CN209039572U - Evaporated device - Google Patents
Evaporated device Download PDFInfo
- Publication number
- CN209039572U CN209039572U CN201821722248.9U CN201821722248U CN209039572U CN 209039572 U CN209039572 U CN 209039572U CN 201821722248 U CN201821722248 U CN 201821722248U CN 209039572 U CN209039572 U CN 209039572U
- Authority
- CN
- China
- Prior art keywords
- cavity
- organic material
- vapor deposition
- vacuum
- evaporation coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The utility model relates to a kind of evaporated device, it can be automatically filled with machine material in vacuum environment, and glass substrate is deposited, wherein evaporated device includes: vapor deposition cavity；Evaporation coating device is set in vapor deposition cavity, and evaporation coating device is for being deposited organic material；Filler cavity is connected with vapor deposition cavity, and filler cavity is for storing organic material；Vacuum valve is set between vapor deposition cavity and filler cavity, and vacuum valve is for being deposited cavity and the connection of filler cavity or being isolated；Feed device is set in packing cavity body, and the intracorporal organic material of packing cavity for being delivered in evaporation coating device by feed device in vacuum break valve；And sensor, it is set in vapor deposition cavity, sensor is used to control the opening and closing and feed device feeding of vacuum valve.The utility model can be accomplished to carry out filler under vacuum state completely, so that evaporated device is continuously maintained in vacuum state and carry out continuous evaporating-plating, improve production efficiency.
Description
Technical field
The utility model relates to a kind of evaporated devices, and machine material can be automatically filled in vacuum environment more particularly to one kind
The evaporated device of material.
Background technique
OLED (Organic Light-Emitting Diode, organic light emitting diode, abbreviation OLED) display screen due to
With thin, light, wide viewing angle, actively shine, luminescent color is continuously adjustable, at low cost, fast response time, energy consumption are small, driving voltage
It is low, operating temperature range is wide, simple production process, luminous efficiency are high and can Flexible Displays the advantages that, oneself is listed in great development
The next-generation display technology of prospect.
OLED device is formed on substrate and generallys use evaporation process, is referred in certain heated under vacuum vapor deposition
Material makes the steam of evaporation material fusing (or distillation) Cheng Yuanzi, molecule or atomic group composition, then condenses in glass substrate table
Face film forming, to form the functional layer of OLED device.
Evaporation process can be divided into point source vapor deposition according to the type of evaporation source (heating device of evaporation material) and line source is deposited,
Wherein the development of point source evaporation coating technique is more mature, realizes volume production in production line.Vacuum degree and vapor deposition temperature are vapor deposition works
Important technology index in skill when needing to add evaporation source into deposited chamber, needs first to stop to produce, make in the prior art
Equipment cooling and vacuum breaker and filled movement is carried out under atmospheric environment, when evaporation source addition after need again to vapor deposition
Room vacuumizes and heats evaporation source.
As it can be seen that existing evaporated device can not continue that vacuum state is kept to carry out continuous evaporating-plating, production efficiency is lower, influences
The production mobility (activation) of evaporator, and can waste organic material, leads to that increased production cost, in addition, to
Addition evaporation source also easily causes dust to enter in deposited chamber, to cause the pollution of overall process may.
Utility model content
The technical problem to be solved by the utility model is to provide a kind of evaporated devices, to solve the above technical problems, tool
Body technique scheme is as follows: providing a kind of evaporated device, can be automatically filled with machine material in vacuum environment, and carry out to glass substrate
Vapor deposition, wherein evaporated device includes: vapor deposition cavity；Evaporation coating device is set in vapor deposition cavity, and evaporation coating device is organic for being deposited
Material；Filler cavity is connected with vapor deposition cavity, and filler cavity is for storing organic material；Vacuum valve is set to vapor deposition cavity
Between filler cavity, vacuum valve is for being deposited cavity and the connection of filler cavity or being isolated；Feed device is set to filler
In cavity, the intracorporal organic material of packing cavity for being delivered in evaporation coating device by feed device in vacuum break valve；With
And sensor, it is set in vapor deposition cavity, sensor is used to control the opening and closing and feed device feeding of vacuum valve.Its
In, when feed device conveys organic material, filler cavity is identical as the vapor deposition vacuum degree of cavity.
It further include being set to the intracorporal magnetic sheet of vapor deposition chamber and metal shielding board, magnetic sheet and steaming in a kind of possible design
The connection of cavity upper end is plated, glass substrate is set to below magnetic sheet, and metal shielding board is set to below glass substrate, magnetic sheet, glass
Substrate and metal shielding board are located above evaporation coating device.
Further include organic material controller in a kind of possible design, is electrically connected with evaporation coating device, organic material control
Device processed is used to control the vapor deposition of evaporation coating device.
In a kind of possible design, when sensor senses the organic material in evaporation coating device less than preset value, transmission
First signal controls vacuum break valve, and controls feed device and the intracorporal organic material of packing cavity is delivered to evaporation coating device
It is interior；When sensor senses the organic material in evaporation coating device greater than preset value, the second signal of transmission, control feed device stopping
Organic material is conveyed, and controls vacuum valve closing.
In a kind of possible design, evaporation coating device includes crucible and the heating source for heating crucible, heating source setting
Below crucible.
In a kind of possible design, sensor is weighing sensor, is set to below crucible, and weighing sensor passes through sense
It surveys the weight of crucible and organic material and judges whether organic material is less than preset value.
Further include vacuum evacuation device in a kind of possible design, connect with filler cavity, vacuum evacuation device will be for that will fill out
Material cavity vacuumizes.
In a kind of possible design, organic material rack is additionally provided in packing cavity body, organic material rack is used for
Carry organic material.
In a kind of possible design, vacuum valve is operated pneumatic valve.
In a kind of possible design, feed device is the combination of multi-spindle machining hand or more cylinders and multiple linear motors
Mechanism.
The utility model has had the advantage that compared with prior art:
For the evaporated device of the utility model in filler, filler cavity is identical as the vapor deposition intracorporal vacuum degree of chamber, can be complete
Accomplish to carry out filler under vacuum state, so that evaporated device is continuously maintained in vacuum state and carry out continuous evaporating-plating, improve production efficiency,
It will not cause the too many loss of organic material.Simultaneously also avoid into deposited chamber add organic material when, cause dust into
Enter cavity is deposited, to cause the pollution of overall process may.
Detailed description of the invention
Using attached drawing, the utility model is described in further detail, but the content in attached drawing does not constitute and appoints to the utility model
What is limited.
Fig. 1 is the structural schematic diagram of the evaporated device of an embodiment of the present invention.
Fig. 2 is the structural schematic diagram when evaporated device of an embodiment of the present invention takes organic material.
Structural schematic diagram when Fig. 3 is the evaporated device conveying organic material of an embodiment of the present invention.
Fig. 4 is the structural schematic diagram after the completion of the evaporated device conveying organic material of an embodiment of the present invention.
Specific embodiment
About its " first " used herein, " second " etc., the meaning of order or cis-position is not especially censured, also non-use
The component described with limiting the application just for the sake of difference with same technique term or operation.
A kind of evaporated device 1 is disclosed in one embodiment of the utility model, is please referred to shown in Fig. 1-4, it can be in vacuum ring
Border is automatically filled with machine material 2, and glass substrate 3 is deposited, and evaporated device 1 includes vapor deposition cavity 4, evaporation coating device 5, fills out
Expect cavity 6, vacuum valve 7, feed device 8 and sensor 9, in which:
Vapor deposition cavity 4 is mainly used for provide the vapor deposition environment of a condition of high vacuum degree when vapor deposition organic material 2, practical at this
Can there is no particular/special requirement for the shape selection that cavity 4 is deposited in novel, referring to this field conventional selection, for example, originally
Rectangular box structure shown in utility model Fig. 1-4.
In a preferred embodiment, it please refers to shown in Fig. 1-4, evaporated device 1 further includes the magnetic being set in vapor deposition cavity 4
Plate 41 and metal shielding board (mask) 42, magnetic sheet 41 are connect with vapor deposition 4 upper end of cavity, and connection type disclosed in the present embodiment is magnetic
Plate 41 is connect by a connecting rod 43 being vertically arranged with vapor deposition cavity 4, and the both ends of connecting rod 43 are respectively and inside vapor deposition cavity 4
Top and the connection of 41 upper end middle position of magnetic sheet, the connection type of right magnetic sheet 41 and vapor deposition cavity 4 are not limited thereto, this field
Technical staff can select other connection types according to the actual situation, such as directly that magnetic sheet 41 is direct by a buckle structure
It is mounted in vapor deposition cavity 4.Glass substrate 3 is set to 41 lower section of magnetic sheet, and metal shielding board 42 is set to 3 lower section of glass substrate,
Metal shielding board 42 is located at 5 top of evaporation coating device for shielding electron reflection, magnetic sheet, glass substrate 3 and metal shielding board 42, with
Make evaporation coating device 5 when organic material 2 is deposited, the organic material 2 after gasification can be deposited on glass substrate 3.
In a preferred embodiment, organic material 2 is organic material, organic material preferably OLED required when being deposited.
It please refers to shown in Fig. 1-4, evaporation coating device 5 is set in vapor deposition cavity 4, and evaporation coating device 5 is for being deposited organic material
2, evaporation coating device 5 disclosed in the present embodiment includes crucible 51 and the heating source 52 for heating crucible 51, and crucible 51 is for installing
Organic material 2, particular/special requirement no for the selection of the shape of crucible 51 in the present invention, referring to this field conventional selection
, for example, rectangle or circle.Heating source 52 is set to 51 lower section of crucible, and heating source 52 can choose heater strip or heating
Cylinder, however, it is not limited to this.Heating source 52 evaporates organic material 2 by heating crucible 51, and the structure of right evaporation coating device 5 is not
It is confined to this, those skilled in the art can the other suitable evaporation coating devices of introduction selection according to the present utility model.
In a preferred embodiment, it please refers to shown in Fig. 1-4, evaporated device 1 further includes organic material controller 10, organic
Control of material device 10 and evaporation coating device 5 are electrically connected, and organic material controller 10 is used to control the vapor deposition of evaporation coating device 5, this reality
Applying example, further disclosed organic material controller 10 is electrically connected with heating source 52, and organic material controller 10 passes through control
Whether whether heating source 52 heat and control evaporation coating device 5 and be deposited, as organic material controller 10 and the (heating of evaporation coating device 5
Source 52) connection circuit be not the application key protection point, therefore, herein without repeating.
Filler cavity 6 is connected with vapor deposition cavity 4, and filler cavity 6 is right in the present invention for storing organic material 2
Can there is no particular/special requirement in the shape selection of filler cavity 6, referring to this field conventional selection, for example, the utility model
Rectangular box structure shown in Fig. 1-4.
In a preferred embodiment, it please refers to shown in Fig. 1, organic material rack 61 is additionally provided in filler cavity 6, it is organic
Material rack 61 is for carrying organic material 2, and further disclosed organic material rack 61 includes first to the present embodiment
Fagging 611, the second horizontal supporting plate 612 and vertical plate 613, one end of first level support plate 611 and the side of filler cavity 6
Vertical connection, one end of vertical plate 613 is vertical with the upper end of filler cavity 6 to be connect, one end of the second horizontal supporting plate 612 with erect
The other end of straight panel 613 vertically connects, the second horizontal supporting plate 612 be located at 611 upper end of first level support plate and with first
Horizontal supporting plate 611 forms an opening, and the structure of right organic material rack 61 is not limited thereto, and those skilled in the art can
Other suitable organic material rack structures are selected with introduction according to the present invention.
In a preferred embodiment, it please refers to shown in Fig. 1-4, evaporated device 1 further includes vacuum evacuation device 11, vacuum means
It sets 11 to connect with filler cavity 6, (vacuum valve 7 at this time, which is in, to close when being filled organic material 2 in filler cavity 6
Closed state), filler cavity 6 is individually subjected to vacuum breaker, and organic material 2 is manually placed on filler cavity 6 under atmospheric pressure
It is interior, after placement, filler cavity 6 is sealed, and filler cavity 6 is vacuumized by vacuum evacuation device 11, makes filler
The vacuum degree of cavity 6 reaches vacuum degree identical with vapor deposition cavity 4.
It please refers to shown in Fig. 1-4, vacuum valve 7 is set between vapor deposition cavity 4 and filler cavity 6, and vacuum valve 7 is used for
Vapor deposition cavity 4 and the connection of filler cavity 6 is isolated, and vacuum valve 7 disclosed in the present embodiment is operated pneumatic valve, but is not limited to
In this, those skilled in the art also can choose other suitable vacuum valves, for example, electromagnetic valve.
It please refers to shown in Fig. 1-4, feed device 8 is set in filler cavity 6, and feed device 8 in vacuum valve 7 for beating
The organic material 2 in filler cavity 6 is delivered in evaporation coating device 5 when opening, feed device 8 disclosed in the present embodiment is multiaxis machine
Tool hand, such as six axis robot or five axis robots, the selection of right feed device 8 are not limited thereto, those skilled in the art
Also other suitable feed devices, such as the combined mechanism of more cylinders and multiple linear motors be can choose.
It please refers to shown in Fig. 1-4, sensor 9 is set in vapor deposition cavity 4, and sensor 9 is for controlling the vacuum valve
Opening and closing and the feed device feeding, specific control mode be sensor 9 sense evaporation coating device 5 in organic material
Whether material 2 in the present invention for the size of the preset value does not have particular/special requirement, those skilled in the art less than a preset value
Corresponding preset value can be arranged according to actual production demand in member.When sensor 9 senses the organic material 2 in evaporation coating device 5
Less than preset value, the first signal is sent, control vacuum valve 7 is opened, please referred to shown in Fig. 3, and control feed device 8 for filler
Organic material 2 in cavity 6 is delivered in evaporation coating device 5, organic material controller 10 at this time can control evaporation coating device 5 after
It is continuous to be deposited, it also can control evaporation coating device 5 and stop vapor deposition, be deposited again after the completion of the conveying of organic material 2, preferably
Organic material controller 10 controls evaporation coating device 5 and continues to be deposited, so that evaporated device 1 is continuously maintained in vacuum state progress
Continuous evaporating-plating, and then improve production efficiency；When sensor 9 senses the organic material 2 in evaporation coating device 5 greater than preset value, hair
The second signal is sent, control feed device 8 stops conveying organic material 2, and controls the closing of vacuum valve 7, please refers to shown in Fig. 4.
In a preferred embodiment, sensor 9 is weighing sensor, and weighing sensor is set to 51 lower section of crucible, weighing
Sensor judges whether organic material 2 is less than preset value by the weight of sensing crucible 51 and organic material 2, such as setting is in advance
If value is 1KG, judge that organic material 2 is less than 1KG when weighing sensor senses the weight of crucible 51 and organic material 2,
The first signal is sent, control vacuum valve 7 is opened, please referred to shown in Fig. 3, and control feed device 8 for having in filler cavity 6
Machine material 2 is delivered in crucible 51, is please referred to shown in Fig. 2,1 and 3, with increasing for the organic material 2 in crucible 51, works as sensing
Device 9 senses the organic material 2 in evaporation coating device 5 greater than 1KG, sends the second signal, it is organic that control feed device 8 stops conveying
Material 2, when feed device 8 is retracted into filler cavity 6, control vacuum valve 7 is closed, and is please referred to shown in Fig. 4, meanwhile, with
The vapor deposition of evaporation coating device 5, reduce the organic material 2 in crucible 51, when the weight of crucible 51 and organic material 2 again less than
When 1KG, the evaporated device 1 of the utility model can be filled organic material 2 again, so that evaporated device is continuously maintained in vacuum
State carries out continuous evaporating-plating, improves production efficiency.
In the present invention, when feed device 8 conveys organic material 2, the vacuum of filler cavity 6 and vapor deposition cavity 4
Spend it is identical, do not need to vapor deposition 4 vacuum breaker of cavity, reduce the excessive consume of organic material, while also avoiding the powder in air
Dirt enters vapor deposition cavity 4, and then the problem of lead to the pollution of overall process.
Several preferred embodiments of the utility model have shown and described in above description, but as previously described, it should be understood that
The utility model is not limited to forms disclosed herein, and is not to be taken as the exclusion to other embodiments, and can be used for
Other combinations, modifications, and environments, and above-mentioned introduction or correlation can be passed through within the scope of the inventive concept described herein
The technology or knowledge in field are modified.And changes and modifications made by those skilled in the art do not depart from the spirit of the utility model
And range, then it all should be in the protection scope of the appended claims for the utility model.
Claims (10)
1. a kind of evaporated device can be automatically filled with machine material in vacuum environment, and glass substrate is deposited, feature exists
In the evaporated device includes:
Cavity is deposited；
Evaporation coating device is set in the vapor deposition cavity, and the evaporation coating device is for being deposited the organic material；
Filler cavity is connected with the vapor deposition cavity, and the filler cavity is for storing the organic material；
Vacuum valve is set between the vapor deposition cavity and the filler cavity, and the vacuum valve is used for the vapor deposition chamber
Body and the connection of the filler cavity are isolated；
Feed device is set in the packing cavity body, and the feed device is used for will be described in the vacuum break valve
The intracorporal organic material of packing cavity is delivered in the evaporation coating device；And
Sensor is set in the vapor deposition cavity, the sensor be used for control the vacuum valve opening and closing and
The feed device feeding；
Wherein, when the feed device conveys the organic material, the vacuum degree of the filler cavity and the vapor deposition cavity
It is identical.
2. evaporated device according to claim 1, which is characterized in that further include being set to the intracorporal magnetic sheet of the vapor deposition chamber
And metal shielding board, the magnetic sheet are connect with the vapor deposition cavity upper end, the glass substrate is set to below the magnetic sheet, institute
It states metal shielding board to be set to below the glass substrate, the magnetic sheet, glass substrate and metal shielding board are located at the vapor deposition
Above device.
3. evaporated device according to claim 1, which is characterized in that further include organic material controller, with the vapor deposition
Device is electrically connected, and the organic material controller is used to control the vapor deposition of the evaporation coating device.
4. evaporated device according to claim 1, which is characterized in that when the sensor senses in the evaporation coating device
The organic material be less than preset value, send the first signal, control the vacuum break valve, and control the feed device
The intracorporal organic material of the packing cavity is delivered in the evaporation coating device；When the sensor senses the vapor deposition
The organic material in device is greater than the preset value, sends the second signal, controls the feed device and stops described in conveying
Organic material, and control the vacuum valve and close.
5. evaporated device according to claim 4, which is characterized in that the evaporation coating device includes crucible and for heating
The heating source of crucible is stated, the heating source is set to below the crucible.
6. evaporated device according to claim 5, which is characterized in that the sensor is weighing sensor, is set to institute
It states below crucible, the weighing sensor judges organic material by sensing the weight of the crucible and the organic material
Whether material is less than the preset value.
7. evaporated device according to claim 1, which is characterized in that further include vacuum evacuation device, with the filler cavity
Connection, the vacuum evacuation device is for vacuumizing the filler cavity.
8. evaporated device according to claim 1, which is characterized in that be additionally provided with organic material placement in the packing cavity body
Frame, the organic material rack is for carrying the organic material.
9. evaporated device according to claim 1, which is characterized in that the vacuum valve is operated pneumatic valve.
10. evaporated device according to claim 1, which is characterized in that the feed device is multi-spindle machining hand or more vapour
The combined mechanism of cylinder and multiple linear motors.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821722248.9U CN209039572U (en) | 2018-10-23 | 2018-10-23 | Evaporated device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821722248.9U CN209039572U (en) | 2018-10-23 | 2018-10-23 | Evaporated device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209039572U true CN209039572U (en) | 2019-06-28 |
Family
ID=67038871
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821722248.9U Expired - Fee Related CN209039572U (en) | 2018-10-23 | 2018-10-23 | Evaporated device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209039572U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112030111A (en) * | 2020-08-04 | 2020-12-04 | 福建华佳彩有限公司 | Vacuum cavity structure |
| CN112063988A (en) * | 2020-08-24 | 2020-12-11 | 福建华佳彩有限公司 | Metal processing equipment and driving method |
| CN112877646A (en) * | 2021-01-13 | 2021-06-01 | 嘉讯科技(深圳)有限公司 | High-efficient vacuum plating device with mix and plate |
| CN113981378A (en) * | 2021-10-22 | 2022-01-28 | 成都中建材光电材料有限公司 | Vacuum refining filler evaporation equipment and use method thereof |
| CN115198235A (en) * | 2022-07-22 | 2022-10-18 | 福建华佳彩有限公司 | Metal cavity feeding method for evaporation |
-
2018
- 2018-10-23 CN CN201821722248.9U patent/CN209039572U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112030111A (en) * | 2020-08-04 | 2020-12-04 | 福建华佳彩有限公司 | Vacuum cavity structure |
| CN112063988A (en) * | 2020-08-24 | 2020-12-11 | 福建华佳彩有限公司 | Metal processing equipment and driving method |
| CN112877646A (en) * | 2021-01-13 | 2021-06-01 | 嘉讯科技(深圳)有限公司 | High-efficient vacuum plating device with mix and plate |
| CN113981378A (en) * | 2021-10-22 | 2022-01-28 | 成都中建材光电材料有限公司 | Vacuum refining filler evaporation equipment and use method thereof |
| CN113981378B (en) * | 2021-10-22 | 2023-08-18 | 成都中建材光电材料有限公司 | Vacuum refining filler evaporation equipment and application method thereof |
| CN115198235A (en) * | 2022-07-22 | 2022-10-18 | 福建华佳彩有限公司 | Metal cavity feeding method for evaporation |
| CN115198235B (en) * | 2022-07-22 | 2023-05-12 | 福建华佳彩有限公司 | Feeding method of metal cavity for evaporation |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN209039572U (en) | Evaporated device | |
| CN103526164B (en) | A kind of evaporated device | |
| CN102867924B (en) | Organic layer depositing device, organic light-emitting display device and its manufacture method | |
| CN109487216A (en) | Source application and OLED evaporator | |
| CN102061445B (en) | Vacuum evaporation device, vacuum evaporation method and organic EL display device manufacturing method | |
| CN101783397B (en) | Organic el device manufacture apparatus, deposition apparatus and deposition method thereof, liquid crystal display manufacture apparatus, alignment apparatus and alignment method | |
| CN101949002B (en) | Coating device, evaporation source device and evaporation source container | |
| CN102051581B (en) | Substrate film-coating processing system | |
| WO2018068389A1 (en) | Vacuum evaporation apparatus | |
| US20140326178A1 (en) | Electromagnetic vapor deposition apparatus | |
| CN101956176B (en) | Continuous evaporation apparatus | |
| KR20080007820A (en) | The rotation evaporator for vapor deposition of thin film and apparatus for vapor deposition of thin film using rotation evaporators | |
| CN101220452A (en) | Novel mask system of organic electroluminescent device and method for manufacturing the same | |
| CN104451585B (en) | Sedimentary origin conveyer | |
| CN108977771A (en) | Vacuum deposition apparatus and the device manufacturing method for having used the vacuum deposition apparatus | |
| CN106191787B (en) | A kind of the resistance-type evaporation coating machine and its operating method of more vacuum chambers | |
| CN107267920B (en) | Evaporated device, crucible and evaporation coating method | |
| CN103740949B (en) | Device and method for pre-treating magnesium metal | |
| CN101501238A (en) | Film deposition apparatus, film deposition system, and film deposition method | |
| CN107002223A (en) | Material deposition system and the method for the deposition materials in material deposition system | |
| US20210351017A1 (en) | Vapor deposition baffle mechanism and vapor deposition apparatus | |
| CN203530419U (en) | Evaporation device for evaporating ITO (indium tin oxide) film by electronic beam | |
| CN103726020A (en) | Vacuum evaporation device and evaporation method | |
| CN100477325C (en) | A blue and green light emitting LED and manufacture method thereof | |
| CN107565062A (en) | Thickness monitoring instrument and evaporator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190628 Termination date: 20201023 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |