CN113981378B - Vacuum refining filler evaporation equipment and application method thereof - Google Patents
Vacuum refining filler evaporation equipment and application method thereof Download PDFInfo
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- CN113981378B CN113981378B CN202111235292.3A CN202111235292A CN113981378B CN 113981378 B CN113981378 B CN 113981378B CN 202111235292 A CN202111235292 A CN 202111235292A CN 113981378 B CN113981378 B CN 113981378B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
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- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention belongs to the technical field of film preparation, and particularly relates to vacuum refining filler evaporation equipment, which comprises a filler bin, a deposition bin and a metering mechanism; the filling bin is provided with an evacuation valve, and a storage box is arranged in the filling bin; the deposition bin is arranged below the filling bin and is communicated with the filling bin; the material metering mechanism is positioned in the filling bin and is movably arranged in the filling bin or the deposition bin; a first valve is arranged between the material metering mechanism and the material storage box. The invention can realize closed filling after raw materials are used up, avoid long-time exposure of devices in the equipment in the air, greatly reduce baking and vacuumizing time, correspondingly reduce the whole filling period, improve the utilization rate of the equipment and improve the production efficiency and yield. The invention also discloses a use method applied to the equipment.
Description
Technical Field
The invention belongs to the technical field of film preparation, and particularly relates to vacuum refining filler evaporation equipment and a using method thereof.
Background
In the continuous production of an evaporation coating film, a baking device is generally arranged below a glass substrate, and the baking device is used for heating raw materials to realize the coating film. However, since the loading amount of the baking device is limited, after a period of production, periodic feeding is necessary, and at this time, the production must be stopped, and then the baking device is completely removed to realize the loading.
In the process, the baking device and the film coating cavity are exposed to the air for a long time, so that excessive water vapor and other gases are adsorbed on the crucible, the cavity and the raw materials, the vacuumizing time and the raw material baking time are prolonged, the equipment utilization rate is reduced, the yield is reduced, and the production cost is increased.
Disclosure of Invention
In order to solve at least one technical problem, the invention discloses vacuum refining filler evaporation equipment, which can realize closed filler after raw materials are used up, avoid long-time exposure of devices in the equipment in air, greatly reduce baking and vacuumizing time, correspondingly reduce the whole filler period, improve the utilization rate of the equipment and improve the production efficiency and yield. The invention also discloses a using method based on the filler evaporation equipment. The specific technical scheme of the invention is as follows:
a vacuum refining packing evaporation apparatus comprising:
the filling bin is provided with an evacuation valve, and a storage box is arranged in the filling bin;
the deposition bin is arranged below the filling bin and is communicated with the filling bin; and
the material metering mechanism is positioned in the filling bin and is movably arranged in the filling bin or the deposition bin;
wherein, be equipped with first valve between metering mechanism and the storage case.
In the evaporation equipment, the baking devices are generally arranged in a plurality of ways to meet the purpose of prolonging the coating and production time, however, after the raw materials are continuously baked, the raw materials are required to be added into the baking devices according to the production rhythm to meet the production requirement of each round, so that in the process, the baking devices and the raw materials are usually exposed in the air, and moisture and/or other gases are excessively adhered to the baking devices and/or the raw materials, so that the coating effect is poor, therefore, the evaporation equipment is carried out in a sealed filling bin when filling is carried out, so as to meet the sealing requirement, avoid the influence of moisture and/or other gases on the coating effect, on the basis, the baking devices are not required to be taken out, the baking devices are enabled to receive the raw materials in the sealed deposition bin, in addition, the evaporation equipment utilizes a material metering mechanism to enable weighing of the raw materials, and after weighing is completed, the material metering mechanism is enabled to be opened, and the raw materials are enabled to fall into the baking devices in a rated mode, so that vacuum material filling is achieved.
Preferably, a second valve is arranged between the filling bin and the deposition bin.
The second valve is mainly used for isolating the filling bin from the deposition bin, so that the second valve can be matched with the action of the material metering mechanism during filling, and can also ensure the tightness during vacuumizing.
Preferably, the method further comprises:
the first hopper is arranged in the filling bin, is positioned below the storage box and is communicated with the storage box;
wherein, first valve sets up in the top of first funnel.
The first hopper can enable raw materials to be filled into the baking device more uniformly, so that raw materials filled into the baking device cannot be accumulated, and the raw materials are filled in a scattered manner, and the baking device is ensured to be filled with enough raw materials smoothly.
Preferably, the method further comprises:
a second funnel which is communicated with the first funnel in the vertical direction;
wherein, the second valve sets up in the second funnel.
Because toast the device and generally be the parallel arrangement, consequently, the second funnel can realize the effect of first funnel except that the raw materials reposition of redundant personnel can also be realized, and when satisfying the raw materials and arriving toast the device, it is relatively even to distribute, avoids toasting the device middle raw materials more, the drawback that the limit side raw materials is few.
Preferably, one end of the second funnel is positioned in the filling bin, and the other end of the second funnel is positioned in the deposition bin.
The second funnel spans the filling bin and the deposition bin in the vertical direction, and as the second valve is arranged on the second funnel, the second funnel is opened and closed, so that the sealing between the filling bin and the deposition bin can be well realized.
Preferably, the second funnel is made of graphite, and a heating wire is embedded in the second funnel.
Graphite has fine heat conductivility, and behind its embedded heater strip, can realize the heating of second funnel to guarantee the homogeneity of temperature field.
Preferably, the metering mechanism comprises two metering discs with opening and closing structures, and any one metering disc is hinged with the storage box.
The metering mechanism is of an opening and closing structure, so that the original metering mechanism can be uniformly filled in the metering disc, raw materials are uniformly filled in a baking device below, the uniformity of filling is guaranteed, and meanwhile, the metering capacity is fixed, so that the control of filling quantity and accurate filling can be realized.
Preferably, the method further comprises:
the crucible is arranged in the deposition bin, a gap is formed between the crucible and the filling bin, and the gap is positioned in the deposition bin; and
and the conveying roller is arranged in the gap and is used for transferring glass.
In the coating process, the conveying roller in the gap can well realize glass specialty, thereby meeting the requirement of glass coating.
A method of using a refining filler for a vacuum refining filler evaporation apparatus as described above, the method of using comprising:
cooling the equipment to a proper temperature range;
opening an evacuating valve, and vacuumizing the filling bin to the process requirement by using external vacuumizing equipment;
opening a first valve, and weighing by using a metering mechanism;
weighing a raw material with preset weight, closing a first valve, and opening a metering mechanism to enable the raw material to enter a deposition bin;
and after the filling is finished, baking and vacuumizing to the process requirement.
Preferably, the using method further comprises:
weighing a preset weight of raw material, closing a first valve, opening a second valve, and then opening a metering mechanism to enable the raw material to enter a crucible in the vertical direction;
and after filling is completed, closing the second valve, baking and vacuumizing to the process requirement.
Compared with the prior art, the invention can realize uniform filling in a vacuum environment, and in the process, the crucible does not need to be taken out of evaporation equipment, thereby ensuring the effectiveness of glass coating; the invention can meet the requirement of repeated filling once, only stop production after the raw materials are used up, and then carry out filling operation, thereby greatly reducing the baking and vacuumizing time, reducing the whole process period and greatly improving the utilization rate of equipment; in addition, because the equipment is operated in a closed space, the contact between the raw materials and operators is correspondingly reduced, and meanwhile, the scattering leakage and waste of the raw materials are avoided.
Drawings
FIG. 1 is a schematic diagram of an embodiment of the present invention;
FIG. 2 is a schematic diagram of a first vulnerability in an embodiment of the present invention;
FIG. 3 is a top view of FIG. 2;
FIG. 4 is a schematic view of a metering mechanism according to an embodiment of the present invention;
FIG. 5 is an enlarged view at A of FIG. 4;
fig. 6 is a top view of fig. 4.
In the figure: 1-a filling bin; 2-depositing a bin; 3-a material metering mechanism; 4-an evacuation valve; 5-a storage box; 6-a first valve; 7-a second valve; 8-a first funnel; 9, a box body; 10-an air duct; 11-a second funnel; 12-a metering disc; 13-a rotating shaft; 14-a crucible; 15-a transfer roller; 16-glass.
Detailed Description
In order to make the technical scheme of the present invention better understood by those skilled in the art, the present invention will be further described in detail with reference to the following specific embodiments.
As shown in fig. 1 to 6, a vacuum refining filler evaporation device comprises a filler bin 1, a deposition bin 2 and a metering mechanism 3; the filling bin 1 is provided with an evacuation valve 4, and a storage box 5 is arranged in the filling bin 1; the deposition bin 2 is arranged below the filling bin 1 and is communicated with the filling bin 1; the material metering mechanism 3 is positioned in the filling bin, and the material metering mechanism 3 is movably arranged in the filling bin 1 or the deposition bin 2; a first valve 6 is arranged between the material metering mechanism 3 and the material storage box 5.
In this embodiment, the filling bin 1 and the depositing bin 2 have a placing space, and the two spaces are in independent closed states under the condition that any valve is not opened; when the material storage box is particularly used, raw materials are reserved in the material storage box 5, and when filling is needed, the raw materials in the material storage box 5 are directly released to a baking device in the deposition bin 2. The material metering mechanism 3 is movably arranged, and can be opened and closed in the filler bin 1, after weighing, the material metering mechanism is opened, and after the raw material is released, the material metering mechanism is closed, and in the process, the evacuation valve 4 is controlled to enable the external vacuum-pumping equipment communicated with the evacuation valve to enable the evaporation equipment to be in a vacuum state.
For better use of the present embodiment, a second valve 7 is provided between the packing compartment 1 and the deposition compartment 2.
The two placing spaces are communicated and separated through the opening and closing of the second valve 7 between the filling bin 1 and the depositing bin 2, and in the structure, a unique discharging passage is arranged between the filling bin 1 and the depositing bin 2, so that the connection or disconnection of the passages can be well realized through the second valve 7.
For better use of the present embodiment, a first funnel 8 is also included; the first hopper 8 is arranged in the filling bin 1, is positioned below the storage box 5 and is communicated with the storage box 5; the first valve 6 is arranged at the top end of the first funnel 8.
One end of the first funnel 8 is an open end, the other end is a necking end, and when filling, raw materials reach the open end and fall to the necking end; the open end is arranged at the lower end of the storage box 5 and is tightly sealed and connected with the storage box, a box body 9 is arranged in the filler bin 1 for better realizing installation, the storage box 5 is positioned at the upper end of the box body 9, the first funnel 8 is positioned in the box body 9 and is tightly connected with the box body 9 at the top of the box body 9, the tightness during filling is kept, and the box body 9 is provided with an air duct 10, so that the vacuum degree in the box body 9 is ensured when the vacuum pumping is convenient; on the basis of the structure, the metering mechanism is positioned at the open end of the first hopper 8, so that the material is homogenized; the housing 9 also reduces the space correspondingly, ensuring the vacuum degree.
It should be noted that the number of the first hoppers 8 may be one or more, and in a plurality of cases, uniform filling may be better achieved, and the present embodiment has a plurality of first hoppers 8. Of course, it can be understood that when a plurality of first hoppers 8 are arranged, any two adjacent first hoppers 8 are tightly connected and do not interfere with each other during discharging, and it can also be understood that the metering mechanism 3 has weighing positions matched with the number of the first hoppers 8 so as to realize the independence of discharging of the first hoppers 8.
For better use of the present embodiment, a second funnel 11 is also included; the second hopper 11 is communicated with the first hopper 8 in the vertical direction; the second valve 7 is arranged on the second funnel 11. The second funnel 11 is made of graphite, and is embedded with a heating wire.
The second funnel 11 has a similar structure to the first funnel 8, and the open end of the second funnel is tightly connected to the lower part of the first funnel 8 and slightly higher than the necking end of the second funnel, so that the sealing performance is ensured; of course, the number of the second hoppers 11 is matched with the first hoppers 8, and the number of the baking devices corresponding to the second hoppers 11 is matched with the second hoppers 11.
For better use of the present embodiment, one end of the second funnel 11 is located in the filling bin 1, and the other end is located in the depositing bin 2.
The second funnel 11 is used as a transition component and is a displacement passage between the filling bin 1 and the deposition bin 2, so that the conduction or the separation of different spaces can be well realized.
For better use of the embodiment, the metering mechanism 3 includes two metering discs 12 with open-close structures, and any one metering disc 12 is hinged with the storage box 5.
In this embodiment, the two metering discs 12 in the metering mechanism 3 can be opened and closed, each metering disc 12 has a rotating shaft 13, and the opening and closing of the metering mechanism 3 can be realized by the asynchronous and synchronous rotation of the rotating shaft 13, so that a good effect is realized by using a simple structure. In general, the rotation of the rotation shaft 13 is achieved by a motor. It should be noted that the metering disc 12 has a plurality of square checks corresponding to the baking devices, so as to realize corresponding material-refining filling.
Of course, in other embodiments, the metering disc 12 may be opened and closed by a telescopic structure, or may be opened and closed by a disc-type rotation opening and closing mechanism, in addition to the opening and closing by the synchronous rotation in opposite directions.
The metering mechanism 3 shown in fig. 4 to 6 is not in an applied state after the completion of the installation, and the two metering discs 12 should be brought into close contact with each other when they are actually closed.
For better use of the present embodiment, a crucible 14 and a transfer roller 15 are also included; the crucible 14 is arranged in the deposition bin 2, a gap is formed between the crucible 14 and the filling bin 1, and the gap is positioned in the deposition bin 2; the transfer roller 15 is disposed in the gap for transferring the glass 16.
In this embodiment, the baking device is a crucible 14, and the crucible 14 is also made of graphite, and the uniform distribution of temperature is achieved by utilizing the good thermal conductivity of graphite, so that the film plating is better achieved.
In all of the above mentioned valves, the control may be achieved by an automated system, which may be implemented by existing systems, which will not be described here.
On the basis of the vacuum refining filler evaporation equipment, the method for realizing film coating by using the equipment in the embodiment comprises the following steps:
s1, cooling equipment to a proper temperature range;
s2, opening an evacuation valve 4, and vacuumizing the filler bin 1 to the process requirement by using external vacuumizing equipment;
s3, opening a first valve 6, and weighing by using a metering mechanism;
s4, weighing a raw material with preset weight, closing the first valve 6, opening the second valve 7, and opening the metering mechanism to enable the raw material to enter the crucible 14;
and S5, after filling is completed, closing the second valve 7, and baking and vacuumizing to the process requirement.
It is to be added that in the specific filling process, the raw materials are placed in a storage box 5; the storage box 5 is arranged as a wedge-shaped box body 9 so as to facilitate blanking; by the operation of the valves, the raw material release, the vacuum degree and the necessary temperature are ensured.
Specifically, when filling is carried out, the temperature is reduced to a proper range, then the vacuum is pumped, the first valve 6 and the second valve 7 are opened, the raw materials fall on the metering mechanism 3, after quantitative collection, the metering mechanism 3 is opened, and the raw materials can be discharged into the crucible 14; after the blanking is completed, the first valve 6, the second valve 7 and the material metering mechanism 3 are closed, the vacuum degree of the filling bin 1 is kept, then the raw materials of the deposition bin 2 are baked, and the glass 16 is operated, so that the film coating is realized.
The foregoing is merely a preferred embodiment of the present invention, and it should be noted that the above-mentioned preferred embodiment should not be construed as limiting the invention, and the scope of the invention should be defined by the appended claims. It will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the spirit and scope of the invention, and such modifications and adaptations are intended to be comprehended within the scope of the invention.
Claims (7)
1. A vacuum refining packing evaporation apparatus, comprising:
the filling bin is provided with an evacuation valve, and a storage box is arranged in the filling bin;
the deposition bin is arranged below the filling bin and is communicated with the filling bin; and
the material metering mechanism is positioned in the filling bin and is movably arranged in the filling bin or the deposition bin;
wherein a first valve is arranged between the material metering mechanism and the material storage box; a second valve is arranged between the filling bin and the deposition bin;
the packing bin is internally provided with a box body, the storage box is positioned at the upper end of the box body, and the first funnel is positioned in the box body and is tightly connected with the box body at the top of the box body, so that the tightness during packing is maintained;
further comprises:
the first hopper is arranged in the filling bin, is positioned below the storage box and is communicated with the storage box; and
the second funnel is communicated with the first funnel in the vertical direction, is made of graphite and is internally embedded with a heating wire;
the first valve is arranged at the top end of the first funnel.
2. A vacuum refining filler evaporation apparatus as defined in claim 1, wherein,
the second valve is arranged on the second funnel.
3. A vacuum refining filler evaporation apparatus as claimed in claim 2, wherein one end of said second funnel is located in the filler bin and the other end is located in the deposition bin.
4. A vacuum refining filler evaporation apparatus as claimed in claim 1, wherein said second funnel is made of graphite with heating wires embedded therein.
5. The vacuum refining filler evaporation apparatus of claim 1, wherein the metering mechanism comprises two metering discs having an open-close structure, and wherein any one of the metering discs is hinged to the storage bin.
6. A vacuum refining packing evaporation apparatus as defined in claim 1, further comprising:
the crucible is arranged in the deposition bin, a gap is formed between the crucible and the filling bin, and the gap is positioned in the deposition bin; and
and the conveying roller is arranged in the gap and is used for transferring glass.
7. A method of using a refining filler in a vacuum refining filler evaporation apparatus as claimed in any one of claims 1 to 6, said method comprising:
cooling the equipment to a proper temperature range;
opening an evacuating valve, and vacuumizing the filling bin to the process requirement by using external vacuumizing equipment;
opening a first valve, and weighing by using a metering mechanism;
weighing a preset weight of raw material, closing a first valve, opening a second valve, and then opening a metering mechanism to enable the raw material to enter a crucible in the vertical direction;
and after filling is completed, closing the second valve, baking and vacuumizing to the process requirement.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111235292.3A CN113981378B (en) | 2021-10-22 | 2021-10-22 | Vacuum refining filler evaporation equipment and application method thereof |
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| CN202111235292.3A CN113981378B (en) | 2021-10-22 | 2021-10-22 | Vacuum refining filler evaporation equipment and application method thereof |
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| CN113981378A CN113981378A (en) | 2022-01-28 |
| CN113981378B true CN113981378B (en) | 2023-08-18 |
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| CN115449755B (en) * | 2022-09-08 | 2023-11-03 | 重庆金美新材料科技有限公司 | Evaporation material distributor and vacuum evaporation equipment |
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| CN113981378A (en) | 2022-01-28 |
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