CN214458300U - Full-automatic equipment for constant-temperature constant-vacuum rapid feeding and discharging in vacuum high-temperature environment - Google Patents
Full-automatic equipment for constant-temperature constant-vacuum rapid feeding and discharging in vacuum high-temperature environment Download PDFInfo
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- CN214458300U CN214458300U CN202120172005.8U CN202120172005U CN214458300U CN 214458300 U CN214458300 U CN 214458300U CN 202120172005 U CN202120172005 U CN 202120172005U CN 214458300 U CN214458300 U CN 214458300U
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Abstract
The utility model provides a full-automatic equipment of unloading in vacuum high temperature environment constant temperature constant vacuum is quick, it relates to the full-automatic equipment field of unloading, it includes vacuum coating equipment, from the rotation frame constant voltage transfer cavity, the sealed door group of second, sealed cavity group, first sealed door group, automatic unloading six-shaft manipulator, the outer work or material rest of stove, vacuum coating equipment right-hand member is connected with rotation frame constant voltage transfer cavity, from rotation frame constant voltage transfer cavity lower extreme is equipped with the sealed door group of second, the sealed door group lower extreme of second is connected with first sealed door group through sealed cavity group, automatic unloading six-shaft manipulator one side and the outer work or material rest swing joint of stove, the beneficial effects of the utility model are that: when the vacuum coating operation of the materials is carried out, the materials are in mechanical operation in the whole process, the pollution of dust to the materials is reduced, the multi-station coating operation can be simultaneously carried out, and the coating efficiency is improved.
Description
Technical Field
The utility model relates to a go up the full-automatic equipment field of unloading, concretely relates to full-automatic equipment of unloading in vacuum high temperature environment constant temperature constant vacuum is quick.
Background
Vacuum coating equipment mainly refers to the coating film that one kind needs to go on under higher vacuum, specifically including a large variety, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, a lot of such as PLD laser sputtering deposit, the main thinking is to divide into evaporation and two kinds of sputter, and the material is when carrying out vacuum coating operation, the transportation that need go up unloading equipment to carry out the material is forwardded, make its material can get into to go to carry out the coating operation in the equipment, because of the particularity of its coating film, generally adopt the manipulator to carry out the transportation of forwardding of material, make it cleaner, reduce the influence that its dust brought, but, still have following not enough:
in the prior art, when the vacuum coating operation of materials is carried out, the vacuum coating operation still cannot be controlled by a full machine, so that the materials are easily polluted by dust, the coating of the materials is influenced, and generally, only single assembly line operation can be carried out, and the coating efficiency of the materials is influenced.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the problems that in the prior art, when the vacuum coating operation of materials is carried out, the full-automatic equipment can not be controlled by the full machine, the materials are easily polluted by dust, the coating film of the materials is influenced, the single assembly line operation can only be carried out generally, the coating film efficiency of the materials is influenced, and the full-automatic equipment for vacuum high-temperature environment constant-temperature constant-vacuum quick feeding and discharging is provided.
In order to achieve the above purpose, the utility model adopts the following technical scheme: a full-automatic vacuum coating equipment with constant temperature, constant vacuum and rapid feeding and discharging in a high-temperature environment comprises a vacuum coating equipment 1, a self-rotating frame constant pressure transfer chamber 2, a second sealing door group 3, a sealing chamber group 4, a first sealing door group 5, an automatic feeding and discharging six-shaft mechanical arm 6 and an external furnace material frame 7, wherein the right end of the vacuum coating equipment 1 is connected with the self-rotating frame constant pressure transfer chamber 2, the second sealing door group 3 is arranged at the lower end of the self-rotating frame constant pressure transfer chamber 2, the lower end of the second sealing door group 3 is connected with the first sealing door group 5 through the sealing chamber group 4, one side of the automatic feeding and discharging six-shaft mechanical arm 6 is movably connected with the external furnace material frame 7, the self-rotating frame constant pressure transfer chamber 2 comprises a third sealing door 21, a vacuum chamber 22 and a self-rotating frame transfer mechanism 23, a vacuum chamber 22 is arranged in the self-rotating frame constant pressure transfer chamber 2, the third sealing door 21 is arranged at the left side of the vacuum chamber 22, the self-rotating frame transfer mechanism 23 is arranged in the self-rotating frame constant pressure transfer chamber 2.
Further, the second sealing door group 3 is composed of a left second sealing door 31 and a right second sealing door 32, the upper ends of the left second sealing door 31 and the right second sealing door 32 are arranged on the self-rotating frame constant pressure transfer chamber 2, and the lower ends of the left second sealing door 31 and the right second sealing door 32 are connected with the sealing chamber group 4.
Further, the sealing chamber group 4 is composed of a right side sealing chamber 41 and a left side sealing chamber 42, a right side second sealing door 32 is arranged at the upper end of the right side sealing chamber 41, and the upper end of the left side sealing chamber 42 is connected with the self-rotating frame constant pressure transfer chamber 2 through the left side second sealing door 31.
Further, the first sealing door group 5 is composed of a right first sealing door 51 and a left first sealing door 52, the right first sealing door 51 is disposed on the right sealing chamber 41, and the left first sealing door 52 is disposed on the left sealing chamber 42.
Furthermore, the six-axis automatic feeding and discharging manipulator 6 is in clearance fit with the first sealing door group 5.
The utility model discloses a theory of operation: closing the first sealing door 51, the second sealing door group 3 and the third sealing door 21 on the right side, vacuumizing the vacuum chamber 22 and the sealing chamber 41 on the right side, electrically opening the first sealing door 52 on the left side, automatically loading and unloading the six-axis robot 6 from the external furnace rack 7, placing one of the two in the left sealing chamber 42, closing the first sealing door 52 on the left side, vacuumizing the sealing chamber 42 on the left side, opening the second sealing door 32 and the third sealing door 21 on the right side while performing the above steps, automatically transferring the internal furnace self-rack to the sealing chamber 41 on the right side by the self-rack transfer mechanism 23 of the vacuum chamber 22, closing the second sealing door 32 on the right side, electrically opening the first sealing door 51 on the right side, automatically taking the six-axis robot 6 from the external furnace rack, placing the internal furnace rack 7, closing the first sealing door 51 on the right side after the six-axis robot 6 takes the self-rack from the automatic loading and unloading, and vacuumizing the sealing chamber 41 on the right side, after the left sealing chamber 42 is vacuumized, the left second sealing door 31 and the third sealing door 21 are opened, the self-rotating frame transfer mechanism 23 in the vacuum chamber 22 transfers the self-rotating frame through the vacuum chamber 22, and the left second sealing door 31 is closed at the same time, the vacuum coating equipment 1 is put in a target position, the coating large disc rotates for one station, and the right second sealing door 32 is opened at the same time, the self-rotating frame transfer mechanism 23 in the vacuum chamber 22 transfers the coated product to the right sealing chamber 41, then the right second sealing door 32 is closed, the left first sealing door 52 is opened while the above steps are operated, after the next self-rotating frame is put in, the left first sealing door 52 is closed, the left sealing chamber 42 is vacuumized, the right first sealing door 51 is opened while the left sealing chamber 42 is vacuumized, the automatic feeding and discharging six-axis manipulator 6 takes the coated product out of the furnace and puts the coated product out of the furnace 7, closing the first right sealing door 51, and vacuumizing the right sealing chamber 41, according to the above process: the product is fed into the left sealing chamber 42, and the product is taken out from the right sealing chamber 41; and circularly putting in and taking out all the self-rotating frames in sequence to complete the feeding and discharging steps.
After the technical scheme is adopted, the utility model discloses beneficial effect does: when the vacuum coating operation of the materials is carried out, the materials are in mechanical operation in the whole process, the pollution of dust to the materials is reduced, the multi-station coating operation can be simultaneously carried out, and the coating efficiency is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.
Fig. 1 is a schematic top view of the present invention.
Fig. 2 is a schematic view of the internal structure corresponding to fig. 1.
Fig. 3 is a schematic structural diagram of the present invention.
Description of reference numerals: the device comprises a vacuum coating equipment 1, a self-rotating frame constant pressure transfer chamber 2, a second sealing door group 3, a sealing chamber group 4, a first sealing door group 5, an automatic feeding and discharging six-shaft manipulator 6, an external furnace material frame 7, a third sealing door 21, a vacuum chamber 22, a self-rotating frame transfer mechanism 23, a left second sealing door 31, a right second sealing door 32, a right sealing chamber 41, a left sealing chamber 42, a right first sealing door 51 and a left first sealing door 52.
Detailed Description
Referring to fig. 1 to fig. 3, the technical solution adopted by the present embodiment is: it comprises a vacuum coating device 1, a self-rotating frame constant pressure transfer chamber 2, a second sealing door group 3, a sealing chamber group 4, a first sealing door group 5, an automatic feeding and discharging six-shaft mechanical arm 6 and an external furnace material frame 7, the right end of the vacuum coating equipment 1 is connected with a self-rotating frame constant pressure transfer chamber 2, the lower end of the self-rotating frame constant pressure transfer chamber 2 is provided with a second sealing door group 3, the lower end of the second sealing door group 3 is connected with a first sealing door group 5 through a sealing chamber group 4, one side of the six-axis automatic feeding and discharging manipulator 6 is movably connected with an external material rack 7, the self-rotating rack constant pressure transfer chamber 2 comprises a third sealing door 21, a vacuum chamber 22 and a self-rotating rack transfer mechanism 23, be equipped with vacuum chamber 22 in the transfer chamber 2 from the revolving rack constant voltage, third sealing door 21 sets up the left side at vacuum chamber 22, from revolving rack transfer mechanism 23 sets up in the transfer chamber 2 from revolving rack constant voltage.
The second sealing door group 3 consists of a left second sealing door 31 and a right second sealing door 32, the upper ends of the left second sealing door 31 and the right second sealing door 32 are arranged on the self-rotating frame constant pressure transfer chamber 2, the lower ends are connected with the sealing chamber group 4, the sealing chamber group 4 consists of a right sealing chamber 41 and a left sealing chamber 42, the upper end of the right sealing chamber 41 is provided with a right second sealing door 32, the upper end of the left sealing chamber 42 is connected with the self-rotating frame constant pressure transfer chamber 2 through the left second sealing door 31, the first sealing door group 5 consists of a right first sealing door 51 and a left first sealing door 52, the right first sealing door 51 is arranged on the right sealing chamber 41, the left first sealing door 52 is arranged on the left sealing chamber 42, and the automatic feeding and discharging six-shaft manipulator 6 is in clearance fit with the first sealing door group 5.
The utility model discloses a theory of operation: closing the first sealing door 51, the second sealing door group 3 and the third sealing door 21 on the right side, vacuumizing the vacuum chamber 22 and the sealing chamber 41 on the right side, electrically opening the first sealing door 52 on the left side, automatically loading and unloading the six-axis robot 6 from the external furnace rack 7, placing one of the two in the left sealing chamber 42, closing the first sealing door 52 on the left side, vacuumizing the sealing chamber 42 on the left side, opening the second sealing door 32 and the third sealing door 21 on the right side while performing the above steps, automatically transferring the internal furnace self-rack to the sealing chamber 41 on the right side by the self-rack transfer mechanism 23 of the vacuum chamber 22, closing the second sealing door 32 on the right side, electrically opening the first sealing door 51 on the right side, automatically taking the six-axis robot 6 from the external furnace rack, placing the internal furnace rack 7, closing the first sealing door 51 on the right side after the six-axis robot 6 takes the self-rack from the automatic loading and unloading, and vacuumizing the sealing chamber 41 on the right side, after the left sealing chamber 42 is vacuumized, the left second sealing door 31 and the third sealing door 21 are opened, the self-rotating frame transfer mechanism 23 in the vacuum chamber 22 transfers the self-rotating frame through the vacuum chamber 22, and the left second sealing door 31 is closed at the same time, the vacuum coating equipment 1 is put in a target position, the coating large disc rotates for one station, and the right second sealing door 32 is opened at the same time, the self-rotating frame transfer mechanism 23 in the vacuum chamber 22 transfers the coated product to the right sealing chamber 41, then the right second sealing door 32 is closed, the left first sealing door 52 is opened while the above steps are operated, after the next self-rotating frame is put in, the left first sealing door 52 is closed, the left sealing chamber 42 is vacuumized, the right first sealing door 51 is opened while the left sealing chamber 42 is vacuumized, the automatic feeding and discharging six-axis manipulator 6 takes the coated product out of the furnace and puts the coated product out of the furnace 7, closing the first right sealing door 51, and vacuumizing the right sealing chamber 41, according to the above process: the product is fed into the left sealing chamber 42, and the product is taken out from the right sealing chamber 41; and circularly putting in and taking out all the self-rotating frames in sequence to complete the feeding and discharging steps.
The above description is only for the purpose of illustrating the technical solutions of the present invention and not for the purpose of limiting the same, and other modifications or equivalent replacements made by those of ordinary skill in the art to the technical solutions of the present invention should be covered within the scope of the claims of the present invention as long as they do not depart from the spirit and scope of the technical solutions of the present invention.
Claims (5)
1. The utility model provides a full automatic equipment of unloading in vacuum high temperature environment constant temperature and vacuum fast which characterized in that: the automatic feeding and discharging six-shaft mechanical arm comprises vacuum coating equipment (1), a self-rotating frame constant-pressure transfer chamber (2), a second sealing door group (3), a sealing chamber group (4), a first sealing door group (5), an automatic feeding and discharging six-shaft mechanical arm (6) and an external furnace material rack (7), wherein the right end of the vacuum coating equipment (1) is connected with the self-rotating frame constant-pressure transfer chamber (2), the second sealing door group (3) is arranged at the lower end of the self-rotating frame constant-pressure transfer chamber (2), the lower end of the second sealing door group (3) is connected with the first sealing door group (5) through the sealing chamber group (4), and one side of the automatic feeding and discharging six-shaft mechanical arm (6) is movably connected with the external furnace material rack (7);
transfer chamber (2) from revolving rack constant voltage has included third sealing door (21), vacuum chamber (22), from revolving rack transfer mechanism (23), be equipped with vacuum chamber (22) in transferring chamber (2) from revolving rack constant voltage, third sealing door (21) set up the left side at vacuum chamber (22), from revolving rack transfer mechanism (23) set up in transferring chamber (2) from revolving rack constant voltage.
2. The full-automatic equipment for constant-temperature constant-vacuum rapid feeding and discharging in the vacuum high-temperature environment as claimed in claim 1, wherein: the second sealing door group (3) is composed of a left side second sealing door (31) and a right side second sealing door (32), the upper ends of the left side second sealing door (31) and the right side second sealing door (32) are arranged on the self-rotating frame constant pressure transfer chamber (2), and the lower end of the left side second sealing door is connected with the sealing chamber group (4).
3. The full-automatic equipment for constant-temperature constant-vacuum rapid feeding and discharging in the vacuum high-temperature environment as claimed in claim 1, wherein: sealed cavity group (4) comprise right side sealed cavity (41), left side sealed cavity (42), right side sealed cavity (41) upper end is equipped with right side second sealing door (32), left side sealed cavity (42) upper end is connected with rotation frame constant pressure transfer chamber (2) through left side second sealing door (31).
4. The full-automatic equipment for constant-temperature constant-vacuum rapid feeding and discharging in the vacuum high-temperature environment as claimed in claim 1, wherein: the first sealing door group (5) is composed of a right first sealing door (51) and a left first sealing door (52), the right first sealing door (51) is arranged on the right sealing chamber (41), and the left first sealing door (52) is arranged on the left sealing chamber (42).
5. The full-automatic equipment for constant-temperature constant-vacuum rapid feeding and discharging in the vacuum high-temperature environment as claimed in claim 1, wherein: and the automatic feeding and discharging six-shaft mechanical arm (6) is in clearance fit with the first sealing door group (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120172005.8U CN214458300U (en) | 2021-01-22 | 2021-01-22 | Full-automatic equipment for constant-temperature constant-vacuum rapid feeding and discharging in vacuum high-temperature environment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120172005.8U CN214458300U (en) | 2021-01-22 | 2021-01-22 | Full-automatic equipment for constant-temperature constant-vacuum rapid feeding and discharging in vacuum high-temperature environment |
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| Publication Number | Publication Date |
|---|---|
| CN214458300U true CN214458300U (en) | 2021-10-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120172005.8U Active CN214458300U (en) | 2021-01-22 | 2021-01-22 | Full-automatic equipment for constant-temperature constant-vacuum rapid feeding and discharging in vacuum high-temperature environment |
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| CN (1) | CN214458300U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114807817A (en) * | 2022-05-06 | 2022-07-29 | 厦门弗瑞特流体控制有限公司 | Supersonic spray welding process for hard alloy on sealing surface of butterfly valve |
| CN114855127A (en) * | 2022-07-06 | 2022-08-05 | 靖江市苏伦工程机械有限公司 | Loader round pin axle processing rust-resistant automatic cladding device |
-
2021
- 2021-01-22 CN CN202120172005.8U patent/CN214458300U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114807817A (en) * | 2022-05-06 | 2022-07-29 | 厦门弗瑞特流体控制有限公司 | Supersonic spray welding process for hard alloy on sealing surface of butterfly valve |
| CN114807817B (en) * | 2022-05-06 | 2024-02-27 | 厦门弗瑞特流体控制有限公司 | Ultrasonic spray welding process for hard alloy on sealing surface of butterfly valve |
| CN114855127A (en) * | 2022-07-06 | 2022-08-05 | 靖江市苏伦工程机械有限公司 | Loader round pin axle processing rust-resistant automatic cladding device |
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