KR101847384B1 - A deposition material supply apparatus - Google Patents

Abstract

Disclosed is a deposition material supplying apparatus capable of repeatedly supplying a deposition material to a source. According to the present invention, the apparatus comprises: a storage unit connected to a vacuum chamber in which a source for evaporating a deposition material is disposed and having a storage module for storing the deposition material and disposed inside the vacuum chamber; an opening/closing unit connected to the vacuum chamber, selectively connected to and disconnected from the storage module to store the deposition material stored in the storage module, and having a shutter part for discharging the deposition material from the storage module; and a transfer unit connected to the vacuum chamber and transferring the deposition material discharged from the storage module to the source.

Description

[0001] The present invention relates to a deposition material supply apparatus,

The present invention relates to a deposition material supply apparatus, and more particularly, to a deposition material supply apparatus for repeatedly supplying an evaporation material to a point source.

As a result of the rapid development of information and communication technology and the expansion of the market, a flat panel display is attracting attention as a display device.

Such flat panel display devices include a liquid crystal display (LCD), a plasma display panel (PDP), and an organic light emitting diode (PDP) display.

Among them, the organic light emitting diode (OLED) display has advantages such as a fast response speed, lower power consumption than a conventional liquid crystal display (LCD), light weight, no need for a separate backlight device, And has a very good merit such as high brightness.

Organic light emitting diode displays (OLED displays) can be divided into passive PMOLEDs and active AMOLEDs depending on the driving method. In particular, AMOLED is a self-emissive display that has a faster response speed than conventional displays, has a natural color and has low power consumption. In addition, if AMOLED is applied to film, not substrate, it can implement the technology of flexible display.

The organic light emitting diode display (OLED display) is manufactured through a pattern forming process, an organic thin film deposition process, an etching process, a sealing process, and a deposition process in which an organic thin film is deposited and a substrate is subjected to a sealing process. Can be produced.

An organic electroluminescent device used in such an organic light emitting diode display (OLED display) is formed by sequentially depositing a cathode film, an organic thin film, and a cathode film on a substrate and applying a voltage between the anode and the cathode, It is a principle that emits itself.

In other words, the injected electrons and holes are recombined, and the excitation energy generated is generated by light. At this time, since the wavelength of light generated according to the amount of the dopant of the organic material can be controlled, full color can be realized.

1 is a structural view of an organic electroluminescent device.

As shown in this figure, an organic electroluminescent device includes an anode, a hole injection layer, a hole transfer layer, an emitting layer, a hole blocking layer, an electron injection layer, a cathode, and the like are stacked in this order.

In this structure, ITO (Indium Tin Oxide), which has small surface resistance and good transparency, is mainly used as the anode. The organic thin film is composed of a multilayer of a hole injecting layer, a hole transporting layer, a light emitting layer, a hole blocking layer, an electron transporting layer, and an electron injecting layer in order to increase the luminous efficiency. Organic materials used as the light emitting layer include Alq3, TPD, PBD, m-MTDATA, and TCTA. As the cathode, a LiF-Al metal film is used. And since the organic thin film is very weak to moisture and oxygen in the air, a sealing film for sealing is formed at the top to increase the lifetime of the device.

1, the organic electroluminescent device includes an anode, a cathode, and a light emitting layer interposed between the anode and the cathode. When the organic electroluminescent device is driven, holes are injected into the light emitting layer from the anode, Is injected into the light emitting layer from the cathode. The holes and electrons injected into the light emitting layer are combined in the light emitting layer to generate excitons, and the excitons emit light while transitioning from the excited state to the ground state.

Such an organic electroluminescent device can be classified into a monochromatic or full color organic electroluminescent device according to the color to be realized. The full-color organic electroluminescent device includes red (R), green (G) and And a light emitting layer patterned for each blue (B) color is provided to realize a full color.

Meanwhile, an evaporation process is required to form the organic electroluminescent device shown in FIG. 1, that is, to deposit the light emitting layer (organic material) and the electrode layer (inorganic material).

The evaporation process includes a feeding process of filling a deposition material (also referred to as a raw material or a vaporization material) into a source (evaporation source, also referred to as an evaporation source), a deposition process of depositing the evaporation material evaporated by the source onto the substrate And a deposition process.

In other words, since the evaporation process is a process that proceeds using a solid evaporation material in a vacuum chamber, there is a need for a so-called feeding process in which a source in a vacuum chamber is filled with a solid state evaporation material, do.

In the case of the conventional deposition material feeding apparatus known to date, due to the structural limitation that it is difficult to repeatedly feed the solid deposition material from the outside of the vacuum chamber to the source in the vacuum chamber, the vacuum chamber is reduced to the atmospheric pressure A method of feeding a solid deposition material to the source was used.

However, when the evaporation material such as aluminum (Al) is evaporated through the point source, the evaporation rate of the evaporation material is high, so that the number of times of reducing the vacuum chamber to the atmospheric pressure state frequently for replenishing the evaporation material becomes frequent, Thereby deteriorating the productivity of the evaporation process.

Korean Patent Publication No. 10-2007-7006395 (2007.05.29.)

SUMMARY OF THE INVENTION It is an object of the present invention to provide a deposition material supply device capable of repeatedly supplying a deposition material to a source without reducing the inside of the vacuum chamber to an atmospheric pressure state in order to supply the deposition material to the source.

According to an aspect of the present invention, there is provided a deposition apparatus comprising: a storage unit connected to a vacuum chamber in which a source for evaporating a deposition material is disposed, the storage module storing the deposition material, the storage module being disposed inside the vacuum chamber; An opening and closing unit connected to the vacuum chamber and having a shutter unit selectively connected to and disconnected from the storage module to maintain storage of the evaporation material stored in the storage module and to discharge the evaporation material from the storage module; And a delivery unit connected to the vacuum chamber, for delivering the deposition material discharged from the storage module to the source.

The storage module may be a storage-material-type storage module that presses the stored deposition material to move the deposition material.

The storage-material-type storage module includes: a lower body portion supporting the evaporation material and having a cut-out portion through which the evaporation material is discharged; And an upper body part disposed on the lower body part and connected to the lower body part in a relatively rotatable manner to form a storage space for storing the deposition material together with the lower body part.

The upper body portion may include an outer wall disposed in an edge region of the lower body portion; An inner wall disposed at a predetermined distance from the outer wall in the direction of a central region of the lower body portion, the inner wall forming the storage space together with the outer wall; And a plurality of barrier ribs connected to the outer side wall and the inner side wall and partitioning the storage space into a plurality of unit storage spaces.

The outer side wall and the inner side wall are provided in concentric circular shapes and the plurality of partition walls may be disposed at regular angular intervals with respect to the center of the upper body portion.

The storage unit may further include a rotation module for the storage unit, which is connected to the upper body and rotates the upper body.

The rotary unit for a storage unit includes: a rotary shaft for a storage unit, which passes through an outer wall of the vacuum chamber and is coupled to the upper body; A sealing unit for a storage unit which is supported on an outer wall of the vacuum chamber and is rotatably connected to the rotary shaft for the storage unit and prevents external air from entering the vacuum chamber; And a driving unit for the storage unit, which is disposed outside the vacuum chamber, and connected to the rotation shaft for the storage unit to rotate the rotation shaft for the storage unit.

The shutter portion may be provided in such a shape that the distal end portion is shaped into the cutout portion of the lower body portion.

The opening and closing unit may further include a moving module for the opening and closing unit, which is connected to the shutter unit and moves the shutter unit in a direction in which the shutter unit approaches and separates from the cutout unit.

The moving module for the opening and closing unit includes: a rotary shaft for opening / closing unit, which passes through the outer wall of the vacuum chamber and is coupled to the shutter unit; A sealing unit for an opening / closing unit, which is supported on an outer wall of the vacuum chamber and is rotatably connected to the rotary shaft for the opening / closing unit, and prevents external air from entering the vacuum chamber; And an opening and closing unit driving unit disposed outside the vacuum chamber and connected to the rotary shaft for the opening and closing unit to rotate the rotary shaft for the opening and closing unit.

The transfer unit comprises: a receiving module for receiving the deposition material discharged from the storage-material-transporting storage module; And a transfer module for transferring the deposition material contained in the receiving module to a position where the source is disposed and discharging the deposition material to the source.

Wherein the storage module includes a storage space for storing the deposition material therein and an inlet port through which the deposition material discharged from the storage material transport type storage module is inserted into the upper space, An upper feeding arm having an accommodating cup provided with a discharging outlet; And a lower feeding arm disposed below the upper feeding arm and relatively rotatably connected to the upper feeding arm to open and close the outlet by relative rotation.

The moving and discharging module includes an upper arm rotating shaft passing through an outer wall of the vacuum chamber and coupled to the upper feeding arm; An upper arm sealing part which is supported on an outer wall of the vacuum chamber and is rotatably connected to the rotary shaft for the upper arm and prevents external air from flowing into the vacuum chamber; An upper arm drive unit disposed outside the vacuum chamber and connected to the rotary shaft for the upper arm to rotate the rotary shaft for the upper arm; A lower arm rotary shaft connected to the lower feeding arm through the inside of the rotary shaft for the upper arm and relatively rotatably connected to the rotary shaft for the upper arm; A lower arm sealing part which is supported by the driving part for the upper arm and is rotatably connected to the rotary shaft for the lower arm and prevents external air from flowing into the vacuum chamber; And a lower arm driving unit which is disposed outside the vacuum chamber and connected to the lower arm rotary shaft to rotate the rotary shaft for the lower arm.

The driving unit for the upper arm includes a rotating block coupled to the rotating shaft for the upper arm and having a driven timing pulley mounted thereon; A timing belt coupled to the driven timing pulley; And an upper arm servo motor connected to the main timing pulley to which the timing belt is connected and rotating the main timing pulley.

The lower arm driving unit may include a lower arm rotary cylinder connected to the lower arm rotary shaft.

Embodiments of the present invention are directed to an evaporation type evaporation type evaporation type evaporation type evaporation type evaporation type evaporation type evaporation type evaporation type evaporation type evaporation type evaporation type evaporation type evaporation type evaporation type evaporation type evaporation type evaporation type evaporation type evaporation type evaporation type refill To the source, it is possible to repeatedly supply the deposition material to the source without reducing the inside of the vacuum chamber to the atmospheric pressure in order to supply the deposition material to the source.

1 is a structural view of an organic electroluminescent device.
2 is a view showing a deposition material supply apparatus according to an embodiment of the present invention.
3 is a plan view of Fig.
FIG. 4 is a view showing the storage unit of FIG. 2. FIG.
5 is a plan view of the upper body portion of Fig.
6 is a plan view of the lower body portion of FIG.
Fig. 7 is a view showing the opening and closing unit of Fig. 2. Fig.
8 is a cross-sectional view of the delivery unit of Fig.
Figure 9 is a top view of the receiving module of Figure 8;
10 and 11 are operational state diagrams of the deposition material supply apparatus of FIG. 2. FIG.

In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.

Hereinafter, the present invention will be described in detail with reference to the preferred embodiments of the present invention with reference to the accompanying drawings. In the following description, well-known functions or constructions are not described in order to avoid unnecessary obscuration of the present invention.

Meanwhile, the substrate described below may be a glass substrate for an organic light emitting diode display (OLED display).

FIG. 2 is a view showing a deposition material supply apparatus according to an embodiment of the present invention, and FIG. 3 is a plan view of FIG. 2. FIG. Fig. 4 is a view showing the storage unit of Fig. 2, Fig. 5 is a plan view of the upper body of Fig. 4, Fig. 6 is a plan view of the lower body of Fig. Fig. 8 is a cross-sectional view showing the delivery unit of Fig. 2, Fig. 9 is a plan view showing the receiving module of Fig. 8, and Figs. 10 and 11 are views showing the operating state of the evaporation material supply device of Fig. to be.

In FIGS. 2 and 3, only a part (lower wall) of the outer wall of the vacuum chamber 110 is shown for convenience of explanation. The deposition material to be described below is provided in the form of fine particles such as pellets. In FIGS. 2 to 9, the deposition material is not shown. In FIGS. 10 and 11, Color.

2 to 11, the deposition material supply apparatus according to the present embodiment includes a storage unit 120 in which a storage module 121 storing a deposition material is disposed inside a vacuum chamber 110, An opening and closing unit 130 having a shutter 131 for discharging the deposition material from the storage module 121 and a transfer unit 140 for transferring the deposition material discharged from the storage module 121 to the source 111 .

The evaporation material supply device according to the present embodiment stores the evaporation material in the vacuum chamber 110 and supplies the evaporation material stored in the storage module 121 to the source (not shown) through the opening / closing unit 130 and the transfer unit 140 111), it is possible to repeatedly supply the evaporation material to the source 111 without reducing the inside of the vacuum chamber 110 to the atmospheric pressure in order to supply the evaporation material to the source 111, The productivity of the deposition process can be increased.

The vacuum chamber 110 is a box-like structure, and a deposition process for a substrate (not shown) is performed inside the vacuum chamber 110. During the deposition process, the interior of the vacuum chamber 110 is maintained at a predetermined vacuum pressure. Therefore, the vacuum chamber 110 is provided with means for changing the inside of the vacuum chamber 110 into a vacuum atmosphere, and a detailed description thereof will be omitted for the sake of convenience.

An entrance door (not shown) is provided on a side wall of the vacuum chamber 110. The entrance door (not shown) is used as a passage for maintenance in the vacuum chamber 110.

A source 111 is disposed inside the vacuum chamber 110. The source 111 is supported on the lower wall of the vacuum chamber 110. The source 111 includes a crucible portion 112 having a loading space (not shown) in which an evaporation material is loaded and an opening 112a communicating with the loading space in an upper portion of the furnace 112, And a heater unit (not shown) for evaporating the evaporation material loaded on the crucible unit 112 by heating.

When the evaporation material is introduced into the loading space of the crucible 112 through the opening 112a, the evaporation material accumulated in the loading space is heated by the heater and evaporated, and the evaporated evaporation material is discharged through the opening 112a Is deposited on the substrate disposed in the upper region of the source (111).

In this embodiment, the source 111 is provided with two point sources, and the scope of the present invention is not limited thereto, and the sources 111 of the present embodiment may be provided in various numbers.

On the other hand, the storage unit 120 is connected to the vacuum chamber 110. 2 to 6, the storage unit 120 includes a storage module 121 disposed inside the vacuum chamber 110 and storing a deposition material, and a storage module 121 connected to the storage module 121 And a rotation module 125 for a storage unit that moves the deposition material stored in the storage module 121. [

The storage module 121 is disposed inside the vacuum chamber 110 and stores the deposition material. In this embodiment, the storage module 121 comprises a storage-type storage module 121 for moving the deposition material by pressurizing the stored deposition material. Movement of the deposition material by the storage-material-type storage module 121 is performed to repeatedly discharge a part of the stored deposition material from the storage-material-type storage module 121 to the outside.

The storage type mobile storage module 121 includes a lower body portion 122 having a cutout S for supporting a deposition material and discharging a deposition material therefrom and a lower body portion 122 disposed at an upper portion of the lower body portion 122, And an upper body part 123 connected to the lower body part 122 so as to be rotatable relative to the lower body part 122 and forming a storage space G in which the deposition material is stored together with the lower body part 122.

In the present embodiment, the lower body portion 122 is provided in a disc shape as shown in detail in FIG. 6, and contacts the deposition material to support the deposition material. 6, the lower body portion 122 is provided with a cut-out portion S through which the evaporation material is discharged. A through-hole 122a for a storage unit, through which a rotary shaft 126 for a storage unit, which will be described later, passes, is provided in a central region of the lower body 122.

The upper body portion 123 is disposed on the upper portion of the lower body portion 122 and is supported on the lower body portion 122. The upper body part 123 is rotatably connected to the lower body part 122 to form a storage space G in which the deposition material is stored together with the lower body part 122.

In this embodiment, the upper body part 123 is provided in a roulette shape as shown in detail in FIGS. The upper body portion 123 includes an outer wall 123a disposed at an edge region of the lower body portion 122 and a second body portion 122 disposed at a predetermined distance in the direction of the central region of the lower body portion 122 from the outer wall 123a. An inner wall 123b forming the storage space G together with the outer wall 123a and a plurality of unit storage spaces G connected to the outer and inner walls 123a and 123b, And a plurality of partition walls 123c partitioning the partition walls.

The outer side wall 123a is provided in a circular ring-like shape, and is disposed in an edge area of the lower body part 122. [

The inner side wall 123b is provided in a concentric circular ring shape having the same center point as the outer side wall 123a. The inner side wall 123b is provided in a circular ring shape having a smaller diameter than the outer side wall 123a and is disposed at a predetermined distance in the direction of the central region of the lower body portion 122 from the outer side wall 123a.

The partition 123c is connected to the outer wall 123a and the inner wall 123b and divides the storage space G into a plurality of unit storage spaces G. [

In the present embodiment, the partition walls 123c are provided in a plurality of locations and are disposed at regular angular intervals with respect to the center of the upper body portion 123 (i.e., the center points of the outer wall 123a and the inner wall 123b).

Meanwhile, the rotation module 125 for the storage unit is connected to the upper body part 123 and rotates the upper body part 123, as shown in detail in FIG. The rotating module 125 for the storage unit rotates the upper body part 123 relative to the lower body part 122 and rotates the upper body part 123 relative to the lower body part 122, To move the evaporation material.

The rotation module 125 for the storage unit of the present embodiment includes a rotary shaft 126 for a storage unit that penetrates the lower wall of the vacuum chamber 110 and is coupled to the upper body portion 123, A sealing unit 127 for a storage unit which is supported by the vacuum chamber 110 and is rotatably connected to the rotary shaft 126 for the storage unit and prevents external air from flowing into the vacuum chamber 110, And a storage unit driving unit 128 connected to the storage unit rotating shaft 126 for rotating the storage unit rotating shaft 126.

The rotating shaft 126 for the storage unit passes through the lower wall of the vacuum chamber 110. The rotation shaft 126 for the storage unit is coupled to the upper body part 123 to rotate the upper body part 123.

The sealing portion 127 for the storage unit is supported on the lower wall of the vacuum chamber 110. The storage unit rotary shaft 126 is rotatably connected to the sealing portion 127 for the storage unit. The sealing portion 127 for the storage unit of the present embodiment is disposed at the lower wall portion of the vacuum chamber 110 through which the rotation shaft 126 for the storage unit penetrates to prevent the outside air from flowing into the vacuum chamber 110 .

The sealing portion 127 for the storage unit includes a sealing body 127a for the storage unit which is coupled to the lower wall of the vacuum chamber 110 and to which the rotary shaft 126 for the storage unit is rotatably connected, 126 and a magnetic fluid (not shown) disposed between the inner circumferential surface of the sealing body 127a for the storage unit.

Here, the magnetic fluid (not shown) is a fluid in which a magnetic powder is stably dispersed in a liquid in a colloid state and then a surfactant is added so as to prevent precipitation or aggregation. Such a magnetic fluid (not shown) And the rotation shaft 126 for the storage unit, thereby preventing the outside air from flowing into the vacuum chamber 110 of the vacuum atmosphere by the rotation of the rotation shaft 126 for the storage unit.

In the present embodiment, a magnetic fluid seal is used as the sealing portion 127 for the storage unit. The scope of the present invention is not limited thereto, and various sealing members for maintaining the degree of vacuum may be used for the storage unit It can be used as the sealing portion 127.

The driving unit 128 for the storage unit is disposed outside the vacuum chamber 110. The drive unit 128 for the storage unit is connected to the rotation shaft 126 for the storage unit to rotate the rotation shaft 126 for the storage unit. In this embodiment, the drive unit 128 for the storage unit includes a servomotor 128a for the storage unit connected to the rotation shaft 126 for the storage unit. The driving unit 128 for the storage unit according to the present embodiment provides rotational force to the upper body part 123 through the servo motor 128a for the storage unit so that the rotation angle of the upper body part 123 is precisely There is an advantage to be able to control.

On the other hand, the opening / closing unit 130 is connected to the vacuum chamber 110. The opening and closing unit 130 is selectively connected to and disconnected from the storage module 121 to maintain the storage of the evaporation material stored in the storage module 121, as shown in detail in FIGS. 2, 3 and 7 A shutter unit 131 for discharging the evaporation material from the storage module 121 and a shutter unit 131 connected to the shutter unit 131 for moving the shutter unit 131 in a direction in which the shutter unit 131 is moved toward and away from the cut- And a movement module 132.

In the present embodiment, the tip end portion of the shutter 131 is formed into a shape that is shaped to the cut-out portion S of the lower body portion 122, as shown in detail in Fig.

Therefore, in the state in which the front end portion of the shutter portion 131 is connected to the lower body portion 122 (i.e., the front end portion of the shutter portion 131 is shaped into the cut-out portion S of the lower body portion 122) The deposition material stored in the module 121 can not be discharged through the cut portion S of the lower body portion 122. That is, when the shutter 131 is connected to the lower body 122, the deposition of the deposition material is maintained.

On the other hand, in a state in which the distal end of the shutter 131 is disconnected from the lower body 122 (i.e., the distal end of the shutter 131 is spaced apart from the cutout S of the lower body 122) The deposition material stored in the storage module 121 is discharged through the cut-out portion S of the lower body portion 122.

As described above, the deposition material supplying apparatus according to the present embodiment includes the shutter unit 131 that is shaped to the cutout S of the lower body 122 and closes the cutout S, There is an advantage that the deposition material can be stored in the entire unit storage space G of the module 121. [

In this embodiment, the shutter 131 is relatively rotated with respect to the lower body 122 and connected to and disconnected from the lower body 122. The rotation of the shutter 131 is transmitted to the movement module 132 ).

The moving module 132 for the opening and closing unit is connected to the shutter 131 and rotates the distal end of the shutter 131 in the direction in which it approaches and separates from the incision S. 7, the moving module 132 for the opening and closing unit includes a rotation shaft 133 for opening and closing unit which is connected to the shutter 131 through the lower wall of the vacuum chamber 110, A sealing part 134 for an opening and closing unit which is supported on a lower wall of the vacuum chamber 110 and is rotatably connected to the rotary shaft 133 for the opening and closing unit and prevents external air from flowing into the vacuum chamber 110, And an opening and closing unit driving unit 135 connected to the rotating shaft 133 for the opening and closing unit and rotating the rotating shaft 133 for the opening and closing unit.

The rotary shaft 133 for the opening and closing unit passes through the lower wall of the vacuum chamber 110. The rotation shaft 133 for the opening and closing unit is coupled to the shutter unit 131 to rotate the shutter unit 131.

The sealing portion 134 for the opening and closing unit is supported on the lower wall of the vacuum chamber 110. [ The rotation shaft 133 for the opening and closing unit is rotatably connected to the sealing portion 134 for the opening and closing unit. The sealing portion 134 for the opening and closing unit of the present embodiment is disposed at the lower wall portion of the vacuum chamber 110 through which the rotary shaft 133 for opening and closing unit penetrates to prevent the outside air from being introduced into the vacuum chamber 110 .

The sealing portion 134 for the opening and closing unit includes a sealing body 134a for the opening and closing unit which is coupled to the lower wall of the vacuum chamber 110 and in which the rotary shaft 133 for the opening and closing unit is rotatably connected, 133 and a magnetic fluid (not shown) disposed between the inner peripheral surface of the sealing body 134a for the opening and closing unit.

The magnetic fluid (not shown) is a fluid in which a magnetic powder is stably dispersed in a liquid in a colloid shape and then a surfactant is added to prevent precipitation or aggregation. The magnetic fluid (not shown) And the rotary shaft 133 for the opening and closing unit, thereby preventing the outside air from flowing into the vacuum chamber 110 in the vacuum atmosphere by the rotation of the rotary shaft 133 for opening / closing unit.

In the present embodiment, a magnetic fluid seal is used as the sealing portion 134 for the opening and closing unit, and thus the scope of the present invention is not limited. Various sealing members for maintaining the degree of vacuum are used for the opening / Can be used as the sealing portion 134.

The driving unit 135 for the opening / closing unit is disposed outside the vacuum chamber 110. The drive unit 135 for the open / close unit is connected to the rotation shaft 133 for the open / close unit to rotate the rotation shaft 133 for the open / close unit. In this embodiment, the drive unit 135 for the opening and closing unit includes a rotary cylinder 135a for the opening and closing unit connected to the rotary shaft 133 for the opening and closing unit. Here, in the present embodiment, the opening / closing unit drive unit 135 provides the rotational force to the shutter unit 131 through the rotary cylinder 135a for the opening / closing unit, thereby reducing the cost of parts because an expensive servo motor is not used There is an advantage that the rotation of the shutter 131 can be easily controlled.

On the other hand, the transfer unit 140 is connected to the vacuum chamber 110. The transfer unit 140 transfers the deposition material discharged from the storage module 121 to the source 111. [ In this embodiment, as shown in detail in FIGS. 8 to 9, the transfer unit 140 includes a receiving module 150 for receiving the deposited material discharged from the storage-and-moving type storage module 121, And a moving and discharging module 160 for moving the deposition material accommodated in the substrate 111 to a position where the source 111 is disposed and discharging the deposition material to the source 111.

The receiving module 150 receives the deposition material discharged from the storage-material-type storage module 121. The receiving module 150 includes a receiving space 153a for receiving the deposition material therein and an inlet 153b for receiving the deposition material discharged from the storage material moving type storage module 121 in the upper area, An upper feeding arm 151 having an accommodating cup 153 provided with a discharge port 153c through which a deposition material accommodated in the accommodating space 153a is discharged and an upper feeding arm 151 disposed below the upper feeding arm 151, And a lower feeding arm 152 which is rotatably connected to the lower feeding arm 151 so as to be relatively rotatable and which opens and closes the discharge opening 153c by rotation.

The upper feeding arm 151 is coupled with a receiving cup 153 for receiving the evaporated material discharged from the storage module 121. As shown in FIG. 9, a receiving space 153a in which a deposition material is accommodated is formed in the receiving cup 153. In the upper region of the receiving cup 153, an inlet 153b through which the evaporated material discharged from the storage-and-moving type storage module 121 is inserted is provided. In addition, a discharge port 153c through which the deposition material accommodated in the accommodation space 153a is discharged is provided in a lower region of the accommodation cup 153. [

The lower feeding arm 152 is disposed below the upper feeding arm 151. The lower feeding arm 152 is relatively rotatably connected to the upper feeding arm 151 to open and close the discharge port 153c of the receiving cup 153 by rotation.

The moving and discharging module 160 moves the deposition material accommodated in the accommodating module 150 to a position where the source 111 is disposed. In addition, the moving and discharging module 160 moves the evaporation material to a position where the source 111 is disposed, drops the evaporation material contained in the accommodation module 150, and inserts the evaporation material into the source 111.

As shown in detail in FIG. 8, the moving and discharging module 160 includes an upper arm rotating shaft 161 penetrating the lower wall of the vacuum chamber 110 and coupled to the upper feeding arm 151, An upper arm sealing part 162 supported on a lower wall of the vacuum chamber 110 and rotatably connected to the rotary shaft 161 for the upper arm to prevent external air from entering the vacuum chamber 110, An upper arm drive unit 163 which is disposed outside the upper arm and is connected to the upper arm rotation shaft 161 to rotate the upper arm rotation shaft 161, A lower arm rotating shaft 164 coupled to the upper arm rotating shaft 161 so as to be rotatable relative to the upper arm rotating shaft 161 and a lower arm rotating shaft 164 rotatably connected to the lower arm driving shaft 163, And external air flows into the vacuum chamber 110 And a lower arm driving part 166 connected to the lower arm rotating shaft 164 and rotating the lower arm rotating shaft 164 is disposed outside the vacuum chamber 110. [ .

The rotary shaft 161 for the upper arm passes through the lower wall of the vacuum chamber 110. The upper arm rotary shaft 161 is coupled to the upper feeding arm 151 to rotate the upper feeding arm 151.

The upper arm sealing portion 162 is supported on the lower wall of the vacuum chamber 110. The rotary shaft 161 for the upper arm is rotatably connected to the sealing portion 162 for the upper arm. The upper arm sealing portion 162 of the present embodiment is disposed at the lower wall portion of the vacuum chamber 110 through which the rotation shaft 161 for the upper arm penetrates to prevent the outside air from flowing into the vacuum chamber 110 .

The upper arm sealing portion 162 includes an upper arm sealing body 162a which is coupled to the lower wall of the vacuum chamber 110 and is rotatably connected to the upper arm rotation shaft 161, And a magnetic fluid (not shown) disposed between the outer circumferential surface of the upper arm 161 and the inner circumferential surface of the sealing body 162a for the upper arm.

The magnetic fluid (not shown) is a fluid in which a magnetic powder is stably dispersed in a colloid state in a liquid and then a surfactant is added to prevent precipitation or aggregation. The magnetic fluid (not shown) And the upper arm rotation shaft 161 to prevent external air from flowing into the vacuum chamber 110 in a vacuum atmosphere by rotation of the rotary shaft 161 for the upper arm.

In the present embodiment, a magnetic fluid seal is used for the upper arm sealing portion 162, and the scope of the present invention is not limited thereto, and various sealing members for maintaining the degree of vacuum may be used for the upper arm Can be used as the sealing portion 162.

The upper arm drive unit 163 is disposed outside the vacuum chamber 110. The upper arm drive unit 163 is connected to the upper arm rotation shaft 161 to rotate the upper arm rotation shaft 161. [

The upper arm drive unit 163 includes a rotary block 163a coupled to the upper arm rotary shaft 161 and equipped with a driven timing pulley 163d and a timing belt 163b connected to the driven timing pulley 163d, And an upper arm servomotor 163c connected to the main timing pulley 163e to which the timing belt 163b is connected and for rotating the main timing pulley 163e.

The upper arm drive unit 163 having such a structure transmits the rotation force provided by the servo arm 163c for the upper arm to the rotation block 163a through the timing belt 163b to rotate the rotation block 163a. The upper arm rotary shaft 161 coupled to the rotary block 163a is rotated in accordance with the rotation of the rotary block 163a so that the upper feeding arm 151 coupled to the upper arm rotary shaft 161 is rotated.

The upper arm drive unit 163 according to this embodiment is connected to the upper feeding arm 151 through the upper arm servo motor 163c, the timing belt 163b, the driven timing pulley 163d and the main timing pulley 163e. So that the rotation angle of the upper feeding arm 151 can be precisely controlled.

The lower arm rotary shaft 164 is coupled to the lower feeding arm 152 through the inside of the rotary shaft 161 for the upper arm as shown in FIG. The lower arm rotary shaft 164 is connected to the upper arm rotary shaft 161 in a relatively rotatable manner.

The lower arm sealing portion 165 is supported on the rotation block 163a. The rotary shaft 164 for the lower arm is rotatably connected to the sealing portion 165 for the lower arm. The sealing portion 165 for the lower arm of the present embodiment prevents the outside air from entering the inside of the vacuum chamber 110.

The lower arm sealing part 165 includes a lower arm sealing body (not shown) coupled to the rotating block 163a and rotatably connected to the lower arm rotating shaft 164, a lower arm rotating shaft 164 And a magnetic fluid (not shown) disposed between the outer circumferential surface of the lower arm and the inner circumferential surface of the sealing body (not shown) for the lower arm.

Here, a magnetic fluid (not shown) is a fluid in which a magnetic powder is stably dispersed in a liquid in a colloid shape and then a surfactant is added so that precipitation or aggregation does not occur. Such a magnetic fluid (not shown) And the rotary shaft 164 for the lower arm to prevent the outside air from flowing into the vacuum chamber 110 in the vacuum atmosphere by the rotation of the rotary shaft 164 for the lower arm. That is, during the rotation process of the lower arm rotary shaft 164, the external air is prevented from flowing into the vacuum chamber 110 through the connection portion between the lower arm rotary shaft 164 and the upper arm rotary shaft 161 do.

In this embodiment, a magnetic fluid seal is used for the lower arm seal 165, and the scope of the present invention is not limited thereto, and various sealing members for maintaining the degree of vacuum may be used for the lower arm Can be used as the sealing portion 165.

The lower arm driving portion 166 is disposed outside the vacuum chamber 110. The lower arm driving part 166 is connected to the lower arm rotating shaft 164 to rotate the lower arm rotating shaft 164. In this embodiment, the lower arm driving unit 166 includes a lower arm rotary cylinder 166a connected to the lower arm rotating shaft 164.

Here, in the present embodiment, the lower arm driving unit 166 provides a turning force to the lower feeding arm 152 through the lower arm rotary cylinder 166a, thereby reducing the component cost without using an expensive servo motor There is an advantage that the lower feeding arm 152 can be simply rotated.

Hereinafter, the operation of the deposition material supply apparatus according to the present embodiment will be described with reference to FIGS. 2 to 11 with reference to FIGS. 10 to 11. FIG.

First, as shown in FIG. 10 (a), the shutter 131 and the lower body 122 are connected. At this time, the tip of the shutter 131 is shaped to the cutout S of the lower body 122 to prevent the deposition material stored in the unit storage space G from being discharged through the cutout S. In this state, the accommodating module 150 is disposed in the lower end region of the shutter 131 in the receiving cup 153.

Thereafter, as shown in FIG. 10 (b), the shutter 131 is disconnected from the lower body 122. That is, the shutter 131 is spaced apart from the cutout S of the lower body 122, the deposition material supported on the tip of the shutter 131 falls through the cutout S, Respectively.

10 (c), the shutter 131 rotates in the direction of the lower body 122, so that the shutter 131 and the lower body 122 are connected. At this time, the front end of the shutter 131 is shaped into the cutout S of the lower body 122.

The upper feeding arm 151 and the lower feeding arm 152 are rotated together as shown in FIG. 11 (a) so that the receiving cup 153 is moved to the side of the source 111 Is positioned in the upper region.

Thereafter, as shown in FIG. 11 (b), the lower feeding arm 152 is rotated relative to the upper feeding arm 151 to discharge the deposition material contained in the receiving cup 153 from the receiving cup 153. The deposition material discharged from the receiving cup 153 is put into the source 111 located below.

The upper feeding arm 151 and the lower feeding arm 152 are rotated together as shown in FIG. 11 (c) so that the receiving cup 153 is disposed in the lower region of the front end portion of the shutter 131. At this time, the upper feeding arm 151 and the lower feeding arm 152 are overlapped with each other, so that the discharge port 153c of the receiving cup 153 is closed by the lower feeding arm 152.

The upper body portion 123 of the storage-type storage module 121 is rotated relative to the lower body portion 122 before or after rotation of the upper feeding arm 151 and the lower feeding arm 152, The deposition material is positioned on the upper surface of the shutter unit 131 shaped to the cutout S as shown in FIG. 11 (c).

Thereafter, the transfer unit 140, which has received the deposition material again, transfers the deposition material to the other source 111. Through the repetition of the above-described operation, the deposition material supply apparatus according to the present embodiment can repeatedly supply the deposition material stored in the storage module 121 to the source 111. [

As described above, the deposition material supplying apparatus according to the present embodiment includes a storage unit 120 in which a storage module 121 for storing a deposition material is disposed inside the vacuum chamber 110, and a storage unit 120 for storing the deposition material stored in the storage module 121 An opening and closing unit 130 having a shutter 131 for discharging the deposition material and a transfer unit 140 for transferring the deposition material discharged from the storage module 121 to the source 111, It is possible to repeatedly supply the evaporation material to the source 111 without reducing the inside of the vacuum chamber 110 to the atmospheric pressure.

Although the present invention has been described in detail with reference to the above drawings, the scope of the scope of the present invention is not limited to the above-described drawings and description.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

110: vacuum chamber 111: source
112: crucible part 112a: opening
120: storage unit 121: storage module
122: lower body part 122a: through-hole for storage unit
123: upper body portion 123a:
123b: inner side wall 123c: partition wall
125: Rotation module for storage unit 126: Rotation shaft for storage unit
127: Sealing unit for storage unit 127a: Sealing body for storage unit
128: Driving unit for storage unit 128a: Servo motor for storage unit
130: opening / closing unit 131:
132: Moving module for opening / closing unit 133: Rotation shaft for opening / closing unit
134: sealing portion for opening and closing unit 134a: sealing body for opening and closing unit
135: driving unit for switching unit 135a: rotary cylinder for switching unit
140: transmitting unit 150: receiving module
151: upper feeding arm 152: lower feeding arm
153: receiving cup 153a: receiving space
153b: inlet 153c: outlet
160: Moving and discharging module 161: Rotation shaft for the upper arm
162: Seal for upper arm 162a: Sealing body for upper arm
163: driving part for the upper arm 163a: rotating block
163b: Timing belt 163c: Servo motor for the upper arm
163d: a driven timing pulley 163e: a driven timing pulley
164: rotary shaft for lower arm 165: sealing member for lower arm
166: Lower arm drive unit 166a: Lower arm rotary cylinder
S: incision G: storage space

Claims (15)

A storage unit connected to a vacuum chamber in which a source for evaporating the evaporation material is disposed, and a storage module for storing the evaporation material, the storage module being disposed inside the vacuum chamber;
An opening / closing unit connected to the vacuum chamber; And
And a transfer unit connected to the vacuum chamber, for transferring the deposition material discharged from the storage module to the source,
Wherein the storage module comprises:
And a storage-material-transfer-type storage module for transferring the deposition material by pressurizing the stored deposition material,
The storage-type storage module includes:
A lower body supporting the deposition material and having a cut-out portion through which the deposition material is discharged; And
And an upper body portion disposed at an upper portion of the lower body portion and relatively rotatably connected to the lower body portion to form a storage space for storing the deposition material together with the lower body portion,
The opening /
The storage module being selectively connected to and disconnected from the storage module to store the deposition material stored in the storage module, to discharge the deposition material from the storage module, and to have a front end portion shaped into the cutout portion of the lower body portion A shutter unit provided; And
And a moving module for the opening / closing unit, which is connected to the shutter unit and moves the shutter unit in a direction in which the shutter unit approaches and separates from the cutout unit,
The moving module for the opening /
A rotating shaft for opening / closing unit passing through the outer wall of the vacuum chamber and coupled to the shutter unit;
A sealing unit for an opening / closing unit, which is supported on an outer wall of the vacuum chamber and is rotatably connected to the rotary shaft for the opening / closing unit, and prevents external air from entering the vacuum chamber; And
And a driving unit for an opening and closing unit disposed outside the vacuum chamber and connected to the rotary shaft for the opening and closing unit to rotate the rotary shaft for the opening and closing unit. delete delete The method according to claim 1,
The upper body portion,
An outer side wall disposed in an edge region of the lower body portion;
An inner wall disposed at a predetermined distance from the outer wall in the direction of a central region of the lower body portion, the inner wall forming the storage space together with the outer wall; And
And a plurality of barrier ribs connected to the outer side wall and the inner side wall and partitioning the storage space into a plurality of unit storage spaces. 5. The method of claim 4,
Wherein the outer side wall and the inner side wall are provided in a concentric circular shape,
Wherein the plurality of partition walls are disposed at equal angular intervals with respect to a center of the upper body portion. The method according to claim 1,
Wherein the storage unit comprises:
Further comprising a rotation module for the storage unit connected to the upper body part and rotating the upper body part. The method according to claim 6,
Wherein the rotation module for the storage unit comprises:
A rotating shaft for a storage unit passing through the outer wall of the vacuum chamber and coupled to the upper body portion;
A sealing unit for a storage unit which is supported on an outer wall of the vacuum chamber and is rotatably connected to the rotary shaft for the storage unit and prevents external air from entering the vacuum chamber; And
And a driving unit for the storage unit, which is disposed outside the vacuum chamber, and connected to the rotation shaft for the storage unit to rotate the rotation shaft for the storage unit. delete delete delete The method according to claim 1,
The transmission unit includes:
A receiving module for receiving the deposition material discharged from the storage-material-transporting storage module; And
And a moving and discharging module for moving the deposition material accommodated in the accommodating module to a position where the source is disposed and discharging the evaporation material to the source. 12. The method of claim 11,
The receiving module includes:
A storage space for storing the deposition material therein is formed in the upper region, a discharge port through which the deposition material discharged from the storage-and-moving type storage module is inserted into the upper region, and a discharge port through which the deposition material stored in the storage space is discharged An upper feeding arm having an accommodating cup provided therein; And
And a lower feeding arm disposed at a lower portion of the upper feeding arm and relatively rotatably connected to the upper feeding arm to open and close the outlet by relative rotation. 13. The method of claim 12,
Wherein the moving /
An upper arm rotating shaft passing through an outer wall of the vacuum chamber and coupled to the upper feeding arm;
An upper arm sealing part which is supported on an outer wall of the vacuum chamber and is rotatably connected to the rotary shaft for the upper arm and prevents external air from flowing into the vacuum chamber;
An upper arm drive unit disposed outside the vacuum chamber and connected to the rotary shaft for the upper arm to rotate the rotary shaft for the upper arm;
A lower arm rotary shaft connected to the lower feeding arm through the inside of the rotary shaft for the upper arm and relatively rotatably connected to the rotary shaft for the upper arm;
A lower arm sealing part which is supported by the driving part for the upper arm and is rotatably connected to the rotary shaft for the lower arm and prevents external air from flowing into the vacuum chamber; And
And a lower arm driving unit which is disposed outside the vacuum chamber and connected to the rotary shaft for the lower arm to rotate the rotary shaft for the lower arm. 14. The method of claim 13,
The driving unit for the upper arm includes:
A rotary block coupled to the rotary shaft for the upper arm and having a driven timing pulley;
A timing belt connected to said driven timing pulley; And
And an upper arm servomotor connected to the main timing pulley to which the timing belt is connected and rotating the main timing pulley. 14. The method of claim 13,
And the lower arm driving unit includes a rotary cylinder for the lower arm connected to the rotary shaft for the lower arm.

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