CN209702839U

CN209702839U - Evaporation coating device

Info

Publication number: CN209702839U
Application number: CN201822246154.5U
Authority: CN
Inventors: 黄航
Original assignee: TCL Corp
Current assignee: TCL Corp
Priority date: 2018-12-28
Filing date: 2018-12-28
Publication date: 2019-11-29
Anticipated expiration: 2028-12-28

Abstract

The utility model relates to vacuum evaporation technology fields, a kind of evaporation coating device is provided to include vapor deposition chamber, charging chamber, be set to the vapor deposition indoor the first container of chamber, and it is set to the indoor feeding device of charging chamber, openable window is equipped on partition between vapor deposition chamber and the chamber that feeds, feeding device includes the first transport mechanism and the second container that is mounted in the first transport mechanism, first transport mechanism is configured as that second container is sent to vapor deposition chamber from charging chamber by the open window, and second container is used to add evaporation material to the first container.In evaporation coating device provided by the utility model, by partition and the window of closing by two chamber isolations, when needing to feed, window is opened, the second container for having evaporation material is transported to vapor deposition chamber and adds evaporation material to the first container by the first transport mechanism, entire charging process is completed by feeding device, avoids causing film thickness to deviate because manual added material shifts the first container.

Description

Evaporation coating device

Technical field

The utility model relates to vacuum evaporation technology fields, especially provide a kind of evaporation coating device.

Background technique

Organic Light Emitting Diode (Organic Light Emitting Diode, OLED) due to it is low with driving voltage, Light emission luminance and luminous efficiency are high, the wide visual angle that shines, fast response time, ultra-thin, and light-weight, all solidstate active shines, can make Make on flexible substrates, the advantages such as device is flexible, the increasingly concern by academia and industrial circle become display technology The main force of middle third generation display.

Organic Light Emitting Diode is a kind of sandwich structure device containing multiple function layers, including anode, cathode, and If organic function layer between the anode and cathode.Organic function layer generally can be divided into hole injection layer (Hole Injection Layer, HIL), hole transmission layer (Hole Transport Layer, HTL), luminescent layer (Emissive Layer, EML), electricity Sub- transport layer (Electron Transport Layer, ETL), electron injecting layer (Electron Injection Layer, EIL)。

The technology of existing preparation OLED device is mainly the method for using vacuum thermal evaporation, i.e., intracavitary in high vacuum vapor deposition, By heating organic functional material, it is made to evaporate and be deposited in substrate.What laboratory used is small-sized research and development equipment mostly, Organic functional material is contained in small-sized crucible, and vapor deposition just needs the added material in crucible after several times.And material is added at present The method of material is usually to take out crucible, is put back to again after added material, then may then make its position during picking and placing crucible It changes, and causes the film thickness being eventually deposited on substrate deviation occur, therefore need first after general added material to film thickness It is corrected, this process wastes more material and time.

Utility model content

The purpose of this utility model is to provide a kind of evaporation coating devices, it is intended to solve evaporation coating device in the prior art and add by hand Material need calibration film thickness and the technical issues of bring low efficiency and waste of material.

A kind of in order to achieve the above purposes, the technical solution adopted by the utility model is: evaporation coating device, including vapor deposition chamber, Charging chamber is set to the indoor the first container of the vapor deposition chamber, and is set to the indoor feeding device of the charging chamber, described The partition being deposited between chamber and the charging chamber is equipped with openable window, and the feeding device includes the first conveyer Structure and the second container being mounted in first transport mechanism, first transport mechanism are configured as through open institute It states window and the second container is sent to the vapor deposition chamber from the charging chamber, the second container is used for described the One container adds evaporation material.

Further, the second container is funnel, and the funnel is equipped with the control of controllable evaporation material additive amount Device.

Further, the control device include the discharge outlet for being articulated with the funnel magnetic closure and be set to institute State the outer magnetic induction driving unit to drive the magnetic closure folding of funnel.

Further, the magnetic closure includes two symmetrical semicircle permanent magnet plates, and it is described two forever The diameter side of magnet plates is connected to each other；The arc top of described two permanent magnet plates is hinged with funnel exit respectively.

Further, the second container is detachably connected with first transport mechanism.

Further, first transport mechanism includes being set to the indoor first movement device of the charging chamber and installation Driven rod on the first movement device, the second container are installed on the driven rod, the first movement device For driving the driven rod to pass through window back and forth movement between the vapor deposition chamber and the charging chamber.

Further, the discharge port upper cover of the first container is equipped with lid, is additionally provided in the vapor deposition chamber removable The lid is to open or close the second transport mechanism of the first container discharge port.

Further, second transport mechanism includes the second mobile device and is installed in second mobile device Transferring arm, the end of the transferring arm is equipped with the pick device that can pick up or unclamp the lid.

Further, the first container is multiple, and lid sets the lid on the discharge port of each the first container Body.

Further, the vapor deposition chamber and the charging chamber are also communicated with vacuum evacuation device.

The utility model has the beneficial effects that

In evaporation coating device provided by the utility model, chamber is deposited and the chamber that feeds in setting in body, between two chambers With partition, partition is equipped with the window that can be beaten, i.e., by partition and the window of closing by two chamber isolations, when window is opened When, the first transport mechanism drives the added material into the first container of the second container equipped with evaporation material, and the entire process that feeds is logical It crosses feeding device to be automatically performed, is not required to mobile the first container by hand, avoid leading because manual added material shifts the first container Film thickness is caused to deviate.

Detailed description of the invention

It, below will be to embodiment or the prior art in order to illustrate more clearly of the technical scheme in the embodiment of the utility model Attached drawing needed in description is briefly described, it should be apparent that, the accompanying drawings in the following description is only that this is practical new Some embodiments of type for those of ordinary skill in the art without any creative labor, can be with It obtains other drawings based on these drawings.

Fig. 1 is the structural schematic diagram of evaporation coating device provided by the embodiment of the utility model；

Wherein, each appended drawing reference in figure:

10- body；Chamber is deposited in 20-；30- charging chamber；40- the first container；41- lid；50- vacuum evacuation device；60- Window；70- second container；The first transport mechanism of 71-；72- control device；73- driven rod.

Specific embodiment

The embodiments of the present invention are described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning Same or similar element or element with the same or similar functions are indicated to same or similar label eventually.Below by ginseng The embodiment for examining attached drawing description is exemplary, it is intended to for explaining the utility model, and should not be understood as to the utility model Limitation.

In the description of the present invention, it should be understood that term " length ", " width ", "upper", "lower", " preceding ", The orientation or positional relationship of the instructions such as " rear ", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", "outside" is based on attached Orientation or positional relationship shown in figure, is merely for convenience of describing the present invention and simplifying the description, rather than indication or suggestion Signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as to this The limitation of utility model.

In addition, term " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or Implicitly include one or more of the features.The meaning of " plurality " is two or two in the description of the present invention, More than, unless otherwise specifically defined.

In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " Gu It is fixed " etc. terms shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integral；It can be Mechanical connection, is also possible to be electrically connected；It can be directly connected, two can also be can be indirectly connected through an intermediary The interaction relationship of connection or two elements inside element.It for the ordinary skill in the art, can basis Concrete condition understands the concrete meaning of above-mentioned term in the present invention.

2. referring to FIG. 1, evaporation coating device provided by the embodiment of the utility model, including body 10, in body 10 Chamber 20 is deposited and the chamber 30 that feeds, the first container 40 in vapor deposition chamber 20, the charging dress in charging chamber 30 It sets, passes through a partition (unlabeled in figure) between vapor deposition chamber 20 and charging chamber 30 and be isolated.In some embodiments, described The size and thickness of partition there is no limit as long as can be isolated in physical space by vapor deposition chamber 20 and charging chamber 30. Partition is equipped with window 60, and in some embodiments, as shown in topic 1, the window occupies the whole face of the partition；Another In a little embodiments, the window only occupies a part of the partition.The window 60 is usually being typically to close It closes, chamber 20 will be deposited by the partition and the window 60 and charging chamber 30 is isolated in physical space.It is described to add Material device include the first transport mechanism 71 and be mounted in first transport mechanism 71 second container 70, it is described first pass Mechanism 71 is sent to be configured as that the second container 70 is sent to institute from the charging chamber 30 by the open window 60 Vapor deposition chamber 20 is stated, the second container 70, which is used to hold 40 devices to described first, adds evaporation material.Specifically, needing to add Openable at the window 60 when material, second container 70 is sent to vapor deposition chamber 20 from charging chamber 30, and second container 70 is used In to the first container 40 add evaporation material.

In the present embodiment, chamber 20 and charging chamber 30 is deposited in setting in body 10, has partition between two chambers, every It is equipped with window 60 at window on plate, i.e., window is opened or closed by window 60 to realize vapor deposition chamber 20 and charging chamber 30 Connection and isolation, when window 60 open when, the first transport mechanism 71 drive be equipped with evaporation material second container 70 to first Added material in container 40, when addition finishes, closing window 60, entire charging process is automatically performed by feeding device, is not required to Mobile the first container 40 by hand avoids causing film thickness to deviate because manual added material shifts the first container 40.

Specifically, in the present embodiment, the second container 70 for placing material is funnel.And funnel is equipped with and can control The control device 72 of evaporation material additive amount.Using funnel as second container 70 is held, facilitate the addition of control evaporation material Amount.By design funnel volume and discharge port size, the quantity of material added in the predetermined time can be calculated, when needing to add material When material, control device 72 is opened, starts to feed, when additive amount reaches requirement, shutoff control unit 72 closes funnel, stops adding Material.

In the present embodiment, the control device 72 includes that the magnetic closure is hinged on the funnel exit, the leakage Magnetic induction driving unit is arranged in the outside in bucket exit, to drive the folding of the magnetic closure.

In the present embodiment, the magnetic closure includes two symmetrical semicircle permanent magnet plates, and described two permanent magnetism The diameter side of body plate is connected to each other；The arc top of described two permanent magnet plates is hinged with funnel exit respectively.

Two permanent magnet plate permanent magnetic plates are respectively positioned in the magnetic field that each electromagnet is formed.After electromagnet is powered, each permanent magnetic plate The magnetic field force induced effect in magnetic field, opposite can open, and the discharge port of funnel, which is opened, at this time realizes charging；When change electromagnet Magnetic direction, each permanent magnetic plate magnetic field force induced effect in magnetic field, can be relatively closed, stops charging.

Further, second container 70 is detachably connected with the first transport mechanism 71.In this way, facilitating the different vapor deposition materials of addition Different second containers 70 is replaced when material, and same second container 70 is avoided to cause cross contamination to contain different evaporation materials.

In the present embodiment, the first transport mechanism 71 includes that the first movement device in charging chamber 30 (does not show in figure Out) and in the driven rod 73 on first movement device, second container peace 70 loaded on driven rod 73, use by first movement device Back and forth movement between chamber 20 and charging chamber 30 is being deposited in driving driven rod to pass through window.In some embodiments, institute Stating first movement device is to be provided with roller pedestal, and the bottom surface of the charging chamber 30 is provided with guide rail, the first movement dress The guide rail movement can be prolonged by setting, so that driven rod 73 be driven to enter in vapor deposition chamber 20 by window 60.

In some embodiments, first movement device is swing arm, and in charging, first movement device swing arm drives transmission Bar 73 and second container 70 are extend into vapor deposition chamber 20 by window, and rotate proper angle be located at the first container 40 just on Side；After charging, first movement device drives driven rod 73 and second container 70 to be retracted into charging chamber 30 by window.When So, in other embodiments, first movement device can also only be telescoping mechanism, i.e., when window and 40 position of the first container just Right, driven rod 73 is extend into vapor deposition chamber 20 by window is placed exactly in 40 top of the first container；Likewise, swing arm also can wrap Elevating mechanism is included, driven rod 73 and 70 height of second container are adjusted according to the position of the first container 40, so as to preferably Add evaporation material.

Further, in this embodiment the discharge port upper cover of the first container 40 is equipped with lid 41, gone back in vapor deposition chamber 20 The second transport mechanism (not shown) of the discharge port is opened or closed equipped with removable lid 41.When needing to feed When, the second transport mechanism drives lid 41 mobile, opens 40 discharge port of the first container；When being not required to vapor deposition, the second transport mechanism It drives the movement of lid 41 to be placed in the first container 40, material is avoided to volatilize and cause cross contamination.

In the present embodiment, the first container 40 is multiple (two are shown in the present embodiment), the discharging of each the first container 40 Lid 41 is covered on mouth.40 discharge port of the first container is sealed by independent lid 41, also further avoid material it Between cross contamination.

Specifically, the second transport mechanism (not shown) including the second mobile device and is installed on the second mobile device On transferring arm, the end of transferring arm is equipped with the pick device that can pick up or unclamp the lid.Likewise, the second mobile device Can also have the function of horizontal extension, oscilaltion or rotation, the concrete function of the second mobile device such as first movement device It is determined according to the relative position of lid 41 and the first container 40.And pick device can major function be used for by lid pick up or pine It opens, specific structure can be multiplicity, manipulator such as can be used, or using magnetic mode etc..

In the present embodiment, and be deposited chamber 20 and charging chamber 30 be connected to vacuum evacuation device 50, it is ensured that charging and Vapor deposition is in vacuum environment, and vapor deposition is prevented to be affected by the external environment and go bad.

In the present embodiment, the detection device of evaporation material surplus in detectable the first container 40 is equipped in vapor deposition chamber 20 (not shown).Specifically, detection device is arranged in the first container 40, steams when detection device detects in the first container 40 When plating material surplus is reduced to early warning amount, operator is reminded to feed to feeding device.Certainly, in the present embodiment, add Second container 70 in material chamber 30 can be used for storage evaporation material, and evaporation material can be stored in vacuum environment, prevent Only evaporation material is affected by environment and rotten, when the evaporation material stored in the second container 70 in charging chamber 30 is enough When, it can directly feed into the first container 40.

In the present embodiment, the working principle of evaporation coating device are as follows: when detection device detects that the material in the first container 40 subtracts When arriving early warning amount less, alarm, such as voice prompting or light prompt or jingle bell prompt occurs.At this point, operator is by charging chamber Room 30 is opened, and addition evaporation material is mounted on driven rod into second container 70, and by the second container 70 for filling evaporation material Charging chamber 30 is closed on 73, after being installed, and charging chamber 30 is evacuated to high vacuum shape using vacuum evacuation device 50 Then state is opened window 60, the second transport mechanism drives lid 41 is mobile to open the first container 40, and first movement device will pass It send bar 73 and fills the second container 70 of evaporation material and 40 top of the first container is sent to by window, two in control device 72 Permanent magnetic plate is opposite under electromagnet effect to be opened, and second container 70 starts to feed into the first container 40, and evaporation material has added It is relatively closed under electromagnet effect at rear two permanent magnetic plate, stop charging, recycles first movement device by driven rod 73 and the Two containers 70 are recovered to charging chamber 30, close window 60, are vacuumized using 50 pairs of vapor deposition chambers 20 of vacuum evacuation device, to When its interior vacuum degree recovery vapor deposition requires, vapor deposition operation can be carried out.

The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model Protection scope within.

Claims

1. a kind of evaporation coating device, it is characterised in that: including vapor deposition chamber, charging chamber, be set to the vapor deposition chamber indoor first Container, and it is set to the indoor feeding device of the charging chamber, the partition between the vapor deposition chamber and the charging chamber It is equipped with openable window, the feeding device includes the first transport mechanism and is mounted in first transport mechanism Second container, first transport mechanism are configured as the second container through the open window from the charging chamber Room is sent to the vapor deposition chamber, and the second container is used to add evaporation material to the first container.

2. evaporation coating device according to claim 1, it is characterised in that: the second container is funnel, and the funnel goes out Material mouth is equipped with the control device for controlling evaporation material additive amount.

3. evaporation coating device according to claim 2, it is characterised in that: the control device includes being articulated with the funnel The magnetic closure of discharge outlet and the magnetic induction driving unit that the magnetic closure folding is driven outside the funnel.

4. evaporation coating device according to claim 3, it is characterised in that: the magnetic closure includes two symmetrical semicircles Shape permanent magnet plate, and the diameter side of described two permanent magnet plates is connected to each other；The arc top of described two permanent magnet plates respectively with leakage Bucket exit is hinged.

5. evaporation coating device according to claim 1, it is characterised in that: the second container and first transport mechanism can Dismantling connection.

6. evaporation coating device according to claim 1, it is characterised in that: first transport mechanism includes being set to the charging Driven rod chamber indoor first movement device and be installed on the first movement device, the second container are installed on institute It states on driven rod, the first movement device is for driving the driven rod to pass through the window.

7. evaporation coating device according to claim 1, it is characterised in that: the discharge port upper cover of the first container is equipped with lid Body is additionally provided in the vapor deposition chamber and moves the lid to open or close the second of the first container discharge port the transmission Mechanism.

8. evaporation coating device according to claim 7, it is characterised in that: second transport mechanism includes the second mobile device And it is installed on the transferring arm in second mobile device, the end of the transferring arm, which is equipped with, can pick up or unclamp the lid Pick device.

9. evaporation coating device according to claim 8, it is characterised in that: the first container be it is multiple, each described first The lid is correspondingly arranged on the discharge port of container.

10. evaporation coating device according to claim 1, it is characterised in that: the vapor deposition chamber and the charging chamber also connect It is connected with vacuum evacuation device.