CN201713575U - Vacuum continuous film plating system - Google Patents
Vacuum continuous film plating system Download PDFInfo
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- CN201713575U CN201713575U CN2010202108179U CN201020210817U CN201713575U CN 201713575 U CN201713575 U CN 201713575U CN 2010202108179 U CN2010202108179 U CN 2010202108179U CN 201020210817 U CN201020210817 U CN 201020210817U CN 201713575 U CN201713575 U CN 201713575U
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- mask plate
- vacuum
- wheel mechanism
- roller
- plated film
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Abstract
The utility model discloses a vacuum continuous film plating system, which comprises mask plate storage equipment, a vacuum film plating machine and mask plate transmission equipment, as well as mask plate treatment equipment, wherein a plurality of mask plates are stored in the mask plate storage equipment; the mask plate transmission equipment is respectively communicated with the mask plate storage equipment and the vacuum film plating machine, the the mask plate storage equipment provides the mask plates for the vacuum film plating machine for plating films and recycles the mask plates after film plating; the mask plate treatment equipment is communicated with the mask plate transmission equipment, cleans or maintains the mask plates after film plating, and sends the mask plates after being cleaned or maintained to the mask plate storage equipment to be stored or the vacuum film plating machine through the mask plate transmission equipment. By adopting the vacuum continuous film plating system, the mask plates can be continuously loaded or unloaded in a vacuum environment.
Description
Technical field
The utility model relates to a kind of vacuum coating system, relates in particular to a kind of vacuum continuous coating system.
Background technology
Along with constant development of economy, the continuous progress of science and technology and the minimizing day by day of world energy sources, people more and more pay attention to the saving and the utilising efficiency of the energy aborning, make the harmony between man and nature development to satisfy the novel industrialization road requirement of China.
For example, in the demonstration industry of digital product, enterprise for save energy, reduce production costs, all strengthen the investment R﹠D intensity, constantly pursue energy-conservation product innovation.Wherein, the OLED display screen is exactly a kind of product innovation in the digital product, OLED is Organic Light Emitting Diode (Organic Light-EmittingDiode), because possess frivolous, characteristics such as power saving, therefore on the display screen of digital product, obtained widespread use, and has bigger market potential, at present all focus on the flat-panel monitor to the application of OLED in the world, because OLED be unique on using can and the TFT-LCD technology of mentioning in the same breath, and be in present all technique of display, unique large size of making, high brightness, the technique of display of the soft screen of high resolving power can be made the thickness the same with paper; But OLED display screen (organic light emitting display) is also different with traditional TFT-LCD display screen (liquid crystal display), it need not backlight, adopt extremely thin coating of organic material and glass substrate, when electric current passes through, these organic materialss will be luminous, and the OLED display screen can do lighter and thinnerly, and visible angle is bigger, and can significantly save electric energy; Correspondingly, all devices of manufacturing OLED display screen must guarantee the accuracy requirement of OLED display screen.The OLED display screen is based on a kind of current mode light emitting semiconductor device of organic materials.Its typical structure is that the luminous organic material of evaporation one deck tens nanometer thickness on ito glass is made luminescent layer, and there is the metal electrode of one deck low work function the luminescent layer top.When being added with voltage on the electrode, luminescent layer just produces optical radiation.
In order to make it can the full color display unit, luminescent layer should be patterned.Usually the luminescent layer patterning is to utilize fine metal mask (MASK) to be fitted on the conductive glass substrate, make the organic materials in the evaporation source on substrate, be deposited as desired pattern, at this moment, need a kind of mask plate handler that mask plate is inputed or outputed from vacuum plating unit.Yet, when existing mask plate handler is worked, earlier mask plate is transported to the vacuum plating unit from the mask plate storing device, after plated film finishes, again mask plate is outputed to the mask plate storing device from vacuum plating unit, this handling mode exists following problem: on the one hand, owing to be input to the mask plate of vacuum plating unit must be clean intact mask plate, and the mask plate of exporting from vacuum plating unit often needs to clean or keep in repair could use to circulate to be input in the vacuum plating unit, and the mask plate quantity in the mask plate storing device is limited, to such an extent as to after vacuum plating unit work for some time, need wait until that the mask plate storing device is reloaded just can be badly in need of work behind the new mask plate, mask plate is directly finished clean or maintenance is directly got back in the vacuum plating unit then and recycled.
Therefore, be badly in need of a kind of vacuum continuous coating system of the loading and unloading mask plate that circulates continuously.
The utility model content
The purpose of this utility model provides a kind of vacuum continuous coating system of the loading and unloading mask plate that circulates continuously.
For on realizing purpose is arranged, the utility model discloses a kind of vacuum continuous coating system, comprise the mask plate storing device, vacuum plating unit, mask plate transmission equipment and mask plate treatment facility, the some mask plates of storage in the described mask plate storing device, described mask plate transmission equipment respectively with described mask plate storing device, vacuum plating unit and mask plate treatment facility are communicated with, described mask plate storing device provides plated film with mask plate and reclaim the mask plate finish behind the plated film by described mask plate transmission equipment for described vacuum plating unit, described mask plate treatment facility cleans or keeps in repair the mask plate of finishing behind the plated film, and the described mask plate that will clean or keep in repair is sent into described mask plate memory device, stores or vacuum plating unit by described mask plate transmission equipment.
Preferably, described mask plate transmission equipment comprises: vacuum chamber, get on the right track, lower railway, clamping device, processing transmitting device and vacuum unit, offer on the chamber wall of described vacuum chamber and load passage, treatment channel, plated film passage and ventilating pit, the plated film gate valve that links to each other with vacuum plating unit is installed on the described plated film passage, the loading gate valve that links to each other with the mask plate storing device is installed on the described loading passage, the processing gate valve that links to each other with the mask plate treatment facility is installed on the described treatment channel; Described getting on the right track is positioned at described vacuum chamber and an end links to each other with the output track of described mask plate storing device, and the other end links to each other with the input track of described vacuum plating unit; Described lower railway is positioned at described vacuum chamber and an end links to each other with the input track of described mask plate storing device, and the other end links to each other with the output track of described vacuum plating unit, and described lower railway is positioned at the described below of getting on the right track; Described clamping device is used for gripping and discharges mask plate, and described clamping device can described get on the right track and lower railway on move; Described processing transmitting device comprises receiving mechanism and roller transport sector, described receiving mechanism comprises receiving station and lift drive mechanism, described receiving station is positioned at described getting on the right track and the below of lower railway, and described lift drive mechanism drives described receiving station and moves up and down; The end that described roller transport sector is positioned at described receiving station both sides and described roller transport sector links to each other with an end of described treatment channel, and the other end of described treatment channel is communicated with described mask plate treatment facility.Described vacuum unit comprises vacuum extraction device of air and vacuum checking device, described vacuum extraction device of air comprises inflation mechanism, air extractor, described inflation mechanism and air extractor are communicated with described ventilating pit respectively, and described vacuum checking device is built in the described vacuum chamber and with described inflation mechanism and air extractor and is electrically connected.
Preferably, described clamping device comprises gripping plate, top wheel mechanism and grasping drive unit, described gripping plate can described get on the right track and lower railway on move and this gripping plate on have some clips, described top wheel mechanism is positioned at the top of described clip, described grasping drive unit drives described top wheel mechanism and does lifting action, and described top wheel mechanism presses the top of described clip and controls described clip and open or close.Have some tops wheel on the wheel mechanism of described top, and each top wheel all be positioned at corresponding clip with it directly over, when opening clip, only need the described top of control wheel mechanism to descend, the top wheel mechanism on the wheel mechanism of top presses the top of clip, makes clip open.
Particularly, described clip comprises grasping part, permanent seat, torsional sprig and spring shaft, described grasping part comprises gripper body, along clip top and clip bottom that described gripper body inward at both ends side is extended, described permanent seat comprises left side, right side and the base that connects described left side and right side, and described left side and right side are fixed on the described gripping plate; The two ends of described spring shaft are installed on described left side and the right side, described gripper body is between described left side and right side, and described gripper body is passed described spring shaft and is articulated with described permanent seat, form spring conflict district between described clip top and the described base, described torsional sprig passes described spring shaft, and the upper support point of described torsional sprig is conflicted with described clip top, and the lower support point of described torsional sprig is conflicted with described base.
Preferably, described roller transport sector comprises roller driving mechanism, idler wheel mechanism and gear wheel mechanism, described idler wheel mechanism is positioned at the both sides of described receiving station, and an end of described idler wheel mechanism links to each other with described treatment channel, described gear wheel mechanism is positioned at the other end of described idler wheel mechanism, and the described idler wheel mechanism of described roller drive mechanism rotates.
Particularly, described idler wheel mechanism comprises turning rolls, roller shaft, gear wheel and roller, and described gear wheel and roller are stepped to be installed on the described roller shaft, and the diameter of described gear wheel is greater than the diameter of described roller.More specifically, described roller is coated with rubber layer.When idler wheel mechanism was carried mask plate, the lower surface of mask plate directly contacted with the rubber layer of described roller, has not only guaranteed the transmit force between roller and the mask plate, makes that also the transmission of mask plate on idler wheel mechanism is steady.
Preferably, described get on the right track and lower railway includes orbit portion and driving part, described driving part drives clamping device and moves on described orbit portion.Described getting on the right track is used for clamping device is transported to from the output track of mask plate storing device the input track of vacuum plating unit, when gripping plate was positioned on the orbit portion that gets on the right track, the driving part that gets on the right track drove gripping plate and moves to the plated film channel direction from loading passage; Described lower railway is used for clamping device is transported to from the output track of vacuum plating unit the input track of mask plate storing device, when gripping plate was positioned on the orbit portion of lower railway, the driving part of lower railway drove gripping plate and moves to the plated film channel direction from loading passage.
The utility model vacuum continuous coating system comprises the mask plate storing device, vacuum plating unit, mask plate transmission equipment and mask plate treatment facility, and described mask plate transmission equipment respectively with described mask plate storing device, vacuum plating unit and mask plate treatment facility are communicated with, described mask plate storing device provides plated film with mask plate and reclaim the mask plate finish behind the plated film by described mask plate transmission equipment for described vacuum plating unit, described mask plate treatment facility cleans or keeps in repair the mask plate of finishing behind the plated film, and the described mask plate that will clean or keep in repair is sent into described mask plate memory device, stores or vacuum plating unit by described mask plate transmission equipment.Compared with prior art, mask plate transmission equipment of the present utility model is communicated with described mask plate storing device, vacuum plating unit and mask plate treatment facility respectively, during plated film, the mask plate of finishing plated film can be delivered to the mask plate treatment facility handle after, importing the mask plate storing device again deposits stand-by, directly being delivered to vacuum plating unit by the mask plate transmission equipment after perhaps handling uses, make mask plate in the plated film work of continuous high speed, to recycle, improve the handling speed of mask plate, guaranteed the working efficiency of plated film.
When using above-mentioned vacuum continuous coating system to load and unload mask plate continuously, mask plate has following two kinds of Recycle design, first kind of mode is the plated film plate to be transported to from the mask plate storing device to carry out plated film the vacuum plating unit earlier, again the mask plate in the vacuum plating unit is transported in the mask plate treatment facility after plated film is finished and cleans or keep in repair, to handle (cleaning or maintenance) good mask plate at last again is transported to the mask plate storing device from the mask plate treatment facility and stores, the loading and unloading path that is mask plate is: mask plate storing device-vacuum plating unit-mask plate treatment facility-mask plate storing device, constantly circulate according to above-mentioned path, thereby vacuum plating is provided the mask plate of successive reusable edible.The second way is the plated film plate to be transported to from the mask plate storing device to carry out plated film the vacuum plating unit earlier, again the mask plate in the vacuum plating unit is transported in the mask plate treatment facility after plated film is finished and cleans or keep in repair, at last will clean or keep in repair good mask plate again and be transported to vacuum plating unit from the mask plate treatment facility, the loading and unloading path that is mask plate is: mask plate storing device-vacuum plating unit-mask plate treatment facility-vacuum plating unit, next mask plate constantly circulates along " vacuum plating unit-mask plate treatment facility " this path, thereby vacuum plating is provided the mask plate of successive reusable edible.Certainly, for convenience sometimes, above-mentioned dual mode can be intersected and use, thereby the mask plate of successive reusable edible is provided for vacuum plating more fast.
Description of drawings
Fig. 1 is the synoptic diagram of the utility model vacuum continuous coating system from vacuum plating unit output mask plate.
Fig. 2 is the utility model vacuum continuous coating system carries a synoptic diagram from mask plate to the mask plate treatment facility.
Fig. 3 is the synoptic diagram that the mask plate after the utility model vacuum continuous coating system handles is delivered to the mask plate transmission equipment.
Fig. 4 is the synoptic diagram of the utility model vacuum continuous coating system to vacuum plating unit input mask plate.
Fig. 5 is the structural representation of gripping plate described in the utility model.
Fig. 6 is another structural representation of gripping plate described in the utility model.
Fig. 7 is the structural representation of clip described in the utility model.
Fig. 8 is another structural representation of clip described in the utility model.
Fig. 9 is the sectional view of clip described in the utility model.
Embodiment
By describing technology contents of the present utility model, structural attitude in detail, realized purpose and effect, give explanation below in conjunction with embodiment and conjunction with figs. are detailed.
The utility model vacuum continuous coating system, be used for the exploitation of vacuum continuous coating loading and unloading mask plate equipment, described vacuum continuous coating system comprises the mask plate storing device, vacuum plating unit, mask plate transmission equipment 100 and mask plate treatment facility, the some mask plates 70 of storage in the described mask plate storing device, described mask plate transmission equipment 100 respectively with described mask plate storing device, vacuum plating unit and mask plate treatment facility are communicated with, described mask plate storing device provides plated film with mask plate 70 and reclaim the mask plate of finishing behind the plated film 70 by described mask plate transmission equipment 100 for described vacuum plating unit, described mask plate treatment facility cleans or keeps in repair the mask plate of finishing behind the plated film 70, and the described mask plate 70 that will clean or keep in repair is sent into described mask plate memory device, stores or vacuum plating unit by described mask plate transmission equipment 100.Particularly, described mask plate transmission equipment 100 comprises vacuum chamber 10, get on the right track 21, lower railway 22, clamping device 30 and mask plate transport sector, with reference to figure 1-Fig. 9, describes the structure and the principle of work thereof of vacuum continuous coating system in detail.
With reference to figure 1-Fig. 4, offer on the chamber wall of described vacuum chamber 10 and load passage 11, treatment channel 13, plated film passage 12 and ventilating pit 14, described plated film passage 12 is relative with described loading passage 11 positions; The plated film gate valve 121 that links to each other with vacuum plating unit is installed on the described plated film passage 12, the loading gate valve 111 that links to each other with the mask plate storing device is installed on the described loading passage 11, the processing gate valve 131 that links to each other with the mask plate treatment facility is installed on the described treatment channel 13.
With reference to figure 1-Fig. 4, described mask plate transmission equipment 100 comprises vacuum unit, this vacuum unit comprises vacuum extraction device of air and vacuum checking device 143, described vacuum extraction device of air comprises inflation mechanism 142, air extractor 141, described inflation mechanism 142 and air extractor 141 are communicated with described ventilating pit 14 respectively, and described vacuum checking device 143 is built in the described vacuum chamber 10 and with described inflation mechanism 142 and air extractor 141 and is electrically connected.
Referring to figs. 2 and 3, described getting on the right track 21 is positioned at vacuum chamber 10 and the one end is connected with the output track of described mask plate storing device, and described 21 the other end of getting on the right track is connected with the input track of described vacuum plating unit; Described lower railway 22 is positioned at described 21 belows and the one end of getting on the right track and is connected with the input track of described mask plate storing device, and the other end is connected with the output track of described vacuum plating unit.Particularly, described get on the right track 21 and lower railway 22 include orbit portion and driving part, described clamping device 31 moves on described orbit portion, the clamping device 30 that described driving part drives on the described orbit portion during work moves along described orbit portion.As can be seen from the figure, get on the right track 21 and lower railway 22 all loading between passage 11 and the plated film passage 12, when clamping device 30 during from the output of the output track of mask plate storing device, open and load gate valve 111 and plated film gate valve 121, clamping device 30 passes and loads passage 11 and enter 21 the orbit portion of getting on the right track, the clamping device 30 that 21 the driving part of getting on the right track drives on this orbit portion moves to plated film passage 12 directions, passes on the input track that plated film passage 12 enters vacuum plating unit until clamping device 30; When clamping device 30 during from the output of the output track of vacuum plating unit, open the plated film gate valve, clamping device 30 passes the orbit portion that plated film passage 12 enters lower railway 22, the clamping device 30 that the driving part of lower railway 22 drives on this orbit portion moves to loading passage 11 directions, passes loading passage 11 until clamping device 30 and enters on the input track of mask plate storing device.
With reference to figure 5-Fig. 9, the structure of clamping device 30 is described, described clamping device 30 is used for gripping and discharges mask plate 70, described clamping device can described get on the right track 21 and lower railway 22 on move.Particularly, with reference to figure 1, Fig. 5 and Fig. 6, described clamping device 30 comprises gripping plate 31, top wheel mechanism 33 and grasping drive unit (not shown), have some clips 32 on the described gripping plate 31, has some tops wheel on the described top wheel mechanism 33, above-mentioned top wheel corresponding one by one with described clip 32 and be positioned at described clip 32 directly over, described grasping drive unit drives described top wheel mechanism 33 and does lifting action, the clip 32 that makes described top wheel mechanism 33 press the top of described clip 32 and control on the gripping plate 31 opens or cuts out, described gripping plate 31 can described get on the right track 21 and lower railway 22 on move.
Particularly, with reference to figure 7-Fig. 9, described clip 32 comprises grasping part 321, permanent seat 322, torsional sprig 323 and spring shaft 324, described grasping part 321 comprises gripper body 3211, along clip top 3212 and clip bottom 3213 that described gripper body 3211 inward at both ends sides are extended, described permanent seat 322 comprises left side 3221, right side 3222 and the base 3223 that connects described left side 3221 and right side 3222, and described left side 3221 and right side 3222 are fixed on the described gripping plate 31; The two ends of described spring shaft 324 link to each other with right side 3222 with described left side 3221, described gripper body 3211 runs through described spring shaft 324 and articulates with described permanent seat 322, form spring conflict district 325 between described clip 32 tops and the described base 3223, form grip region 326 between described clip 32 bottoms and the described base; Described torsional sprig 323 runs through described spring shaft 324, and the upper support point 3231 of described torsional sprig 323 is conflicted the lower support point 3232 of described torsional sprig 323 and described base 3223 conflicts with described clip 32 tops.
With reference to figure 1-Fig. 4, described processing transmitting device comprises receiving mechanism and roller transport sector 60, described receiving mechanism comprises receiving station 41 and lift drive mechanism, described receiving station 41 is positioned at and describedly gets on the right track 21 and the below of lower railway 22, and described lift drive mechanism drives described receiving station 41 and moves up and down; Described roller transport sector 60 is positioned at described receiving station 41 both sides, and an end of described roller transport sector 60 links to each other with described treatment channel 13.Wherein, receiving station 41 is used for mask plate 70 is delivered to roller transport sector 60 from clamping device 31, perhaps the mask plate on the roller transport sector 60 70 is delivered on the clamping device 31.Roller transport sector 60 is used for and will will carry the mask plate 70 of coming be delivered to (with reference to figure 2) the mask plate treatment facility through treatment channel 13 from receiving station 41, perhaps will be delivered to from the mask plate 70 that the mask plate treatment facility is imported into receiving station 41 directly over (with reference to figure 3).
Particularly, referring to figs. 2 and 3, described roller transport sector 60 comprises roller driving mechanism, idler wheel mechanism 50 and gear wheel mechanism 61, described idler wheel mechanism 50 is positioned at the both sides of described receiving station 41, described idler wheel mechanism 50 rotations of described roller drive mechanism, one end of described idler wheel mechanism 50 is connected with described treatment channel 13, and described gear wheel mechanism 61 is positioned at the end of described idler wheel mechanism 50 away from described treatment channel 13.More specifically, with reference to figure 1 and Fig. 4, described idler wheel mechanism 50 comprises turning rolls 51, roller shaft 53, gear wheel 52 and roller 54, described gear wheel 52 and the described roller shaft 53 of roller 54 stepped installations, and the diameter of described gear wheel 52 is greater than the diameter of described roller 54, during the action of roller driving mechanism, roller 54 rotates and drives on it around roller shaft 53 is that mask plate 70 moves.More specifically, described roller 54 is coated with rubber layer.
With reference to figure 1 and Fig. 2, needs are cleaned or the mask plate 70 of maintenance when vacuum plating unit outputs to the mask plate treatment facility, earlier the clamping device that clamping is had a mask plate 70 by lower railway 22 along arrow A (see figure 1) direction be transported to receiving station 41 directly over, lift drive mechanism drives receiving station 41 and rises, the top wheel of top wheel mechanism 33 presses down along direction of arrow (see figure 6), the mask plate 70 of finishing plated film is released, mask plate 70 separates with clamping device 30, receiving station 41 descends, until mask plate 70 is released on the idler wheel mechanism 50, the described mask plate 70 of idler wheel mechanism 50 drives passes treatment channel 13 along arrow B (see figure 2) direction and is delivered in the mask plate treatment facility; With reference to figure 3-Fig. 4, with clean or maintenance after mask plate 70 when the mask plate treatment facility is input to vacuum plating unit, mask plate 70 enters on the roller 54 of idler wheel mechanism 50 by treatment channel 13 along arrow C (see figure 3) direction, until when wheel of stopping of walking to gear wheel mechanism 61, the roller 54 of idler wheel mechanism 50 stops operating, the gripping plate 31 that is unkitted mask plate 70 along get on the right track 21 walk to receiving station 41 directly over, the fore-set of top wheel mechanism 33 presses down, the clip 32 of gripping plate 31 is opened, lift drive mechanism drives receiving station 41 and rises, until the position that mask plate 70 is held up the clip 32 of gripping plate 31, the top wheel of top wheel mechanism 33 rises, clip 32 cuts out, and mask plate 70 is held mechanism's 15 clampings and 21 brings back in the input track of vacuum plating unit along getting on the right track along arrow D (see figure 4) direction.
Referring to figs. 1 to Fig. 4, describe the method that use vacuum continuous coating described in the utility model system loads and unloads mask plate continuously in detail, mainly be divided into three parts:
First part is delivered to the mask plate in the mask plate storing device 70 and carries out plated film in the vacuum plating unit, specifically may further comprise the steps:
(1) open vacuum extraction device of air, the air pressure of the air pressure in vacuum checking device 143 detects described vacuum chamber 10 and adjacent vacuum plating unit and mask plate treatment facility is close; (2) open loading gate valve 111 and plated film gate valve 121, the gripping plate 31 that clamping has a mask plate 70 enters from the output track of mask plate storing device and of the present utility modelly gets on the right track 21,21 the driving part action of getting on the right track, make gripping plate 31 enter into the input track of vacuum plating unit along 21 the orbit portion of getting on the right track along arrow D (see figure 4) direction, close plated film gate valve 121 and load gate valve 111, the gripping plate 31 that mask plate 70 is housed enters from the input track of vacuum plating unit and carries out plated film work the vacuum plating unit.
Second section is exported the mask plate 70 of finishing plated film from vacuum plating unit, and is delivered to and cleans in the mask plate treatment facility or processing such as maintenance, specifically may further comprise the steps:
(3) finish plated film after, open vacuum extraction device of air, the air pressure in described vacuum chamber 10 is identical with air pressure in vacuum plating unit and the mask plate treatment facility; (4) open plated film gate valve 121, the output track output of gripping plate 31 along arrow A direction (see figure 1) from vacuum plating unit of mask plate 70 is housed, and enter lower railway 22 of the present utility model, gripping plate 31 moves on lower railway 22, in the time of directly over gripping plate 31 walks to described receiving station 41, the driving part of lower railway 22 is out of service, closes plated film gate valve 121; (5) lift drive mechanism drives described receiving station 41 risings, until receiving station 41 contact (or approaching) described mask plate 70 lower surfaces; The top wheel of top wheel mechanism 33 presses down along direction of arrow (see figure 6), and clip 32 is opened, and mask plate 70 separates with clamping device 30, and the mask plate 70 of finishing plated film is released on the receiving station 41; Lift drive mechanism drives described receiving station 41 and descends, and is carried on until described mask plate 70 on the roller 54 of idler wheel mechanism 50; (6) open processing gate valve 131, the roller driving mechanism drives idler wheel mechanism 50 and rotates, rotation along with idler wheel mechanism 50, being arranged in mask plate 70 on the idler wheel mechanism 50 passes treatment channel 13 along arrow B (see figure 2) direction and enters the mask plate treatment facility, carry out corresponding cleaning or attended operation, close and handle gate valve 131.
Third part, mask plate 70 clean or maintenance good after, the mask plate 70 after selecting according to actual needs to handle is input to be stored in the mask plate storing device or is delivered to plated film in the vacuum plating unit again, specific as follows:
If select the mask plate 70 that will handle well to be delivered to from the mask plate treatment facility that the mask plate storing device is medium to be waited to load when using, may further comprise the steps:
(7) after mask plate 70 is finished dealing with, open and handle gate valve 131, the mask plate 70 after the processing passes processing gate valve 131 and enters on the roller 54 of described idler wheel mechanism 50 along arrow C (see figure 3) direction from the mask plate treatment facility, closes and handles gate valve 131; (8) roller drive mechanism roller 54 rotation, until mask plate 70 when walk to gear wheel mechanism 61 stop wheel the time, the roller driving mechanism is out of service, at this moment mask plate 70 be positioned at receiving station 41 directly over; (9) fore-set of top wheel mechanism 33 presses down, and the clip 32 of gripping plate 31 is opened; Lift drive mechanism drives receiving station 41 and rises, until the position that mask plate 70 is held up the clip 32 of gripping plate 31; The top wheel of top wheel mechanism 33 rises, and clip 32 cuts out, the described mask plate 70 of described clamping device 30 clampings; (10) open loading gate valve 111,21 the driving part motion of getting on the right track, until with the mask plate on the clamping device 15 70 along arrow D (see figure 4) direction along the 21 input tracks that enter vacuum plating unit that get on the right track, close and load gate valve 111, mask plate enters in the mask plate storing device waiting along above-mentioned input track and loads.
If the mask plate of selecting to handle well 70 carries out plated film from defeated directly the delivering to of mask plate treatment facility the vacuum plating unit, may further comprise the steps:
After (7 ｀) mask plate is handled, open and handle gate valve 131, the mask plate 70 after cleaning or maintenance are finished passes processing gate valve 131 and enters on the roller 54 of described idler wheel mechanism 50 along arrow C (see figure 3) direction from the mask plate treatment facility, close the processing gate valve; (8 ｀) roller drive mechanism roller 54 rotation, until mask plate 70 when walk to gear wheel mechanism 61 stop wheel the time, the roller driving mechanism is out of service, at this moment mask plate 70 be positioned at receiving station 41 directly over; (9 ｀) opens and loads gate valve 111, the gripping plate 31 that mask plate 70 is not housed is from entering the input track of mask plate storing device along lower railway, pass along the output track of mask plate storing device again and load passage 11 and enter and get on the right track 21, close and load gate valve 111, gripping plate 31 moves in the 21 upper edge arrow D (see figure 4) directions that get on the right track, and stops to move in the time of directly over gripping plate 31 walks to receiving station 41; The fore-set of (10 ｀) top wheel mechanism 33 presses down, the clip 32 of gripping plate 31 is opened, lift drive mechanism drives receiving station 41 and rises, until the position that mask plate 70 is held up the clip 32 of gripping plate 31, the top wheel of top wheel mechanism 33 rises, clip 32 cuts out, the described mask plate 70 of described clamping device 30 clampings; (11 ｀) opens vacuum extraction device of air, air pressure in described vacuum chamber 10 is identical with the air pressure of vacuum plating unit, open plated film gate valve 121,21 the driving part motion of getting on the right track, until the mask plate on the clamping device 15 70 21 is brought back in the input track of vacuum plating unit along getting on the right track along arrow D (see figure 4) direction, close plated film gate valve 121, mask plate 70 enters along the input track of vacuum plating unit and finishes plated film in the vacuum plating unit.Wherein, step (9 ｀) can be finished in completing steps (7 ｀) and step (8 ｀).
Wherein, get on the right track 21 and the traffic direction of lower railway 22 and position relation all can change, vacuum plating unit, the installation site of mask plate storing device and mask plate treatment facility also can be changed.In addition, the various driving mechanisms or the driving part that relate in the literary composition can be made up of motor, also can be made up of propulsion sources such as cylinder, oil cylinders.
Wherein, the utility model is controlled by the plated film Controlling System, this plated film Controlling System is electrically connected with the utility model vacuum continuous coating system, can control the action of each parts in the vacuum continuous coating system by the plated film Controlling System, this plated film Controlling System can be finished by those skilled in the art voluntarily according to working method of the present utility model.
Above disclosed only is preferred embodiment of the present utility model, can not limit the interest field of the utility model certainly with this, and therefore the equivalent variations of being done according to the utility model claim still belongs to the scope that the utility model is contained.
Claims (7)
1. vacuum continuous coating system, comprise the mask plate storing device, vacuum plating unit and mask plate transmission equipment, the some mask plates of storage in the described mask plate storing device, described mask plate transmission equipment is communicated with described mask plate storing device and described vacuum plating unit respectively, described mask plate storing device provides plated film with mask plate and reclaim the mask plate finish behind the plated film by described mask plate transmission equipment for described vacuum plating unit, it is characterized in that: also comprise the mask plate treatment facility that is communicated with described mask plate transmission equipment, described mask plate treatment facility cleans or keeps in repair the mask plate of finishing behind the plated film, and the mask plate that will clean or keep in repair is sent into described mask plate memory device, stores or vacuum plating unit by described mask plate transmission equipment.
2. vacuum continuous coating as claimed in claim 1 system, it is characterized in that: described mask plate transmission equipment comprises:
Vacuum chamber, offer on the chamber wall of described vacuum chamber and load passage, treatment channel, plated film passage and ventilating pit, the plated film gate valve that links to each other with vacuum plating unit is installed on the described plated film passage, the loading gate valve that links to each other with the mask plate storing device is installed on the described loading passage, the processing gate valve that links to each other with the mask plate treatment facility is installed on the described treatment channel;
Get on the right track, described getting on the right track is positioned at described vacuum chamber and an end links to each other with the output track of described mask plate storing device, and the other end links to each other with the input track of described vacuum plating unit;
Lower railway, described lower railway are positioned at described vacuum chamber and an end links to each other with the input track of described mask plate storing device, and the other end links to each other with the output track of described vacuum plating unit, and described lower railway is positioned at the described below of getting on the right track;
Clamping device, described clamping device are used for gripping and discharge mask plate, and described clamping device can described get on the right track and lower railway on move;
Handle transmitting device, described processing transmitting device comprises receiving mechanism and roller transport sector, described receiving mechanism comprises receiving station and lift drive mechanism, and described receiving station is positioned at described getting on the right track and the below of lower railway, and described lift drive mechanism drives described receiving station and moves up and down; The end that described roller transport sector is positioned at described receiving station both sides and described roller transport sector links to each other with an end of described treatment channel, and the other end of described treatment channel is communicated with described mask plate treatment facility;
Vacuum unit, described vacuum unit comprises vacuum extraction device of air and vacuum checking device, described vacuum extraction device of air comprises inflation mechanism, air extractor, described inflation mechanism and air extractor are communicated with described ventilating pit respectively, and described vacuum checking device is built in the described vacuum chamber and with described inflation mechanism and air extractor and is electrically connected.
3. vacuum continuous coating as claimed in claim 2 system, it is characterized in that: described clamping device comprises gripping plate, top wheel mechanism and grasping drive unit, described gripping plate can described get on the right track and lower railway on move, have some clips on the described gripping plate, described top wheel mechanism is positioned at the top of described clip, described grasping drive unit drives described top wheel mechanism and does lifting action, and described top wheel mechanism presses the top of described clip and controls described clip and open or close.
4. vacuum continuous coating as claimed in claim 3 system, it is characterized in that: described clip comprises grasping part, permanent seat, torsional sprig and spring shaft, described grasping part comprises gripper body, along clip top and clip bottom that described gripper body inward at both ends side is extended, described permanent seat comprises left side, right side and the base that connects described left side and right side, and described left side and right side are fixed on the described gripping plate; The two ends of described spring shaft are installed on described left side and the right side, described gripper body is between described left side and right side, and described gripper body is passed described spring shaft and is articulated with described permanent seat, form spring conflict district between described clip top and the described base, described torsional sprig passes described spring shaft, and the upper support point of described torsional sprig is conflicted with described clip top, and the lower support point of described torsional sprig is conflicted with described base.
5. vacuum continuous coating as claimed in claim 2 system, it is characterized in that: described roller transport sector comprises roller driving mechanism, idler wheel mechanism and gear wheel mechanism, described idler wheel mechanism is positioned at the both sides of described receiving station, and an end of described idler wheel mechanism links to each other with described treatment channel, described gear wheel mechanism is positioned at the other end of described idler wheel mechanism, and the described idler wheel mechanism of described roller drive mechanism rotates.
6. vacuum continuous coating as claimed in claim 5 system, it is characterized in that: described idler wheel mechanism comprises turning rolls, roller shaft, gear wheel and roller, described gear wheel and roller are stepped to be installed on the described roller shaft, and the diameter of described gear wheel is greater than the diameter of described roller.
7. vacuum continuous coating as claimed in claim 2 system is characterized in that: described get on the right track and lower railway includes orbit portion and driving part, described driving part drives clamping device and moves on described orbit portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202108179U CN201713575U (en) | 2010-05-25 | 2010-05-25 | Vacuum continuous film plating system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202108179U CN201713575U (en) | 2010-05-25 | 2010-05-25 | Vacuum continuous film plating system |
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| Publication Number | Publication Date |
|---|---|
| CN201713575U true CN201713575U (en) | 2011-01-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010202108179U Expired - Lifetime CN201713575U (en) | 2010-05-25 | 2010-05-25 | Vacuum continuous film plating system |
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| Country | Link |
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| CN (1) | CN201713575U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101956175A (en) * | 2010-05-25 | 2011-01-26 | 东莞宏威数码机械有限公司 | Vacuum continuous coating system and method for assembling and disassembling masks by using same |
| CN107841721A (en) * | 2017-12-22 | 2018-03-27 | 中山国鳌智能科技有限公司 | A kind of Novel film-coated equipment |
| CN109097740A (en) * | 2018-09-30 | 2018-12-28 | 佛山科学技术学院 | A kind of vacuum coating equipment with corrosion proof function |
| CN109943886A (en) * | 2017-12-21 | 2019-06-28 | 常州国成新材料科技有限公司 | A kind of Film patterning method and device of high vacuum system |
-
2010
- 2010-05-25 CN CN2010202108179U patent/CN201713575U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101956175A (en) * | 2010-05-25 | 2011-01-26 | 东莞宏威数码机械有限公司 | Vacuum continuous coating system and method for assembling and disassembling masks by using same |
| CN101956175B (en) * | 2010-05-25 | 2012-10-17 | 东莞宏威数码机械有限公司 | Vacuum continuous coating system and method for assembling and disassembling masks by using same |
| CN109943886A (en) * | 2017-12-21 | 2019-06-28 | 常州国成新材料科技有限公司 | A kind of Film patterning method and device of high vacuum system |
| CN107841721A (en) * | 2017-12-22 | 2018-03-27 | 中山国鳌智能科技有限公司 | A kind of Novel film-coated equipment |
| CN107841721B (en) * | 2017-12-22 | 2019-05-10 | 江西邦盛光学仪器有限公司 | A kind of Novel film-coated equipment |
| CN109097740A (en) * | 2018-09-30 | 2018-12-28 | 佛山科学技术学院 | A kind of vacuum coating equipment with corrosion proof function |
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