece trolley 1 flowed out from piece chamber 22 out being conveyed into piece chamber 21 by increasing a translation component 5, it can
Further to promote the convenience of vacuum coating production line, pass through the cooperation of translation component 5 and translation room 4, it can realize true
The fully-automatic production of empty coating film production line is no longer needed to through manual handling workpiece trolley 1, and occupied area is smaller.
Further, as shown in Figure 1 and Figure 2, the vacuum coating production line further includes the handling piece for workpiece loading and unloading
Frame 3, the setting of handling horse 3 is between translation component 5 and vacuum chamber 2.The handling horse 3 include handling piece frame body with
And it is arranged on handling piece frame body with vacuum chamber 2 into corresponding 5th transport mechanism in piece chamber 21 and out 22 position of piece chamber
With the 6th transport mechanism.In the present embodiment, horse 3 is loaded and unloaded by handling piece frame body and the 5th transport mechanism and the 6th transport mechanism
It constitutes, the 5th transport mechanism and the 6th transport mechanism can be used for conveying work pieces trolley 1, and workpiece trolley stays in handling horse
When 3, feeding and blanking can be carried out, improves the convenience that vacuum coating production line uses.
Further, as shown in figure 1, figure 2, figure 3, figure 4 and figure 5, the translation room 4 includes the translation being connected to vacuum chamber 2
Warehouse 41 is slidably arranged on translation warehouse 41 for fixing the first translating bracket 42 of workpiece trolley 1, flat for driving first
The first translation driving device 43 that bracket 42 moves is moved, 42 lower part of the first translating bracket is set for transmitting workpiece trolley 1
Third transport mechanism 44；Described translate offers feed inlet and outlet 411 with the position of the cooperation of vacuum chamber 2 on warehouse 41, and described first
It is vertical that the translation direction of translating bracket 42 and workpiece trolley 1 enter and leave the translation direction of warehouse 41.Pass through third conveyer
Workpiece trolley 1 can be sent into and be sent out translation room 4 by structure 44, pass through matching for the first translating bracket 42 and the first translation driving device 43
Close, the position of workpiece trolley 1 can be adjusted, by workpiece trolley 1 be transmitted to on the corresponding position of 22 producing line of piece chamber out；Again
Translation warehouse 41 is connected to vacuum chamber 2, in the case where can be the pressure holding for translating warehouse 41 and vacuum chamber 2 under pair
Workpiece trolley 1 carries out the adjustment of position, without being returned to atmospheric pressure, the effective time for shortening workpiece trolley 1 and commutating, improves true
The working efficiency of empty coating film production line.The translation room 4 further includes the aspirating hole 412 being arranged on translation warehouse 41,
By increase an aspirating hole 412, can be used for connecting pumping unit adjust translation room 4 air pressure, make translate room 4 air pressure with
The air pressure of connected vacuum chamber 2 is consistent, to improve the working efficiency of coating film production line.
Further, as shown in Fig. 3, Fig. 4, Fig. 6, the third transport mechanism 44 includes being rotatably arranged on the first translation branch
Multiple friction pulleys 441 of 42 lower part of frame, the first transport motor 442 for driving friction pulley 441 to rotate pass through translation warehouse 41
The axle sleeve 443 of the first translating bracket 42 and the first transport motor 442 is connected, axle sleeve 443 is passed through and connects 442 He of the first transport motor
The transmission component 444 of friction pulley 441.Friction pulley 441 is driven to rotate by the first transport motor 442, to realize friction pulley
The movement that workpiece trolley 1 on 441 moves forward or back.In addition, first transport motor 442 also could alternatively be rotary pneumatic
Cylinder drives friction pulley 441 to move, the movement of the forward or backward of workpiece trolley 1 also may be implemented by rotary cylinder.Pass through increase
One axle sleeve 443 connects the first transport motor 442 and the first translating bracket 42, when the first translating bracket 42 is moved, the
One transport motor 442 and transmission component 444 are moved simultaneously, be can simplify the structure of third transport mechanism 44, are improved simultaneously
The stability of third transport mechanism 44.It should be noted that the third transport mechanism 44 in the present embodiment uses friction pulley 441
The transmission for carrying out workpiece trolley 1 is one kind of embodiment, and the utility model can also be by modes such as gear, rack gears to work
Part trolley 1 is transmitted.
Further, as shown in figs. 4 and 6, further, the transmission component 444 is by gear, the transmission such as transmission shaft
First transport motor, 442 power transmission to friction pulley 441 can be realized band by the cooperation of gear and transmission shaft by part composition
The movement for the forward or backward of part trolley 1 of starting building.In the present embodiment, chain conveyer, belt biography etc. is can also be used in the transmission component 444
The kind of drive drives friction pulley 441 to rotate, to complete the movement that driving workpiece trolley 1 is moved forward or back.
Further, as shown in Fig. 3, Fig. 6, first translation driving device 43 includes connecting with the first transport motor 442
The first swivel nut 431 connect, the first screw rod 432 being threadedly engaged with the first swivel nut 431, for driving the first screw rod 432 to rotate
First translation motor 433, first translation motor 433 are arranged in 442 side of the first transport motor.Pass through the first translation electricity
Machine 433 drives the rotation of the first screw rod 432, can drive and be translated with the first transport motor 442 of the first swivel nut 431 connection
Movement, while driving and carrying out translational motion with the first transport motor 442 and the first translating bracket 42.Certainly, in the present embodiment
First translation driving device 43 or cylinder directly drive the movement of the first transport motor 442 by cylinder, can also complete
The translation motion of first translating bracket 42.
Further, as shown in Fig. 3, Fig. 8, translation is provided between the translation warehouse 41 and the first translating bracket 42 and is led
To mechanism 45.The guided in translation mechanism 45 includes at least one translating rails 451 being arranged on translation warehouse 41, and sliding
The dynamic translation guide sleeve 452 being set on translating rails 451, the translation guide sleeve 452 are connect with the first translating bracket 42.Pass through increasing
Add one for guiding the guided in translation mechanism 45 of 42 translation direction of the first translating bracket, can effectively improve flat first translation
Stability when bracket 42 is mobile.
Further, as shown in figure 3, the third transport mechanism 44 further includes for guiding 1 direction of transfer of workpiece trolley
First transmission guiding mechanism 445, it is described first transmission guiding mechanism 445 be arranged on 42 top of the first translating bracket.Described
One transmission guiding mechanism 445 is magnetic steering mechanism, including magnetic track and the top of workpiece trolley 1 is arranged in is used to lead with magnetism
Multiple permanent magnets of rail cooperation.The permanent magnet is intermediate polarity identical mutually exclusive with magnetic track, passes through permanent magnet and magnetism
The cooperation of guide rail can effectively reduce the frictional force of workpiece trolley 1 Yu guide rail, improve the Transportation Efficiency of third transport mechanism 44
Fruit.
Further, as shown in Fig. 1, Fig. 9, the translation component 5 includes the translation component bottom that 2 side of vacuum chamber is arranged in
Frame 51 is slidably arranged on translation component chassis 51 for adjusting the second translating bracket 52 of 1 position of workpiece trolley, for driving
Dynamic second translating bracket 52 does the second translation driving device 53 of translational motion, is arranged on the second translating bracket 52 for transporting
The translation direction of 4th transport mechanism 54 of workpiece trolley 1, second translating bracket 52 enters or leaves flat with workpiece trolley 1
The direction for moving component chassis 51 is mutually perpendicular to.Can workpiece trolley 1 be sent into and be sent out the second translation by the 4th transport mechanism 54
Bracket 52 can adjust the position of workpiece trolley 1 by the cooperation of the second translating bracket 52 and the second translation driving device 53
It is whole, workpiece trolley 1 is sent on the corresponding position of 21 producing line of piece chamber.In the present embodiment, second translation driving device
53 is similar to the first translation driving device 43, is by electric motor driven screw swivel nut to drive translating bracket to be translated
Movement.
Further, as shown in figure 4, being provided with the workpiece installation for vertically-mounted workpiece in the middle part of the workpiece trolley 1
Through-hole.By the way that the workpiece installation through-hole for being used for vertically-mounted workpiece is arranged in the middle part of workpiece trolley 1, workpiece plated film is being carried out
When work, after the filming process for completing workpiece side, the plated film work that adjacent producing line carries out the other side is reached by translating room
Sequence.The plated film work of two sides can be completed once, it is not necessary that after completing one side, disassembly installation workpiece carries out the other side again again
Plated film work, effectively improves production efficiency.
Further, such as Fig. 3, shown in fig. 4, fig. 9, the third transport mechanism 44, the structure of the 4th transport mechanism 54
It is similar, it is the transportation function for driving friction pulley rotation etc. to complete workpiece trolley 1 by driving device.It is described in the present embodiment
First transport mechanism, the second transport mechanism, the 5th transport mechanism, the 6th transport mechanism structure are similar, are driven and are slided by synchronous belt
Wheel belt start building part trolley 1 movement, to realize the function of conveying work pieces trolley 1.
Further, as shown in Figure 6, Figure 7, seal assembly is additionally provided between the axle sleeve 443 and translation warehouse 41
46.By increasing seal assembly 46, it can effectively prevent translation room 4 and leak, improve the working efficiency of translation room 4.Institute
Seal assembly 46 is stated to include seal assembly main body 461, backbone sealing ring is arranged between seal assembly main body 461 and axle sleeve 443
462, seal assembly main body 461 is set and translates the sealing ring of warehouse 41.It can be right by backbone sealing ring 462 and sealing ring
The cooperation position of axle sleeve 463 and translation warehouse 41 is sealed.In the present embodiment, the backbone sealing ring 462 can also be replaced
For magnetic fluid, the sealing function in the present embodiment can also be completed by magnetic fluid.
Further, as shown in Figure 1 and Figure 2, the vacuum coating production line includes six vacuum chambers being continuously arranged, root
It is divided into disengaging piece room according to the difference of process, essence takes out room, preceding transition chamber, coating chamber A, coating chamber B, rear transition chamber, the disengaging piece
Room is connect with handling horse 3, and the translation room is connect with rear transition chamber.The disengaging piece room piece chamber connects respectively into piece chamber and out
Logical first pumping unit and the second pumping unit；Into the piece chamber and out piece chamber that the essence takes out room be respectively communicated with third pumping unit with
4th pumping unit；The preceding transition chamber, coating chamber A, coating chamber B, rear transition chamber into piece chamber connection the 5th pumping unit；Institute
State preceding transition chamber, coating chamber A, the 6th pumping unit of coating chamber B, the piece chamber out of rear transition chamber and the connection of translation room.The disengaging
The first vacuum lock and the second vacuum lock are provided between piece room and handling horse 3；The disengaging piece room, essence are taken out and are provided between room
Third vacuum lock and the 4th vacuum lock, the essence take out and are provided with the 5th vacuum lock and the 6th vacuum lock between room, preceding transition chamber.
Working principle of the utility model is:
After unloading workpiece, it is located at the 6th transport mechanism side workpiece trolley 1 on handling horse 3 and enters translation component 5, translation
After the second translation driving device 53 on component 5 drives the second translating bracket 52 that workpiece trolley 1 is driven to carry out translation adjustment position,
The 5th transport mechanism side that the workpiece trolley 1 of 4th transport mechanism 53 transmission enters handling horse at this moment can be wanting plated film
The fixed workpiece trolley 1 of workpiece on, open the first vacuum lock, workpiece trolley 1 enter into disengaging piece room into piece chamber, when workpiece is small
Vehicle is completely into the first vacuum lock of rear closing, and for the first pumping unit to disengaging room into piece chamber evacuation, air pressure reaches certain numerical value
When (usually 3 pa) when open true third vacuum lock, workpiece trolley enter essence take out room into piece chamber, when workpiece trolley 1 completely into
Third vacuum lock is closed after entering, when essence takes out (usually 0.08 pa, when automatic control when room reaches certain numerical value into piece chamber pressure
Third is evacuated unit and continuously takes out room into piece chamber pumping to essence), open the 5th vacuum lock；Workpiece trolley 1 enters preceding transition chamber into piece
Chamber, then successively come into coating chamber A, coating chamber B into piece chamber carry out plated film, then after transition chamber into piece chamber come into translation room,
After workpiece trolley is completely into translation room, the translation driving device 43 and the first translating bracket 42 cooperation adjustment work of room 4 are translated
Behind the position of part trolley 1, workpiece trolley 1 comes into rear transition chamber from translation room 4 and goes out piece chamber, and then comes into coating chamber B, coating chamber A
Piece chamber plated film again out continues transition chamber before coming into and goes out piece chamber, opens the 6th vacuum lock when reaching designated position, workpiece trolley into
Enter essence take out room go out piece chamber, when workpiece trolley completely into after close the 6th vacuum lock, open the 4th vacuum lock, workpiece trolley enter
Disengaging piece room goes out piece chamber, when (the 4th pumping unit is continuous when automatic control completely into the 4th vacuum lock of rear closing for workpiece trolley
Slice chamber evacuation in room is taken out to essence), disengaging piece room goes out piece chamber and deflates (unloading vacuum), and the second vacuum lock, work are opened after deflation
Part trolley comes into handling horse slice side, and closing the second vacuum lock, (the second pumping unit is to disengaging room after the second vacuum lock is closed
Slice chamber evacuation), at this moment workpiece can be removed from workpiece trolley 1；Workpiece trolley 1 comes into translation component 5 after taking workpiece
Start next working cycles.On production line simultaneously be provided with more workpiece trolleies 1, the work on each station can simultaneously into
Row, to reach quantity-produced purpose.
It should be understood that above embodiments are only to illustrate the technical solution of the utility model, it is rather than its limitations, right
For those skilled in the art, it can modify to technical solution illustrated in the above embodiments, or to part of skill
Art feature is equivalently replaced；And all such modifications and replacement, it all should belong to the protection of the appended claims for the utility model
Range.
Claims (10)
1. a kind of vacuum coating production line, which is characterized in that including at least one be used for fix workpiece workpiece trolley, at least one
It is a be set side by side with into piece chamber and out the vacuum chamber of piece chamber, be separately positioned on that intracavitary into piece and slice is intracavitary small for transmitting workpiece
The first transport mechanism and the second transport mechanism of vehicle, for the flat of piece chamber will to be conveyed into out from the workpiece trolley flowed out into piece chamber
Room is moved, the vacuum chamber is connect with translation room.
2. vacuum coating production line according to claim 1, which is characterized in that the vacuum coating production line further includes using
In the workpiece trolley flowed out from piece chamber out to be conveyed into the translation component into piece chamber, the translation component, translation room are set respectively
It sets at vacuum chamber both ends.
3. vacuum coating production line according to claim 2, which is characterized in that the vacuum coating production line further includes using
In the handling horse of workpiece loading and unloading, the handling horse setting is between translation component and vacuum chamber.
4. vacuum coating production line according to claim 1 to 3, which is characterized in that the translation room includes and vacuum
The translation warehouse of room connection is slidably arranged on translation warehouse for fixing the first translating bracket of workpiece trolley, for driving
The of the first translating bracket lower part for transmitting workpiece trolley is arranged in first translation driving device of the first translating bracket movement
Three transport mechanisms；Position on the translation warehouse with vacuum chamber cooperation offers feed inlet and outlet, first translating bracket
It is vertical that translation direction and workpiece trolley enter and leave the translation direction of warehouse.
5. vacuum coating production line according to claim 4, which is characterized in that the third transport mechanism includes that rotation is set
Multiple friction pulleys in the first translating bracket lower part are set, the first transport motor for driving friction pulley to rotate passes through translation storehouse
Body connects the axle sleeve of the first translating bracket and the first transport motor, across the transmission of axle sleeve connection the first transport motor and friction pulley
Component.
6. vacuum coating production line according to claim 5, which is characterized in that first translation driving device include with
First swivel nut of the first transport motor connection, the first screw rod being threadedly engaged with the first swivel nut, for driving the rotation of the first screw rod
The first translation motor, first translation motor is arranged in the first transport motor side.
7. vacuum coating production line according to claim 4, which is characterized in that the translation warehouse and the first translating bracket
Between be provided with guided in translation mechanism.
8. vacuum coating production line according to claim 5, which is characterized in that the third transport mechanism further includes being used for
The first transmission guiding mechanism of workpiece trolley direction of transfer is guided, the first transmission guiding mechanism is arranged in the first translating bracket
Top.
9. vacuum coating production line according to claim 2, which is characterized in that the translation component includes being arranged in vacuum
The translation component chassis of room side is slidably arranged on translation component chassis for adjusting the second translation branch of the small truck position of workpiece
Frame, for driving the second translating bracket to do the second translation driving device of translational motion, setting is used on the second translating bracket
4th transport mechanism of transmitting workpiece trolley, the translation direction and workpiece trolley of second translating bracket enter or leave translation
The direction of component chassis is mutually perpendicular to.
10. vacuum coating production line according to claim 1, which is characterized in that setting is useful in the middle part of the workpiece trolley
In the workpiece installation through-hole of vertically-mounted workpiece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821812048.2U CN209508399U (en) | 2018-11-05 | 2018-11-05 | A kind of vacuum coating production line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821812048.2U CN209508399U (en) | 2018-11-05 | 2018-11-05 | A kind of vacuum coating production line |
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| Publication Number | Publication Date |
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| CN209508399U true CN209508399U (en) | 2019-10-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821812048.2U Active CN209508399U (en) | 2018-11-05 | 2018-11-05 | A kind of vacuum coating production line |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114457315A (en) * | 2021-12-28 | 2022-05-10 | 凯盛信息显示材料(黄山)有限公司 | Glass magnetron sputtering coating system |
-
2018
- 2018-11-05 CN CN201821812048.2U patent/CN209508399U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114457315A (en) * | 2021-12-28 | 2022-05-10 | 凯盛信息显示材料(黄山)有限公司 | Glass magnetron sputtering coating system |
| CN114457315B (en) * | 2021-12-28 | 2023-07-25 | 凯盛信息显示材料(洛阳)有限公司 | Glass magnetron sputtering coating system |
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Effective date of registration: 20210721 Address after: 526000 20 meters south of hongaisi Machinery Industry Co., Ltd., Jindu Industrial Park, Jindu Town, Gaoyao District, Zhaoqing City, Guangdong Province (one of the workshops of Shankou community residents committee) Patentee after: Zhaoqing Dexin Vacuum Equipment Co.,Ltd. Address before: 526000 F4 District, Jindu Town, Gaoyao District, Zhaoqing City, Guangdong Province (behind hongaisi, Century Avenue) Patentee before: ZHAOQING QIANYAN VACUUM EQUIPMENT Co.,Ltd. |