CN202120988U - Substrate conveying equipment for forming passivation layer on OLED (Organic Light Emitting Diode) substrate - Google Patents
Substrate conveying equipment for forming passivation layer on OLED (Organic Light Emitting Diode) substrate Download PDFInfo
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- CN202120988U CN202120988U CN2011202484275U CN201120248427U CN202120988U CN 202120988 U CN202120988 U CN 202120988U CN 2011202484275 U CN2011202484275 U CN 2011202484275U CN 201120248427 U CN201120248427 U CN 201120248427U CN 202120988 U CN202120988 U CN 202120988U
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- oled
- passivation layer
- vapor deposition
- conveying
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Abstract
The utility model discloses substrate conveying equipment for forming a passivation layer on an OLED (Organic Light Emitting Diode) substrate, which is used for conveying the OLED substrate to a chemical vapor deposition device or a sputtering coating device to form a passivation layer. The conveying equipment comprises a conveying cavity internally provided with a conveying mechanism; the conveying cavity abuts against the chemical vapor deposition device or the sputtering coating device through an openable/closable cabin door; the conveying mechanism in the conveying cavity is provided with a substrate fixing part which can be turned up and down; the OLED substrate is fixed on the substrate fixing part, and then the substrate fixing part is controlled to turn by 180 degrees while the OLED substrate also turns by 180 degrees along with the substrate fixing part; the turned OLED substrate is transferred to a CVD (Chemical Vapor Deposition) cabin or a sputtering coating cabin, so that the passivation layer is formed on the surface of the OLED substrate through the CVD or sputtering coating process. Therefore, with the adoption of the substrate conveying equipment for forming the passivation layer on the OLED substrate, the whole conveying process is fully automatic without needing a glove box, and the production efficiency is improved.
Description
Technical field
The utility model includes employed equipment in the production of OLED (OLED), is specifically related to be used for oled substrate is transported to chemical vapor deposition device (CVD) or sputtering unit (sputter) and then forms the apparatus for transporting substrate of passivation layer (passivation layer).
Background technology
In the OLED production technology, the vapor deposition operation is the operation of each functional layer such as vapor deposition hole transmission layer, luminescent layer, electron transfer layer, negative electrode, and packaging process is moisture and the thermalization of oxygen and the operation that the shortening in life-span is implemented that prevents owing to OLED.One packaging process is after sticking drier on the glass cap (glass cap), to utilize the UV adhesive to adhere on the oled substrate again stainless steel metal cover plate (cap) or encapsulation.But, developing the new technology that encapsulates through direct vapor deposition passivation layer (passivation layer) on the vapor deposition face recently gradually.This encapsulation technology is lower than existing encapsulation technology cost, and encapsulation back OLED thinner, gentlier, more soft.
But, form passivation layer and need use chemical vapor deposition device (CVD) or sputtering unit (Sputter).So, inevitably need on existing organic matter vaporization plating machine, dock chemical vapor deposition device or sputtering unit.Existing organic matter vaporization plating machine be through with the heating of the organic substance of bottom upwards gasification back vapor deposition to substrate, so during vapor deposition substrate in the above, the vapor deposition face is then down; Chemical vapor deposition device or sputtering unit then require substrate below, and vapor deposition is towards last.So, must at first realize 180 degree upsets of substrate for realizing organic matter vaporization plating machine and docking of chemical vapor deposition device or sputtering unit.
As shown in Figure 1, present way is outside the opened and closed hatch door of the transmission cavity of organic matter vaporization plating machine (Transfer chamber), to dock glove box (Glove Chamber), and then through glove box butt joint chemical vapor deposition device or sputtering unit.Above-mentioned way is after utilizing the interior connecting gear of transmission cavity that oled substrate is delivered to glove box, and again through artificial substrate overturn, the substrate after will overturning is again at last delivered to and learned vapor deposition apparatus or sputtering unit.Yet, set up the chamber expense that glove box not only will be paid great number, and will increase the software that matees with chamber, but also will rely on manual operation.
The utility model content
The technical problem that the utility model will solve provides a kind of apparatus for transporting substrate for formation passivation layer on oled substrate that glove box can turn over oled substrate again automatically of neither setting up.
Be provided with the transmission cavity of connecting gear in this apparatus for transporting substrate comprises, this transmission cavity docks with chemical vapor deposition device or sputtering unit through opening and closing hatch door, and the connecting gear in this transmission cavity has the substrate fixed part that can spin upside down.
Concrete, but said connecting gear adopts the manipulator of multiaxial motion, and the front end of this manipulator is the substrate fixed part.
Concrete, this substrate fixed part has a vacuum cup that is installed in the base on the driving shaft and is located at this susceptor surface, and said vacuum cup is connected with air pump through pipeline, and said driving shaft is connected with motor.
After being fixed on oled substrate on the substrate fixed part, the control basal plate fixed part turns over turnback again, and oled substrate also will turn over turnback along with the substrate fixed part together; Afterwards, the hatch door of the oled substrate that has overturn after opening is transferred to CVD cabin or sputter cabin, thereby forms passivation layer on the oled substrate surface through CVD or sputtering process.Therefore, after the technology of employing the utility model, need not use glove box, and the whole automations of whole handover process, production efficiency is improved.
Description of drawings
Fig. 1 is the sketch map of existing load mode.
Fig. 2 is the sketch map before the substrate overturn in the application's apparatus for transporting substrate.
Fig. 3 is the sketch map behind the substrate overturn in the application's apparatus for transporting substrate.
Fig. 4 is the concrete structure sketch map of connecting gear in the application's apparatus for transporting substrate.
Be labeled as among the figure: transmission cavity 1, hatch door 2, glove box 3, chemical vapor deposition device 4a, sputtering unit 4b, connecting gear 5, substrate fixed part 5a, base 501, vacuum cup 502, pipeline 503, driving shaft 504, motor 505, oled substrate 6, air pump 7.
Embodiment
Below in conjunction with accompanying drawing the utility model is done further explanation.
As shown in Figure 4, but connecting gear 5 is the manipulator of a multiaxial motion, wherein; Be provided with motor 505 in the inside of this manipulator and near the position of its front end substrate fixed part 5a; This motor 505 connects driving shaft 504, and said substrate fixed part 5a has a vacuum cup 502 that is installed in the base 501 on this driving shaft 504 and is located at these base 501 surfaces, and said vacuum cup 502 is connected with air pump 7 through pipeline 503; This air pump 7 is positioned at the below of manipulator; The major part of pipeline 503 then places in the manipulator, and the front portion of pipeline 503 and then is communicated with vacuum cup 502 in swivel joint extends to base 501.After air pump 7 operations, vacuum cup 502 will hold oled substrate 6, and then make driving shaft 504 drive bases 501, vacuum cup 502 be rotated, thereby make oled substrate 6 turn over turnback.
Like Fig. 2, shown in Figure 3, above-mentioned connecting gear 5 is set in the transmission cavity 1 (Transfer chamber) of organic matter vaporization plating machine, and this transmission cavity 1 docks with chemical vapor deposition device 4a or sputtering unit 4b through opening and closing hatch door 2.Before the upset, oled substrate 6 is in state shown in Figure 2, and 6 of the oled substrates in upset back are in state shown in Figure 3.Under state shown in Figure 3, the hatch door 2 of the oled substrate 6 that has overturn after opening is transferred to CVD cabin or sputter cabin, thereby forms passivation layer (passivation layer) through CVD or sputtering process on oled substrate 6 surfaces.
Claims (3)
1. be the apparatus for transporting substrate that on oled substrate, forms passivation layer; Be provided with the transmission cavity (1) of connecting gear (5) in comprising; It is characterized in that: this transmission cavity (1) docks with chemical vapor deposition device (4a) or sputtering unit (4b) through opening and closing hatch door (2), and the connecting gear (5) in this transmission cavity (1) has the substrate fixed part (5a) that can spin upside down.
2. as claimed in claim 1 is the apparatus for transporting substrate of vapor deposition passivation layer on oled substrate, it is characterized in that: said connecting gear (5) but adopt the manipulator of multiaxial motion, the front end of this manipulator is substrate fixed part (5a).
3. according to claim 1 or claim 2 the apparatus for transporting substrate of vapor deposition passivation layer on oled substrate; It is characterized in that: this substrate fixed part (5a) has a vacuum cup (502) that is installed in the base (501) on the driving shaft (504) and is located at this base (501) surface; Said vacuum cup (502) is connected with air pump (7) through pipeline (503), and said driving shaft (504) is connected with motor (505).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202484275U CN202120988U (en) | 2011-07-14 | 2011-07-14 | Substrate conveying equipment for forming passivation layer on OLED (Organic Light Emitting Diode) substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202484275U CN202120988U (en) | 2011-07-14 | 2011-07-14 | Substrate conveying equipment for forming passivation layer on OLED (Organic Light Emitting Diode) substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202120988U true CN202120988U (en) | 2012-01-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202484275U Expired - Fee Related CN202120988U (en) | 2011-07-14 | 2011-07-14 | Substrate conveying equipment for forming passivation layer on OLED (Organic Light Emitting Diode) substrate |
Country Status (1)
| Country | Link |
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| CN (1) | CN202120988U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104733646A (en) * | 2015-02-10 | 2015-06-24 | 四川虹视显示技术有限公司 | OLED vacuum aging system |
| CN104854692A (en) * | 2012-11-27 | 2015-08-19 | 株式会社创意科技 | Electrostatic chuck, glass substrate processing method, and said glass substrate |
| CN108321310A (en) * | 2018-01-30 | 2018-07-24 | 上海瀚莅电子科技有限公司 | The manufacturing system of organic light emitting diode device |
-
2011
- 2011-07-14 CN CN2011202484275U patent/CN202120988U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104854692A (en) * | 2012-11-27 | 2015-08-19 | 株式会社创意科技 | Electrostatic chuck, glass substrate processing method, and said glass substrate |
| CN104854692B (en) * | 2012-11-27 | 2017-09-08 | 株式会社创意科技 | Electrostatic chuck, glass substrate processing method and its glass substrate |
| US9866151B2 (en) | 2012-11-27 | 2018-01-09 | Creative Technology Corporation | Electrostatic chuck, glass substrate processing method, and said glass substrate |
| CN104733646A (en) * | 2015-02-10 | 2015-06-24 | 四川虹视显示技术有限公司 | OLED vacuum aging system |
| CN108321310A (en) * | 2018-01-30 | 2018-07-24 | 上海瀚莅电子科技有限公司 | The manufacturing system of organic light emitting diode device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120118 Termination date: 20200714 |
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| CF01 | Termination of patent right due to non-payment of annual fee |