CN113981378A - Vacuum refining filler evaporation equipment and use method thereof - Google Patents
Vacuum refining filler evaporation equipment and use method thereof Download PDFInfo
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- CN113981378A CN113981378A CN202111235292.3A CN202111235292A CN113981378A CN 113981378 A CN113981378 A CN 113981378A CN 202111235292 A CN202111235292 A CN 202111235292A CN 113981378 A CN113981378 A CN 113981378A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
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- Physical Vapour Deposition (AREA)
Abstract
The invention belongs to the technical field of film preparation, and particularly relates to vacuum refining filler evaporation equipment which comprises a filler bin, a deposition bin and a metering mechanism, wherein the filler bin is arranged on the bottom of the deposition bin; the filling bin is provided with a vacuumizing valve, and a storage box is arranged in the filling bin; the deposition bin is arranged below the filler bin and is communicated with the filler bin; the metering mechanism is movably arranged in the filling bin or the deposition bin; a first valve is arranged between the metering mechanism and the material storage box. According to the invention, after the raw materials are used up, the closed type filling can be realized, the long-time exposure of devices in the equipment in the air is avoided, the baking and vacuumizing time is greatly reduced, the whole filling period is correspondingly reduced, the utilization rate of the equipment is improved, and the production efficiency and the yield are improved. The invention also discloses a using method applied to the equipment.
Description
Technical Field
The invention belongs to the technical field of film preparation, and particularly relates to vacuum refining filler evaporation equipment and a using method thereof.
Background
In the continuous production of the evaporation coating, a baking device is generally disposed below a glass substrate, and the baking device is used to heat the raw material to realize the coating. However, since the charging of the baking device is somewhat limiting, after a certain period of production, periodic charging must be carried out, at which time production must be stopped and the baking device removed completely to enable the filling.
In the process, the baking device and the film coating cavity are exposed in the air for a long time, so that excessive water vapor and other gases are adsorbed on the crucible, the cavity and the raw materials, the vacuumizing time and the raw material baking time are prolonged, the equipment utilization rate is reduced, the yield is reduced, and the production cost is increased.
Disclosure of Invention
In order to solve at least one technical problem, the invention discloses vacuum refining filler evaporation equipment, which can realize closed filler after raw materials are used up, avoid long-time exposure of devices in the equipment in the air, greatly reduce baking and vacuumizing time, correspondingly reduce the whole filler period, improve the utilization rate of the equipment and improve the production efficiency and yield. The invention also discloses a use method of the filler evaporation equipment. The specific technical scheme of the invention is as follows:
a vacuum refining charge evaporation apparatus, comprising:
the filling bin is provided with an evacuation valve, and a storage box is arranged in the filling bin;
the deposition bin is arranged below the filling bin and is communicated with the filling bin; and
the metering mechanism is positioned in the material mixing bin and movably arranged in the filling bin or the deposition bin;
wherein, be equipped with first valve between metering mechanism and the storage case.
In the evaporation equipment, baking devices are generally arranged in a plurality of rows to meet the purpose of prolonging the coating and production time, however, after the raw materials are continuously baked, raw materials are required to be added into the baking devices according to the production rhythm to meet the production requirement of each round, therefore, in the process, the baking devices and the raw materials are usually exposed in the air, so that excessive moisture and/or other gases are adhered to the baking devices and/or the raw materials, and the coating effect is poor, therefore, the evaporation equipment is carried out in a sealed filling bin during filling to meet the sealing requirement, the coating effect is prevented from being influenced by excessive moisture and/or other gases, on the basis, the baking devices do not need to be taken out, the baking devices are enabled to receive the raw materials in the sealed deposition bin, besides, the evaporation equipment realizes weighing of the raw materials by using a material metering mechanism, and after weighing is finished, the metering mechanism is opened, so that the raw materials fall into the baking device in a rated manner, and vacuum material refining and filling are realized.
Preferably, a second valve is arranged between the filling bin and the deposition bin.
The second valve mainly realizes the isolation of the filling bin and the deposition bin, not only can be matched with the action of the timing material mechanism during filling, but also can ensure the sealing performance during vacuum pumping.
Preferably, the method further comprises the following steps:
the first hopper is arranged in the filling bin, is positioned below the storage box and is communicated with the storage box;
wherein, the first valve is arranged at the top end of the first funnel.
First funnel can make the even baking device that fills in of raw materials more to the raw materials that the messenger filled in the baking device can not pile up, and is dispersedly to realize filling, thereby guarantees that the baking device levelly and smoothly loads sufficient raw materials.
Preferably, the method further comprises the following steps:
the second funnel is communicated with the first funnel in the vertical direction;
wherein the second valve is disposed in the second funnel.
Because the device that toasts is generally to be arranged side by side, consequently, the second funnel can also realize the raw materials reposition of redundant personnel except can realizing the effect of first funnel, when satisfying the raw materials and reacing the device that toasts, distributes evenly relatively, avoids toasting the device in the middle of the raw materials many, the drawback that the avris raw materials is few.
Preferably, one end of the second hopper is positioned in the filling bin, and the other end of the second hopper is positioned in the deposition bin.
The second funnel strides over the filling bin and the deposition bin in the vertical direction, and because the second valve is arranged on the second funnel, the second funnel is opened and closed, and the sealing between the filling bin and the deposition bin can be well realized.
Preferably, the second funnel is made of graphite, and a heating wire is embedded in the second funnel.
Graphite has fine heat conductivility, and after the heater strip was embedded to it, the heating of second funnel can be realized to the homogeneity of assurance temperature field.
Preferably, the metering mechanism comprises two metering disks in an opening and closing structure, and any one of the metering disks is hinged with the storage box.
The metering mechanism is of an opening-closing structure, so that the raw materials can be uniformly filled in the metering disc, the raw materials can be more uniformly filled into the baking device below, the filling uniformity is ensured, and meanwhile, the metering capacity is certain, so that the filling control and accurate filling can be realized.
Preferably, the method further comprises the following steps:
the crucible is arranged in the deposition bin, a gap is formed between the crucible and the filling bin, and the gap is positioned in the deposition bin; and
the conveying roller is arranged in the gap and used for transferring the glass.
In the coating process, the conveying rollers in the gaps can well realize the glass specialty, so that the requirement of glass coating is met.
A method for using refining filler, which is applied to the vacuum refining filler evaporation equipment, wherein the method for using comprises the following steps:
cooling the equipment to a suitable temperature range;
opening an evacuation valve, and evacuating the filler bin to meet the process requirement by using external evacuation equipment;
opening the first valve, and weighing by using a metering mechanism;
weighing raw materials with preset weight, closing the first valve, and opening the metering mechanism to enable the raw materials to enter the deposition bin.
And after the filling is finished, baking and vacuumizing to meet the process requirement.
Preferably, the using method further comprises:
weighing raw materials with preset weight, closing the first valve, opening the second valve, and then opening the metering mechanism to enable the raw materials to enter the crucible in the vertical direction;
and after the filling is finished, closing the second valve, baking and vacuumizing to meet the process requirement.
Compared with the prior art, the invention can realize uniform filling in a vacuum environment, and in the process, the crucible does not need to be taken out of evaporation equipment, thereby ensuring the effectiveness of glass coating; the invention can meet the requirement of multiple times of filling at one time, and after the raw materials are used up, only the production needs to be stopped, and then the filling operation is carried out, thereby greatly reducing the baking and vacuumizing time, reducing the whole process period and greatly improving the utilization rate of equipment; in addition, because the equipment is operated in a closed space, the contact between the raw materials and an operator is correspondingly reduced, and meanwhile, the scattering, leakage and waste of the raw materials are avoided.
Drawings
FIG. 1 is a schematic diagram of an embodiment of the present invention;
FIG. 2 is a schematic diagram of a first vulnerability in an embodiment of the present invention;
FIG. 3 is a top view of FIG. 2;
FIG. 4 is a schematic view of a metering mechanism in an embodiment of the present invention;
FIG. 5 is an enlarged view of FIG. 4 at A;
fig. 6 is a top view of fig. 4.
In the figure: 1-a filling bin; 2-a deposition chamber; 3-a metering mechanism; 4-an evacuation valve; 5-a material storage box; 6-a first valve; 7-a second valve; 8-a first funnel; 9-a box body; 10-an air duct; 11-a second funnel; 12-a metering disc; 13-a rotating shaft; 14-a crucible; 15-a transfer roll; 16-glass.
Detailed Description
In order that those skilled in the art will better understand the technical solutions of the present invention, the present invention will be further described in detail with reference to the following embodiments.
As shown in fig. 1 to 6, a vacuum refining filler evaporation device comprises a filler bin 1, a deposition bin 2 and a metering mechanism 3; the filling bin 1 is provided with an evacuation valve 4, and a storage tank 5 is arranged in the filling bin 1; the deposition bin 2 is arranged below the filling bin 1 and is communicated with the filling bin 1; the metering mechanism 3 is positioned in the material mixing bin, and the metering mechanism 3 is movably arranged in the filling bin 1 or the deposition bin 2; a first valve 6 is arranged between the metering mechanism 3 and the storage box 5.
In this embodiment, the filling bin 1 and the deposition bin 2 both have placing spaces, and the two spaces are in an independent closed state without opening any valve; when the material storage box is used specifically, raw materials are stored in the material storage box 5, and when the materials are required to be filled, the raw materials in the material storage box 5 are directly released to a baking device in the deposition bin 2. It should be noted that the metering mechanism 3 is movably arranged, and can be opened and closed in the filling material bin 1, and after weighing is completed, the metering mechanism is opened, and after releasing the raw material is completed, the metering mechanism is closed, and in this process, the evacuation valve 4 should be controlled, so that the communicated external vacuum-pumping equipment makes the evaporation equipment in a vacuum state.
For a better use of this embodiment, a second valve 7 is provided between the filling silo 1 and the deposition silo 2.
The two placing spaces are communicated and separated through the opening and closing of the second valve 7 between the filling bin 1 and the deposition bin 2, and structurally, an only blanking passage is formed between the filling bin 1 and the deposition bin 2, so that the passage can be well communicated or disconnected through the second valve 7.
For better use of the present embodiment, a first funnel 8 is also included; the first hopper 8 is arranged in the filling bin 1, is positioned below the storage box 5 and is communicated with the storage box 5; the first valve 6 is arranged at the top end of the first funnel 8.
One end of the first funnel 8 is an open end, the other end of the first funnel is a reduced end, and when the materials are filled, the materials are fed from the open end to the reduced end; the open end is arranged at the lower end of the storage box 5 and is tightly and hermetically connected with the storage box, in order to better realize installation, a box body 9 is arranged in the filling bin 1, the storage box 5 is positioned at the upper end of the box body 9, the first funnel 8 is positioned in the box body 9 and is tightly connected with the box body 9 at the top of the box body 9, the sealing performance during filling is kept, and the box body 9 is provided with an air duct 10, so that the vacuum degree in the box body 9 is ensured when vacuum pumping is facilitated; on the basis of the structure, the metering mechanism is positioned at the open end of the first hopper 8, thereby realizing the refining; the box body 9 also correspondingly reduces the space, and ensures the maintenance of the vacuum degree.
It should be noted that the number of the first funnels 8 may be one, or may be multiple, and in the case of multiple first funnels, uniform filling may be better achieved, and the present embodiment has multiple first funnels 8. Of course, it can be understood that when a plurality of first funnels 8 are provided, any two adjacent first funnels 8 are tightly connected and do not interfere with each other during blanking, and it can also be understood that the counting mechanism 3 has material weighing positions matched with the number of the first funnels 8 so as to realize the blanking independence of the first funnels 8.
For better use of the present embodiment, a second funnel 11 is also included; the second hopper 11 communicates with the first hopper 8 in the vertical direction; the second valve 7 is disposed in the second hopper 11. The second funnel 11 is made of graphite, and a heating wire is embedded in the second funnel.
The second funnel 11 is similar to the first funnel 8 in structure, and the open end of the second funnel is closely connected to the lower part of the first funnel 8 and is slightly higher than the reduced end of the second funnel, so that the sealing performance is ensured; of course, the number of the second hoppers 11 matches the number of the first hoppers 8, and similarly, the number of the baking devices corresponding to the second hoppers 11 matches the number of the second hoppers 11.
For a better use of this embodiment, the second hopper 11 is located with one end in the filling silo 1 and with the other end in the deposition silo 2.
The second hopper 11 is used as a transition component and is a displacement passage between the filling bin 1 and the deposition bin 2, so that the conduction or the separation of different spaces is well realized.
For better use of the embodiment, the metering mechanism 3 comprises two metering discs 12 in an opening and closing structure, and any one of the metering discs 12 is hinged with the storage box 5.
In this embodiment, the two measuring discs 12 in the measuring mechanism 3 can be opened and closed, each measuring disc 12 has a rotating shaft 13, and the opening and closing of the measuring mechanism 3 can be realized by the asynchronous and synchronous rotation of the rotating shafts 13, so that a good effect can be realized by using a simple structure. Generally, the rotation of the rotating shaft 13 is achieved by a motor. It should be noted that the metering disc 12 has a plurality of squares corresponding to the baking devices, so as to realize corresponding material refining and filling.
Of course, in another embodiment, the metering disc 12 may be opened or closed in a telescopic structure, or in a disc-type rotating opening and closing mechanism, besides being opened or closed in a manner of rotating in different directions synchronously.
The metering mechanism 3 shown in fig. 4 to 6 is not applied after the completion of mounting, but two metering disks 12 are to be brought into close contact with each other when actually closed.
For better use of the embodiment, the crucible device further comprises a crucible 14 and a conveying roller 15; the crucible 14 is arranged in the deposition bin 2, and a gap is formed between the crucible 14 and the filling bin 1 and is positioned in the deposition bin 2; the conveying roller 15 is provided in the gap for transferring the glass 16.
In this embodiment, the baking device is a crucible 14, and the crucible 14 is also made of graphite, so that the good thermal conductivity of graphite is utilized to realize uniform temperature distribution, thereby better realizing coating.
In all the above mentioned valves, the control can be realized by an automatic system, which can be realized by an existing system, and will not be described again here.
On the basis of the vacuum refining filler evaporation equipment, the method for realizing film coating by using the equipment in the embodiment is as follows:
s1, cooling the equipment to a proper temperature range;
s2, opening the evacuation valve 4, and evacuating the filling bin 1 to meet the process requirement by using external evacuation equipment;
s3, opening the first valve 6, and weighing by using a metering mechanism;
s4, weighing raw materials with preset weight, closing the first valve 6, opening the second valve 7, and opening the metering mechanism to enable the raw materials to enter the crucible 14;
and S5, closing the second valve 7 after the filling is finished, baking and vacuumizing until the process requirement is met.
It is necessary to supplement that, in a specific filling process, the raw materials are placed in a storage box 5; the material storage box 5 is arranged into a wedge-shaped box body 9 so as to facilitate blanking; through the operation of each valve, the release of raw materials, the vacuum degree and the necessary temperature are ensured.
Specifically, when filling is carried out, the temperature is reduced to a proper range, then the vacuum pumping is carried out, the first valve 6 and the second valve 7 are opened, so that the raw materials fall on the metering mechanism 3, and after quantitative collection, the metering mechanism 3 is opened, and then the raw materials can be discharged into the crucible 14; and after the blanking is finished, closing the first valve 6, the second valve 7 and the metering mechanism 3, keeping the vacuum degree of the filling bin 1, baking the raw material in the deposition bin 2, operating the glass 16, and realizing the film coating.
The above is only a preferred embodiment of the present invention, and it should be noted that the above preferred embodiment should not be considered as limiting the present invention, and the protection scope of the present invention should be subject to the scope defined by the claims. It will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the spirit and scope of the invention, and these modifications and adaptations should be considered within the scope of the invention.
Claims (10)
1. A vacuum refining filler evaporation apparatus, comprising:
the filling bin is provided with an evacuation valve, and a storage box is arranged in the filling bin;
the deposition bin is arranged below the filling bin and is communicated with the filling bin; and
the metering mechanism is positioned in the material mixing bin and movably arranged in the filling bin or the deposition bin;
wherein, be equipped with first valve between metering mechanism and the storage case.
2. The vacuum refining filler evaporating device as claimed in claim 1, wherein a second valve is provided between the filler bin and the deposition bin.
3. A vacuum refining filler evaporation apparatus as defined in claim 2, further comprising:
the first hopper is arranged in the filling bin, is positioned below the storage box and is communicated with the storage box;
wherein, the first valve is arranged at the top end of the first funnel.
4. A vacuum refining filler evaporation apparatus as defined in claim 3, further comprising:
the second funnel is communicated with the first funnel in the vertical direction;
wherein the second valve is disposed in the second funnel.
5. The vacuum refining filler evaporation apparatus of claim 4, wherein one end of the second hopper is located in the filler bin and the other end is located in the deposition bin.
6. The vacuum refining filler evaporating device as claimed in claim 4, wherein the second hopper is made of graphite and has a heating wire embedded therein.
7. The vacuum refining filler evaporating device as claimed in claim 1, wherein the metering mechanism comprises two metering discs in an open-close structure, and any one of the metering discs is hinged with the storage bin.
8. A vacuum refining filler evaporation apparatus as defined in claim 1, further comprising:
the crucible is arranged in the deposition bin, a gap is formed between the crucible and the filling bin, and the gap is positioned in the deposition bin; and
the conveying roller is arranged in the gap and used for transferring the glass.
9. A method for using a refining filler, which is applied to the vacuum refining filler evaporation equipment as claimed in any one of claims 1 to 8, and comprises the following steps:
cooling the equipment to a suitable temperature range;
opening an evacuation valve, and evacuating the filler bin to meet the process requirement by using external evacuation equipment;
opening the first valve, and weighing by using a metering mechanism;
weighing raw materials with preset weight, closing the first valve, and opening the metering mechanism to enable the raw materials to enter the deposition bin.
And after the filling is finished, baking and vacuumizing to meet the process requirement.
10. The method of using a refining filler as defined in claim 9, wherein the method of using further comprises:
weighing raw materials with preset weight, closing the first valve, opening the second valve, and then opening the metering mechanism to enable the raw materials to enter the crucible in the vertical direction;
and after the filling is finished, closing the second valve, baking and vacuumizing to meet the process requirement.
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| CN202111235292.3A CN113981378B (en) | 2021-10-22 | 2021-10-22 | Vacuum refining filler evaporation equipment and application method thereof |
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| CN202111235292.3A CN113981378B (en) | 2021-10-22 | 2021-10-22 | Vacuum refining filler evaporation equipment and application method thereof |
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| CN113981378B CN113981378B (en) | 2023-08-18 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024051083A1 (en) * | 2022-09-08 | 2024-03-14 | 重庆金美新材料科技有限公司 | Distributor for materials to be deposited and vacuum deposition device |
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| CN111893333A (en) * | 2020-09-04 | 2020-11-06 | 合肥工业大学 | Device and method for continuously preparing multiple compact alloys |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024051083A1 (en) * | 2022-09-08 | 2024-03-14 | 重庆金美新材料科技有限公司 | Distributor for materials to be deposited and vacuum deposition device |
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