CN209338644U - A kind of coating machine - Google Patents
A kind of coating machine Download PDFInfo
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- CN209338644U CN209338644U CN201821601439.XU CN201821601439U CN209338644U CN 209338644 U CN209338644 U CN 209338644U CN 201821601439 U CN201821601439 U CN 201821601439U CN 209338644 U CN209338644 U CN 209338644U
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- 238000000576 coating method Methods 0.000 title claims abstract description 254
- 239000011248 coating agent Substances 0.000 title claims abstract description 245
- 239000000463 material Substances 0.000 claims abstract description 194
- 238000003860 storage Methods 0.000 claims abstract description 138
- 238000012856 packing Methods 0.000 claims abstract description 25
- 230000000694 effects Effects 0.000 claims abstract description 8
- 230000005540 biological transmission Effects 0.000 claims description 133
- 230000009471 action Effects 0.000 claims description 17
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- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 description 12
- 239000010408 film Substances 0.000 description 11
- 238000012546 transfer Methods 0.000 description 11
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Abstract
The utility model discloses a kind of coating machines, to solve the problems, such as that the prior art causes chamber contamination and equipment to be lost in coating process in the presence of due to constantly opening chamber supplement Coating Materials.In the utility model, automated packing device is provided in the vacuum chamber of coating machine, when carrying out coating operation, when carrying out coating operation, storage device is under the driving of first driving device, the decentralization that the Coating Materials of storage is a at set time intervals, device is then transported on after the Coating Materials for picking up storage device decentralization, under the second driving device effect of itself, the Coating Materials is transmitted and is loaded into crucible, so in coating process, no longer needing frequently to open vacuum chamber is that crucible adds Coating Materials, reduce the number begun to speak, chamber contamination can thus be reduced, reduce the mechanical loss of coating machine, production cycle duration is increased simultaneously.
Description
Technical field
The utility model relates to optical coating device technical field, in particular to a kind of coating machine.
Background technique
Currently, optical thin film production is usually based on physical vapor deposition, this method is to be by solid state transformed by Coating Materials
The Coating Materials of gaseous state or ionic state, gaseous state or ionic state passes through space by evaporation source, arrives at substrate surface, and material arrives at substrate
Behind surface, deposition is gradually formed to film, thus on completing substrate eyeglass plated film.
In existing optical coating technique, plated film is carried out frequently with vacuum coating equipment, coating machine is high in coating process
Electronic beam current is pressed to require bombardment on the evaporation material in crucible acupuncture point, however the capacity of the crucible in existing coating machine all compares
It is smaller, in coating process, need constantly to open the vacuum chamber supplement Coating Materials of coating machine.In this way, when increasing plated film
It is long, simultaneously because constantly opening vacuum chamber in coating process, it is also possible to cause chamber contamination, while open and close chamber
It will cause machine loss during room.
In conclusion existing in coating process at present due to constantly opening chamber supplement Coating Materials and causing chamber dirty
The problem of dye and equipment loss.
Utility model content
The utility model provides a kind of coating machine, to solve to exist in coating process due to constantly beating in the prior art
The problem of beginning to speak room supplement Coating Materials and chamber contamination and equipment caused to be lost.
The utility model embodiment provides a kind of coating machine, which includes: vacuum chamber, is set in the vacuum chamber
Coating machine automated packing device and the crucible being set in the vacuum chamber, the coating machine automated packing device include:
It is installed in the vacuum chamber and the storage device with discharge station, the storage device has multiple storings
Unit and control mechanism for controlling the storing unit switch, each described storing unit correspond to for storing portion
The Coating Materials of crucible, and the storage device can be acted relative to the transmission device so that each described storing unit can
Be moved to the discharge station, and the control mechanism be used to control be in discharge station storing unit it is in the open state with
Coating Materials is transferred；
It is installed on the transmission device that can be acted in the vacuum chamber and relative to the crucible and storage device, it is described
For sending the Coating Materials for being in the storing unit decentralization of discharge station to the crucible when transmission device acts；
First driving device for driving storage device to act；
The second driving device for drive transmission unit movement.
In the vacuum chamber of above-mentioned coating machine, it is provided with automated packing device, coating machine automated packing device includes being installed on
In the vacuum chamber and the storage device with discharge station, be installed in the vacuum chamber and can relative to the crucible with
And the transmission device of storage device movement, for driving the first driving device of storage device movement and for driving transmission dress
Set the second driving device of movement.In this way, when carrying out coating operation, when the degree membrane material in crucible will exhaust, vacuum
Storage device in chamber is controlled a storage in storage device is single under the driving of first driving device by control equipment
Member is moved to discharge station, and the Coating Materials in it is transferred, and is then passed the Coating Materials by transmission device in vacuum chamber
It send and is loaded into crucible, so in coating process, it is no longer necessary to which frequently opening vacuum chamber is that crucible adds Coating Materials, is subtracted
The number begun to speak is lacked, thus chamber contamination can be reduced, when reducing the mechanical loss of coating machine, while increasing the production cycle
It is long.
In a kind of possible embodiment, the storage device includes a rotary shaft and a main component, the main body
Component can be rotatably mounted in the vacuum chamber around the axial line of the rotary shaft, and the storing unit is around the rotary shaft
Axial line be uniformly distributed in the main component；The first driving device is connect with the transmission of rotary axis.
Above-mentioned storage device includes a rotary shaft and a main component, and the main component can be around the axle center of the rotary shaft
Line is rotatably mounted in the vacuum chamber, and the storing unit is uniformly distributed in the master around the axial line of the rotary shaft
Body component；The first driving device is connect with the transmission of rotary axis.In this way, the storing list being evenly distributed on main component
Member can successively pass through discharge station with the rotation of main component, complete blanking operation.And then vacuum chamber can not opened
In the case where Coating Materials is repeatedly added into crucible, due to during reducing automatic Loading Coating Materials open vacuum chamber step
Suddenly, so reducing chamber contamination, the mechanical loss of coating machine is reduced, while increasing production cycle duration.
In a kind of possible embodiment, in the storage device, each described storing unit includes the main body
The cylindrical space that hollow out is formed on component；The control mechanism include can around the cylindrical space bottom a side turningly
Be installed on cylindrical space bottom small raft and with the main component coaxial arrangement and non-rotatable baffle, institute
It states baffle and is provided with discharge openings at discharge station, when the small raft of cylindrical space bottom is overlapped with discharge openings, pulvinulus
Plate is overturn by closed state to opening state under self gravitation effect.
In above-mentioned coating machine, the control mechanism of storage device by can around the cylindrical space bottom a side turningly
Be installed on cylindrical space bottom small raft and with the main component coaxial arrangement and non-rotatable baffle structure
At the baffle is provided with discharge openings at discharge station.In the specific implementation, it is revolved with main component around rotary shaft
Turn, storing unit moves closer to discharge openings, when small raft is completely in discharge openings, small raft under the effect of gravity,
It is flipped around the side that itself connect with cylindrical space, so that small raft is overturn under self gravitation effect by closed state
To opening state, and then complete Coating Materials decentralization.
In a kind of possible embodiment, the first driving device includes driving motor.
In above-mentioned coating machine, use driving motor as first driving device, so that the rotary shaft of storage device is according to setting
Fixed requirement rotates, and then main component rotates with, so that the storing unit on main component can be arrived successively
Up to discharge station.
In a kind of possible embodiment, in the storage device, each described storing unit includes by main body structure
Hollow out forms cylindrical space, the valve to be opened/closed of cylindrical space bottom setting and the control valve opening and closing on part
Third driving device, when storing unit is in discharge station, the third driving device controls the valve opening.
In above-mentioned coating machine, valve to be opened/closed is arranged in the cylindrical space bottom that can also be formed on main component
To realize storing unit, opening for the valve to be opened/closed of the cylindrical space bottom setting can be so controlled by 3rd device
Close realization decentralization Coating Materials.
In a kind of possible embodiment, the third driving device includes the driving electricity for being installed on the main component
Machine.
In this way, can control the valve opening that cylindrical space bottom is arranged in or closing, under the action of driving device
It completes storage device and transfers Coating Materials.
In a kind of possible embodiment, the transmission device has splicing station and crucible charge station, and described
Transmission device includes:
Storing unit is transmitted, for storing Coating Materials；Institute is picked up when the transmission storing unit is in splicing station
The Coating Materials for stating the unit storing unit decentralization of discharge station, will when the transmission storing unit is in crucible charge station
The Coating Materials of interception is filled in crucible；
Second driving device and the transmission storing unit are sequentially connected, for driving transmission storing unit described
It is moved between splicing station and the crucible charge station.
Above-mentioned transmission device picks up the Coating Materials of storage device decentralization in splicing station, and is temporarily stored in transmission storing unit
In, then under the driving of the second driving device, storing unit is transmitted from splicing station and is moved to crucible charge station, then will
Coating Materials in transmission storing unit is loaded into crucible.The Coating Materials decentralization that can be so stored in storage device
Afterwards, the Coating Materials by the decentralization is loaded into crucible by transmission device, and then is realized the case where not opening vacuum chamber
Under be automatically replenished Coating Materials.
In a kind of possible embodiment, the storing unit of the storage device by hollow out main component and main body structure
The cylindrical region that the baffle of part bottom is formed is constituted, and the bottom of each cylindrical space is correspondingly arranged on small raft, institute
State and be provided with an opening on the baffle of main component bottom, when cylinder space with opening is overlapped when, small raft opening, under leave with
Store up the Coating Materials in principal space.
In above-mentioned apparatus, by being formed on the main component of storage device one by one for storing the column of Coating Materials
Space, then in each cylindrical space bottom, setting is connected on main component, but openable small raft, and in entire storing
The bottom of device is equipped with one piece of baffle that cannot be moved, which is being provided with an opening corresponding to discharge station, simultaneously
The baffle can stop the Coating Materials in the storing unit that remaining is all in addition to discharge station to fall.It so can be in plated film
The Coating Materials of storage can successively be transferred, and then the Coating Materials of the decentralization can be filled by transmission device in the process
It fills out in crucible, and then realizes and be repeatedly automatically replenished Coating Materials in the case where not opening vacuum chamber.
In a kind of possible embodiment, the storing unit of the storage device is empty by the column of hollow out on main component
Between and cylinder space bottom setting organ to be opened/closed constitute, when storing unit rotates to discharge station, open organ, under
Put the Coating Materials being stored in principal space.
In above-mentioned storage device, control switch can be pressed by program by being arranged one in the bottom of each storing unit
Organ, when storing unit rotates to discharge station, the organ receives open command, opens organ, and decentralization is stored in
Coating Materials in principal space, after the completion of discharging, which receives out code, closes organ.It so equally can be with
It realizes and transfers the Coating Materials of storage, and then the Coating Materials of the decentralization can be loaded into crucible by transmission device
Interior, realization is automatically replenished Coating Materials in the case where not opening vacuum chamber.
In a kind of possible embodiment, second driving device includes driven rod, the driven rod can around one with
The shaft of the axis parallel of the main component is rotatably mounted in the vacuum chamber, and one end of the driven rod is equipped with
The transmission storing unit；Drive member for driving the driven rod to rotate around the shaft.
In above-mentioned apparatus, under the action of drive member, driven rod is with one and the axis parallel of the main component
Shaft rotation picks up the Coating Materials of storage device decentralization, and continue turn when transmitting storing unit rotational and arriving splicing station
It is dynamic, after the transmission storing unit rotational to crucible charge station equipped with Coating Materials, open opening for transmission storing unit bottom
It closes, the Coating Materials transmitted in storing unit is loaded into crucible.A Coating Materials filling is so completed, it is so past
It is multiple, until after the Coating Materials stored in storage device is all loaded into crucible, then the supplement of the vacuum chamber by opening coating machine
Coating Materials.
In a kind of possible embodiment, second driving device includes: being used for of can rotating around self-axis line
Transmit the transmission disk of the Coating Materials picked up, the axial line of the transmission disk and the axis parallel of the main component；
And the drive member for driving the transmission disk to act.
In above-mentioned apparatus, under the action of drive member, transmission disk is rotated around self-axis line, when setting is transmitting
When transmission storing unit rotational on disk is to splicing station, the Coating Materials of storage device decentralization is picked up, and continue to rotate,
After transmission storing unit rotational to crucible charge station equipped with Coating Materials, the switch of transmission storing unit bottom is opened, it will
Coating Materials in transmission storing unit is loaded into crucible.A Coating Materials filling is so completed, and so on, directly
After the Coating Materials stored into storage device is all loaded into crucible, the vacuum chamber supplement plating membrane material of coating machine can be just opened
Material.
In a kind of possible embodiment, second driving device includes: telescopic for transmitting the plating picked up
The mechanical arm of membrane material；And the drive member for driving the mechanical arm movement.
In above-mentioned apparatus, under the action of drive member, mechanical arm can be between splicing station and crucible charge station
It is mobile.When mechanical arm extends so that transmission storing unit arrival splicing station on the robotic arm is arranged, storage device is picked up
The Coating Materials of decentralization is simultaneously stored in transmission storing unit, and subsequent contract arm is stretched after reaching supporting point towards crucible
Long mechanical arm opens transmission storing unit bottom after the transmission storing unit rotational to crucible charge station equipped with Coating Materials
The Coating Materials transmitted in storing unit is loaded into crucible by the switch in portion.A Coating Materials filling is so completed,
And so on, after the Coating Materials stored in storage device is all loaded into crucible, the vacuum chamber of coating machine can just be opened
Supplement Coating Materials.
In a kind of possible embodiment, the capacity of the transmission storing unit in the transmission device is greater than the storing
The capacity of storing unit in device.
Above-mentioned apparatus, the capacity that the capacity of transmission storing unit is greater than the storing unit in the storage device could make
Transmission storing unit picks up all Coating Materials of storage device decentralization, avoids the Coating Materials of decentralization from being scattered and transmits storing out
Unit.
In a kind of possible embodiment, the coating machine further include: be set to the sense in the vacuum chamber in crucible
Device is answered, and corresponds to storage device and the respectively arranged controller of transmission device；The sensing device is for monitoring crucible
The surplus of interior Coating Materials, and when Coating Materials remaining reserves are less than given threshold, trigger signal is sent to storage device
Controller and transmission device controller so that the controller of storage device can be according to the residue of Coating Materials in crucible
Coating Materials is transmitted on transmission device by amount, and then material is sent into corresponding crucible.
In above-mentioned coating machine, it is additionally provided with sensing device in the crucible in vacuum chamber, for monitoring Coating Materials in crucible
Surplus, and inductive signal is sent to the controller of storage device and the controller of transmission device, subsequent storage device
The controller of controller and transmission device determines the need for thinking dry domestic filling Coating Materials according to inductive signal.
Detailed description of the invention
It, below will be to required in embodiment description in order to illustrate more clearly of the technical scheme in the embodiment of the utility model
Attached drawing to be used is briefly introduced, it should be apparent that, the accompanying drawings in the following description is only some implementations of the utility model
Example, for those of ordinary skill in the art, without any creative labor, can also be attached according to these
Figure obtains other attached drawings.
Fig. 1 is the structural schematic diagram of automated packing device in coating machine vacuum chamber provided by the embodiment of the utility model；
Fig. 2A is the structure of one of coating machine automated packing device provided by the embodiment of the utility model storage device
Schematic diagram；
Fig. 2 B is the main body of one of coating machine automated packing device provided by the embodiment of the utility model storage device
The structural schematic diagram of component；
Fig. 3 is the structure of another storage device in coating machine automated packing device provided by the embodiment of the utility model
Schematic diagram；
Fig. 4 is that the structure of the transmission device of the first coating machine automated packing device provided by the embodiment of the utility model is shown
It is intended to；
Fig. 5 is that the structure of the transmission device of second of coating machine automated packing device provided by the embodiment of the utility model is shown
It is intended to；
Fig. 6 is that the structure of the transmission device of the third coating machine automated packing device provided by the embodiment of the utility model is shown
It is intended to.
Specific embodiment
It is related to a kind of coating machine for adding automated packing device in the vacuum chamber in the utility model embodiment.Specific
When implementation, Coating Materials required for a lot of parts is stored in the storage device of coating machine automated packing device in advance, is being carried out
When plated film, the Coating Materials in storage device is transferred at set time intervals, and by transmission device, by the plating of decentralization
Membrane material is transmitted to above mouth of pot, and then Coating Materials is loaded into crucible, to realize the automatic Loading inside coating machine
Coating Materials.
It is practical to this below in conjunction with attached drawing in order to keep the purpose of this utility model, technical solution and advantage clearer
It is novel to be described in further detail, it is clear that described embodiment is only the utility model some embodiments, rather than
Whole embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art are not making creative work
Under the premise of all other embodiment obtained, fall within the protection scope of the utility model.
As shown in Figure 1, the utility model embodiment provides a kind of coating machine, which includes: vacuum chamber 1, is set to institute
The crucible 12 stating the coating machine automated packing device in vacuum chamber 1 and being set in the vacuum chamber 1, the coating machine are automatic
Filler device includes:
It is installed in the vacuum chamber 1 and the storage device 10 with discharge station 13, the storage device 10 has more
A storing unit 100 and the control mechanism switched for controlling the storing unit 100, each described storing Unit 100 are used
In a Coating Materials for corresponding to crucible 12 of storage, and the storage device 10 can be acted relative to the transmission device 11 with
Each described storing unit 100 is set to be movable to the discharge station 13, and the control mechanism is in blanking for controlling
The storing unit 100 of station 13 is in the open state to transfer Coating Materials；
It is installed on the transmission device that can be acted in the vacuum chamber 1 and relative to the crucible 12 and storage device 10
11, the Coating Materials when transmission device 11 acts for transferring the storing unit 100 for being in discharge station 13 is sent to
The crucible 12；
First driving device for driving storage device 10 to act；
The second driving device acted for drive transmission unit 11.
In the vacuum chamber 1 of above-mentioned coating machine, it is provided with automated packing device, coating machine automated packing device includes being installed on
In the vacuum chamber 1 and the storage device 10 with discharge station 13, it is installed in the vacuum chamber 1 and can be relative to described
The transmission device 11 that crucible 12 and storage device 10 act, first driving device for driving storage device 10 to act and
The second driving device acted for drive transmission unit 11.In this way, when carrying out coating operation, when the plating membrane material in crucible 12
When material will exhaust, for the storage device 10 in vacuum chamber 1 under the driving of first driving device, being controlled by control equipment will storage
A storage unit in material device 10 is moved to discharge station 13, and the Coating Materials in it is transferred, then by vacuum chamber 1
The Coating Materials is transmitted and is loaded into crucible 12 by interior transmission device 11, so in coating process, it is no longer necessary to frequently
Opening vacuum chamber 11 is that crucible 12 adds Coating Materials, reduces the number begun to speak, thus can reduce chamber contamination, reduces plating
The mechanical loss of film machine, while increasing production cycle duration.
Wherein, the every a Coating Materials volume stored in storage device 10 is 12 capacity of crucible being adapted to according to coating machine
It determines.
The automatic loading mechanism in coating machine vacuum chamber 1 is illustrated below in conjunction with diagram.
As seen in figs. 2a-2b, the first provided in the utility model embodiment realizes the embodiment of storage device 10.
Specifically, storing described in the storage device 10 for the automated packing device being arranged in the vacuum chamber 1 of the coating machine fills
Setting 10 includes a vacuum chamber 1 and a main component 101, and the main component 101 can be rotated around the axial line of the rotary shaft 102
Ground is installed in the vacuum chamber 1, and the storing unit 100 be uniformly distributed in around the axial line of the rotary shaft 102 it is described
Main component 101；The first driving device and the rotary shaft 102 are sequentially connected.
Above-mentioned storage device 10 includes a rotary shaft 102 and a main component 101, and the main component 101 can be around described
The axial line of rotary shaft 102 is rotatably mounted in the vacuum chamber 1, and the storing unit 100 is around the rotary shaft 102
Axial line is uniformly distributed in the main component 101；The first driving device and the rotary shaft 102 are sequentially connected.In this way,
The storing unit 100 being evenly distributed on main component 101 can successively pass through blankers with the rotation of main component 101
Blanking operation is completed in position 13.And then Coating Materials repeatedly can be added into crucible 12 in the case where not opening vacuum chamber 1,
Due to the step of opening vacuum chamber 1 during reducing automatic Loading Coating Materials, so reducing chamber contamination, coating machine is reduced
Mechanical loss, while increasing cycle duration.
Further, in the storage device 10, each described storing unit 100 includes on the main component 101
The cylindrical space 104 that hollow out is formed；The control mechanism include can around 104 bottom of cylindrical space a side turningly
Be installed on the 104 bottom small raft 105 of cylindrical space and with the main component 101 coaxial arrangement and it is non-rotatable
Baffle 103, the baffle 103 is provided with discharge openings at discharge station 13, when the small raft of 104 bottom of cylindrical space
105 with discharge openings when being overlapped, and small raft 105 is overturn by closed state to opening state under self gravitation effect.
In above-mentioned coating machine, the control mechanism of storage device 10 is by can be around a side of 104 bottom of cylindrical space
It is turningly installed on the 104 bottom small raft 105 of cylindrical space and with the main component 101 coaxial arrangement and not
Rotatable baffle 103 is constituted, and the baffle 103 is provided with discharge openings at discharge station 13.In the specific implementation, with
Main component 101 is rotated around rotary shaft 102, and storing unit 100 moves closer to discharge openings, when small raft 105 is completely in
When in discharge openings, small raft 105 under the effect of gravity, is flipped around the side that itself connect with cylindrical space 104, makes
It obtains small raft 105 to be overturn by closed state to opening state under self gravitation effect, and then completes Coating Materials decentralization.
Specifically, the first driving device includes driving motor.
In above-mentioned coating machine, use driving motor as first driving device, so that the rotary shaft 102 of storage device 10 is pressed
Requirement according to setting rotates, and then main component 101 rotates with, so that the storing unit on main component 101
100 can successively reach discharge station 13.
Such as: the automated packing device fortune in specific implementation, when Coating Materials will exhaust in crucible 12, in coating machine
Turn, first under the action of driving motor, the rotary shaft 102 of storage device 10 is rotated, the main component of storage device 10
101 rotate therewith；In the journey of PLC (Programmable Logic Controller, programmable logic controller (PLC)) setting
Under sequence, the main component 101 rotates by a certain angle；
The cylindrical space 104 that the storing unit 100 of Coating Materials is mounted at first reaches 101 bottom of main component
When discharge openings on baffle 103, the small raft 105 of 104 bottom of cylindrical space in itself under the action of, surround and main body
The tie point of a side that component 101 connects is flipped, and is overturn by closed state to opening state, in cylindrical space 104
Coating Materials smoothly fall；
Then with the rotation of rotary shaft 102, storing unit 100 with carrier element component 101 revolution space position
It changes, gradually rotates out of discharge station 13, when rotating out of discharge station 13, small raft 105 is due to 101 bottom of main component
The lattice gear of the baffle in portion acts on, and gradually closes, enters closed state by opening state；
Later, it repeats the above process, until after the Coating Materials decentralization in storage device 10, then open the progress of vacuum chamber 1
Filler operation, and the storing unit 100 in storage device is loaded into full Coating Materials.
As shown in figure 3, the embodiment of second of the realization storage device 10 provided in the utility model embodiment.
Specifically, each described storing unit 100 includes by leading in the storage device 10 in the vacuum chamber 1
Hollow out forms cylindrical space 104, the valve to be opened/closed of 104 bottom of cylindrical space setting and control on body component 101
The third driving device of the valve opening and closing, when storing unit 100 is in discharge station 13, the third driving device control
The valve opening.
In above-mentioned coating machine, 104 bottom of the cylindrical space setting that can also be formed on main component 101 can be opened and closed
Valve to realize storing unit 100, opening for 104 bottom of cylindrical space setting can be so controlled by 3rd device
Decentralization Coating Materials is realized in the opening and closing of the valve closed.
Specifically, the third driving device includes the driving motor for being installed on the main component 101.
In this way, can control the valve opening that 104 bottom of cylindrical space is arranged in or pass under the action of driving device
It closes, storage device 10 is completed and transfers Coating Materials.
Such as: the automated packing device fortune in specific implementation, when Coating Materials will exhaust in crucible 12, in coating machine
Turn, first under the action of driving motor, the rotary shaft 102 of storage device 10 is rotated, the main component of storage device 10
101 rotate therewith；Under the program of PLC setting, the main component 101 rotates by a certain angle；
The cylindrical space 104 that the storing unit 100 of Coating Materials is mounted at first reaches 101 bottom of main component
When discharge openings on baffle 103, the valve of 104 bottom of cylindrical space is under the driving of the driving motor of itself, according to setting
Program open, be in an open state by closed state conversion, the Coating Materials stored in storing unit 100 smoothly falls；
The Coating Materials of storage in storing unit 100 is completely lower to fall behind, and the valve of 104 bottom of cylindrical space is at itself
Driving motor driving under, according to the stop of setting, closed state is entered by opening state, blanking is then rotated out of and opens
Mouthful；
Later, it repeats the above process, until after the Coating Materials decentralization in storage device 10, then open the progress of vacuum chamber 1
Filler operation, and the storing unit 100 of storing dress is loaded into full Coating Materials.
In above-described embodiment specific implementation process, the opening on the plate washer 2 of 101 bottom of main component setting can be bigger
In 100 bottom opening of storing unit, the Coating Materials in storing unit 100 can so be made smoothly to fall completely, without
It can block because of the plate washer of 101 bottom of main component setting and prevent Coating Materials from falling completely, and then avoid providing
Source waste.
Further, it after the Coating Materials stored in storing unit 100 is smoothly transferred, and is loaded in the Coating Materials
Before in crucible 12, it is also necessary to a transmission device 11, the plated film transferred at discharge station 13 for picking up storage device 10
Material simultaneously sends the Coating Materials picked up to crucible 12.
As shown in Figure 1, specifically, the transmission device 11 has 12 loading station 15 of splicing station 14 and crucible, and institute
Stating transmission device 11 includes: transmission storing unit 110, for storing Coating Materials；It is connect when the transmission storing unit 110 is in
The Coating Materials that the unit storing unit 100 that the discharge station 13 is picked up when station 14 is transferred is expected, when the transmission storing list
The Coating Materials of interception is filled in crucible 12 by member 110 when being in 12 loading station 15 of crucible；Second driving device and institute
It states transmission storing unit 110 to be sequentially connected, for driving transmission storing unit 110 in the splicing station 14 and the crucible 12
It is moved between when loading station 15.
Above-mentioned transmission device 11 picks up the Coating Materials of storage device decentralization in splicing station 14, and is temporarily stored in transmission storing
In unit 110, then under the driving of the second driving device, storing unit 110 is transmitted from splicing station 14 and is moved to crucible 12
The Coating Materials transmitted in storing unit 110 is then loaded into crucible 12 by loading station 15.It so can be in storage device
After the Coating Materials decentralization stored in 10, the Coating Materials of the decentralization is passed through in 11 device crucible 12 of transmission device, in turn
Realization is automatically replenished Coating Materials in the case where not opening vacuum chamber 1.
Wherein, the side transmission device 11 that the Coating Materials transmission that storage device 10 is transferred is loaded into crucible 12 realized
Formula be it is diversified, three kinds of possible embodiments are presented below.
One, as shown in figure 4, second driving device can by driven rod 111 and for drive the driven rod 111 around
The drive member of the shaft rotation is constituted, wherein the driven rod 111 can be around one and the axial line of the main component 101
Parallel shaft is rotatably mounted in the vacuum chamber 1, and one end of the driven rod 111 is equipped with the transmission storing unit
110。
In above-mentioned apparatus, under the action of drive member, driven rod 111 is with one and the axial line of the main component 101
Parallel shaft rotation picks up the plating membrane material of the decentralization of storage device 10 when transmission storing unit 110 turns to splicing station 14
Material, and continue to rotate, after the transmission storing unit 110 equipped with Coating Materials turns to 12 loading station 15 of crucible, opens and pass
The Coating Materials transmitted in storing unit 110 is loaded into crucible 12 by the switch for sending 110 bottom of storing unit.It is so i.e. complete
It is loaded at a Coating Materials.
Wherein, the drive member can be driving motor.
When it is implemented, the automated packing device in coating machine operates, first when Coating Materials will exhaust in crucible 12
First under the action of driving motor, the rotary shaft of storage device 10 is rotated, and the main component 101 of storage device 10 is sent out therewith
Raw rotation；Under the program of PLC setting, storage device 10 can transfer the interior Coating Materials for being stored in storing unit 100；
In storage device 10 when discharge station 13 transfers the Coating Materials stored in a storing unit 100, transmission device
Transmission storing unit 110 on 11 reaches splicing station, picks up the Coating Materials of lower section, and is stored in transmission storing unit 110
In；
Then, under the driving of the program of PLC setting, after driven rod 111 rotates around the axis of rotation certain angle, stop rotation
Turn, open the valve of transmission 110 bottom of storing unit, the Coating Materials of the storage transmitted in storing unit 110 is loaded into earthenware
In crucible 12；
Subsequent driven rod 111 continues to rotate out of 12 loading station of crucible；
Later, it repeats the above process, until after the Coating Materials decentralization in storage device 10, then open the progress of vacuum chamber 1
Filler operation, and the storing unit 100 in storage device is loaded into full Coating Materials.
Two, as shown in figure 5, second driving device can be picked up by that can rotate around self-axis line for transmitting
The transmission disk 112 of Coating Materials and for drive it is described transmission disk 112 act drive member constitute, wherein the biography
Send the axial line of disk 112 and the axis parallel of the main component 101.
In above-mentioned apparatus, under the action of drive member, transmission disk 112 works as setting around self-axis line rotation
When the transmission storing unit 110 on transmission disk 112 turns to splicing station 14, the plating membrane material of the decentralization of storage device 10 is picked up
Material, and continue to rotate, after the transmission storing unit 110 equipped with Coating Materials turns to 12 loading station 15 of crucible, opens and pass
The Coating Materials transmitted in storing unit 110 is loaded into crucible 12 by the switch for sending 110 bottom of storing unit.It is so i.e. complete
It is loaded at a Coating Materials.
Wherein, the drive member can be driving motor.
When it is implemented, the automated packing device in coating machine operates, first when Coating Materials will exhaust in crucible 12
First under the action of driving motor, the rotary shaft of storage device 10 is rotated, and the main component 101 of storage device 10 is sent out therewith
Raw rotation；Under the program of PLC setting, storage device 10 can transfer the interior Coating Materials for being stored in storing unit 100；
In storage device 10 when discharge station 13 transfers the Coating Materials stored in a storing unit 100, transmission device
Transmission storing unit 110 on 11 reaches splicing station, picks up the Coating Materials of lower section, and is stored in transmission storing unit 110
In；
Then, under the driving of the program of PLC setting, after transmission disk 111 rotates around the axis of rotation certain angle, stop
The valve of transmission 110 bottom of storing unit is opened in rotation, and the Coating Materials of the storage transmitted in storing unit 110 is loaded into
In crucible 12；
Then transmission disk 112 continues to rotate out of 12 loading station of crucible；
Later, it repeats the above process, until after the Coating Materials decentralization in storage device 10, then open the progress of vacuum chamber 1
Filler operation, and the storing unit 100 of storing dress is loaded into full Coating Materials.
Three, as shown in fig. 6, second driving device can be by telescopic for transmitting the machine of the Coating Materials picked up
Tool arm 113 and drive member for driving the mechanical arm 113 to act are constituted.
In above-mentioned apparatus, under the action of drive member, mechanical arm 113 can be in 12 charger of splicing station 14 and crucible
It is moved between position 15.When mechanical arm 113 extends so that the transmission storing unit 110 being arranged on mechanical arm 113 reaches splicing work
When position 14, picks up the Coating Materials of the decentralization of storage device 10 and be stored in transmission storing unit 110, subsequent contract arm
113, mechanical arm 113 is extended towards crucible 12 after reaching supporting point, is rotated in the transmission storing unit 110 equipped with Coating Materials
To after 12 loading station 15 of crucible, the switch of transmission 110 bottom of storing unit is opened, the plated film in storing unit 110 will be transmitted
Mixture is into crucible 12.A Coating Materials filling is so completed, and so on, until storing in storage device 10
Coating Materials be all loaded into crucible 12 after, can just open coating machine vacuum chamber 1 supplement Coating Materials.
Wherein, the drive member can be driving motor.
When it is implemented, the automated packing device in coating machine operates, first when Coating Materials will exhaust in crucible 12
First under the action of driving motor, the rotary shaft of storage device 10 is rotated, and the main component 101 of storage device 10 is sent out therewith
Raw rotation；Under the program of PLC setting, storage device 10 can transfer the interior Coating Materials for being stored in storing unit 100；
In storage device 10 when discharge station 13 transfers the Coating Materials stored in a storing unit 100, transmission device
Transmission storing unit 110 on 11 reaches splicing station under the driving of mechanical arm 113, picks up the Coating Materials of lower section, and deposits
Storage is in transmission storing unit 110；
Then, under the driving of the program of PLC setting, mechanical arm 113 is shunk to the side endpoint far from splicing station,
After reaching endpoint, then towards 12 direction of crucible elongation mechanical arm 113, after reaching 12 filler station of crucible, mechanical arm 113 stops
The valve of transmission 110 bottom of storing unit is then opened in the movement of elongation, will transmit the plated film of the storage in storing unit 110
In mixture to crucible 12；
Subsequent mechanical arm 113 is reversely shunk, and leaves 12 loading station of crucible；
Later, it repeats the above process, until after the Coating Materials decentralization in storage device 10, then open the progress of vacuum chamber 1
Filler operation, and the storing unit 100 of storing dress is loaded into full Coating Materials.
Wherein, the opening of the transmission storing unit 110 of the transmission device 11 also should be slightly bigger than the storing of storage device 10
The bottom opening of unit 100, can be by the transmission storing list of transmission device 11 with the Coating Materials for ensuring that storage device 10 is transferred
Member 110 picks up completely.
Specifically, in the above-described embodiments, the capacity of the transmission storing unit 110 in the transmission device 11 is greater than described
The capacity of storing unit 100 in storage device 10.In this way, transmission storing unit 110 can just pick up the decentralization of storage device 10
All Coating Materials, without falling out.
When carrying out Coating Materials filling with above-mentioned apparatus, it is necessary first to know specifically when carry out Coating Materials
Filling.
Based on this, sensing device is provided in crucible 12 in the vacuum chamber 1 of the coating machine；It is filled in addition, corresponding to storing
Set 10 and transmission device 11 be also respectively provided with controller；The sensing device is used to monitor the residue of Coating Materials in crucible 12
Amount, and inductive signal is sent to the controller of storage device 10 and the controller of transmission device 11, so that storage device 10
Controller Coating Materials can be transmitted on transmission device 11 according to the surplus of Coating Materials in crucible, and then by material
It is sent into corresponding crucible 12.
In implementation, the sensing device of monitoring Coating Materials surplus is provided in the crucible 12 in the vacuum chamber 1, it is described
Sensing device can be piezoelectric transducer etc..
Wherein, in order to guarantee that piezoelectric transducer works normally, piezoelectric transducer is preferable to the pressure of resistance to 500 degree of high temperature
Electric transducer；Piezoelectric transducer heat-barrier material can also be coated, so that the operating temperature of piezoelectric transducer is down to it
The range of normal work.Used heat-barrier material is, for example, ceramic insulating material.
In specific implementation, multiple pressure sensors can be arranged in crucible 12, with the reduction of Coating Materials, pressure is passed
The pressure that sensor senses becomes smaller, and then is transferred to the controller of storage device 10 and the controller inductive signal of transmission device 11
It changes；
When the electric current of inductive signal is greater than setting electric current threshold value or voltage is less than setting voltage threshold, storage device 10
Controller and transmission device 11 controller can be assumed that the Coating Materials deficiency in current crucible 12 needs be filled, into
And the controller of storage device 10 can control first driving device driving 10 control member of the storage device fortune of storage device 10
Turn, sends the Coating Materials corresponded in crucible 12 to transmission device 11；
When Coating Materials deficiency of the controller of transmission device 11 in the current crucible 12 of determination needs to be filled, it will pass
Sending storing unit 110 to turn at splicing station 14 waits storage device 10 to transfer Coating Materials, after picking up Coating Materials,
The Coating Materials is loaded into crucible 12.
Wherein, the controller of the controller of storage device 10 and transmission device 11 can be single-chip microcontroller, CPU (Central
Processing Unit, central processing unit), PLC etc..
Inductive signal data are handled in controller to obtain needing after filling Coating Materials, bristling with anger down first into crucible 12
It enables to first driving device and the second driving device, so that storage device 10 and transmission device 12 operate, then sends instructions down again
Coating Materials decentralization is carried out to the control mechanism of storage device 10.
Further, if thering are multiple crucibles 12 for loading different materials to carry out coating operation at the same time in coating machine, at this time
Also the Coating Materials of identical type can be configured in storage device 10.
In specific implementation, can the storing unit 100 to storage device 10 be numbered, and by the corresponding storage of each number
Coating Materials type is input to the controller of storage device 10 in advance, is controlled by the controller of storage device 10, by different plated films
Material on transmission device 11 via being loaded into corresponding crucible 12.
Wherein, Coating Materials can be Cu, In, Ga, Xi etc..
Above by reference to showing according to the method, apparatus (system) of the embodiment of the present application and/or the frame of computer program product
Figure and/or flow chart describe the application.It should be understood that can realize that block diagram and or flow chart is shown by computer program instructions
The combination of the block of a block and block diagram and or flow chart diagram for figure.These computer program instructions can be supplied to logical
With computer, the processor of special purpose computer and/or other programmable data processing units, to generate machine, so that via meter
The instruction that calculation machine processor and/or other programmable data processing units execute creates for realizing block diagram and or flow chart block
In specified function action method.
Correspondingly, the application can also be implemented with hardware and/or software (including firmware, resident software, microcode etc.).More
Further, the application can take computer usable or the shape of the computer program product on computer readable storage medium
Formula has the computer realized in the medium usable or computer readable program code, to be made by instruction execution system
It is used with or in conjunction with instruction execution system.In the present context, computer can be used or computer-readable medium can be with
It is arbitrary medium, may include, stores, communicates, transmits or transmit program, is made by instruction execution system, device or equipment
With, or instruction execution system, device or equipment is combined to use.
Obviously, it is practical without departing from this can to carry out various modification and variations to the utility model by those skilled in the art
Novel spirit and scope.If in this way, these modifications and variations of the present invention belong to the utility model claims and
Within the scope of its equivalent technologies, then the utility model is also intended to include these modifications and variations.
Claims (10)
1. a kind of coating machine characterized by comprising vacuum chamber, the coating machine automated packing being set in vacuum chamber dress
The crucible in the vacuum chamber is set and is set to, the coating machine automated packing device includes:
It is installed in the vacuum chamber and the storage device with discharge station, the storage device has multiple storing units
With the control mechanism for controlling the storing unit switch, each described storing unit corresponds to crucible for storing portion
Coating Materials, and the storage device can relative to transmission device act so that each described storing unit is movable to institute
Discharge station is stated, and the control mechanism is in the open state will plate membrane material for controlling the storing unit in discharge station
Material decentralization；
It is installed on the transmission device that can be acted in the vacuum chamber and relative to the crucible and storage device, the transmission
For sending the Coating Materials for being in the storing unit decentralization of discharge station to the crucible when device action；
First driving device for driving storage device to act；
The second driving device for drive transmission unit movement.
2. coating machine as described in claim 1, which is characterized in that the storage device includes a rotary shaft and a main body structure
Part, the main component can be rotatably mounted in the vacuum chamber around the axial line of the rotary shaft, and the storing unit
The main component is uniformly distributed in around the axial line around the rotary shaft；
The first driving device is connect with the transmission of rotary axis.
3. coating machine as claimed in claim 2, which is characterized in that in the storage device, each described storing unit packet
Include the cylindrical space that hollow out is formed on the main component；
The control mechanism includes that can turningly be installed on and the cylindrical space around a side of the cylindrical space bottom
Bottom small raft and with the main component coaxial arrangement and non-rotatable baffle, the baffle set at discharge station
Be equipped with discharge openings, when the small raft of cylindrical space bottom is overlapped with discharge openings, small raft under self gravitation effect by
Closed state is overturn to opening state.
4. coating machine as claimed in claim 2, which is characterized in that the first driving device includes driving motor.
5. coating machine as described in claim 1, which is characterized in that in the storage device, each described storing unit packet
It includes and is formed described in cylindrical space, the valve to be opened/closed that the cylindrical space bottom is arranged and control as hollow out on main component
The third driving device of valve opening and closing, when storing unit is in discharge station, the third driving device controls the valve
It opens.
6. coating machine as claimed in claim 5, which is characterized in that the third driving device includes being installed on the main body structure
The driving motor of part.
7. coating machine as claimed in claim 2, which is characterized in that the transmission device has splicing station and crucible charge work
Position, and the transmission device includes:
Storing unit is transmitted, for storing Coating Materials；Picked up when the transmission storing unit is in splicing station it is described under
The Coating Materials for expecting the unit storing unit decentralization of station, will pick up when the transmission storing unit is in crucible charge station
Coating Materials be filled in crucible；
Second driving device and the transmission storing unit are sequentially connected, for driving transmission storing unit in the splicing
It is moved between station and the crucible charge station.
8. coating machine as claimed in claim 7, which is characterized in that second driving device includes:
Driven rod, the driven rod can be rotatably mounted to described true around the shaft of one and the axis parallel of the main component
In cavity, and one end of the driven rod is equipped with the transmission storing unit；
Drive member for driving the driven rod to rotate around the shaft；Or
What can be rotated around self-axis line is used to transmit the transmission disk of the Coating Materials picked up, the axial line of the transmission disk
With the axis parallel of the main component；
Drive member for driving the transmission disk to act；Or
The telescopic mechanical arm for being used to transmit the Coating Materials picked up；
For driving the drive member of the mechanical arm movement.
9. coating machine as claimed in claim 7, which is characterized in that the capacity of the transmission storing unit in the transmission device is big
The capacity of storing unit in the storage device.
10. coating machine as described in claim 1, which is characterized in that the coating machine further include:
It is set to the sensing device in the vacuum chamber in middle crucible, and is respectively set corresponding to storage device and transmission device
Controller；
The sensing device is used to monitor the surplus of Coating Materials in crucible, and inductive signal is sent to the control of storage device
The controller of device and transmission device processed, so that the controller of storage device can be incited somebody to action according to the surplus of Coating Materials in crucible
Coating Materials is transmitted on transmission device, and then material is sent into corresponding crucible.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821601439.XU CN209338644U (en) | 2018-09-29 | 2018-09-29 | A kind of coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821601439.XU CN209338644U (en) | 2018-09-29 | 2018-09-29 | A kind of coating machine |
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| Publication Number | Publication Date |
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| CN209338644U true CN209338644U (en) | 2019-09-03 |
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ID=67746201
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111319888A (en) * | 2020-02-29 | 2020-06-23 | 上海领本智能科技有限公司 | Garbage classification method suitable for triangular garbage can and triangular intelligent garbage can |
-
2018
- 2018-09-29 CN CN201821601439.XU patent/CN209338644U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111319888A (en) * | 2020-02-29 | 2020-06-23 | 上海领本智能科技有限公司 | Garbage classification method suitable for triangular garbage can and triangular intelligent garbage can |
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Address after: Room 3001, building 6, No.7, Rongchang East Street, Daxing Economic and Technological Development Zone, Beijing 100176 Patentee after: Beijing Dingrong Photovoltaic Technology Co.,Ltd. Address before: Room 3001, building 6, No.7, Rongchang East Street, Daxing Economic and Technological Development Zone, Beijing 100176 Patentee before: BEIJING APOLLO DING RONG SOLAR TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20210401 Address after: Room 201, Building A, 1 Qianwan Road, Qianhai Shenzhen-Hong Kong Cooperation Zone, Shenzhen, Guangdong Province Patentee after: Shenzhen Zhengyue development and Construction Co.,Ltd. Address before: Room 3001, building 6, No.7, Rongchang East Street, Daxing Economic and Technological Development Zone, Beijing 100176 Patentee before: Beijing Dingrong Photovoltaic Technology Co.,Ltd. |
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Effective date of registration: 20210901 Address after: No.66210, 3rd floor, Pudong Free Trade Zone, Shanghai, China Patentee after: Shanghai zuqiang Energy Co.,Ltd. Address before: Room 201, Building A, 1 Qianwan Road, Qianhai Shenzhen-Hong Kong Cooperation Zone, Shenzhen, Guangdong Province Patentee before: Shenzhen Zhengyue development and Construction Co.,Ltd. |
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Granted publication date: 20190903 |