CN108588669A - A kind of disjunctor plated film machine production line - Google Patents
A kind of disjunctor plated film machine production line Download PDFInfo
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- CN108588669A CN108588669A CN201810455417.5A CN201810455417A CN108588669A CN 108588669 A CN108588669 A CN 108588669A CN 201810455417 A CN201810455417 A CN 201810455417A CN 108588669 A CN108588669 A CN 108588669A
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- workpiece
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- plated film
- coating chamber
- chamber
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
Abstract
The invention discloses a kind of disjunctor plated film machine production lines, including two kinds of continuous production processes：First production model and the second production model, first production model goes out furnace chamber by workpiece shove charge room, coating chamber and workpiece and constitutes, second production model is made of coating chamber and middle part disengaging furnace chamber, the middle part of first production model is equipped with coating chamber, the side of coating chamber is equipped with workpiece shove charge room, the other side of coating chamber goes out furnace chamber equipped with workpiece, and the middle part of the second production model is equipped with middle part and passes in and out furnace chamber, and the both sides of middle part disengaging furnace chamber are equipped with coating chamber.The mode of production of the production line can avoid the evacuated time of coating chamber, heating time before each plated film, work pace can be greatly shortened, improve production efficiency, the layout type of first production model is suitable for evacuating, heating time and the substantially comparable workpiece of plated film time, the layout type of second production model is suitable for evacuating, and heating time is short, the workpiece of plated film time length.
Description
Technical field
The present invention relates to a kind of plated film machine production lines, and in particular to a kind of disjunctor plated film machine production line.
Background technology
Vacuum PVD plated films, which are one kind, can really obtain micron order coating and free of contamination environment-friendly type surface treatment method,
The various physical properties and chemical property of workpiece surface, plated film can be improved in the case where having little influence on workpiece original size
After be not necessary to reprocess, by control coating process in relevant parameter, can control and plate out different colors.And vacuum coating is not
It will produce substance that is toxic or having pollution.Traditional vacuum coating machine technological process：1. workpiece shove charge；2. vacuumizing, heating；3. plating
Film；4. filling air；5. taking out workpiece；Feature：Production is required for vacuumizing the vacuum chamber of equipment every time, heats, has waited for
Workpiece is taken out at air is re-filled with after plated film.It vacuumizes and heating is repetitive operation, and vacuumize and heating is required for every time
Time and energy consumption, bring inconvenience.
Invention content
The purpose of the present invention is that solve the above-mentioned problems and provides a kind of disjunctor plated film machine production line, to solve
The above problem.
In order to solve the above technical problem, the present invention provides the following technical solutions：
The present invention provides a kind of disjunctor plated film machine production lines, including two kinds of continuous production processes：First production model and
Second production model, first production model go out furnace chamber by workpiece shove charge room, coating chamber and workpiece and constitute, second production
Pattern is made of the coating chamber and middle part disengaging furnace chamber, and the middle part of first production model is equipped with the coating chamber, described
The side of coating chamber is equipped with workpiece shove charge room, and the other side of the coating chamber goes out furnace chamber equipped with the workpiece, and described second
The middle part of production model is equipped with the middle part and passes in and out furnace chamber, and the both sides of the middle part disengaging furnace chamber are equipped with the coating chamber.
As a preferred technical solution of the present invention, workpiece shove charge room, the coating chamber and the workpiece are come out of the stove
Room constitutes vacuum chamber, and the vacuum chamber passes sequentially through several large-scale vacuum valves and is sequentially connected, workpiece shove charge room
Quickly forvacuum function, the coating chamber vacuum and the condition of high temperature can be kept for a long time, to reduce energy consumption and avoid
It evacuates and the time of heating wastes.
As a preferred technical solution of the present invention, the large-scale vacuum valve can be according to technique needs, in side
It is arbitrarily opened or closed in the state of air side vacuum or both sides while vacuum, so as to realize three or more vacuum chambers
Different vacuum indexs and different function are realized in connected state.
As a preferred technical solution of the present invention, it is all provided in first production model and second production model
Flexible transmission work rest, workpiece can be controlled freely by conversion equipment continuously from the work after reaching process conditions
Part shove charge room enters to the coating chamber, freely continuous again by conversion equipment control after the coating chamber completes plated film
The entrance workpiece go out furnace chamber.
As a preferred technical solution of the present invention, the production of first production model and second production model
Mode can avoid the evacuated time of coating chamber, heating time before each plated film, can greatly shorten work pace, improve production effect
Rate.
As a preferred technical solution of the present invention, the layout type of first production model is suitable for evacuating, and adds
Hot time and the substantially comparable workpiece of plated film time, the layout type of second production model are suitable for evacuating, heating time
It is short, the workpiece of plated film time length.
The advantageous effect that is reached of the present invention is：The device is a kind of disjunctor plated film machine production line, the production of the production line
Mode can avoid the evacuated time of coating chamber, heating time before each plated film, can greatly shorten work pace, improve production effect
Rate, the layout type of the first production model are suitable for evacuating, heating time and the substantially comparable workpiece of plated film time, the second production
The layout type of pattern is suitable for evacuating, and heating time is short, the workpiece of plated film time length.
Description of the drawings
Attached drawing is used to provide further understanding of the present invention, and a part for constitution instruction, the reality with the present invention
It applies example to be used to explain the present invention together, not be construed as limiting the invention.In the accompanying drawings：
Fig. 1 is the first production model figure of the present invention；
Fig. 2 is the second production model figure of the present invention；
In figure：1, workpiece shove charge room；2, coating chamber；3, workpiece goes out furnace chamber；4, middle part passes in and out furnace chamber.
Specific implementation mode
Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings, it should be understood that preferred reality described herein
Apply example only for the purpose of illustrating and explaining the present invention and is not intended to limit the present invention.
Embodiment 1
As shown in Figs. 1-2, the present invention provides a kind of disjunctor plated film machine production line, including two kinds of continuous production processes：First
Production model and the second production model, the first production model go out furnace chamber 3 by workpiece shove charge room 1, coating chamber 2 and workpiece and constitute, the
Two production models are made of coating chamber 2 and middle part disengaging furnace chamber 4, and the middle part of the first production model is equipped with coating chamber 2, coating chamber 2
Side be equipped with workpiece shove charge room 1, the other side of coating chamber 2 goes out furnace chamber 3 equipped with workpiece, during the middle part of the second production model is equipped with
Portion passes in and out furnace chamber 4, and the both sides of middle part disengaging furnace chamber 4 are equipped with coating chamber 2.
Workpiece shove charge room 1, coating chamber 2 and workpiece go out furnace chamber 3 and constitute vacuum chamber, and it is big that vacuum chamber passes sequentially through several
Type vacuum valve is sequentially connected, and workpiece shove charge room 1 quickly forvacuum function, coating chamber 2 can keep vacuum and high temperature for a long time
State, to reduce energy consumption and avoid the time waste for evacuating and heating.
Large-scale vacuum valve can according to technique needs, in side air side vacuum or both sides simultaneously vacuum in the state of
It arbitrarily opens or closes, so as to realize that three or more vacuum chambers realize different vacuum index and not in connected state
Congenerous.
Flexible transfer work rest is equipped in first production model and the second production model, workpiece is reaching process conditions
Afterwards, it can be controlled by conversion equipment and freely continuously enter to coating chamber 2 from workpiece shove charge room 1, plated film is completed in coating chamber 2
Afterwards, go out furnace chamber 3 into workpiece again by conversion equipment control is freely continuous.
The mode of production of first production model and the second production model can avoid the evacuated time of coating chamber before each plated film,
Heating time can greatly shorten work pace, improve production efficiency.
The layout type of first production model is suitable for evacuating, heating time and the substantially comparable workpiece of plated film time, the
The layout type of two production models is suitable for evacuating, and heating time is short, the workpiece of plated film time length.
The device is a kind of disjunctor plated film machine production line, including two kinds of continuous production processes：First production model and second
Production model, the first production model go out furnace chamber 3 by workpiece shove charge room 1, coating chamber 2 and workpiece and constitute, and the second production model is by plating
Film room 2 and middle part disengaging furnace chamber are constituted, and the middle part of the first production model is equipped with coating chamber 2, and the side of coating chamber 2 is filled equipped with workpiece
The other side of furnace chamber 1, coating chamber 2 goes out furnace chamber 3 equipped with workpiece, and the middle part of the second production model is equipped with middle part and passes in and out furnace chamber, middle part
The both sides of disengaging furnace chamber are equipped with coating chamber 2, and the layout type of the first production model is suitable for evacuating, when heating time and plated film
Between substantially comparable workpiece, the layout type of the second production model is suitable for evacuating, and heating time is short, the work of plated film time length
It is equipped with flexible transfer work rest in part, the first production model and the second production model, workpiece, can be with after reaching process conditions
Coating chamber 2 continuously freely is entered to from workpiece shove charge room 1 by conversion equipment control, after coating chamber 2 completes plated film, again
Go out furnace chamber 3 into workpiece by the way that conversion equipment control is freely continuous, can avoid the evacuated time of coating chamber before each plated film, adds
The hot time can greatly shorten work pace, improve production efficiency.
The advantageous effect that is reached of the present invention is：The device is a kind of disjunctor plated film machine production line, the production of the production line
Mode can avoid the evacuated time of coating chamber, heating time before each plated film, can greatly shorten work pace, improve production effect
Rate, the layout type of the first production model are suitable for evacuating, heating time and the substantially comparable workpiece of plated film time, the second production
The layout type of pattern is suitable for evacuating, and heating time is short, the workpiece of plated film time length.
Finally it should be noted that：The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention,
Although the present invention is described in detail referring to the foregoing embodiments, for those skilled in the art, still may be used
With technical scheme described in the above embodiments is modified or equivalent replacement of some of the technical features.
All within the spirits and principles of the present invention, any modification, equivalent replacement, improvement and so on should be included in the present invention's
Within protection domain.
Claims (6)
1. a kind of disjunctor plated film machine production line, including two kinds of continuous production processes：First production model and the second production model,
It being characterized in that, first production model goes out furnace chamber (3) by workpiece shove charge room (1), coating chamber (2) and workpiece and constitutes, and described
Two production models are made of the coating chamber (2) and middle part disengaging furnace chamber (4), and the middle part of first production model is equipped with described
The side of coating chamber (2), the coating chamber (2) is equipped with workpiece shove charge room (1), and the other side of the coating chamber (2) is equipped with
The workpiece goes out furnace chamber (3), and the middle part of second production model is equipped with middle part disengaging furnace chamber (4), the middle part disengaging
The both sides of furnace chamber (4) are equipped with the coating chamber (2).
2. a kind of disjunctor plated film machine production line according to claim 1, which is characterized in that workpiece shove charge room (1), institute
It states coating chamber (2) and the workpiece goes out furnace chamber (3) and constitutes vacuum chamber, the vacuum chamber passes sequentially through several large-scale vacuums
Valve is sequentially connected, and workpiece shove charge room (1) quickly forvacuum function, the coating chamber (2) can keep vacuum for a long time
And the condition of high temperature, to reduce energy consumption and avoid the time waste for evacuating and heating.
3. a kind of disjunctor plated film machine production line according to claim 2, which is characterized in that the large-scale vacuum valve can be with
According to technique needs, in side air side vacuum or both sides simultaneously vacuum in the state of arbitrarily open or close, so as to
Realize that three or more vacuum chambers realize different vacuum indexs and different function in connected state.
4. a kind of disjunctor plated film machine production line according to claim 1, which is characterized in that first production model and institute
It states and is equipped with flexible transfer work rest in the second production model, workpiece can pass through conversion equipment control after reaching process conditions
System freely continuously enters to the coating chamber (2) from workpiece shove charge room (1), after the coating chamber (2) completes plated film,
Freely continuously go out furnace chamber (3) into the workpiece again by conversion equipment control.
5. a kind of disjunctor plated film machine production line according to claim 1, which is characterized in that first production model and institute
The mode of production for stating the second production model can avoid the evacuated time of coating chamber, heating time before each plated film, can contract significantly
Short work pace improves production efficiency.
6. a kind of disjunctor plated film machine production line according to claim 1, which is characterized in that the cloth of first production model
Office's mode is suitable for evacuating, heating time and the substantially comparable workpiece of plated film time, the layout type of second production model
Suitable for evacuating, heating time is short, the workpiece of plated film time length.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201810455417.5A CN108588669A (en) | 2018-05-15 | 2018-05-15 | A kind of disjunctor plated film machine production line |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810455417.5A CN108588669A (en) | 2018-05-15 | 2018-05-15 | A kind of disjunctor plated film machine production line |
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| CN108588669A true CN108588669A (en) | 2018-09-28 |
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| CN201810455417.5A Pending CN108588669A (en) | 2018-05-15 | 2018-05-15 | A kind of disjunctor plated film machine production line |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109402596A (en) * | 2018-10-29 | 2019-03-01 | 厦门建霖健康家居股份有限公司 | A kind of colorful coating system of continuous type vacuum |
| CN112080731A (en) * | 2020-07-22 | 2020-12-15 | 湘潭宏大真空技术股份有限公司 | Multi-chamber continuous optical film coating machine |
| CN112458425A (en) * | 2020-10-30 | 2021-03-09 | 湘潭宏大真空技术股份有限公司 | Three-chamber film coating machine applied to narrow space |
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| JPH09279341A (en) * | 1996-04-17 | 1997-10-28 | Anelva Corp | Tray transportation type incline film forming device |
| CN101240414A (en) * | 2007-02-09 | 2008-08-13 | 应用材料股份有限公司 | Transport device in a facility for processing substrates |
| CN102181839A (en) * | 2011-06-03 | 2011-09-14 | 浙江大学 | Same end entrance-exit type continuous sputtering film plating device |
| CN103119192A (en) * | 2010-11-15 | 2013-05-22 | 株式会社爱发科 | Film-forming apparatus |
| CN104822857A (en) * | 2013-02-04 | 2015-08-05 | 株式会社爱发科 | Thin substrate processing device |
| JP2018031056A (en) * | 2016-08-24 | 2018-03-01 | 株式会社村田製作所 | Film deposition apparatus |
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2018
- 2018-05-15 CN CN201810455417.5A patent/CN108588669A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09279341A (en) * | 1996-04-17 | 1997-10-28 | Anelva Corp | Tray transportation type incline film forming device |
| CN101240414A (en) * | 2007-02-09 | 2008-08-13 | 应用材料股份有限公司 | Transport device in a facility for processing substrates |
| CN103119192A (en) * | 2010-11-15 | 2013-05-22 | 株式会社爱发科 | Film-forming apparatus |
| CN102181839A (en) * | 2011-06-03 | 2011-09-14 | 浙江大学 | Same end entrance-exit type continuous sputtering film plating device |
| CN104822857A (en) * | 2013-02-04 | 2015-08-05 | 株式会社爱发科 | Thin substrate processing device |
| JP2018031056A (en) * | 2016-08-24 | 2018-03-01 | 株式会社村田製作所 | Film deposition apparatus |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109402596A (en) * | 2018-10-29 | 2019-03-01 | 厦门建霖健康家居股份有限公司 | A kind of colorful coating system of continuous type vacuum |
| CN112080731A (en) * | 2020-07-22 | 2020-12-15 | 湘潭宏大真空技术股份有限公司 | Multi-chamber continuous optical film coating machine |
| CN112080731B (en) * | 2020-07-22 | 2022-10-18 | 湘潭宏大真空技术股份有限公司 | Multi-chamber continuous optical film coating machine |
| CN112458425A (en) * | 2020-10-30 | 2021-03-09 | 湘潭宏大真空技术股份有限公司 | Three-chamber film coating machine applied to narrow space |
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Address after: 528000 No. 1, Beiqi science and Technology Industrial Park, Shizhong village, Shishan town, Nanhai District, Foshan City, Guangdong Province (application for residence) Applicant after: Foshan Nanhai Jingding Tai Intelligent Technology Co., Ltd. Address before: 528000 Liang Jinping Factory Building No. 1 (Residence Declaration) of Shizhong Village, Nanhai District, Foshan City, Guangdong Province Applicant before: FOSHAN NANHAI DISTRICT JINGDINGTAI MACHINERY EQUIPMENT CO., LTD. |
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Application publication date: 20180928 |