CN209741257U

CN209741257U - Feeding device for evaporation crucible

Info

Publication number: CN209741257U
Application number: CN201822117961.7U
Authority: CN
Inventors: 不公告发明人
Original assignee: Fujian Huajiacai Co Ltd
Current assignee: Fujian Huajiacai Co Ltd
Priority date: 2018-12-17
Filing date: 2018-12-17
Publication date: 2019-12-06
Anticipated expiration: 2028-12-17

Abstract

The utility model relates to a vacuum evaporation crucible film forming technique is applied to OLED's manufacture process, provides a feeding device that evaporation crucible used, feeding device includes: the storage box 1 is used for storing materials; translation mechanism 8, translation mechanism 8 and storage case 1 are established on the support 801 that is located crucible supporting platform top that has guide rail 802, the drive of translation mechanism 8 horizontal motion is along the guide rail on the support to storage case 1 carries out the automation of cloth to crucible 4, does not need manual operation, has reduced the intensity of labour of the reinforced process of coating by vaporization crucible, does benefit to and improves work efficiency, and the more even effect of cloth is more excellent.

Description

feeding device for evaporation crucible

Technical Field

This technical scheme relates to vacuum evaporation coating film technology, especially relates to a hold reinforced equipment of crucible automatic weighing of organic material for vacuum evaporation coating.

Background

In realizing the utility model discloses an in-process, the inventor finds to have following problem among the prior art, at present, main film forming technology vacuum evaporation in the OLED preparation flow, at the vacuum evaporation in-process, the crucible quality that holds the material is heavier, and the in-process generally all adopts manual completion, intensity of labour is big and there is the material spill the extravagant drawback that the crucible caused, moreover, when adding the material, the material more or less can raise the dust, can have great potential injury possibility after operating personnel calls in vivo.

SUMMERY OF THE UTILITY MODEL

Therefore, a technical scheme for reducing labor intensity in the vacuum evaporation crucible charging process is needed to be provided, and in order to achieve the purpose, the inventor provides a technical scheme for additionally arranging an electric drive moving device for the existing material storage box to achieve charging automation.

The utility model provides a feeding device that evaporation coating crucible was used for giving 4 evaporation coating materials in crucible, including a supporting platform who places the crucible, feeding device includes: the storage box 1 is movably arranged above the supporting platform, the storage box 1 is used for storing evaporation materials, and a discharge pipe 203 is connected to the storage box 1; still be equipped with translation mechanism 8, translation mechanism 8 is connected with storage case 1, thereby translation mechanism drive storage case 1 removes and carries out the cloth to the crucible on the level thing platform.

the crucible adding device is further provided with a weighing mechanism 5, the weighing mechanism 5 is arranged on the supporting platform 502, and a pressure sensor 504 is arranged below the supporting platform 502 and used for weighing the weight of the added material in the crucible 4.

A limiting block 501 is arranged on a supporting platform 502 of the weighing mechanism 5, the limiting blocks 501 are respectively arranged on fixed positions and mark out the fixed positions contained in the crucible 4, so that the crucible 4 can be positioned in a specific range surrounded by the limiting blocks 501 when being placed on the platform, and the crucible 4 is ensured to be vertically aligned with the feeding mechanism 2.

Be equipped with translation mechanism 8, translation mechanism 8 includes: a cradle 801 having a cross beam positioned above the support platform 502. And the guide rail 802 is fixed on the bracket 801, and the guide rail 802 extends along the horizontal direction. And the sliding block mechanism 804 is slidably connected to the guide rail 802 and fixedly connected with the storage box 1. And the motor 803 is connected with the sliding block mechanism 804 through a transmission mechanism and drives the sliding block mechanism 804 to drive the storage box 1 to slide along the guide rail 802.

The discharge pipe 203 is provided with a baffle 201, and the baffle 201 is connected with a driving mechanism for controlling the opening size of the baffle 201.

The baffle 201 is connected to the discharge pipe 203 through a rotating shaft 205, and the driving mechanism comprises: the feeding device comprises a feeding motor 2 and a speed reducer 204, wherein the motor 3 drives a rotating shaft 205 through the speed reducer 204 so as to drive a baffle 201 connected to the rotating shaft to change the inclination angle.

The bottom of the discharge pipe 203 is hermetically connected with a discharge port 202 with a small upper end and a large lower end.

Still be equipped with a closed box 9 in addition, translation mechanism 8, weighing mechanism 5 and storage case 1 all set up in closed box 9 is inside. The closed box body 9 comprises an opening 901 and a cover plate 902, the cover plate 902 can be opened when materials are replaced and added, and the crucible (4) is taken and placed through the opening 901 to add materials to the material storage box. When the evaporation crucible is used for feeding, the cover plate 902 is closed, so that the box body is in a sealed state, the operation personnel and the flying powder are separated, and the health and safety of the operation personnel are ensured.

The feeding device is further provided with a human-computer interface 7 capable of being used for displaying information, the human-computer interface 7 is located on the outer surface of the closed box body 9, an operator can know the operation condition in the closed box body in real time through the human-computer interface, and corresponding adjustment operation is carried out according to the actual situation.

Be different from prior art, above-mentioned technical scheme has added and has established storage case 1 and translation mechanism 8, and the storage case sets up in the supporting platform top and by translation mechanism drive horizontal migration, has realized with the help of storage case 1 and translation mechanism 8 that automatic removal is reinforced, no longer need manual transport reinforced, greatly reduced the intensity of labour of the reinforced process of coating by vaporization crucible, be favorable to improving work efficiency, and the more even effect of cloth is more excellent.

drawings

FIG. 1 is a schematic view showing the structure of a charging device for an evaporation crucible according to an embodiment;

FIG. 2 is a schematic structural view of a feeding device for an evaporation crucible according to an embodiment;

FIG. 3a is a schematic view of an embodiment of the damper in the magazine being open;

FIG. 3b is a schematic view of an embodiment of the magazine with the flaps closed;

fig. 4 is a schematic structural diagram of the enclosure box according to the embodiment.

Description of reference numerals:

1. Storage box

101. top end turnover cover of storage box

2. Feeding mechanism

201. Baffle plate

202. Discharge port with small upper end and large lower end

203. Discharge pipe

204. Speed reducer

205. Rotating shaft

3. Charging motor

4. crucible pot

5. Weighing mechanism

501. Limiting block

502. Supporting platform

503. Base seat

504. Pressure sensor

6. Controller

7. Human-machine interface

8. Translation mechanism

801. Support frame

802. Guide rail

803. Electric machine

804. Sliding block mechanism

9. Enclosed box

901. opening of the container

902. Cover plate

Detailed Description

To explain technical contents, structural features, and objects and effects of the technical solutions in detail, the following detailed description is given with reference to the accompanying drawings in conjunction with the embodiments.

please refer to fig. 1 and fig. 2: this embodiment is a feeding device for an evaporation crucible, which is used for distributing an evaporation crucible 4. Wherein, evaporation coating crucible 4 is used for holding the coating by vaporization material for the crucible in the vacuum evaporation coating machine, and this crucible is detachable, takes out this crucible when needs increase material, will hold the crucible of good material again after reinforced and put into airtight box and carry out the coating by vaporization. The feeding device is provided with a supporting platform for placing the crucible 4, the feeding device comprises a storage box 1 and a translation mechanism 8, the storage box 1 is used for placing evaporation materials, and the bottom of the storage box is connected with a discharge pipe 203. Storage case 1 is connected with translation mechanism 8, and translation mechanism 8 is used for driving storage case 1 along motion guide rail 802 horizontal migration to this material with storage case 1 adds the crucible on the supporting platform in, realizes storage case 1 automatic movement reinforced effect that need not manual reinforced.

The translation mechanism 8 includes: the support 801, the support 801 is a beam structure disposed above the support platform 502 for supporting the rails 802, the storage bins 1 and other devices involved in the translation mechanism 8, the rails 802 being horizontally disposed and aligned above and below the support platform 502. The material storage box 1 is driven to slide by the sliding block mechanism 804 fixedly connected with the material storage box 1, the motor 803 is fixedly connected to the sliding block mechanism 804, the motor 803 drives the sliding block mechanism 804 to move through the transmission mechanism, the sliding block mechanism 804 drives the material storage box 1 fixedly connected with the sliding block mechanism 804 to move together, the reciprocating stroke is controlled by the output signal of the controller 6, and therefore the automatic moving effect of the material storage box is achieved, the whole feeding process is automatically completed by mechanical operation without excessive labor consumption, the work burden is reduced, and the work efficiency is improved.

The motor 803 in the translation mechanism drives the sliding block mechanism to move on the guide rail through a transmission mechanism, so that the material storage box connected to the sliding block mechanism moves, and the transmission mechanism can be a synchronous belt transmission mechanism, a gear and rack transmission mechanism, a screw rod and nut transmission mechanism or a chain transmission mechanism.

The top of storage case 1 still is provided with top flip 101, when needs add the material to the storage case in, will top flip 101 is opened then reinforced in to storage case 1, and the material closes top flip 101 after adding and makes the dust arrange the influence that reduces overflowing of material and flying dust in sealing the storage case in.

The charging device further comprises a weighing mechanism 5, wherein the weighing mechanism 5 comprises a supporting platform 502 and a pressure sensor 504 arranged below the supporting platform 502. The supporting platform 502 is horizontally arranged, so that the crucible 4 is stressed and moves downwards only in the vertical direction after being placed, the crucible 4 is ensured not to be inclined horizontally, more accurate weight data information is obtained, the accuracy of the data is improved, the waste of materials is effectively reduced, and the quality risk of finished products is also reduced. The pressure signal sensor 504 can accurately weigh the weight of the crucible 4 and the organic material inside and generate an electric signal, the signal output end receives the electric signal generated by the pressure sensor 504 and outputs the signal to the controller 6, so that the material can be accurately weighed, the output end and the controller 6 can adopt a wired connection and a wireless connection mode, and the base 503 is used for bearing the weight of the crucible 4 and the supporting platform 502 and is fixedly connected with the bottom of the closed box body 9.

The supporting platform 502 of the weighing mechanism 5 is fixedly provided with the limiting blocks 501, the limiting blocks 501 are arranged at fixed positions on the supporting platform 502 and are used for marking a fixed position and a range of a crucible, so that the crucible can be vertically aligned to the feeding mechanism 2 when placed in the range of the fixed position marked by the limiting blocks on the supporting platform 502, the position relation between the storage box 1 and the crucible 4 is clearer during feeding, the program instruction input value of the human-computer interface 7 has more accurate position reference, and the material distribution is more accurate.

Please refer to fig. 3a and fig. 3 b: be provided with baffle 201 in feeding device's discharging pipe 203 pipe, and discharging pipe 203 airtight connection is at the lower extreme of storage case 1, baffle 201 is connected on discharging pipe 203 through pivot 205, actuating mechanism is still being connected to pivot 205, thereby actuating mechanism drives pivot 205 and rotates and drive baffle 201 that links to each other with the pivot and change the angle of its slope. Organic material passes through discharging pipe 203 and the big discharge gate 202 of the little lower extreme in upper end falls to crucible 4, and the aperture of initial stage baffle 201 is 90, and material falling speed is very fast, but the material falls the time because the effect of inertia can influence the precision of weighing mechanism 5, consequently passes through when the later stage drive mechanism drives pivot 205 rotatory, pivot 205 drives again and links together baffle 201 rotates and changes inclination, thereby baffle 201 rotation inclination in the discharging pipe 203 pipe changes the passageway size that supplies the material to pass through in the discharging pipe 203, controls feed rate through the volume that the regulation unit interval material passes through to reduce weighing mechanism 5's error, improve the accuracy of weighing data, and when baffle 201 aperture is 0, discharging pipe 203 closes completely, and reinforced the end.

The driving mechanism comprises a feeding motor 3 and a speed reducer 204, and the feeding motor 3 and the speed reducer 204 are connected with a rotating shaft 205 together. Controller 6 among the weighing mechanism 5 receives behind the weight signal and compares it with the weight value of settlement and calculate the opening aperture of baffle 201 in the reinforced mechanism simultaneously, then gives reinforced motor 3 with the aperture signal transmission who calculates, reinforced motor 3 drives reduction gear 204 according to this signal instruction and drives pivot 205 rotatory, and baffle 201 that is connected with pivot 205 follows the rotation of pivot 205 and changes the inclination of board, thereby the adjustable load of change of baffle 201 aperture reaches the effect of adjusting ejection of compact speed.

Referring to fig. 4 and fig. 3a and fig. 3b, the feeding device is further provided with a closed box 9, and the translation mechanism 8, the weighing mechanism 5, the feeding mechanism 2 and the storage box 1 are all disposed in a closed space of the closed box 9. The closed box body is provided with an opening 901 and a cover plate 902, the storage box 1 can be taken out and placed through the opening 901 to add materials after the cover plate 902 is opened, the crucible 4 containing evaporation materials can also be taken out and placed through the opening 901 of the closed box body 9, the cover plate 902 is closed during feeding operation, the box body can be in a closed state, and the situation that the flying-out of dust damages the health of operators is avoided.

The feeding device is provided with a human-computer interface 7 capable of displaying information, and the human-computer interface 7 is positioned on the outer surface of the closed box body 9. The operation of the evaporation crucible charging process in the closed box body 9 can reduce air pollution caused by dust raised by materials in the charging process, and can also reduce the potential harm possibility of physical health caused by the suction of the materials by operators. The human-machine interface 7 is provided with a numeric keyboard for the operator to enter the amount of organic material added and this signal can be stored in the controller 6.

The controller 6 can control the movement of the motor 803 on one hand, and can accept the weight signal of the weighing mechanism 5 on the other hand, calculate the opening degree of the baffle 201 in the feeding mechanism by the built-in algorithm thereof according to the set value, then generate a signal and transmit the signal to the feeding motor 3, so that the feeding motor 3 drives the rotating shaft 205, the rotating shaft 205 is connected with the inclined angle of the rotating plate of the baffle 201, the operation of automatic weighing and feeding closed-loop control of the device is achieved, and the feeding speed can be conveniently adjusted in real time according to the operation condition of the device to realize the effect of accurate feeding. The controller can be a hand-held remote controller, a wired remote control device and a wired computer controller, the controller is connected with the charging motor 3 and the motor 3, and the operation condition of the motor can be controlled through the remote controller.

This feeding device is used in vacuum evaporation filming in the OLED preparation especially adapted, and vacuum evaporation in-process especially holds the crucible quality of organic material very heavy, and manually operation's intensity of labour is too big, and the scheme of proposing in this scheme can alleviate and improve labor efficiency, alleviates manually operation intensity of labour, raises the efficiency, reduces the injury to the material flying dust powder to the human body.

It should be noted that, although the above embodiments have been described herein, the scope of the present invention is not limited thereby. Therefore, based on the innovative concept of the present invention, the changes and modifications of the embodiments described herein, or the equivalent structure or equivalent process changes made by the contents of the specification and the drawings of the present invention, directly or indirectly apply the above technical solutions to other related technical fields, all included in the protection scope of the present invention.

Claims

1. The utility model provides a feeding device that evaporation coating crucible was used for giving crucible (4) evaporation coating material, includes a supporting platform who places crucible (4), and feeding device, feeding device includes:

The storage box (1) is movably arranged above the supporting platform and used for storing evaporation materials, and a discharge pipe (203) is connected to the storage box (1);

And the translation mechanism (8) is connected with the material storage box (1) and moves the material storage box (1) to distribute the material to the crucible (4) on the horizontal supporting platform.

2. A charging device as claimed in claim 1, characterized by further comprising a weighing means (5), said weighing means (5) being arranged on said supporting platform (502), a pressure sensor (504) being arranged below said supporting platform (502) for weighing the weight of the charging material in said crucible (4).

3. A charging device as claimed in claim 2, characterized in that a stop block (501) is arranged above the supporting platform (502) of the weighing mechanism (5), the stop blocks (501) are arranged in a fixed position and enclose a fixed area, and the crucible (4) is placed in the fixed area, so that the crucible (4) can be located in the specific area enclosed by the stop blocks (501) when being placed, and the crucible (4) is ensured to be vertically aligned with the charging mechanism (2).

4. The charging device according to claim 1, characterized by comprising a magazine translation mechanism (8), said translation mechanism (8) comprising:

A brace (801) that is a beam located above a support platform (502);

a guide rail (802), the guide rail (802) being fixed to a bracket (801) and the guide rail (802) extending in a horizontal direction;

The sliding block mechanism (804) is connected to the guide rail (802) in a sliding manner and is fixedly connected with the storage box (1);

The motor (803) is connected with the sliding block mechanism (804) through a transmission mechanism and drives the sliding block mechanism to drive the material storage box (1) to slide along the guide rail (802).

5. The charging device according to claim 1, characterized in that the tapping pipe (203) is provided with a flap (201), said flap (201) being connected to a drive mechanism for controlling the opening of the flap.

6. A charging device as claimed in claim 5, characterised in that the baffle (201) is connected to the tapping pipe (203) by means of a rotating shaft (205), said drive means comprising: the feeding motor (3) drives the rotating shaft (205) through the speed reducer (204) so as to drive and change the rotating angle of the baffle (201).

7. The charging device according to claim 6, characterized in that the bottom of the discharge pipe (203) is hermetically connected with a discharge outlet (202) having a small upper end and a large lower end.

8. The apparatus according to claim 1, further comprising a containment body (9), wherein said translation means (8), weighing means (5) and storage bin (1) are arranged inside said containment body (9).

9. A charging device as claimed in claim 8, characterized by comprising a human-machine interface (7) for displaying information, and by said human-machine interface (7) being located on the outer surface of said containment box (9).