CN101814586A - Clamping type substrate turnover device - Google Patents
Clamping type substrate turnover device Download PDFInfo
- Publication number
- CN101814586A CN101814586A CN200910246910A CN200910246910A CN101814586A CN 101814586 A CN101814586 A CN 101814586A CN 200910246910 A CN200910246910 A CN 200910246910A CN 200910246910 A CN200910246910 A CN 200910246910A CN 101814586 A CN101814586 A CN 101814586A
- Authority
- CN
- China
- Prior art keywords
- clamping
- driving mechanism
- substrate
- turnover device
- type substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 133
- 230000007306 turnover Effects 0.000 title claims abstract description 52
- 230000007246 mechanism Effects 0.000 claims abstract description 113
- 230000005540 biological transmission Effects 0.000 claims description 47
- 238000000465 moulding Methods 0.000 claims description 20
- 238000003825 pressing Methods 0.000 claims description 20
- 239000011553 magnetic fluid Substances 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 abstract description 17
- 230000008569 process Effects 0.000 abstract description 13
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 6
- 239000000047 product Substances 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- 238000013461 design Methods 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 210000001138 tear Anatomy 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- -1 therefore Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68728—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Presses And Accessory Devices Thereof (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention provides a clamping type substrate turnover device. The clamping type substrate turnover device comprises a clamping drive mechanism, a turnover drive mechanism and a substrate clamping mechanism, wherein the clamping drive mechanism and turnover drive mechanism are separately connected with the substrate clamping mechanism, the substrate clamping mechanism is provided with a structure for clamping or loosing a substrate; the clamping drive mechanism is used to drive the substrate clamping mechanism to clamp or loose the substrate arranged in the substrate clamping mechanism; and the turnover drive mechanism is used to drive the substrate clamping mechanism to perform turnover movement, thus the substrate in the substrate clamping mechanism performs turnover movement. Therefore, the clamping type substrate turnover device can be used to clamp, transfer and turn the substrate and can keep the substrate to be stable during the turnover process; and the structure is simple, and the protection for the substrate is good.
Description
Technical field
The present invention relates to a kind of clamping type substrate turnover device, relate in particular to a kind of clamping type substrate turnover device that substrate in the organic light emitting display is carried out clamping and upset.
Background technology
Along with the progress of the development of society, science and technology, more and more go deep into people's life as the flat-panel display device of the terminal display spare of various vision signals and computer data information.Flat-panel display device has thin and light and handy, complete machine can be made portable, voltage is low, do not have X-radiation, do not have flashing, do not produce static, advantages such as low in energy consumption, available powered battery, life-span length, it is the technology that microelectric technique, lcd technology etc. are merged mutually, is mainly used on the end products such as notebook computer, desktop computer, large-screen color TV, mobile communication, digital camera, Digital Video.
At present, in the display industry of digital product, enterprise for energy savings, reduce production costs, all strengthen the investment R﹠D intensity, constantly pursue energy-conservation new product.Wherein, organic light emitting display is a kind of new product in the digital product, organic light emitting display is because possess frivolous, characteristics such as power saving, therefore on the display screen of digital product, obtained extensive use, and has bigger market potential, at present all focus on the flat-panel monitor to the application of organic light emitting display in the world, because organic light emitting display be unique on using can and the liquid crystal display device technology of mentioning in the same breath, and be in present all Display Techniques, unique large scale of making, high brightness, the Display Technique of the soft screen of high-resolution can be made the thickness the same with paper; But organic light emitting display is also different with traditional liquid crystal display device, it need not backlight, adopt extremely thin coating of organic material and glass substrate, when electric current passes through, these organic materials will be luminous, and organic light emitting display can do lighter and thinnerly, and visible angle is bigger, and can significantly save electric energy; Correspondingly, all devices of manufacturing organic light emitting display must guarantee the required precision of organic light emitting display.
In the process of making flat-panel display device, needs use turning device is realized the upset to the devices such as substrate of flat-panel display device.For example, traditional liquid crystal display device generally comprises display panels and backlight module, and display panels is to be made of two substrates and the liquid crystal layer between this two substrate.In the process with the assembling of two substrates, need elder generation with one of them substrate turn-over, carries out the substrate assembling by turning device afterwards again.In addition, the flat-panel display device that with glass is substrate also needs to carry out the upset of substrate in manufacture process, need and will be fitted on the backboard that is filled with fillers such as drier with the substrate overturn of finishing each functional layer film plating during as the encapsulation operation of organic light-emitting display device.The substrate turnover device of existing flat-panel display device is mainly the absorption type turning device, this technology is mainly reflected in the patent of invention of number of patent application 200910128038.6, this patent disclosure the method for a kind of substrate overturn platform and substrate overturn, the main mode of vacuum suction that adopts is carried out turning operation to substrate, adopts this patented technology can guarantee that substrate can not come off in upset.Yet along with the continuous reinforcement that the slimming of various demonstration products requires, substrate manufacture gets more and more thinner, and the liquid crystal display device thickness of glass substrate is 0.63mm usually, and the base plate glass thickness that organic light emitting display adopted is less than 0.3mm.It bears distortion, damaged ability also along with reduction along with the thickness attenuation of substrate.Though the substrate overturn platform of prior art adopts vacuum suction can guarantee that in design the substrate of flat-panel display device problems such as substrate comes off can not occur in the process of upset, but vacuum absorption device structure comparatively complexity has the factors of instability, can make slide relative between substrate and the suction nozzle as suction nozzle breakage, vacuum deficiency etc.; In addition, the vacuum cup of employing can be because of contact the wear and tear substrate of suction nozzle with substrate, or the final display transparent effect of influence of leaving a trace on substrate, therefore, substrate do not had the excellent protective energy.Special in the manufacture process of organic light emitting display, because the glass substrate area of organic light emitting display is very big, the rete of plating is comparatively complicated on thinner thickness and the substrate, so the words of the glass substrate of organic light emitting display as adopting the vacuum suction mode to overturn, not only there are suction nozzle and substrate contacts and the substrate that weares and teares, or on substrate, leave a trace and influence final display transparent effect, but also can cause base plate deformation, breakage etc.
Therefore, be badly in need of a kind of follow-on substrate turnover device and overcome above-mentioned defective.
Summary of the invention
The object of the present invention is to provide and a kind ofly can carry out omnibearing clamping, transmission and upset and in the switching process of substrate, can effectively keep the clamping type substrate turnover device of the stable and antisitic defect of substrate substrate.
To achieve these goals, the invention provides a kind of clamping type substrate turnover device, described clamping type substrate turnover device comprises clamping driving mechanism, upset driving mechanism and clamping device for base plate.Described upset driving mechanism comprises first driving mechanism, worm screw, Hollow Transmission Shafts and turbine, described worm screw is located on described first driving mechanism, described turbine be fixed on the described Hollow Transmission Shafts and with described worm engaging, offer the installing hole that is used to connect described clamping device for base plate on the end face of one end of described Hollow Transmission Shafts, described Hollow Transmission Shafts is hollow structure, and described upset driving mechanism provides the power of substrate overturn.Described clamping driving mechanism comprises second driving mechanism, rotating shaft, mount pad and mounting blocks, described second driving mechanism is fixed in the other end of described Hollow Transmission Shafts by described mount pad, one end of described rotating shaft is fixed on described second driving mechanism, the other end of described rotating shaft passes described Hollow Transmission Shafts and fixedlys connected with described mounting blocks, and described clamping driving mechanism provides the power that clamps or unclamp substrate.Described clamping device for base plate comprises and drives bindiny mechanism, clamp system and fixed guide mechanism: described driving bindiny mechanism comprises cam, described cam symmetry offers two arc guide barrels, and the mounting blocks of described clamping driving mechanism is fixedly connected on the described cam; Described clamp system comprises, lower platen and at least one pair of press strip group, described press strip group comprises, following press strip, on described, rounded roller follower respectively is installed on the respective side of lower platen, described roller follower slidably is installed on respectively in two arc guide barrels of described cam, form clamping zone between described top board and the described lower platen, described ceiling molding is installed on the described top board and stretches in the described clamping zone, described press strip down is installed on the described lower platen and stretches in the described clamping zone, and described ceiling molding and described press strip down are over against setting, substrate is held between described ceiling molding and the described down press strip, and the described clamp system of described clamping drive mechanism clamps or unclamps substrate; Described fixed guide mechanism comprises guide rail, slide block and mounting panel, described mounting panel is arranged at outside the described clamping zone, described guide rail and described slide block be engagement connection slidably, and described guide rail and described slide block are connected between described mounting panel and described top board and the lower platen, described guide rail is vertical with described upper and lower pressing plate with the glide direction of described slide block, and the fixing described upper and lower pressing plate of described fixed guide mechanism is also controlled described upper and lower pressing plate and moved along a straight line all the time.
Preferably, described clamping type substrate turnover device carries out clamping and upset to the substrate in the vacuum chamber that vacuum environment is provided, be provided with the first sealing magnetic current spare between described rotating shaft and the described Hollow Transmission Shafts and near described mount pad end, described first magnetic fluid seal is cut off the airflow connection between described clamping driving mechanism and the described vacuum chamber.
Preferably, offer on the chamber wall of described vacuum chamber and insert the hole, described Hollow Transmission Shafts is with flange seat outward and described flange seat is fixedly installed on the chamber wall at described installing hole two ends, described flange seat is hollow structure, one end of described Hollow Transmission Shafts passes described flange seat and the described hole of inserting successively, be provided with the second sealing magnetic current spare between described flange seat and the described Hollow Transmission Shafts, described second magnetic fluid seal is cut off the airflow connection between described upset driving mechanism and the described vacuum chamber.
Preferably, described guide rail comprises first upper rail and first lower guideway, described first upper rail is fixedlyed connected with described top board, described first lower guideway is fixedlyed connected with described lower platen, and described first lower guideway and described first upper rail are parallel to each other, described slide block comprises first top shoe and first sliding block of fixedlying connected with described mounting panel, described first top shoe and described first upper rail be engagement connection slidably, and a described sliding block and described first lower guideway be engagement connection slidably.Slide relative by described first upper rail and described first top shoe and described first lower guideway and described first sliding block, can drive the described upper and lower pressing plate of fixedlying connected with the described first upper and lower guide rail near or separate, thereby make described clamp system clamp or unclamp operation to described substrate.
Preferably, described guide rail comprises second upper rail and second lower guideway of fixedlying connected with described mounting panel, and described second upper rail and second lower guideway are parallel to each other, described slide block comprises second top shoe and second sliding block, described second top shoe is fixedlyed connected with described top board, described second sliding block is fixedlyed connected with described lower platen, described second top shoe and described second upper rail be engagement connection slidably, and described second sliding block and described second lower guideway be engagement connection slidably.Slide relative by described second upper rail and described second top shoe and described second lower guideway and described second sliding block, can drive the described upper and lower pressing plate of fixedlying connected with the described second upper and lower slide block near or separate, thereby make described clamp system clamp or unclamp operation to described substrate.
Preferably, described clamp system also comprises at least two springs, and two described springs are conflicted respectively and are connected between described ceiling molding and described top board and described press strip down and the described lower platen.
Preferably, all offer several dead slots on the surface of described upper and lower pressing plate, and the described respective side of described upper and lower pressing plate all offers groove, described roller follower is positioned at described groove, the saving that the design of described dead slot and groove is very big the material of described upper and lower pressing plate, help reducing production costs.
Preferably, described upper and lower press strip has boss and the concave surface that cooperatively interacts respectively.
Preferably, described first driving mechanism and second driving mechanism are servomotor or air-cylinder type motor.Alternatively, described driving mechanism can be replaced by people's hand drive.
Compared with prior art, because clamping type substrate turnover device of the present invention comprises the clamping driving mechanism, upset driving mechanism and clamping device for base plate, described clamping device for base plate comprises driving bindiny mechanism, clamp system and fixed guide mechanism, described clamp system comprises, following press strip, described ceiling molding is installed on the described top board and stretches into the interior and described press strip down of described clamping zone and is installed on the described lower platen and stretches in the described clamping zone, when second driving mechanism of described clamping driving mechanism drives described rotating shaft rotation, thereby when driving with described cam rotation that described rotating shaft is fixedlyed connected, be installed in respectively described on, two roller followers on the lower platen are according to the rotation of described cam and move along the arching trajectory face of two arc guide barrels of described cam, driving described top board and ceiling molding simultaneously slides in described top shoe by described upper rail and drives described lower platen and following press strip and slide in described sliding block by described lower guideway, thereby control described clamp system on, lower platen near or separately, and then make ceiling molding on the described top board and the following press strip on the described lower platen clamp or unclamp operation to described substrate; When first driving mechanism of described upset driving mechanism drives described worm screw rotation, thereby when driving described turbine with the rotation of described Hollow Transmission Shafts, the described clamping device for base plate of fixedlying connected with described Hollow Transmission Shafts also and then rotates.Therefore, described clamping type substrate turnover device can be realized the omnibearing clamping of substrate, transmission and upset, and can keep the stable of substrate in transmission and switching process; In addition, again because described clamping type substrate turnover device is upper and lower double-layer structure, so structure is comparatively simple, and described substrate is had the better protect performance.
Description of drawings
Fig. 1 is the stereogram of clamping device for base plate in the clamping type substrate turnover device of the present invention.
Fig. 2 be in the clamping type substrate turnover device of the present invention the clamping driving mechanism and the upset driving mechanism stereogram.
Fig. 3 is the structural representation of clamping device for base plate in the clamping type substrate turnover device shown in Figure 1.
Fig. 4 is the enlarged drawing of A part among Fig. 3.
Fig. 5 is the view of the upper and lower press strip of clamping type substrate turnover device of the present invention when clamping substrate.
Fig. 6 is the structural representation of another angle of clamping device for base plate in the clamping type substrate turnover device of the present invention.
Fig. 7 is the structural representation of clamping device for base plate in specific embodiment of clamping type substrate turnover device of the present invention.
Fig. 8 is the structural representation of clamping device for base plate in another specific embodiment of clamping type substrate turnover device of the present invention.
Fig. 9 is the structural representation that clamping type substrate turnover device of the present invention is applied to vacuum system.
Figure 10 is the sectional view that clamping type substrate turnover device of the present invention is applied to vacuum system.
Embodiment
With reference now to accompanying drawing, describe embodiments of the invention, the similar elements label is represented similar elements in the accompanying drawing.
With reference to figure 1-3, clamping type substrate turnover device 1 of the present invention comprises clamping driving mechanism, upset driving mechanism and clamping device for base plate.Described upset driving mechanism comprises first driving mechanism 11, worm screw 12, Hollow Transmission Shafts 13 and turbine 14, described worm screw 12 is located on described first driving mechanism 11, described turbine 14 is fixed on the described Hollow Transmission Shafts 13 and with described worm screw 12 and meshes, offer the installing hole 15 that is used to connect described clamping device for base plate on the end face of one end of described Hollow Transmission Shafts 13, described Hollow Transmission Shafts 13 is hollow structure, and described upset driving mechanism provides the power of substrate overturn 100.Described clamping driving mechanism comprises second driving mechanism 21, rotating shaft 22, mount pad 23 and mounting blocks 24, described second driving mechanism 21 is fixed in the other end of described Hollow Transmission Shafts 13 by described mount pad 23, one end of described rotating shaft 22 is fixed on described second driving mechanism 21, the other end of described rotating shaft 22 passes described Hollow Transmission Shafts 13 and fixedlys connected with described mounting blocks 24, and described clamping driving mechanism provides the power that clamps or unclamp substrate 100.Described clamping device for base plate comprises and drives bindiny mechanism, clamp system and fixed guide mechanism: described driving bindiny mechanism comprises cam 310, described cam 310 symmetries offer two arc guide barrels 311, and the mounting blocks 24 of described clamping driving mechanism is fixedly connected on the described cam 310; Described clamp system comprises, lower platen 320a, 320b and at least one pair of press strip group 321, described press strip group 321 comprises, following press strip 321a, 321b, on described, lower platen 320a, rounded roller follower 322a respectively is installed on the respective side of 320b, 322b, described roller follower 322a, 322b slidably is installed on respectively in two arc guide barrels 311 of described cam 310, form clamping zone 323 between described top board 320a and the described lower platen 320b, described ceiling molding 321a is installed on described top board 320a and goes up and stretch in the described clamping zone 323, described press strip 321b down is installed on described lower platen 320b and goes up and stretch in the described clamping zone 323, and described ceiling molding 321a and described press strip 321b down are over against setting, described substrate 100 is held between described ceiling molding 321a and the described down press strip 321b, and the described clamp system of described clamping drive mechanism clamps or unclamps described substrate 100; Described fixed guide mechanism comprises guide rail 330, slide block 331 and mounting panel 332, described mounting panel 332 is arranged at outside the described clamping zone 323, described guide rail 330 and described slide block 331 be engagement connection slidably, and described guide rail 330 and described slide block 331 are connected between described mounting panel 332 and described top board 320a and the lower platen 320b, the glide direction of described guide rail 330 and described slide block 331 and described on, lower platen 320a, 320b is vertical, described fixed guide mechanism fixing described on, lower platen 320a, 320b and control described on, lower platen 320a, 320b moves along a straight line all the time.
Particularly, described first driving mechanism 11 and second driving mechanism 21 are servomotor or air-cylinder type motor, and alternatively, described first driving mechanism 11 and second driving mechanism 21 also can be replaced by manual actuation.
With reference to figure 4, described clamp system also comprises at least two spring 324a, 324b, and two described spring 324a, 324b conflict respectively and be connected between described ceiling molding 321a and described top board 320a and described press strip 321b down and the described lower platen 320b.Particularly, described spring 324a, 324b are fixed by the screw 325a, the 325b that pass described spring 324a, 324b respectively, screw damping and the clamping force between described upper and lower pressing plate 320a, 320b of the described spring 324a of degree may command, 325b and clamp stroke by regulating described screw 325a, 325b.
With reference to figure 4-5, described upper and lower press strip 321a, 321b have boss 3211a, 3211b and concave surface 3212a, the 3212b that cooperatively interacts respectively.Particularly, the described concave surface 3211b of press strip 321b down is used for carrying described substrate 100, when described upper and lower press strip 321a, 321b mutually near the time, boss 3211a, 3211b and concave surface 3212a, the 3212b of described upper and lower press strip cooperatively interact, and described substrate 100 is held between concave surface 3212a, the 3212b of described upper and lower press strip.
With reference to figure 6, all offer dead slot 3201 on the surface of described upper and lower pressing plate 320a, 320b, and the respective side of described upper and lower pressing plate 320a, 320b all offers groove 3202a, 3202b, described roller follower 322a, 322b are positioned at described groove 3202a, 3202b, alternatively, the size of described dead slot 3201 and number can be decided according to the area size of described upper and lower pressing plate 320a, 320b.The material of described upper and lower pressing plate 320a, 320b has been saved in the design of described dead slot 3201 and groove 3202a, 3202b greatly, helps reducing production costs.
With reference to figure 7, in a specific embodiment of the present invention, described guide rail 330 comprises the first upper rail 330a and the first lower guideway 330b, the described first upper rail 330a is fixedlyed connected with described top board 320a, the described first lower guideway 330b is fixedlyed connected with described lower platen 320b, and described first lower guideway 330b and the described first upper rail 330a are parallel to each other, described slide block 331 comprises the first top shoe 331a and the first sliding block 331b of fixedlying connected with described mounting panel 332, described first top shoe 331a and the described first upper rail 330a be engagement connection slidably, and a described sliding block 331b and the described first lower guideway 330b be engagement connection slidably.Slide relative by the described first upper rail 330a and the described first top shoe 331a and described first lower guideway 330b and the described first sliding block 331b, can drive described upper and lower pressing plate 320a, the 320b of fixedlying connected with the described first upper and lower guide rail 3303a, 330b near or separate, thereby make described clamp system clamp or unclamp operation to described substrate 100.
With reference to figure 8, in another specific embodiment of the present invention, described guide rail 330 comprises the second upper rail 3300a and the second lower guideway 3300b of fixedlying connected with described mounting panel 332, and the described second upper rail 3300a and the second lower guideway 3300b are parallel to each other, described slide block 331 comprises the second top shoe 3310a and the second sliding block 3310b, the described second top shoe 3310a is fixedlyed connected with described top board 320a, the described second sliding block 3310b is fixedlyed connected with described lower platen 320b, described second top shoe 3310a and the described second upper rail 3300a be engagement connection slidably, and described two sliding block 3310b and the described second lower guideway 3300b be engagement connection slidably.Apparently, this connected mode can realize that also described clamp system clamps or unclamp operation described substrate 100.
With reference to figure 9-10, be applied in the specific embodiment of vacuum system at substrate rotating device 1 of the present invention, the clamping device for base plate of described substrate rotating device 1 places vacuum chamber 400, offer one on the chamber wall 401 of described vacuum chamber and insert hole (figure does not show), second driving mechanism 21 of described clamping driving mechanism is fixed on the described Hollow Transmission Shafts 13 by described mount pad 23 and mounting screw 402; One end of described rotating shaft 22 is fixedlyed connected with described second driving mechanism 21, the other end passes the hole of inserting of described Hollow Transmission Shafts 13 and described chamber wall 401, and be fixed on the described cam 310 that is in the described vacuum chamber 400 by described mounting blocks 24, the rotation that the driving of described rotating shaft 22 by described second driving mechanism 21 drives described cam 310 realizes described substrate 100 clampings; Be provided with first magnetic fluid seal 403 near described mount pad 23 ends between described Hollow Transmission Shafts 13 and described rotating shaft 22, described first magnetic fluid seal 403 is used to cut off the airflow connection between described clamping driving mechanism and the described vacuum chamber 400; Be provided with bearing 410 between described Hollow Transmission Shafts 13 and the described rotating shaft 22 and near the described nose end of inserting, described bearing 410 is used to guarantee the transmission stability of described rotating shaft 22.The turbine 14 of described upset driving mechanism is fixed on the described Hollow Transmission Shafts 13, and what described Hollow Transmission Shafts 13 was passed flange seat 404, described chamber wall 401 successively inserts hole and fixing by the bearing that places described flange seat 404 inside (figure do not show); Described flange seat 404 is fixed on the chamber wall 401 of described vacuum chamber by screw 405, the sealing ring (figure does not show) that is " O " type also is housed between described flange seat 404 and the described chamber wall 401, in addition, second magnetic fluid seal 406 is housed between described flange seat 404 and the described Hollow Transmission Shafts 13, and described second magnetic fluid seal 406 is used to cut off the airflow connection between described upset driving mechanism and the described vacuum chamber 400; The other end of described Hollow Transmission Shafts 13 is fixed on a plate 407 by described installing hole 15 and screw 151, and described connecting plate 407 is fixedlyed connected with the mounting panel 332 of described clamping device for base plate; Driving described worm screw 12 by described first driving mechanism 11 rotates, then drive described turbine 14 and 13 rotations of described Hollow Transmission Shafts, the final upset that drives described clamping device for base plate realizes the upset to the substrate 100 that is in described clamping device for base plate inside.In the process of described clamping type substrate turnover device 1 work, for the safety that guarantees whole process and stable, when described clamping driving mechanism action, it is static that described upset driving mechanism keeps.
Now the operation principle and the process of clamping type substrate turnover device of the present invention are done detailed explanation in conjunction with Fig. 1 to Fig. 7 and Fig. 9 to Figure 10:
When clamping type substrate turnover device of the present invention was in initial condition, described upper and lower pressing plate 320a, 320b were the state of being separated from each other; When second driving mechanism 21 (realizing with servomotor here) of described clamping driving mechanism drives power transmission shaft 22 and cam 310 and counterclockwise rotates, be separately fixed at described on, lower platen 320a, two roller follower 322a on the 320b, 322b is respectively along two arc guide barrel 311a of described cam 310, the arching trajectory face gliding direction of 311b rolls, drive simultaneously that described top board 320a and ceiling molding 321a slide in the described first top shoe 331a by the described first upper rail 330a and toward the third side to slip, and drive that described lower platen 320b and play press strip 321b slide in the described first sliding block 331b by the described first lower guideway 330b and past third side to slip, thereby realize on described first, following press strip 321a, 321b is to the clamping function of described substrate 100; After clamping described substrate 100, described substrate 100 is being carried out in the process of processed, first driving mechanism 11 (realizing with servomotor here) by described upset driving mechanism drives described worm screw 12 rotations, thereby drive described turbine 14 and 13 rotations of described Hollow Transmission Shafts, the final upset that drives described clamping device for base plate realizes the upset to the substrate 100 that is in described clamping device for base plate inside; After described substrate 100 processed are finished, drive the rotation of second driving mechanism, 21 driven rotary axles 22 and cam 310 clockwise directions, make be separately fixed at described on, lower platen 320a, two roller follower 322a on the 320b, 322b is respectively along two arc guide barrel 311a of described cam 310, sliding direction rolls on the arching trajectory face of 311b, drive simultaneously that described top board 320a and ceiling molding 321a slide in the described first top shoe 331a by the described first upper rail 330a and toward sliding with the opposing direction in centre, and drive that described lower platen 320b and play press strip 321b slide in the described first sliding block 331b by the described first lower guideway 330b and past and the opposing direction slip in centre, thereby realize on described first, following press strip 321a, 321b is to the release function of described substrate 100.
In like manner, the operation principle of another specific embodiment of clamping type substrate turnover device 1 of the present invention is also caught up with and is stated equally, describes in detail owing to top, is not setting forth here.
As from the foregoing, because clamping type substrate turnover device 1 of the present invention comprises the clamping driving mechanism, upset driving mechanism and clamping device for base plate, described clamping device for base plate comprises driving bindiny mechanism, clamp system and fixed guide mechanism, described clamp system comprises, following press strip 321a, 321b, described ceiling molding 321a is installed on described top board 320a and goes up and stretch in the described clamping zone 323 and described press strip 321b down are installed on described lower platen 320b and go up and stretch in the described clamping zone 323, described rotating shaft 22 rotations of second driving mechanism, 21 drives when described clamping driving mechanism, thereby when driving described cam 310 rotations of fixedlying connected with described rotating shaft 22, be installed in respectively described on, lower platen 320a, two roller follower 322a on the 320b, 322b is according to the rotation of described cam 310 and along two arc guide barrel 311a of described cam 310, the arching trajectory face motion of 311b, driving described top board 320a and ceiling molding 321a simultaneously slides in described top shoe 331a by described upper rail 330a and drives described lower platen 320b and following press strip 321b and slide in described sliding block 331b by described lower guideway 330b, thereby control described clamp system on, lower platen 320a, 320b near or separately, and then make ceiling molding 321a on the described top board 320a and the following press strip 321b on the described lower platen 320b clamp or unclamp operation to described substrate 100; When first driving mechanism 11 of described upset driving mechanism drives described worm screw 12 rotations, thereby when driving described turbine 14 with described Hollow Transmission Shafts 13 rotations, the described clamping device for base plate of fixedlying connected with described Hollow Transmission Shafts 13 is and then rotation also.Therefore, described clamping type substrate turnover device 1 can be realized substrate 100 omnibearing clampings, transmission and upset, and can keep the stable of substrate 100 in transmission and switching process; In addition, again because described clamping type substrate turnover device 1 is upper and lower double-layer structure, so structure is comparatively simple, and described substrate 100 is had the better protect performance.
Above disclosed only is the preferred embodiments of the present invention, can not limit the present invention's interest field certainly with this, and therefore the equivalent variations of being done according to the present patent application claim still belongs to the scope that the present invention is contained.
Claims (10)
1. a clamping type substrate turnover device is applicable to substrate is carried out clamping and upset, it is characterized in that described clamping type substrate turnover device comprises:
The upset driving mechanism, described upset driving mechanism comprises first driving mechanism, worm screw, Hollow Transmission Shafts and turbine, described worm screw is located on described first driving mechanism, described turbine be fixed on the described Hollow Transmission Shafts and with described worm engaging, offer the installing hole that is used to connect described clamping device for base plate on the end face of one end of described Hollow Transmission Shafts, described Hollow Transmission Shafts is hollow structure, and described upset driving mechanism provides the power of substrate overturn;
The clamping driving mechanism, described clamping driving mechanism comprises second driving mechanism, rotating shaft, mount pad and mounting blocks, described second driving mechanism is fixed in the other end of described Hollow Transmission Shafts by described mount pad, one end of described rotating shaft is fixed on described second driving mechanism, the other end of described rotating shaft passes described Hollow Transmission Shafts and fixedlys connected with described mounting blocks, and described clamping driving mechanism provides the power that clamps or unclamp substrate;
Clamping device for base plate, described clamping device for base plate comprises driving bindiny mechanism, clamp system and fixed guide mechanism, described driving bindiny mechanism comprises cam, and described cam symmetry offers two arc guide barrels, and the mounting blocks of described clamping driving mechanism is fixedly connected on the described cam;
Described clamp system comprises, lower platen and at least one pair of press strip group, described press strip group comprises, following press strip, on described, rounded roller follower respectively is installed on the respective side of lower platen, described roller follower slidably is installed on respectively in two arc guide barrels of described cam, form clamping zone between described top board and the described lower platen, described ceiling molding is installed on the described top board and stretches in the described clamping zone, described press strip down is installed on the described lower platen and stretches in the described clamping zone, and described ceiling molding and described press strip down are over against setting, substrate is held between described ceiling molding and the described down press strip, and the described clamp system of described clamping drive mechanism clamps or unclamps substrate;
Described fixed guide mechanism comprises guide rail, slide block and mounting panel, described mounting panel is arranged at outside the described clamping zone, described guide rail and described slide block be engagement connection slidably, and described guide rail and described slide block are connected between described mounting panel and described top board and the lower platen, described guide rail is vertical with described upper and lower pressing plate with the glide direction of described slide block, and the fixing described upper and lower pressing plate of described fixed guide mechanism is also controlled described upper and lower pressing plate and moved along a straight line all the time.
2. clamping type substrate turnover device as claimed in claim 1, it is characterized in that, described clamping type substrate turnover device carries out clamping and upset to the substrate in the vacuum chamber that vacuum environment is provided, be provided with the first sealing magnetic current spare between described rotating shaft and the described Hollow Transmission Shafts and near described mount pad end, described first magnetic fluid seal is cut off the airflow connection between described clamping driving mechanism and the described vacuum chamber.
3. clamping type substrate turnover device as claimed in claim 2, it is characterized in that, offer on the chamber wall of described vacuum chamber and insert the hole, described Hollow Transmission Shafts is with flange seat outward and described flange seat is fixedly installed on the chamber wall at described installing hole two ends, described flange seat is hollow structure, one end of described Hollow Transmission Shafts passes described flange seat and the described hole of inserting successively, be provided with the second sealing magnetic current spare between described flange seat and the described Hollow Transmission Shafts, described second magnetic fluid seal is cut off the airflow connection between described upset driving mechanism and the described vacuum chamber.
4. clamping type substrate turnover device as claimed in claim 1, it is characterized in that, described guide rail comprises first upper rail and first lower guideway, described first upper rail is fixedlyed connected with described top board, described first lower guideway is fixedlyed connected with described lower platen, and described first lower guideway and described first upper rail are parallel to each other, described slide block comprises first top shoe and first sliding block of fixedlying connected with described mounting panel, described first top shoe and described first upper rail be engagement connection slidably, and a described sliding block and described first lower guideway be engagement connection slidably.
5. clamping type substrate turnover device as claimed in claim 1, it is characterized in that, described guide rail comprises second upper rail and second lower guideway of fixedlying connected with described mounting panel, and described second upper rail and second lower guideway are parallel to each other, described slide block comprises second top shoe and second sliding block, described second top shoe is fixedlyed connected with described top board, described second sliding block is fixedlyed connected with described lower platen, described second top shoe and described second upper rail be engagement connection slidably, and described second sliding block and described second lower guideway be engagement connection slidably.
6. clamping type substrate turnover device as claimed in claim 1 is characterized in that described clamp system also comprises at least two springs, and two described springs are conflicted respectively and are connected between described ceiling molding and described top board and described press strip down and the described lower platen.
7. clamping type substrate turnover device as claimed in claim 1, it is characterized in that, all offer several dead slots on the surface of described upper and lower pressing plate, and the described respective side of described upper and lower pressing plate all offers groove, described roller follower is positioned at described groove.
8. clamping type substrate turnover device as claimed in claim 1 is characterized in that, described upper and lower press strip has boss and the concave surface that cooperatively interacts respectively.
9. clamping type substrate turnover device as claimed in claim 1 is characterized in that, described first driving mechanism is servomotor or air-cylinder type motor.
10. clamping type substrate turnover device as claimed in claim 1 is characterized in that, described second driving mechanism is servomotor or air-cylinder type motor.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102469107A CN101814586B (en) | 2009-12-01 | 2009-12-01 | Clamping type substrate turnover device |
| PCT/CN2009/076114 WO2011066701A1 (en) | 2009-12-01 | 2009-12-28 | Clamping type substrate turning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102469107A CN101814586B (en) | 2009-12-01 | 2009-12-01 | Clamping type substrate turnover device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101814586A true CN101814586A (en) | 2010-08-25 |
| CN101814586B CN101814586B (en) | 2011-09-28 |
Family
ID=42621757
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009102469107A Expired - Fee Related CN101814586B (en) | 2009-12-01 | 2009-12-01 | Clamping type substrate turnover device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN101814586B (en) |
| WO (1) | WO2011066701A1 (en) |
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101972501A (en) * | 2010-10-18 | 2011-02-16 | 迈柯唯医疗设备(苏州)有限公司 | Intelligent closed-loop identification, resetting and feedback device |
| CN103871947A (en) * | 2012-12-14 | 2014-06-18 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Clamping device and plasma processing device |
| CN104340729A (en) * | 2013-07-31 | 2015-02-11 | 哈里斯股份有限公司 | A thin-plate conveying device and a thin-plate cleaning system |
| CN104340730A (en) * | 2013-07-31 | 2015-02-11 | 哈里斯股份有限公司 | Transparent panel cleaning system |
| CN104761155A (en) * | 2015-03-27 | 2015-07-08 | 广东韦达尔科技有限公司 | Cooperation rotating mechanism of film sticking machine |
| CN104772642A (en) * | 2014-01-14 | 2015-07-15 | 鸿富锦精密工业（深圳）有限公司 | Turnover device |
| CN104816519A (en) * | 2015-03-27 | 2015-08-05 | 广东韦达尔科技有限公司 | Clamping apparatus of film laminating machine |
| CN104828602A (en) * | 2015-03-27 | 2015-08-12 | 广东韦达尔科技有限公司 | Side-turning mechanism for laminator |
| CN104843469A (en) * | 2015-04-27 | 2015-08-19 | 歌尔声学股份有限公司 | Tool turning device and turning method thereof |
| CN105527469A (en) * | 2016-01-06 | 2016-04-27 | 珠海格力电器股份有限公司 | A clamping structure for changing FCT test equipment sky board |
| CN105784724A (en) * | 2016-03-07 | 2016-07-20 | 京东方科技集团股份有限公司 | Flat panel product detecting device |
| CN107322711A (en) * | 2017-08-25 | 2017-11-07 | 湖州民阁木业有限公司 | A kind of rotary wood board splicing machine |
| CN107894518A (en) * | 2017-11-09 | 2018-04-10 | 奥士康科技股份有限公司 | A kind of double width material substrate examines car |
| CN109454504A (en) * | 2018-12-28 | 2019-03-12 | 天津时代创业科技有限公司 | Automatical feeding system is used in table knife polishing |
| CN110039470A (en) * | 2019-05-20 | 2019-07-23 | 昆明理工大学 | A kind of multi-functional special fixture on assembling line |
| CN110491817A (en) * | 2019-09-03 | 2019-11-22 | 罗博特科智能科技股份有限公司 | A kind of adjustable slice turning device |
| CN110540037A (en) * | 2018-08-21 | 2019-12-06 | 蓝思智能机器人(长沙)有限公司 | Hot bending forming equipment and mould turnover mechanism thereof |
| CN112753788A (en) * | 2021-01-15 | 2021-05-07 | 韦祝英 | Tea leaf baking machine with automatic overturning function |
| CN115948720A (en) * | 2023-03-14 | 2023-04-11 | 上海陛通半导体能源科技股份有限公司 | Thin film deposition apparatus |
| CN116438642A (en) * | 2020-10-20 | 2023-07-14 | 塞姆西斯科有限责任公司 | Clamping device for fixing a substrate for surface treatment of the substrate |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2002050863A1 (en) * | 2000-12-19 | 2004-04-22 | 株式会社アドバンテスト | Sample carrier fixing mechanism |
| GB2392309B (en) * | 2002-08-22 | 2004-10-27 | Leica Microsys Lithography Ltd | Substrate loading and unloading apparatus |
| CN100390954C (en) * | 2004-05-09 | 2008-05-28 | 郑光镐 | Plane holding device |
| JP4467367B2 (en) * | 2004-06-22 | 2010-05-26 | 大日本スクリーン製造株式会社 | Substrate reversing device, substrate transporting device, substrate processing device, substrate reversing method, substrate transporting method, and substrate processing method |
| CN101510523B (en) * | 2009-03-19 | 2010-08-25 | 友达光电股份有限公司 | Substrate overturn platform and method for substrate overturn |
-
2009
- 2009-12-01 CN CN2009102469107A patent/CN101814586B/en not_active Expired - Fee Related
- 2009-12-28 WO PCT/CN2009/076114 patent/WO2011066701A1/en active Application Filing
Cited By (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101972501A (en) * | 2010-10-18 | 2011-02-16 | 迈柯唯医疗设备(苏州)有限公司 | Intelligent closed-loop identification, resetting and feedback device |
| CN103871947A (en) * | 2012-12-14 | 2014-06-18 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Clamping device and plasma processing device |
| CN104340729A (en) * | 2013-07-31 | 2015-02-11 | 哈里斯股份有限公司 | A thin-plate conveying device and a thin-plate cleaning system |
| CN104340730A (en) * | 2013-07-31 | 2015-02-11 | 哈里斯股份有限公司 | Transparent panel cleaning system |
| CN104340729B (en) * | 2013-07-31 | 2017-04-12 | 哈里斯股份有限公司 | A thin-plate conveying device and a thin-plate cleaning system |
| CN104772642B (en) * | 2014-01-14 | 2017-02-15 | 鸿富锦精密工业（深圳）有限公司 | Turnover device |
| CN104772642A (en) * | 2014-01-14 | 2015-07-15 | 鸿富锦精密工业（深圳）有限公司 | Turnover device |
| CN104816519A (en) * | 2015-03-27 | 2015-08-05 | 广东韦达尔科技有限公司 | Clamping apparatus of film laminating machine |
| CN104828602A (en) * | 2015-03-27 | 2015-08-12 | 广东韦达尔科技有限公司 | Side-turning mechanism for laminator |
| CN104761155A (en) * | 2015-03-27 | 2015-07-08 | 广东韦达尔科技有限公司 | Cooperation rotating mechanism of film sticking machine |
| CN104816519B (en) * | 2015-03-27 | 2017-05-17 | 广东韦达尔科技有限公司 | Clamping apparatus of film laminating machine |
| CN104761155B (en) * | 2015-03-27 | 2017-05-17 | 广东韦达尔科技有限公司 | Cooperation rotating mechanism of film sticking machine |
| CN104843469A (en) * | 2015-04-27 | 2015-08-19 | 歌尔声学股份有限公司 | Tool turning device and turning method thereof |
| CN105527469A (en) * | 2016-01-06 | 2016-04-27 | 珠海格力电器股份有限公司 | A clamping structure for changing FCT test equipment sky board |
| CN105784724A (en) * | 2016-03-07 | 2016-07-20 | 京东方科技集团股份有限公司 | Flat panel product detecting device |
| CN107322711A (en) * | 2017-08-25 | 2017-11-07 | 湖州民阁木业有限公司 | A kind of rotary wood board splicing machine |
| CN107894518A (en) * | 2017-11-09 | 2018-04-10 | 奥士康科技股份有限公司 | A kind of double width material substrate examines car |
| CN110540037A (en) * | 2018-08-21 | 2019-12-06 | 蓝思智能机器人(长沙)有限公司 | Hot bending forming equipment and mould turnover mechanism thereof |
| CN109454504A (en) * | 2018-12-28 | 2019-03-12 | 天津时代创业科技有限公司 | Automatical feeding system is used in table knife polishing |
| CN110039470A (en) * | 2019-05-20 | 2019-07-23 | 昆明理工大学 | A kind of multi-functional special fixture on assembling line |
| CN110491817A (en) * | 2019-09-03 | 2019-11-22 | 罗博特科智能科技股份有限公司 | A kind of adjustable slice turning device |
| CN110491817B (en) * | 2019-09-03 | 2024-04-26 | 罗博特科智能科技股份有限公司 | Adjustable sheet turning device |
| CN116438642A (en) * | 2020-10-20 | 2023-07-14 | 塞姆西斯科有限责任公司 | Clamping device for fixing a substrate for surface treatment of the substrate |
| CN112753788A (en) * | 2021-01-15 | 2021-05-07 | 韦祝英 | Tea leaf baking machine with automatic overturning function |
| CN112753788B (en) * | 2021-01-15 | 2022-11-22 | 湖北小稀藤茶叶有限公司 | Tea leaf baking machine with automatic overturning function |
| CN115948720A (en) * | 2023-03-14 | 2023-04-11 | 上海陛通半导体能源科技股份有限公司 | Thin film deposition apparatus |
| CN115948720B (en) * | 2023-03-14 | 2023-06-02 | 上海陛通半导体能源科技股份有限公司 | Thin film deposition apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2011066701A1 (en) | 2011-06-09 |
| CN101814586B (en) | 2011-09-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101814586B (en) | Clamping type substrate turnover device | |
| CN201590412U (en) | Clamping-type upending device | |
| KR101623325B1 (en) | Substrate bonding apparatus and substrate bonding method | |
| US10962456B2 (en) | Flexible display auxiliary device and foldable mobile terminal | |
| WO2021238434A1 (en) | Curved-surface laminating device and curved-surface laminating method | |
| WO2015131321A1 (en) | High-precision liquid-crystal screen laminating machine | |
| KR102131962B1 (en) | Manufacturing device for a cover window and manufacturing method for the cover window | |
| CN203705763U (en) | Backlight source film attaching jig | |
| CN201439257U (en) | Coating device | |
| WO2020037785A1 (en) | Attaching device and attaching method for bending display panel | |
| US20180004028A1 (en) | Integrated Fully-sealed Liquid Cryatal Screen and Manufacturing Process for Same | |
| CN207088653U (en) | High-precision electronic paper make-up machine | |
| WO2013010474A1 (en) | Piezo-capacitive effect-based printed flexible touchscreen display | |
| CN211496019U (en) | Transferring and placing device for glass plate | |
| CN101656224B (en) | Clamping device for base plate | |
| CN201257792Y (en) | Attachment apparatus | |
| CN107283989A (en) | Press fit device and the method for pressing colloid on a display panel | |
| JP2010257205A (en) | Touch panel and manufacturing method therefor | |
| CN115050858A (en) | Mini/Micro LED chip pneumatic huge transfer device | |
| CN215200919U (en) | Press lamp strip to glue tool | |
| CN209348934U (en) | It is a kind of for coating the device of planar substrates | |
| CN1921509A (en) | Rotatable slide cover type mobile communication terminal, slidable and rotatable hinge module | |
| CN101947878B (en) | Transfer printing method of LED light source black oil | |
| CN111025702B (en) | Method for manufacturing large-size liquid crystal panel through bottom-up full lamination | |
| CN113433722A (en) | Positioning platform for attaching liquid glue and working method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PP01 | Preservation of patent right |
Effective date of registration: 20131205 Granted publication date: 20110928 |
|
| RINS | Preservation of patent right or utility model and its discharge | ||
| PD01 | Discharge of preservation of patent |
Date of cancellation: 20140905 Granted publication date: 20110928 |
|
| PP01 | Preservation of patent right |
Effective date of registration: 20140905 Granted publication date: 20110928 |
|
| RINS | Preservation of patent right or utility model and its discharge | ||
| PD01 | Discharge of preservation of patent |
Date of cancellation: 20150905 Granted publication date: 20110928 |
|
| PP01 | Preservation of patent right |
Effective date of registration: 20150905 Granted publication date: 20110928 |
|
| RINS | Preservation of patent right or utility model and its discharge | ||
| PD01 | Discharge of preservation of patent |
Date of cancellation: 20210904 Granted publication date: 20110928 |
|
| PD01 | Discharge of preservation of patent | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110928 Termination date: 20131201 |