CN209397258U - Continuous vacuum coating device and coating system - Google Patents

Abstract

This application involves technical field of vacuum plating, more particularly, to a kind of continuous vacuum coating device and coating system, a kind of continuous vacuum coating device, comprising: conveyer, into piece room, coating chamber, slice room and transport mechanism；Into being provided with the first perpendicular pushing-type gate valve between piece room and the coating chamber, the second perpendicular pushing-type gate valve is provided between coating chamber and the slice room, conveyer is at least provided with two, wherein at least one conveyer is used to for unplated piece being delivered into piece interior, and wherein at least another conveyer is used to plating piece being transported to outside by slice room；Into the top of piece room, coating chamber top and the slice room at the top of be provided with transport mechanism.The application can realize the transmission to workpiece in adjacent vacuum room, and automation Chengdu is high, high production efficiency.

Description

Continuous vacuum coating device and coating system

Technical field

This application involves technical field of vacuum plating, more particularly, to a kind of continuous vacuum coating device and coating system.

Background technique

Currently, existing technique for vacuum coating is to concentrate in a vacuum chamber completing, each step process can interact, Lead to coating effects difference etc., and need manually to place more, adjust and take out workpiece from vacuum chamber, production efficiency is low.

Utility model content

The application's is designed to provide a kind of continuous vacuum coating device and coating system, to solve to deposit in the prior art Technique for vacuum coating be to concentrate in a vacuum chamber completing, each step process can interact, cause coating effects poor, And the technical problem that production efficiency is low.

This application provides a kind of continuous vacuum coating devices, comprising: conveyer, into piece room, coating chamber, slice room and Transport mechanism；

It is described into being provided with the first perpendicular pushing-type gate valve, the first perpendicular pushing-type gate valve between piece room and the coating chamber It is connected or is isolated with the coating chamber into piece room for controls described；It is arranged between the coating chamber and the slice room Have the second perpendicular pushing-type gate valve, the second perpendicular pushing-type gate valve be connected with the slice room for controlling the coating chamber or Person is isolated；

The conveyer is at least provided with two, and conveyer described in wherein at least one is for unplated piece to be delivered to Described indoor into piece, wherein at least another described conveyer is used to plating piece being transported to outside by the slice room；

The top into piece room, the coating chamber top and the slice room at the top of be provided with the conveyer Structure.

Specifically, the coating chamber is set as the cavity of inner hollow, and the inside cavity of the coating chamber is provided with heating Component, electron gun, automated packing component and crucible assembly；

The automated packing component is arranged on the side wall of the coating chamber, and be arranged in the crucible assembly just on Side, the automated packing component is for material to be added to inside the crucible assembly；The electron gun is arranged in the crucible The side of component, the used in electron gun are evaporated in the crucible assembly materials inside；The inside cavity of the coating chamber is arranged There is the heating component, the heating component is for accelerating material evaporation.

Specifically, the automated packing component includes feed containers, charging switch and driving assembly；

The feed containers include storage bin, feed pipe and discharge nozzle, and the storage bin is connected with the feed pipe；

Be provided with charging switch between the feed pipe and the discharge nozzle, the charging switch for described in making into It is connected to or disconnects between expects pipe and the discharge nozzle；

The driving component is for driving the charging switch movement, so as to connect between the feed pipe and the discharge nozzle Logical or disconnection.

Specifically, further include the first vacuum evacuation device, first vacuum evacuation device is connected to described into piece room, it is described into Piece room is set as hollow structure, and first vacuum evacuation device to described into piece room for vacuumizing；

First vacuum evacuation device includes the first cryogenic pump, the first lobe pump and the first mechanical pump；Described first is mechanical Pump is at least provided with three, wherein at least one described first mechanical pump is connected to first cryogenic pump, first low temperature Pump is connected to described into piece room, wherein at least two first mechanical pumps are connected to first lobe pump, first sieve The other end of thatch pump is connected to described into piece room and the first cryogenic pump respectively by pipeline.

It specifically, further include the second vacuum evacuation device, second vacuum evacuation device is connected to the coating chamber, and described Second vacuum evacuation device is for vacuumizing the coating chamber；Second vacuum evacuation device includes the second mechanical pump, the Two lobe pumps, the second cryogenic pump；Second cryogenic pump is connected with the coating chamber, and the top of the coating chamber is arranged in；Institute The other end for stating the second cryogenic pump is connected to second lobe pump, and the other end of the second lobe pump and second mechanical pump connect It is logical.

Specifically, further include third vacuum evacuation device, the third vacuum evacuation device is connected to the slice room, it is described go out Piece room is set as hollow structure, and the third vacuum evacuation device is for vacuumizing the slice room；The third vacuum means It sets including third cryogenic pump, third lobe pump and third mechanical pump；The third mechanical pump is at least provided with three, the third Cryogenic pump is arranged on the bottom wall of the slice room, and the third cryogenic pump is at least provided with two groups, and third described in every group is low The quantity of temperature pump is set as two, and the third lobe pump is at least provided with one；Wherein, at least two third mechanical pump Be connected with the third lobe pump, the other end of the third lobe pump by pipeline respectively with the third cryogenic pump and institute It states slice room bottom wall to be connected, wherein at least one described third mechanical pump is connected to setting with the third cryogenic pump.

Specifically, the transport mechanism includes: first motor, the first transmission lever, the first synchronizing wheel and the first belt；It is described The output shaft of first motor is connect by the first belt with first transmission lever, the side both ends difference of first transmission lever Multiple first synchronizing wheels are provided with, multiple first synchronizing wheels of the same side are intervally arranged along first direction, the first party To the length direction perpendicular to first transmission lever, connected between every adjacent first synchronizing wheel by first belt It connects, first transmission lever is connect with first synchronizing wheel by the first belt.

Specifically, the conveyer includes the second frame and the horizontal transport group that is arranged in second frame Part transports component, bearing assembly and the first frame vertically；First frame is used to support the bearing assembly, the carrying Component for hanging unplated piece, vertical the transports component for by the bearing assembly for hanging unplated piece be promoted to it is described Into position at the sustained height of piece room；The horizontal transport component is for transporting the bearing assembly for hanging unplated piece to described Into piece interior；

The bearing assembly includes large gear disk, bearing plate and loading plate；It is provided with below the large gear disk described Bearing plate is connect below the bearing plate with the loading plate by connector；

The horizontal component that transports includes: the second motor, the second transmission lever, the second synchronizing wheel, the second belt；Described second The output shaft of motor is connect by the second belt with the transmission lever, and the side both ends of second transmission lever are respectively arranged with more Multiple second synchronizing wheels of a second synchronizing wheel, the same side are intervally arranged along first direction, the first direction perpendicular to The length direction of second transmission lever is connected per between adjacent second synchronizing wheel by second belt, and described the Two transmission levers are connect with second synchronizing wheel by belt；

The vertical transport component includes: third motor, roller group, first pulley, second pulley, the first hanging ring and second Hanging ring；

The upper end of first frame is arranged in first hanging ring, and first frame is arranged in second hanging ring Lower end, for the first pulley at least provided with four, second frame is arranged in first pulley described in wherein at least one On the frame of top, wherein at least another described first pulley top center that second frame is arranged in, described second is sliding At least provided with four, second pulley described in wherein at least one is arranged in the bottom frame of second frame wheel, wherein Described at least another wherein at least among another described bottom that second frame is arranged in, the roller group is at least set It sets there are two idler wheel, wherein at least one idler wheel sequentially passes through first pulley and the first hanging ring by wirerope；It is wherein at least another One idler wheel sequentially passes through second pulley and the second hanging ring by wirerope；The idler wheel coaxial arrangement, and one end setting of axis There is gear wheel, the output pinion of the third motor drives gear wheel rotation；The gear wheel rotation drives first frame Frame is vertically moving.

Specifically, the described first perpendicular pushing-type gate valve；The first vertical gate valve includes valve body, sealing plate component, leads To component and driving device；The sealing plate component, the guidance set are respectively positioned in the valve body；The first party of the valve body Upward the first side wall is equipped with first through hole, and the second sidewall on the first direction of the valve body is equipped with the second through-hole, institute First through hole is stated to be oppositely arranged with second through-hole；

The sealing plate component includes support plate and sealing plate, and the support plate is described for blocking the first through hole For blocking second through-hole, the support plate is connected with the sealing plate by umbrella shape connector sealing plate；

The guidance set includes the guide rod and guide wheel being arranged in a second direction, and the guide rod is located at the sealing plate component Top, the sealing plate component are connected with the guide wheel, and the guide wheel is located on the guide rod, and can be along the guide rod Extending direction sliding；The second direction is perpendicular to the first direction；

The driving device can drive the sealing plate component to move along the guide rod direction.

The application also provides a kind of coating system, fills including continuous vacuum coating described in any one of above-mentioned technical proposal It sets.

Compared with prior art, the application has the beneficial effect that continuous vacuum coating device provided by the present application will be entire Technique is respectively multiple steps, and each step carries out in different vacuum chambers, and adjacent vacuum chamber has plate valve system control System is isolated, and then is avoided and influenced each other, and is guaranteed coating effects, and be provided with transport mechanism in each vacuum chamber, is inserted Plate valve mechanism can control adjacent vacuum chamber, and then can realize the transmission to workpiece in adjacent vacuum room, automatically It is melted into all high, high production efficiency.

Coating system provided by the present application, including continuous vacuum coating device described above, thus, by vacuum chamber Transport mechanism realize automatically delivering for workpiece.

Detailed description of the invention

It, below will be to specific in order to illustrate more clearly of the application specific embodiment or technical solution in the prior art Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below Attached drawing is some embodiments of the application, for those of ordinary skill in the art, before not making the creative labor It puts, is also possible to obtain other drawings based on these drawings.

Fig. 1 is the structural schematic diagram of continuous vacuum coating device provided by the embodiments of the present application；

Fig. 2 is the internal structure enlarged drawing of A in T Fig. 1；

Fig. 3 is the transport mechanism schematic diagram of continuous vacuum coating device provided by the embodiments of the present application；

Fig. 4 is the structural schematic diagram of the provided by the embodiments of the present application first perpendicular pushing-type gate valve；

Fig. 5 is sectional view at A-A in Fig. 4；

Fig. 6 is sectional view at B-B in Fig. 4；

Fig. 7 is the structural schematic diagram of the filler assembly of continuous vacuum coating device provided by the embodiments of the present application；

Fig. 8 is the enlarged diagram in Fig. 7 at A；

Fig. 9 is the structural representation of the charging switch of the filler assembly of continuous vacuum coating device provided by the embodiments of the present application Figure；

Figure 10 is the another knot of the charging switch of the filler assembly of continuous vacuum coating device provided by the embodiments of the present application Structure schematic diagram；

Figure 11 is the structure under the second visual angle of the filler assembly of continuous vacuum coating device provided by the embodiments of the present application Schematic diagram；

Figure 12 is under the third visual angle visual angle of the filler assembly of continuous vacuum coating device provided by the embodiments of the present application Structural schematic diagram；

Figure 13 is structure of the transport establishment of continuous vacuum coating device provided by the embodiments of the present application under the first visual angle Schematic diagram；

Figure 14 is structure of the transport establishment of continuous vacuum coating device provided by the embodiments of the present application under the second visual angle Schematic diagram.

Appended drawing reference:

100- coating chamber；101- feed containers；102- charging switch；103- driving assembly；104- storage bin；105- into Expects pipe；106- discharge nozzle；The first striker plate of 107-；108- storing pipe；The second striker plate of 109-；110- baffle fixed plate；111- Feed opening；112- venthole；113- magnetism servo-electric motor water-cooling；114- seal assembly；115- guide sleeve；116- mounting base；117- maintenance Door；118- heating component；119- electron gun；120- automated packing component；123- end cap；124- connecting rod；125- fan； The second vacuum evacuation device of 126-；The second cryogenic pump of 127-；The second lobe pump of 128-；The second mechanical pump of 129-；130-200- is into piece Room；The first vacuum evacuation device of 202-；The first cryogenic pump of 203-；The first mechanical pump of 204-；The first lobe pump of 205-；300- slice Room；The second vacuum evacuation device of 301-；302- third mechanical pump；303- third cryogenic pump；305- third lobe pump；400- transmission Mechanism；401- first motor；The first transmission lever of 402-；The first synchronizing wheel of 403-；The first belt of 404-；500- first erects pushing-type and inserts Plate valve；501- valve body；502- first through hole；The second through-hole of 503-；504- sealing plate component；505- support plate；506- sealing plate； 507- elastic component；508- corrugated expansion pipe；509- umbrella shape connector；510- fixes bracket；511- guidance set；512- guide rod； 513- guide wheel；515- driving device；516- slideway；517- locating part；518- valve plate cooling water channel；519- support plate cooling water Road；520- sealing plate cooling water channel；521- second erects pushing-type gate valve；600- conveyer；601- loading plate；The second electricity of 602- Machine；The second frame of 603-；The first frame of 604-；605- large gear disk；606- bearing plate；The second transmission lever of 608-；609- second Synchronizing wheel；611- third motor；612- first pulley；613- second pulley；The first hanging ring of 614-.

Specific embodiment

It is clearly and completely described below in conjunction with technical solution of the attached drawing to the application, it is clear that described implementation Example is some embodiments of the present application, instead of all the embodiments.

In conjunction with Fig. 1, provide a kind of continuous vacuum coating device in the application, comprising: conveyer 600, into piece room 200, Coating chamber 100, slice room 300 and transport mechanism 400；It is inserted into the first perpendicular pushing-type is provided between piece room 200 and coating chamber 100 Plate valve 500, is provided with the second perpendicular pushing-type gate valve between coating chamber 100 and slice room 300, conveyer 600 at least provided with Two, wherein at least one conveyer 600 is for being delivered to unplated piece into piece room 300, and wherein at least another is transported Mechanism 600 is used to plating piece being transported to outside by slice room 200；Into the top of piece room 300, coating chamber 100 top with go out The top of piece room 200 is provided with transport mechanism.

Specifically, entire technique is respectively multiple steps by this continuous vacuum coating device, and each step is different true It is carried out in empty room, and adjacent vacuum chamber has gate valve mechanism controls to be isolated, and then avoids and influence each other, guarantees plated film effect Fruit, and it is provided with transport mechanism in each vacuum chamber, being subject to plate valve system can control adjacent vacuum chamber, Jin Erke The transmission to workpiece in adjacent vacuum room is realized, automation Chengdu is high, high production efficiency.

In one embodiment of the application, coating chamber 100 is the cavity of inner hollow, coating chamber combined with Figure 1 and Figure 2, 100 inside cavity is provided with heating component 118, electron gun 119, automated packing component 120 and crucible assembly；

Automated packing component 120 is arranged on the side wall of coating chamber 100, and the surface of crucible assembly is arranged in, automatically Filler assembly 120 is for material to be added to inside crucible assembly；The side of crucible assembly, electron gun is arranged in electron gun 119 119 for evaporating crucible assembly materials inside；The inside cavity of coating chamber 100 is provided with heating component 118, heating component 118 for accelerating material evaporation.

Specifically, at least four groups of heating component 118, the four groups of interval of heating component 118 settings, four groups of heating components 118 are set It sets at four angles of coating chamber 100, more specifically, heating component 118 is preferably iodine-tungsten lamp, heating component 118 can increase The rate being evacuated in coating chamber 100 increases the movement velocity of gas molecule, and then realizes better plated film.

Specifically, crucible assembly includes crucible, end cap 123 and connecting rod 124, is provided with end cap 123, end cap on crucible Connecting rod 124 is provided on 123, the other end of connecting rod 124 is connect with motor output shaft, and motor is controlled using control system System controls motor when needing to add materials to the inside of crucible or be evaporated effect to material using electron gun 119, End cap 123 is removed above crucible using connecting rod 124, when not needing to add materials to the inside of crucible, or is not required to benefit When being evaporated effect to the material inside earthenware with electron gun 119, driving motor drives connecting rod 124, to make end cap 123 It covers on crucible.

Specifically, electron gun 119 is generation, the device for accelerating and assembling high-energy density electronic beam current, it, which emits, provides There is the electron beam of certain energy, certain line and speed and angle, also known as electronics is infused；In electron gun 119, filament, generally It is tungsten wire, after electrified regulation, surface generates a large amount of thermoelectron, under high voltage electric field effect between the anode and cathode, thermoelectricity Son accelerates to anode direction high-speed mobile, and obtains very high kinetic energy, height of the specific velocity amplitude depending on acceleration voltage, and one As can achieve 2/3rds of the light velocity or so, electronic beam current can be made to focus under the action of focus coil, in guidance coil, again Claim electron beam can be made to deflect under the action of deflection coil, to be scanned in a certain range；The work of electron gun 119 Voltage is usually between tens to several hundred kilovolts, to prevent high-voltage breakdown, line scattering and its energy detraction, electron gun 119 Vacuum degree must be maintained at 6.67x10^-2 pa or more.

Specifically, the inner wall of coating chamber 100 by being disposed with first layer heating reflecting plate except interior, the second layer heat it is anti- Plate and stainless steel mirror heat radiation reflecting plate are penetrated, is interacted between three layers of reflecting plate, realizes that the heating to coating chamber 100 is made With further speeding up ion diffusion velocity, realize to the quick plated film with plating piece.

Specifically, coating chamber 100 is preferably arranged to square structure, and the lateral wall setting of coating chamber 100 is promising stainless Steel, more, the lateral wall of coating chamber 100 are preferably SUS304 stainless steel material.

Specifically, magnetism servo-electric motor water-cooling 113 is provided on the lateral wall of coating chamber 100, specifically, magnetism servo-electric motor water-cooling 113 is preferred For the snakelike water pipe being wrapped on 100 lateral wall of coating chamber either water bag, and the other end of water pipe or water bag connection refrigeration Device, refrigerating plant is used to freeze to the water in water pipe either water bag, more specifically, the model of refrigerating plant is preferably selected For JL0.3.

Specifically, the side wall of coating chamber 100 is provided with observation window, and observation window is used to observe the work inside coating chamber 100 Situation realizes the purpose of real-time monitoring, more convenient；Specifically, there are three the quantity settings of observation window, difference angle easy to repair Fall the component at place；More specifically, observation window is set as transparent glass window, and in the side of transparent glass window and close to coating chamber The side of 100 cavitys is provided with antifouling baffle, and antifouling baffle is used to that the ion of evaporation to be stopped to be attached to transparent glass window, when need When observing by observation window, antifouling baffle is opened, is observed through observation window, when not needing observation, the conjunction of antifouling baffle is arrived On transparent glass window.

Specifically, maintenance door 117 is additionally provided on the side wall of coating chamber 100, maintenance door 117 is convenient to overhaul, actual In the course of work, when the damage of component occurs in continuous vacuum coating device, by maintenance door 117 conveniently to continuous vacuum coating dress Widget in setting is overhauled, and specifically, maintenance door 117 and 100 junction of coating chamber is provided with sealing rubber ring, sealant Circle makes coating chamber 100 remain the state of sealing, to preferably realize to the plated film with plating piece for sealing.

Specifically, film thickness gauge is provided in plated film cavity, film thickness gauge is for detecting band plating piece thickness, when thickness reaches threshold Value, stops plated film at this time, specifically, when film thickness gauge uses magnetic induction principle, flows into using from gauge head by non-ferromagnetic coating The size of the magnetic flux of ferromagnet substrate can also measure the size of corresponding magnetic resistance to measure coating film thickness, to indicate that it is covered Thickness degree, coating is thicker, then magnetic resistance is bigger, and magnetic flux is smaller, utilizes the calibrator of magnetic induction principle, however, it would be possible to have magnetic conduction base Non-magnetic coating thickness on body, generally requires substrate magnetic permeability 500 or more, if cladding material is also magnetic, it is required that And the difference of the magnetic permeability of substrate is sufficiently large.

Specifically, ion source is additionally provided in coating chamber 100, ion source, when passing through voltage, makes for increasing ionization level More argon ions are filled inside coating chamber 100, argon ion is for the evaporation for accelerating material.

More specifically, the top of coating chamber 100 is provided with fan 125, and the lower section of loading plate, wind is arranged in fan 125 Fan 125 can be rotated, and the fan 125 of rotation keeps the material of evaporation more uniform, even if plated film is more uniform.

In one embodiment of the application, as shown in Fig. 7 to Figure 12, filler assembly includes feed containers 101, feeds and open 102 and driving assembly 103 are closed, wherein feed containers 101 are used for transferring raw material, and feed containers 101 include storage bin 104, charging Pipe 105 and discharge nozzle 106, wherein storage bin 104 is used for the storage of raw materials, and feed pipe 105 and discharge nozzle 106 are used for storage bin Feedstock transportation in 104 is provided with the charging for controlling charging to setting position between feed pipe 105 and discharge nozzle 106 Switch 102, charging switch 102 are connected with driving assembly 103, and driving assembly 103 is used to control the movement of charging switch 102, real Now charging switch 102 will be connected to or disconnect between feed pipe 105 and discharge nozzle 106, and then control feedstock transportation is to setting position It sets；Charging switch 102 is driven using driving assembly 103, realizes that the raw material stored in feed containers 101 is added in crucible, solves Needs existing in the prior art of having determined manually add coating raw material into coating machine, artificial filling inefficiency and manually add Material needs to interrupt coating process, prevent the technical issues of coating process is from forming pipelining.

Specifically, the outlet end of feed pipe 105 is opposite with the arrival end of discharge nozzle 106, and the outlet end of feed pipe 105 with Setting is spaced between the arrival end of discharge nozzle 106；Feeding switch 102 includes the first striker plate 107, the setting of the first striker plate 107 Between feed pipe 105 and discharge nozzle 106, the first striker plate 107 to be connected between feed pipe 105 and discharge nozzle 106 or It disconnects.

Specifically, the outlet end of feed pipe 105 is opposite with the arrival end of discharge nozzle 106, that is to say, that 105 He of feed pipe The nozzle of discharge nozzle 106 is opposite to flow into raw material in discharge nozzle 106 from feed pipe 105, the outlet end of feed pipe 105 Have at a distance from a setting between the arrival end of discharge nozzle 106, the first striker plate 107 is allowed to be placed on feed pipe 105 With discharge nozzle 106 at opposite nozzle, raw material is stopped to flow into discharge nozzle 106 from feed pipe 105, i.e. blocking raw material flows into Plated film is indoor by force, drives baffle movement in driving assembly 103, baffle is from the opposite nozzle of feed pipe 105 and discharge nozzle 106 It removes, raw material can flow into discharge nozzle 106 from feed pipe 105, realize the filling into crucible.

Specifically, feed containers 101 further include storing pipe 108, storing pipe 108 be located at feed pipe 105 and discharge nozzle 106 it Between, the both ends of storing pipe 108 are opposite with the arrival end of the outlet end of feed pipe 105 and discharge nozzle 106 respectively；First striker plate 107 are set between feed pipe 105 and storing pipe 108, and charging switch 102 further includes the second striker plate 109, the second striker plate 109 are set between storing pipe 108 and discharge nozzle 106；When the first striker plate 107 is connected to feed pipe 105 and storing pipe 108, Second striker plate 109 disconnects storing pipe 108 and discharge nozzle 106；Feed pipe 105 and storing pipe 108 are disconnected in the first striker plate 107 When, the second striker plate 109 is connected to storing pipe 108 and discharge nozzle 106.

Specifically, feed containers 101 further include storing pipe 108, and storing pipe 108 is for controlling the raw material being added in crucible Amount, specifically, storing pipe 108 is between feed pipe 105 and discharge nozzle 106, the nozzle at 108 both ends of storing pipe respectively with into The outlet end of expects pipe 105 and the arrival end of discharge nozzle 106 are oppositely arranged.Charging switch 102 includes being set to 105 He of feed pipe The first striker plate 107 between storing pipe 108, and the second striker plate being set between storing pipe 108 and discharge nozzle 106 109, when the first striker plate 107 is connected to feed pipe 105 and storing pipe 108, the second striker plate 109 disconnects feed pipe 105 and storage Expects pipe 108, at this point, raw material is flowed into storing pipe 108 by feed pipe 105, because the second striker plate 109 is disconnected storing pipe 108 With discharge nozzle 106, raw material cannot be flowed out from storing pipe 108, and the capacity of storing pipe 108 determines once into crucible The amount of adding raw materials；When the first striker plate 107 disconnects feed pipe 105 and storing pipe 108, the second striker plate 109 is connected to storing Pipe 108 and discharge nozzle 106, the then raw material stored in storing pipe 108 can be flowed into discharge nozzle 106, be added in crucible, this When since the first striker plate 107 disconnects feed pipe 105 and when storing pipe 108, i.e., cannot influence the amount for flowing into raw material in crucible.

More specifically, charging switch 102 further includes baffle fixed plate 110, baffle fixed plate 110 and driving assembly 103 Output shaft is connected；First striker plate 107 and the second striker plate 109 are connect with baffle fixed plate 110 respectively, wherein the second backgauge Feed opening 111 is offered on plate 109.

More specifically, charging switch 102 further includes baffle fixed plate 110, baffle fixed plate 110 and driving assembly 103 Output shaft is connected, and baffle fixed plate 110 is separately connected with the first striker plate 107 and the second striker plate 109, driving assembly 103 It drives baffle fixed plate 110 to move, the first striker plate 107 and the second striker plate 109 can be driven to move.Wherein, the first backgauge Plate 107 stops raw material to flow into storing pipe 108, and feed opening 111 is offered on the second striker plate 109, is stored in storing pipe 108 Raw material i.e. by feed inlet flow into discharge nozzle 106 in.Specifically, the length of the second striker plate 109 is greater than the first striker plate 107, when the first striker plate 107 removes at the opposite nozzle of feed pipe 105 and storing pipe 108, the second striker plate 109 can also Storing pipe 108 and discharge nozzle 106 are stopped.

More specifically, replacement different length can be passed through as construction needs to be adjusted the amount of each adding raw materials Storing pipe 108 is realized and adds different amounts of raw material.When the length variation of storing pipe 108, first gear can be adjusted by slotted hole The distance between flitch 107 and the second striker plate 109, for placing the storing pipe 108 of different length between, and nothing Different the first striker plate 107 and the second striker plate 109 need to made.

In actual application process, driving assembly 103 is located at outside coating chamber 100, feed containers 101 and charging switch 102 are located in coating chamber 100, and the output shaft of driving assembly 103 runs through the side wall of coating chamber 100；Output shaft and coating chamber 100 Seal assembly 114 is installed between side wall, guide sleeve 115 is provided on seal assembly 114, guide sleeve 115 is used for output shaft The direction of motion guiding；Driving assembly 103 is located at outside coating chamber 100, and feed containers 101 and charging switch 102 are located at coating chamber In 100, driving assembly 103 can be controlled, realize adding raw materials.Sealing is installed between output shaft and the side wall of crucible Component 114 prevents gas leakage from causing crucible internal vacuum insufficient, is provided with and leads on seal assembly 114 for the sealing to crucible To set 115, when output shaft stretches out longer, guide sleeve 115 is oriented to the direction of motion of output shaft, prevents output axle offset；It drives It is provided with mounting base 116 on dynamic component 103, mounting base 116 is located at outside crucible, and mounting base 116 is used for driving assembly 103 is fixed In on crucible wall.

It combined with Figure 1 and Figure 2, further include the first vacuum evacuation device 202 in one embodiment of the application, first takes out very Empty device 202 is connected into piece room 200, is set as hollow structure into piece room 200, and the first vacuum evacuation device 202 is used for into piece Room 200 vacuumizes；

First vacuum evacuation device 202 includes the first cryogenic pump 203, the first lobe pump 205 and the first mechanical pump 204；First Mechanical pump 204 is at least provided with three, wherein at least one first mechanical pump 204 is connected to the first cryogenic pump 203, and first is low Temperature pump 203 is connected into piece room 200, wherein at least two first mechanical pumps 204 are connected to the first lobe pump 205, first sieve The other end of thatch pump 205 is connected into piece room 200 and the first cryogenic pump 203 respectively by pipeline.

Further, fine pumping system is the Lay treasured cryogenic pump of a model DIP8000, a model D25B Mechanical pump and model W251 lobe pump form extract system, carry out independent pumping into piece cavity；Low vacuum extract system The thick extract system formed for the lobe pump of model WAU1001 and a model SV630 mechanical pump；Further, One cryogenic pump 203 is connect with into 200 bottom wall of piece room, and 200 bottom wall of piece room is provided with first gear plate valve 206, when this occurs, first Flapper valve 206 is moved into 200 inside cavity of piece room, when not being evacuated, under the drive of the first cylinder 201, and first gear plate valve 206 block on 200 bottom wall of piece room, realize sealing.

Specifically, into the first maintenance door is provided on piece room 200, the first maintenance door is used for the maintenance into piece room 200.

More specifically, being preferably arranged to box type vacuum cavity into piece room 200, it is preferably arranged into 200 size of piece room 2110*2110*450mm reinforces welding fabrication using the SUS304 stainless steel plate of 25mm thickness, and eliminates and answer by annealing Power, into 200 cavity of piece room in be equipped with heater, heater is for heating degasification.

It combined with Figure 1 and Figure 2, further include the second vacuum evacuation device 126 in one embodiment of the application, second takes out very Empty device 126 is connected to coating chamber 100, and the second vacuum evacuation device 126 is for vacuumizing coating chamber 100；Second vacuumizes Device 126 includes the second mechanical pump 129, the second lobe pump 128, the second cryogenic pump 127；Second cryogenic pump 127 and coating chamber 100 It is connected, and the top of coating chamber 100 is set；The other end of second cryogenic pump 127 is connected to the second lobe pump 128, and second The other end of lobe pump 128 is connected to the second mechanical pump 129.

In use, first turning on the second mechanical pump 129, it is then turned on the second lobe pump 128, finally opens the second cryogenic pump 127, specifically, the second lobe pump 128, the second mechanical pump 129 and the second cryogenic pump 127 are used in conjunction with each other, to provide height Vacuum forepumping obtains rapid workpiece and changes the outfit pumping.

It combined with Figure 1 and Figure 2, further include third vacuum evacuation device 301 in one embodiment of the application, third is taken out true Empty device 301 is connected to slice room 300, and slice room 300 is set as hollow structure, and third vacuum evacuation device 301 is used for slice Room 300 vacuumizes；Third vacuum evacuation device 301 includes third cryogenic pump 303, third lobe pump 305 and third mechanical pump 302； At least provided with three, third cryogenic pump 303 is arranged on the bottom wall of slice room 300 third mechanical pump 302, third cryogenic pump 303 at least provided with two groups, and the quantity of every group of third cryogenic pump 303 is set as two, third lobe pump 305 at least provided with One；Wherein, at least two third mechanical pumps 302 are connected with third lobe pump 305, and the other end of third lobe pump 305 is logical It crosses pipeline to be connected with third cryogenic pump 303 and 300 bottom wall of slice room respectively, wherein at least one third mechanical pump 302 and The connection setting of three cryogenic pumps 303.

Further, third cryogenic pump 303 is connect with 300 bottom wall of slice room, and 300 bottom wall of slice room is provided with second Flapper valve, two groups of third cryogenic pumps 303 share a second gear plate valve, and when this occurs, second gear plate valve is to 300 cavity of slice room Internal motion, when not being evacuated, under the drive of the first cylinder, second baffle jam pot cover is got lodged on 300 bottom wall of slice room, is realized close Envelope.

In one embodiment of the application, in conjunction with Fig. 3, transport mechanism 400 includes: first motor 401, the first transmission lever 402, the first synchronizing wheel 403 and the first belt 404；

The output shaft of first motor 401 is connect by the first belt 404 with the first transmission lever 402, the first transmission lever 402 Side both ends are respectively arranged with multiple first synchronizing wheels 403, and multiple first synchronizing wheels 403 of the same side are arranged along first direction interval Cloth, first direction often pass through the first belt between adjacent first synchronizing wheel 403 perpendicular to the length direction of the first transmission lever 402 404 connections, the first transmission lever 402 are connect with the first synchronizing wheel 403 by the first belt 404.

First motor 401 drives the rotation of the first transmission lever 402, and the first transmission lever 402 of rotation passes through the first belt 404 The mutual transmission between the first synchronizing wheel 403 is driven, and then bearing assembly can be delivered to coating chamber 100 from into piece room 200, Bearing assembly is delivered to slice room 300 from coating chamber 100.

In one embodiment of the application, in conjunction with Figure 14, conveyer 600 includes that the second frame 603 and setting exist Level in second frame 603 transports component, transports component, bearing assembly and the first frame 604 vertically；First frame 604 is used In support bearing component, bearing assembly is for hanging unplated piece, the vertical bearing assembly for transporting component and being used to hang unplated piece Be promoted into position at 200 sustained height of piece room；Horizontal transport component be used for by the bearing assembly for hanging unplated piece transport to Into in piece room 200；

Bearing assembly includes large gear disk 605, bearing plate 606 and loading plate 601；It is provided with below large gear disk 605 Bearing plate 606 is connect below bearing plate 606 with loading plate 601 by connector；

Specifically in the actual operation process, it is linked with band plating piece below loading plate 601, utilizes the defeated of the 4th motor Gear drives large gear disk 605 to rotate out, and the rotation of large gear disk 605 drives the rotation of bearing plate 606, and bearing plate 606 turns The dynamic rotation for driving loading plate 601.

It includes: the second motor 602, the second transmission lever 608, the second synchronizing wheel 609, the second belt that level, which transports component,；The The output shaft of two motors 602 is connect by the second belt with transmission lever, and the side both ends of the second transmission lever 608 are respectively arranged with more Multiple second synchronizing wheels 609 of a second synchronizing wheel 609, the same side are intervally arranged along first direction, and first direction is perpendicular to The length direction of two transmission levers 608 is connected per between adjacent second synchronizing wheel 609 by the second belt, the second transmission lever 608 with Second synchronizing wheel 609 is connected by belt；

Second motor 602 drives the rotation of the second transmission lever 608, and the second transmission lever 608 of rotation is driven by the second belt Mutual transmission between second synchronizing wheel 609, and then realize and the second bearing assembly is moved horizontally.

The vertical component that transports includes: third motor 611, roller group, first pulley 612, second pulley 613, the first hanging ring 614 and second hanging ring；

The upper end of the first frame 604 is arranged in first hanging ring 614, and the lower end of the first frame 604 is arranged in the second hanging ring, the At least provided with four, wherein at least one first pulley 612 is arranged on the top frame of the second frame 603 one pulley 612, Wherein at least another first pulley 612 top center that the second frame 603 is arranged in, second pulley 613 is at least provided with four A, wherein at least one second pulley 613 is arranged in the bottom frame of the second frame 603, and wherein at least another is wherein extremely Few another is arranged among the bottom of the second frame 603, and roller group is at least provided with two idler wheels, wherein at least one idler wheel First pulley 612 and the first hanging ring 614 are sequentially passed through by wirerope；Wherein at least another idler wheel is successively worn by wirerope Cross second pulley 613 and the second hanging ring；Idler wheel coaxial arrangement, and one end of axis is provided with gear wheel, the output of third motor 611 Pinion gear drives gear wheel rotation；Gear wheel rotation drives the first frame 604 vertically moving.

Specifically, bearing assembly is arranged inside the first frame 604, and bearing assembly is in ground first, manually will be with plating Part is hung on the loading plate 601 of bearing assembly, is then driven third motor 611, is made the first frame 604 along side straight up To movement, when reaching at 200 sustained height of piece room, stops driving, the second motor 602 is utilized to drive the first frame 604 It moves in the horizontal direction, to make bearing assembly and be sent into piece room 200.

In one embodiment of the application, as shown in Figures 4 to 6, the first perpendicular pushing-type gate valve includes valve body 501, close Blanking plate component 504, guidance set 511 and driving device 515；

Sealing plate component 504, guidance set 511 are respectively positioned in valve body 501；The first side on the first direction of valve body 501 Wall is equipped with first through hole 502, and the second sidewall on the first direction of valve body 501 is equipped with the second through-hole 503, first through hole 502 are oppositely arranged with the second through-hole 503；

Sealing plate component 504 includes support plate 505 and sealing plate 506, and support plate 505 is close for blocking first through hole 502 Sealing plate 506 is connected with sealing plate 506 by umbrella shape connector 509 for blocking the second through-hole 503, support plate 505.

Guidance set 511 includes the guide rod 512 and guide wheel 513 being arranged in a second direction, and guide rod 512 is located at sealing board group 504 top of part, sealing plate component 504 are connected with guide wheel 513, and guide wheel 513 is located on guide rod 512, and can be along guide rod 512 Extending direction sliding；Second direction is perpendicular to first direction；

Driving device 515 can drive sealing plate component 504 to move along 512 direction of guide rod.

Specifically, erecting pushing-type gate valve includes valve body 501, sealing plate component 504, guidance set 511 and driving device 515, sealing plate component 504, guidance set 511 are respectively positioned in valve body 501；

The first side wall on the first direction of valve body 501 is equipped with first through hole 502, on the first direction of valve body 501 Second sidewall is equipped with the second through-hole 503, and first through hole 502 is oppositely arranged with the second through-hole 503, and first through hole 502 is The material inlet of perpendicular pushing-type gate valve, the second through-hole 503 are the material outlet of perpendicular pushing-type gate valve；When first through hole 502 and When two through-holes 503 are connected to, erecting pushing-type gate valve is open state, and material can pass through first through hole from the vacuum chamber of side 502 and second through-hole 503 pass through valve body 501, reach the vacuum chamber of the other side of perpendicular pushing-type gate valve, realize the stream of material It is logical；When first through hole 502 and the second through-hole 503 are closed by sealing, sealing closed state will be in by erecting pushing-type gate valve, and real Now the sealing of two neighboring vacuum chamber is closed.

Sealing plate component 504 includes support plate 505 and sealing plate 506, and support plate 505 and sealing plate 506 are connected by umbrella shape Fitting 509 is connected, and plays the role of stablizing support to support plate 505 and sealing plate 506 by umbrella shape connector 509；Branch Fagging 505 can cover in first through hole 502, and lean sealing with the side inner wall of valve body 501；Sealing plate 506 can It is provide with on the second through-hole 503, and leans sealing with the other side inner wall of valve body 501；Therefore, sealing plate component 504 can First through hole 502 and the second through-hole 503 are sealed, when sealing plate component 504 is moved to first through hole 502 and the second through-hole When at 503, closure sealing can be carried out to first through hole 502 and the second through-hole 503, erecting pushing-type gate valve will close in sealing State, and realize that the sealing to two neighboring vacuum chamber is closed；When sealing plate component 504 is logical from first through hole 502 and second When removing at hole 503, there is no barrier to block between first through hole 502 and the second through-hole 503, forms flow path, Neng Gouyong It is shifted in the indoor material of two neighboring vacuum chamber.

Guidance set 511 includes guide rod 512 and guide wheel 513, and guide wheel 513 can be slided along the extending direction of guide rod 512； Sealing plate component 504 is connected with guide wheel 513 by 513 boom of guide wheel, is hung in the lower section of the guide rod 512 of guide rod 512, when leading When wheel 513 is slided along 512 extending direction of guide rod, it will drive sealing plate component 504 and moved in valve body 501, seal board group Part 504 can shift to the other side from side in valve body 501；Driving device 515 is connected with sealing plate component 504, driving device 515 can drive sealing plate component 504 to move along 512 direction of guide rod.

Specifically, when erecting pushing-type gate valve for continuous vacuum coating device, gate valve and continuous vacuum coating are filled Two vacuum cavities set are attached by bolt, and the vacuum cavity of continuous vacuum coating device and plate valve body 5011 joint place is equipped with sealing element, sealing is formed between vacuum cavity and plate valve body 5011, material can be from side Vacuum chamber passes through valve body 501 by first through hole 502 and the second through-hole 503, reaches the true of the other side of perpendicular pushing-type gate valve Plenum chamber realizes the circulation of material；When need between material carry out vacuum chamber transfer when, driven by driving device 515 Sealing plate component 504 is moved along 512 direction of guide rod, when being removed from first through hole 502 and the second through-hole 503, first through hole 502 There is no barrier to block between the second through-hole 503, form flow path, so that material be made to carry out across plate valve body 501 Transfer between vacuum chamber；Pass through driving device 515 when sealing closing to vacuum chamber when needing to turn off perpendicular pushing-type gate valve Driving sealing plate component 504 is moved at first through hole 502 and the second through-hole 503 along 512 direction of guide rod, by sealing board group Part 504 is sealed sealing to first through hole 502 and the second through-hole 503, the sealing of perpendicular pushing-type gate valve is realized, to realize Sealing to vacuum chamber；Specifically, driving device 515 can be cylinder.Therefore, sealing plate is driven by driving device 515 Component 504 is moved along guidance set 511, to realize the automatic control of the opening and closing to valve, to realize continuous vacuum The automatic control of connection and sealing between the vacuum cavity of coating apparatus convenient for operation, while ensure that the good sealing of valve Performance.

In one embodiment of the application, it is preferable that as shown in fig. 6, including guide slide 516, guide slide 516 Positioned at 505 lower section of support plate；Pulley is equipped in guide slide 516, the quantity of pulley is multiple, multiple pulleys and support plate 505 It is connected.

In this embodiment, erecting pushing-type gate valve includes guide slide 516, the direction one of guide slide 516 and guide rod Cause, guide slide 516 is located at the lower section of support plate 505, be equipped with multiple pulleys in guide slide 516, the lower section of support plate 505 and Pulley is connected, thus when driving device 515 drives sealing plate component 504 along 512 direction back and forth movement of guide rod, support plate 505 do back and forth movement in slideway 516 also by pulley.By the setting of sliding, support can be played to support plate 505 and is led To effect, to keep sealing plate component 504 more stable when moving reciprocatingly under the action of driving device 515.

In one embodiment of the application, it is preferable that as shown in Fig. 2, the third side wall in the second direction of valve body 501 It is equipped with locating part 517；The quantity of locating part 517 be it is multiple, multiple locating parts 517 can lean with sealing plate component 504.

In this embodiment, the third side wall in the second direction of valve body 501 is equipped with locating part 517, when needing to valve When body 501 and vacuum chamber are sealed, need to drive sealing plate component 504 along 512 direction of guide rod by driving device 515 It is moved at first through hole 502 and the second through-hole 503 and is sealed closure to it, when sealing plate component 504 moves to and limits Part 517 against position when, the sealing plate 506 of sealing plate component 504 and support plate 505 are placed exactly in first through hole 502 and the At two through-holes 503, closure can be sealed to first through hole 502 and the second through-hole 503, so that perpendicular pushing-type gate valve be made to close It closes, realizes the sealing to vacuum chamber.

Specifically, the quantity of umbrella shape connector 509 is multiple, and multiple umbrella shape connectors 509 are uniformly distributed in support plate Between 505 and sealing plate 506.

More specifically, support plate 505 is linked together with sealing plate 506 by umbrella shape connector 509；And connected by umbrella shape Fitting 509 plays the role of support plate 505 and sealing plate 506 to stablize support.The quantity of umbrella shape connector 509 be it is multiple, it is more A umbrella shape connector 509 is uniformly distributed between support plate 505 and sealing plate 506, can make support plate 505 and sealing plate 506 More stable is set in valve body 501, and it is during the motion more stable run, to guarantee support plate 505 and sealing plate 506, with the closer of 501 inner wall of valve body fitting, reach preferably sealing performance.

More specifically, umbrella shape connector 509 includes the first connector, the second connector and locating shaft；First connector and One end of second connector is set on locating shaft, and is rotatablely connected with locating shaft, the other end of the first connector and support Plate 505 is rotatablely connected, and the other end and sealing plate 506 of the second connector are rotatablely connected.

More specifically, umbrella shape connector 509 includes the first connector, the second connector and locating shaft；First connector and One end of second connector is set on locating shaft, and is rotatablely connected with locating shaft, the other end of the first connector and support Plate 505 is rotatablely connected, and the other end and sealing plate 506 of the second connector are rotatablely connected.When support plate 505 and sealing plate 506 to Opposite direction movement, and during being sealed against with 501 inner wall of valve body, support plate 505 and sealing plate 506 will drive the first company Fitting is rotated centered on locating shaft with the second connector；By the way that umbrella shape is arranged between support plate 505 and sealing plate 506 Connector 509 also can play branch to support plate 505 while playing connection function to support plate 505 and sealing plate 506 The effect of support and traction；The other end and support plate 505 of first connector are rotatablely connected, the other end of the second connector and sealing Plate 506 is rotatablely connected, thus works as support plate 505 and sealing plate 506 during the motion, and led by umbrella shape connector 509 When drawing, support plate 505 and sealing plate 506 can be made to be maintained at vertical direction without deflecting；Therefore, it is connected by umbrella shape The setting of part 509 can make support plate 505 and sealing plate 506 is stable is set in valve body 501, and put down during the motion It quietly runs, it is closer to guarantee that support plate 505 is bonded with sealing plate 506 with 501 inner wall of valve body, to guarantee preferably close Sealing property.

More specifically, sealing plate component 504 includes fixed bracket 510, umbrella shape connector 509 passes through locating shaft and fixation Bracket 510 is connected；Driving device 515 is connected with fixed bracket 510, and fixed bracket 510 is connected with guide wheel 513, is used for Sealing plate component 504 is pulled to slide along 512 direction of guide rod.

More specifically, sealing plate component 504 includes fixed bracket 510, for fixing umbrella shape connector 509, thus to branch Fagging 505 and sealing plate 506 play the role of stablizing support；Umbrella shape connector 509 is connected by locating shaft with fixed bracket 510 It connects, so that support plate 505 be made to be connected by umbrella shape connector 509 with fixed bracket 510 with sealing plate 506；Thus, it is fixed Bracket 510 can play the role of support plate 505 and sealing plate 506 to stablize support；Specifically, it is also set on fixed bracket 510 There is limit shaft sleeve, locating shaft passes through limit shaft sleeve and is fixedly connected with fixed bracket 510.

Driving device 515 is connected with fixed bracket 510, by fixing bracket 510 for support plate 505 and sealing plate 506 It links together, therefore when driving device 515 drives fixed bracket 510 to move, will drive support plate 505 and sealing plate 506 It moves therewith, sealing plate component 504 is enable to move reciprocatingly under the driving of driving device 515 along 512 direction of guide rod, To realize that sealing plate component 504 is closed and opened to the sealing of perpendicular pushing-type gate valve.

More specifically, sealing plate component 504 includes corrugated expansion pipe 508 and gas passage；

Gas passage is located in support plate 505, and support plate 505 is equipped with gas path exit port, corrugated expansion pipe 508 One end is connected with gas path exit port, and the other end of corrugated expansion pipe 508 is connected with sealing plate 506；Gas path exit port Quantity with corrugated expansion pipe 508 is multiple and corresponds, and multiple corrugated expansion pipes 508 are evenly distributed on support plate 505 Between sealing plate 506.

More specifically, being equipped with gas passage in support plate 505, and support plate 505 is equipped with gas path exit port, ripple is swollen Tube expansion 508 is set between support plate 505 and sealing plate 506, and the gas in one end of corrugated expansion pipe 508 and support plate 505 Body channel outlet is connected, and allows gas to enough enter in corrugated expansion pipe 508, the other end of corrugated expansion pipe 508 and sealing Plate 506 is connected, and blocks to corrugated expansion pipe 508, prevents gas from being discharged；To when gas is continually fed into When in corrugated expansion pipe 508, the air pressure in corrugated expansion pipe 508 increases, and corrugated expansion pipe 508 expands elongated；In turn, will Support plate 505 struts round about with sealing plate 506, makes support plate 505 to the one of the valve body 501 for being equipped with first through hole 502 Side sidewall direction is mobile and stands tightly against sealing with 501 inner wall of valve body, to carry out closure sealing to first through hole 502；Sealing The side sidewall direction of plate 506 to the valve body 501 for being equipped with the second through-hole 503 is mobile and stands tightly against with 501 inner wall of valve body close Envelope, to carry out closure sealing to the second through-hole 503；In turn, lead to logical between multipair first through hole 502 and the second through-hole 503 The sealing on road is closed, and the sealing to two neighboring vacuum chamber is realized.

Specifically, by increasing the air pressure in corrugated expansion pipe 508, can make to act on support plate 505 and sealing plate 506 On thrust increase, and then it is closer to be bonded support plate 505 with sealing plate 506 with 501 inner wall of valve body, has valve Better seal performance.

More specifically, sealing plate component 504 includes elastic component 507, one end of elastic component 507 is connected with support plate 505, The other end of elastic component 507 is connected with sealing plate 506, for pulling sealing plate 506 mobile to 505 direction of support plate；Elasticity The quantity of part 507 is multiple；Multiple elastic components 507 are uniformly distributed between support plate 505 and sealing plate 506.

More specifically, be additionally provided with elastic component 507 between support plate 505 and sealing plate 506, one end of elastic component 507 with Support plate 505 is connected, and the other end of elastic component 507 is connected with sealing plate 506；When needing to open gate valve for first through hole 502 and second through-hole 503 when getting through, the gas in corrugated expansion pipe 508 is discharged, thus support plate 505 and sealing plate 506 are no longer influenced by the effect of the thrust of corrugated expansion pipe 508, while being arranged between dependence support plate 505 and sealing plate 506 Elastic component 507 tenses support plate 505 and sealing plate 506 to centre, and close to each other, makes support plate 505 and sealing plate 506 It no longer with 501 inner wall gluing, sealing of valve body, and drives support plate 505 and sealing plate 506 to move by driving device 515, moves The range of first through hole 502 and the second through-hole 503 out, to realize the unlatching of valve.

The quantity of elastic component 507 is multiple, and multiple elastic components 507 are evenly distributed on support plate 505 and sealing plate 506 Between, so that the tightening force for enabling elastic component 507 to generate is more equally distributed on support plate 505 and sealing plate 506, guarantee Support plate 505 and stability of the sealing plate 506 in moving process；Specifically, elastic component 507 can be back-moving spring.

More specifically, it is preferable to ground, as shown in Figure 2 and Figure 6, including valve plate cooling water channel 518；Valve plate cooling water channel 518 wraps Support plate cooling water channel 518 and sealing plate cooling water channel 520 are included, support plate cooling water channel 518 is fixedly installed on support plate 505 On, sealing plate cooling water channel 520 is fixedly installed on sealing plate 506.

More specifically, perpendicular pushing-type gate valve includes valve plate cooling water channel 518, valve plate cooling water channel 518 includes that support plate is cold But water channel 518 and sealing plate cooling water channel 520, support plate cooling water channel 518 are set in support plate 505, sealing plate cooling water Road 520 is set on sealing plate 506；By be passed through into valve plate cooling water channel 518 recirculated cooling water to support plate 505 with it is close Sealing plate 506 cools down, while being also to cool down to valve body 501, to make gate valve close to two high temperature cavitys progress Feng Shi still ensures that gate valve temperature in the range of being suitable for use, has good sealing performance, realizes to high-temperature vacuum chamber The sealing of room.

Present invention also provides a kind of continuous vacuum coating systems, the continuous vacuum coating dress including any of the above-described embodiment It sets.

Finally, it should be noted that the above various embodiments is only to illustrate the technical solution of the application, rather than its limitations；It is right Part is equivalently replaced；It modifies or replaces, each embodiment of the application that it does not separate the essence of the corresponding technical solution The range of technical solution.

Claims (10)

1. a kind of continuous vacuum coating device characterized by comprising conveyer, into piece room, coating chamber, slice room and biography Send mechanism；

It is described into the first perpendicular pushing-type gate valve is provided between piece room and the coating chamber, the first perpendicular pushing-type gate valve is used for Control is described to be connected or is isolated with the coating chamber into piece room；Is provided between the coating chamber and the slice room Two perpendicular pushing-type gate valves, the second perpendicular pushing-type gate valve are connected or phase for controlling the coating chamber with the slice room Isolation；

At least provided with two, conveyer described in wherein at least one is used to for unplated piece being delivered to described the conveyer Into piece interior, wherein at least another described conveyer is used to plating piece being transported to outside by the slice room；

The top into piece room, the coating chamber top and the slice room at the top of be provided with the transport mechanism.

2. continuous vacuum coating device according to claim 1, which is characterized in that the coating chamber is set as inner hollow Cavity, the inside cavity of the coating chamber is provided with heating component, electron gun, automated packing component and crucible assembly；

The automated packing component is arranged on the side wall of the coating chamber, and the surface of the crucible assembly is arranged in, institute Automated packing component is stated for material to be added to inside the crucible assembly；The crucible assembly is arranged in the electron gun Side, the used in electron gun are evaporated in the crucible assembly materials inside；The inside cavity of the coating chamber is provided with described Heating component, the heating component is for accelerating material evaporation.

3. continuous vacuum coating device according to claim 2, which is characterized in that the automated packing component includes charging Container, charging switch and driving assembly；

The feed containers include storage bin, feed pipe and discharge nozzle, and the storage bin is connected with the feed pipe；

The charging switch is provided between the feed pipe and the discharge nozzle, the charging switch is for making the feed pipe It is connected to or disconnects between the discharge nozzle；

The driving component for driving charging switch to move so that be connected between the feed pipe and the discharge nozzle or Person disconnects.

4. continuous vacuum coating device according to claim 1, which is characterized in that further include the first vacuum evacuation device, institute The first vacuum evacuation device is stated to be connected to described into piece room, it is described to be set as hollow structure, first vacuum evacuation device into piece room For being vacuumized to described into piece room；

First vacuum evacuation device includes the first cryogenic pump, the first lobe pump and the first mechanical pump；First mechanical pump is extremely There are three few settings, wherein at least one described first mechanical pump is connected to first cryogenic pump, first cryogenic pump and It is described to be connected into piece room, wherein at least two first mechanical pumps are connected to first lobe pump, first lobe pump The other end be connected to described into piece room and the first cryogenic pump respectively by pipeline.

5. continuous vacuum coating device according to claim 2, which is characterized in that further include the second vacuum evacuation device, institute It states the second vacuum evacuation device to be connected to the coating chamber, and second vacuum evacuation device is for vacuumizing the coating chamber； Second vacuum evacuation device includes the second mechanical pump, the second lobe pump, the second cryogenic pump；Second cryogenic pump and the plating Film room is connected, and the top of the coating chamber is arranged in；The other end of second cryogenic pump and second lobe pump connect Logical, the other end of the second lobe pump is connected to second mechanical pump.

6. continuous vacuum coating device according to claim 1, which is characterized in that further include third vacuum evacuation device, institute It states third vacuum evacuation device to be connected to the slice room, the slice room is set as hollow structure, the third vacuum evacuation device For being vacuumized to the slice room；The third vacuum evacuation device includes that third cryogenic pump, third lobe pump and third are mechanical Pump；At least provided with three, the third cryogenic pump is arranged on the bottom wall of the slice room third mechanical pump, and described Three cryogenic pumps are at least provided with two groups, and the quantity of third cryogenic pump described in every group is set as two, and the third lobe pump is extremely It is provided with one less；Wherein, at least two third mechanical pumps are connected with the third lobe pump, the third lobe pump The other end be connected respectively with the third cryogenic pump and slice room bottom wall by pipeline, wherein described at least one Third mechanical pump is connected to setting with the third cryogenic pump.

7. continuous vacuum coating device according to claim 1, which is characterized in that the transport mechanism includes: the first electricity Machine, the first transmission lever, the first synchronizing wheel and the first belt；

The output shaft of the first motor is connect by the first belt with first transmission lever, the side of first transmission lever Both ends are respectively arranged with multiple first synchronizing wheels, and multiple first synchronizing wheels of the same side are intervally arranged along first direction, institute First direction is stated perpendicular to the length direction of first transmission lever, often passes through described first between adjacent first synchronizing wheel Belt connection, first transmission lever are connect with first synchronizing wheel by the first belt.

8. continuous vacuum coating device according to claim 4, which is characterized in that the conveyer includes the second frame And the level being arranged in second frame transports component, transports component, bearing assembly and the first frame vertically；Described One frame is used to support the bearing assembly, and for the bearing assembly for hanging unplated piece, the vertical transport component is used for will The bearing assembly of suspension unplated piece is promoted to described into position at the sustained height of piece room；The horizontal transport component is used for The bearing assembly for hanging unplated piece is transported to described into piece interior；

The bearing assembly includes large gear disk, bearing plate and loading plate；The load-bearing is provided with below the large gear disk Plate is connect below the bearing plate with the loading plate by connector；

The horizontal component that transports includes: the second motor, the second transmission lever, the second synchronizing wheel, the second belt；Second motor Output shaft connect with the transmission lever by the second belt, the side both ends of second transmission lever are respectively arranged with multiple the Multiple second synchronizing wheels of two synchronizing wheels, the same side are intervally arranged along first direction, and the first direction is perpendicular to described The length direction of second transmission lever is often connected between adjacent second synchronizing wheel by second belt, and described second passes It passs bar and is connect with second synchronizing wheel by belt；

The vertical transport component includes: that third motor, roller group, first pulley, second pulley, the first hanging ring and second are hung Ring；

The upper end of first frame is arranged in first hanging ring, and second hanging ring is arranged under first frame End, for the first pulley at least provided with four, the top of second frame is arranged in first pulley described in wherein at least one On portion's frame, wherein at least another described first pulley top center that second frame is set, the second pulley At least provided with four, second pulley described in wherein at least one is arranged in the bottom frame of second frame, wherein extremely Few described in another wherein at least among another described bottom that second frame is arranged in, the roller group is at least arranged There are two idler wheel, wherein at least one idler wheel sequentially passes through first pulley and the first hanging ring by wirerope；It is wherein at least another A idler wheel sequentially passes through second pulley and the second hanging ring by wirerope；The idler wheel coaxial arrangement, and one end of axis is provided with Gear wheel, the output pinion of the third motor drive gear wheel rotation；The gear wheel rotation drives first frame It is vertically moving.

9. continuous vacuum coating device according to claim 1, which is characterized in that the first perpendicular pushing-type gate valve；

The first vertical gate valve includes valve body, sealing plate component, guidance set and driving device；

The sealing plate component, the guidance set are respectively positioned in the valve body；The first side on the first direction of the valve body Wall is equipped with first through hole, and the second sidewall on the first direction of the valve body is equipped with the second through-hole, the first through hole with Second through-hole is oppositely arranged；

The sealing plate component includes support plate and sealing plate, and the support plate is for blocking the first through hole, the sealing For blocking second through-hole, the support plate is connected with the sealing plate by umbrella shape connector plate；

The guidance set includes the guide rod and guide wheel being arranged in a second direction, and the guide rod is located on the sealing plate component Side, the sealing plate component are connected with the guide wheel, and the guide wheel is located on the guide rod, and can prolonging along the guide rod Stretch direction sliding；The second direction is perpendicular to the first direction；

The driving device can drive the sealing plate component to move along the guide rod direction.

10. a kind of coating system, which is characterized in that filled including continuous vacuum coating described in any one of claims 1 to 9 It sets.