CN110423990A - A kind of steel band coating system - Google Patents
A kind of steel band coating system Download PDFInfo
- Publication number
- CN110423990A CN110423990A CN201910826782.7A CN201910826782A CN110423990A CN 110423990 A CN110423990 A CN 110423990A CN 201910826782 A CN201910826782 A CN 201910826782A CN 110423990 A CN110423990 A CN 110423990A
- Authority
- CN
- China
- Prior art keywords
- target
- vacuum
- fixed part
- steel band
- technique
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910000831 Steel Inorganic materials 0.000 title claims abstract description 30
- 239000010959 steel Substances 0.000 title claims abstract description 30
- 239000011248 coating agent Substances 0.000 title claims abstract description 18
- 238000000576 coating method Methods 0.000 title claims abstract description 18
- 230000007246 mechanism Effects 0.000 claims abstract description 44
- 238000000034 method Methods 0.000 claims abstract description 31
- 238000001771 vacuum deposition Methods 0.000 claims abstract description 28
- 239000000463 material Substances 0.000 claims abstract description 6
- 239000000498 cooling water Substances 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical group [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
Abstract
The present invention provides a kind of steel band coating system, including technique for vacuum coating room, guide rail mechanism and target pass in and out trolley；The front of technique for vacuum coating room is arranged in guide rail mechanism, and is vertical setting with technique for vacuum coating room, and target disengaging trolley is slidably mounted on guide rail mechanism.It includes vehicle body and target installing mechanism that target, which passes in and out trolley,；Vehicle body is equipped with target fixed part, and target fixed part is arranged perpendicular to vehicle body, and target installing mechanism is installed on target fixed part.Target installing mechanism includes motor, mounting flange and target mounting post；Motor is installed on target fixed part, and mounting flange is installed on the output shaft of motor, and target mounting post is connect with mounting flange, and target mounting post offers fixation hole.Steel band coating system of the invention can effectively use manpower and material resources sparingly, and operating safety factor is high, and plated film compactness is good, improve product yield.
Description
Technical field
The present invention relates to steel band production equipment technology more particularly to a kind of steel band coating systems.
Background technique
In stainless steel industry now, it is often used single-unit furnace and titanizing processing is carried out to steel plate, and used in single-unit furnace
There are two types of targets, and one is titanium block target, another kind is column target.The target of titanium block target is evenly distributed on furnace body side, mounting means
To install manually, compare and expend time and manpower, and due to the limitation of installation site and target shape, sputtering range has centainly
Limitation.The target installation of column target needs to use driving and is lifted, and installs time-consuming and acquires a certain degree of difficulty, to safety of employees
It is threatened there is also certain, and the target consumption of column target is very fast, economy is not high.
Summary of the invention
The present invention provides one kind and can effectively use manpower and material resources sparingly, and operating safety factor is high, and plated film compactness is good, improves
The steel band coating system of product yield.
A kind of the technical solution adopted by the present invention are as follows: steel band coating system comprising: technique for vacuum coating room, guide rail machine
Structure and target pass in and out trolley；The guide rail mechanism is arranged in the front of the technique for vacuum coating room, and with the Vacuum Deposition
Membrane process room is vertical setting, and the target disengaging trolley is slidably mounted on the guide rail mechanism；
The target disengaging trolley includes vehicle body, front-wheel, rear-wheel and target installing mechanism；The front-wheel is installed on institute
The bottom front of vehicle body is stated, the rear-wheel is installed on the bottom rear end of the vehicle body, and the front-wheel and the rear-wheel are respectively positioned on
On the guide rail mechanism；The vehicle body is equipped with target fixed part, and the target fixed part is arranged perpendicular to the vehicle body, the target
Material installing mechanism is installed on the target fixed part；
The target installing mechanism includes motor, mounting flange and target mounting post；The motor is installed on described
Target fixed part, the mounting flange are installed on the output shaft of the motor, the target mounting post and the connecting flange
Disk connection, and the target mounting post offers fixation hole.
Further, two target disengaging trolleies have been mounted side by side in sliding left and right on the guide rail mechanism.
Further, the target fixed part is equipped with multiple target installing mechanisms.
Further, the technique for vacuum coating room is connected with vacuum device, and the vacuum device includes vacuum pump
And vacuum tube；The vacuum tube connects the inside of the vacuum pump and the technique for vacuum coating room.
Further, the periphery of the technique for vacuum coating room is equipped with cooling water circulation.
Compared to the prior art, steel band coating system of the invention passes in and out trolley by setting target and transports target pipe to true
Empty coated process chamber to effectively save a large amount of manpower and material resources, but also improves the safety of operation.In addition, pass through by
Target fixed part is arranged perpendicular to vehicle body, and target installing mechanism is installed on target fixed part, and target pipe is installed on target peace
Mounting mechanism is allowed to be parallel to target disengaging trolley disengaging direction, makes target pipe just with the indoor steel band of technique for vacuum coating in flat
Row relationship, so that the film compactness of plating is good, is avoided the occurrence of due to arc light so that arc light sputtering concentrates on steel band when plated film
Sputter unstable the problem of leading to steel band uneven color one.
Detailed description of the invention
The drawings are intended to provide a further understanding of the invention, and constitutes part of specification, and following specific
Embodiment is used to explain the present invention together, but should not be construed as limiting the invention.In the accompanying drawings,
Fig. 1: the schematic diagram of steel band coating system of the present invention；
Fig. 2: another schematic diagram of steel band coating system of the present invention；
Fig. 3: the schematic diagram of target fixed mechanism of the present invention.
Specific embodiment
Below in conjunction with attached drawing, detailed description of the preferred embodiments.It should be understood that this place is retouched
The specific embodiment stated is merely to illustrate and explain the present invention, and is not intended to restrict the invention.
As shown in Figure 1 to Figure 3, steel band coating system of the invention include technique for vacuum coating room 1, guide rail mechanism 2 and
Target passes in and out trolley 3；Wherein, the front of technique for vacuum coating room 1 is arranged in guide rail mechanism 2, and is in technique for vacuum coating room 1
It is vertically arranged, target disengaging trolley 3 is slidably mounted on guide rail mechanism 2.
It includes vehicle body 301, front-wheel 302, rear-wheel 303 and target installing mechanism that target, which passes in and out trolley 3,；Wherein, front-wheel
302 are installed on the bottom front of vehicle body 301, and rear-wheel 303 is installed on the bottom rear end of vehicle body 301, and front-wheel 302 and rear-wheel 303
It is respectively positioned on guide rail mechanism 2.Trolley 3 is passed in and out by Manual-pushing target to move back and forth along guide rail mechanism 2.Further, vehicle body 301
Equipped with target fixed part 304, target fixed part 304 is arranged perpendicular to vehicle body 301, and target installing mechanism is installed on target fixed part
304。
In the present embodiment, two target disengaging trolleies 3 have been mounted side by side in sliding left and right on guide rail mechanism 2, it is possible to understand that,
In other embodiments, three or more target disengaging trolleies 3 can be mounted side by side in left and right on guide rail mechanism 2, or only install one
Platform target pass in and out trolley 3, target disengaging trolley 3 quantity can be configured according to the needs of actual production, not as
Limit.
Target installing mechanism includes motor 4, mounting flange 5 and target mounting post 6；Wherein, motor 4 is installed on target
In material fixed part 304, mounting flange 5 is installed on the output shaft of motor 4, and is fixed by fixing piece 7.Target mounting post
6 connect with mounting flange 5, and target mounting post 6 offers fixation hole 8, by an end cap of target pipe A in target mounting post 6,
Then target pipe A is passed through by fixed pin 9, be inserted into fixation hole 8, so that target pipe A be fixed.
In the present embodiment, target fixed part 304 is equipped with multiple target installing mechanisms, it is possible to understand that, other embodiments
In, target fixed part 304 can also only install a target installing mechanism, and target fixed mechanism quantity can be according to actual production
Needs be configured, be not limited thereto.
Technique for vacuum coating room 1 is connected with vacuum device and cooling water circulation 10；Wherein, vacuum device packet
Include vacuum pump 11 and vacuum tube 12；Vacuum tube 12 connects the inside of vacuum pump 11 and technique for vacuum coating room 1, is Vacuum Deposition
Membrane process room 1 vacuumizes.Cooling water circulation 10 is mounted on the periphery of technique for vacuum coating room 1, is technique for vacuum coating room 1
Cool down.
The course of work of steel band coating system of the invention is as follows:
Target pipe A is installed on target fixed mechanism first, trolley 3 is passed in and out by Manual-pushing target and is moved along guide rail mechanism 2
It is dynamic, target pipe A is transported into technique for vacuum coating room 1, wherein target passes in and out fortune of the transporting direction perpendicular to steel band of trolley 3
Line direction；Target pipe A, which enters behind technique for vacuum coating room 1 to adopt, to be tightened by bolts；So that in target pipe A and technique for vacuum coating room 1
Steel plate is in parallel relation, when plated film, is rotated by motor 4 with moving-target pipe A, arc light uniform irradiation is on steel band, so that on steel band
Plated film is uniform, and color is uniform, and the film compactness plated is good.
To sum up, steel band coating system of the invention has the advantage that
1, it passes in and out trolley 3 by setting target to transport target pipe A to technique for vacuum coating room 1, to effectively save big
The manpower and material resources of amount, but also improve the safety of operation.
2, by the way that target fixed part 304 to be arranged perpendicular to vehicle body 301, and target installing mechanism is installed on target and is fixed
Target pipe A is installed on target installing mechanism by portion 304, is allowed to be parallel to target disengaging trolley 3 and is passed in and out direction, make target pipe A just with
Steel band in technique for vacuum coating room 1 is in parallel relation, so that arc light sputtering concentrates on steel band when plated film, so that plating
Film compactness is good, avoids the occurrence of since arc light sputters unstable the problem of leading to steel band uneven color one.
Without departing from the thought of the invention, any combination is carried out to various different embodiments of the invention, it should all
When being considered as present disclosure；Within the scope of the technical concept of the present invention, a variety of simple modifications are carried out to technical solution
And any combination of the thought without prejudice to the invention that different embodiments carry out, should all protection scope of the present invention it
It is interior.
Claims (5)
1. a kind of steel band coating system characterized by comprising technique for vacuum coating room, guide rail mechanism and target disengaging are small
Vehicle；The guide rail mechanism is arranged in the front of the technique for vacuum coating room, and with the technique for vacuum coating room is perpendicular sets
It sets, the target disengaging trolley is slidably mounted on the guide rail mechanism；
The target disengaging trolley includes vehicle body, front-wheel, rear-wheel and target installing mechanism；The front-wheel is installed on the vehicle
The bottom front of body, the rear-wheel are installed on the bottom rear end of the vehicle body, and the front-wheel and the rear-wheel be respectively positioned on it is described
On guide rail mechanism；The vehicle body is equipped with target fixed part, and the target fixed part is arranged perpendicular to the vehicle body, the target peace
Mounting mechanism is installed on the target fixed part；
The target installing mechanism includes motor, mounting flange and target mounting post；The motor is installed on the target
Fixed part, the mounting flange are installed on the output shaft of the motor, and the target mounting post and the mounting flange connect
It connects, and the target mounting post offers fixation hole.
2. steel band coating system as described in claim 1, it is characterised in that: sliding left and right is mounted side by side on the guide rail mechanism
There are two target disengaging trolleies.
3. steel band coating system as described in claim 1, it is characterised in that: the target fixed part is equipped with multiple targets
Material installing mechanism.
4. steel band coating system as described in claim 1, it is characterised in that: the technique for vacuum coating room, which is connected with, to be vacuumized
Mechanism, the vacuum device include vacuum pump and vacuum tube；The vacuum tube connects the vacuum pump and the vacuum
The inside of coated process chamber.
5. steel band coating system as described in claim 1, it is characterised in that: the periphery of the technique for vacuum coating room is equipped with
Cooling water circulation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910826782.7A CN110423990A (en) | 2019-09-03 | 2019-09-03 | A kind of steel band coating system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910826782.7A CN110423990A (en) | 2019-09-03 | 2019-09-03 | A kind of steel band coating system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110423990A true CN110423990A (en) | 2019-11-08 |
Family
ID=68418617
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910826782.7A Pending CN110423990A (en) | 2019-09-03 | 2019-09-03 | A kind of steel band coating system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110423990A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112962081A (en) * | 2021-02-01 | 2021-06-15 | 肇庆宏旺金属实业有限公司 | Continuous coating production line and coating process for steel plate |
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|---|---|---|---|---|
| GB415710A (en) * | 1933-02-28 | 1934-08-28 | Frank Edmund Bancroft | Improvements in or relating to x-ray tubes |
| CN2220476Y (en) * | 1994-12-02 | 1996-02-21 | 王平安 | Horizontal vacuum film coating machine with cross-pipe central target |
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| CN205443434U (en) * | 2016-04-08 | 2016-08-10 | 赵瑞山 | Vacuum compound ion coating machine |
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| CN208965019U (en) * | 2018-10-25 | 2019-06-11 | 金山莱宝(厦门)科技有限公司 | A kind of highly-safe numerical control vacuum coating equipment |
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| CN210620928U (en) * | 2019-09-03 | 2020-05-26 | 肇庆宏旺金属实业有限公司 | Steel band coating system |
-
2019
- 2019-09-03 CN CN201910826782.7A patent/CN110423990A/en active Pending
Patent Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB415710A (en) * | 1933-02-28 | 1934-08-28 | Frank Edmund Bancroft | Improvements in or relating to x-ray tubes |
| CN1126770A (en) * | 1994-08-25 | 1996-07-17 | 美国Boc氧气集团有限公司 | Portable magnetron including a replaceable target structure |
| CN2220476Y (en) * | 1994-12-02 | 1996-02-21 | 王平安 | Horizontal vacuum film coating machine with cross-pipe central target |
| CN201778105U (en) * | 2009-09-29 | 2011-03-30 | 深圳市振恒昌实业有限公司 | Novel magnetic control sputtering cylindrical target |
| CN202090052U (en) * | 2011-04-27 | 2011-12-28 | 广东中环真空设备有限公司 | Magnetic-controlled sputtering coating equipment |
| CN103132027A (en) * | 2011-11-28 | 2013-06-05 | 鸿富锦精密工业（深圳）有限公司 | Vacuum coating device |
| US20130235892A1 (en) * | 2012-03-09 | 2013-09-12 | Raytheon Company | Miniaturized solid-state lasing device, system and method |
| CN105239052A (en) * | 2015-11-17 | 2016-01-13 | 广东腾胜真空技术工程有限公司 | Double-release and double-collection winding film coating device and method |
| CN205443434U (en) * | 2016-04-08 | 2016-08-10 | 赵瑞山 | Vacuum compound ion coating machine |
| CN208393393U (en) * | 2018-04-28 | 2019-01-18 | 常州星宇车灯股份有限公司 | A kind of Portable movable vehicle of quick-replaceable magnetic control spattering target |
| CN109735812A (en) * | 2018-09-06 | 2019-05-10 | 中国科学院金属研究所 | A kind of big L/D ratio tube intracavity magnetron sputtering apparatus and the method for preparing α-Ta coating |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112962081A (en) * | 2021-02-01 | 2021-06-15 | 肇庆宏旺金属实业有限公司 | Continuous coating production line and coating process for steel plate |
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