CN104694903B - continuous physical vacuum coating equipment - Google Patents
continuous physical vacuum coating equipment Download PDFInfo
- Publication number
- CN104694903B CN104694903B CN201510071505.1A CN201510071505A CN104694903B CN 104694903 B CN104694903 B CN 104694903B CN 201510071505 A CN201510071505 A CN 201510071505A CN 104694903 B CN104694903 B CN 104694903B
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- CN
- China
- Prior art keywords
- chamber
- vacuum
- feeding mouth
- buffer
- discharging opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001771 vacuum deposition Methods 0.000 title claims abstract 7
- 238000004140 cleaning Methods 0.000 claims abstract description 32
- 230000008020 evaporation Effects 0.000 claims abstract description 30
- 238000001704 evaporation Methods 0.000 claims abstract description 30
- 238000000576 coating method Methods 0.000 claims abstract description 26
- 238000007747 plating Methods 0.000 claims abstract description 26
- 239000011248 coating agent Substances 0.000 claims abstract description 24
- 238000002360 preparation method Methods 0.000 claims abstract description 22
- 238000007599 discharging Methods 0.000 claims description 43
- 239000012528 membrane Substances 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 12
- 238000000151 deposition Methods 0.000 claims description 9
- 230000008021 deposition Effects 0.000 claims description 9
- 238000010924 continuous production Methods 0.000 claims description 2
- 230000003139 buffering effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 7
- 238000010923 batch production Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 239000010409 thin film Substances 0.000 abstract 2
- 239000007888 film coating Substances 0.000 abstract 1
- 238000009501 film coating Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses and provides continuous physical vacuum coating equipment which can not cause the doubt of pollution in the process of starting evaporation plating after cleaning workpieces and can realize continuous batch production. The continuous physical vacuum coating equipment comprises a vacuum coating device with a plurality of independent coating cavities, a buffer vacuum device with a cleaning buffer cavity and a buffer vacuum cavity, a preparation device with a preposed preparation cavity and a completion cavity, a conveying device and a gate unit comprising a plurality of gates, and is used for continuously producing the thin-film solar cells. During production, the thin-film solar cells are continuously conveyed by the conveying device to pass through the preposed preparation cavity, the cleaning buffer cavity with the linear ion source unit, the film coating cavity of the multi-source evaporation unit, the buffer vacuum cavity and the completion cavity, and the gate is controlled to be opened when one of the solar cells arrives and closed when the solar cell passes through the gate so as to maintain the air pressure of each cavity and achieve the purpose of increasing the output without consuming the vacuumizing time.
Description
Technical field
The present invention relates to a kind of filming equipment, and increase output effect can be reached in identical processing time by particularly relating to one kind
Continous way physical vaccum deposite equipment.
Background technology
Approximately, existing film-plating process is will to clean the workpiece completed by operating personnel to be put into and put down with ambient pressure
On the microscope carrier of the filming equipment of weighing apparatus, then closed filming equipment starts to vacuumize, when the vacuum of filming equipment reaches necessarily
During negative pressure, i.e., heat substrate by the heated seats in filming equipment and carry out plated film in a manner of sputtering or electron beam evaporation, treat whole
After the completion of individual coating process, then row releases vacuum state and takes out the workpiece for completing plated film, and progress is re-covered after changing next workpiece
Said process.Film-plating process one so is come during occurring that workpiece enters filming equipment after the cleaning, it is possible to meets with again
The doubt of pollution, two must take a substantial amount of time and be drawn vacuum and reach predetermined negative pressure wait, so can not be criticized
Amount production.
In addition, increasingly improved with the requirement of green energy resource, the demand of solar cell of electricity is given birth to by irradiation also increasingly
Increase, still, one come solar cell volume it is more and more huger, as before by operating personnel carry out film-plating process side
Formula seems difficult, two, if can not be deposited in batches to produce solar cell, market scale can not be also formed, meets hair
Open up the demand of green energy resource.
Therefore, it is drawn vacuum, it is necessary to establish and can reduce to spend in for producing solar cell processed and reaches predetermined negative
Press and be deposited, the continous way physical vaccum deposite equipment of solar cell is produced with continuous batch.
The content of the invention
The technical problems to be solved by the invention are overcome the deficiencies in the prior art, there is provided a kind of workpiece starts after the cleaning
During evaporation, the doubt polluted again, and the continous way physical vaccum deposite equipment that can be produced with continuous batch are not had.
The technical solution adopted in the present invention is：Continuous production solar cell processed of the invention, it is included：
One vacuum coater, including coating chamber, plural number with the independent plating membrane cavity of plural number are respectively arranged at the plating
The multi-source deposition unit of membrane cavity and the coating chamber is drawn into the first vacuum unit of the negative pressure state suitable for evaporation, it is described more
Source deposition unit have the carrier formed with the pattern for evaporation, move the carrier be correspondingly positioned at wherein one it is predetermined too
The moving member of positive energy battery and the movably corresponding solar cell that the carrier is located simultaneously enter to the solar cell
The evaporation part of row evaporation；
One buffer vacuum device, including the cleaning with the first feeding mouth and the first discharging opening for connecting the coating chamber are slow
After rushing the preceding buffer vacuum chamber of chamber, there is the buffer vacuum chamber of the second feeding mouth for connecting the coating chamber and the second discharging opening
Buffer vacuum chamber, it is arranged at the preceding buffer vacuum chamber and the wherein at least one solar energy being pointed in the cleaning cushion chamber
Battery movably carry out the cleaning unit of ion cleaning, be drawn respectively it is described cleaning cushion chamber and the buffer vacuum chamber it is into low
In the second vacuum unit of the predetermined negative pressure state of atmospheric pressure；
Steady device, including with the 3rd feeding mouth with the first feeding mouth for connecting the preceding buffer vacuum chamber the 3rd
The pan feeding preparation room of the preposition preparation chamber of discharging opening, the 4th pan feeding with the second discharging opening for connecting the rear buffer vacuum chamber
Mouthful and the completions chamber of the 4th discharging opening discharging preparation room, be drawn preposition chamber and the completion chamber of preparing respectively into subatmospheric
3rd vacuum unit of the predetermined negative pressure state of power；
One conveyer, plural solar cell is conveyed sequentially by the 3rd feeding mouth, the preposition preparation chamber, institute
State the 3rd discharging opening, first feeding mouth, the cleaning cushion chamber, first discharging opening, the plating membrane cavity, described second
Feeding mouth, the buffer vacuum chamber, second discharging opening, the 4th feeding mouth, the completion chamber and the 4th discharging
Mouthful；And
One shuttle element, including the gate controller of plural gate and the control gate, the gate controller control
The gate is closed the 3rd feeding mouth, the 3rd discharging opening and the first feeding mouth, described first gone out in which can open respectively
Material mouth, second feeding mouth, described second enter discharging opening and the 4th feeding mouth and the 4th discharging opening, and ought be wherein
Even even a solar cell the pair of gate opening answered and passes through rear institute when reaching in the solar cell
Gate closing is stated, while two adjacent gates will not be opened simultaneously.
Further, first vacuum unit makees to plate the negative pressure of membrane cavity described in the command of execution no more than 10-5Pa, described second
Vacuum unit makees to clean cushion chamber described in the command of execution and the negative pressure of the buffer vacuum chamber is not more than 10-3Pa, and the described 3rd takes out
Vacuum unit makees preposition chamber and the negative pressure for completing chamber of preparing described in the command of execution no more than 10-1Pa。
Further, the cleaning unit of the buffer vacuum device is linear ion source or plasma-based.
Further, the evaporation part of the multi-source deposition unit adds respectively with least two evaporation coating materials and at least two
The heated seats of the heat evaporation coating materials.
Further, the evaporation coating materials is identity element or different elements.
The beneficial effects of the invention are as follows：It is a kind of complete, for solar cell batch production the invention reside in providing
Continous way physical vaccum deposite equipment, reaches to be segmented and vacuumizes, solves by the buffer vacuum device with the preparation device
Except vacuum state is to save processing time, and multilayer large area is once carried out through the deposited chamber including independent evaporation chamber
Plated film operation, and first film plating substrate can be done with movably linear ion source before film-plating process and cleaned again, made follow-up
Coating process it is not contaminated and the multiple efficacies such as the adhesive force of film layer can be increased.
Brief description of the drawings
Fig. 1 is the side schematic view of the present invention；
Fig. 2 is the structural representation of vacuum coater of the present invention；
Fig. 3 is the structural representation of buffer vacuum chamber and pan feeding preparation room before the present invention；
Fig. 4 is the structural representation of buffer vacuum chamber and discharging preparation room after the present invention.
Embodiment
As shown in Figure 1, Figure 2, Figure 3, Figure 4, a preferred embodiment of continous way physical vaccum deposite equipment of the present invention includes
Vacuum coater 1, buffer vacuum device 2, preparation device 3, conveyer 4 and shuttle element 5.
The vacuum coater 1 includes one, and there is the coating chamber 12 of the independent plating membrane cavity 11 of plural number, plural number to set respectively
In the multi-source deposition unit 13 of the plating membrane cavity 11, and one be drawn the coating chamber 12 into first of the negative pressure state suitable for evaporation
There is a carrier 15, one formed with the pattern for evaporation to move for vacuum unit 14, each multi-source deposition unit 13
The corresponding moving member 16 for being positioned at wherein one predetermined solar cell 6 of the carrier 15, and one movably correspond to and be located
The solar cell 6 of the carrier 15 and the evaporation part 17 that the solar cell 6 is deposited.For being shown with this illustration
Bright, the evaporation part 17 includes four evaporation coating materials 18, and two heat the heated seats 19 that coating materials 18 is deposited respectively, and described more
The evaporation coating materials 18 of the evaporation part 17 of source deposition unit 13 is identity element or different elements.And the carrier 15 is in this reality
It is light shield to apply example.
The buffer vacuum device 2 connects the first of the coating chamber 12 with one with one first feeding mouth 20 including one and gone out
The preceding buffer vacuum chamber 23, one of the cleaning cushion chamber 22 of material mouth 21 has the and of the second feeding mouth 24 of a connection coating chamber 12
The rear buffer vacuum chamber 27, one of the buffer vacuum chamber 26 of one second discharging opening 25 is arranged at the cleaning of the preceding buffer vacuum chamber 23
Unit 28, one is drawn the cleaning cushion chamber 22 and the buffer vacuum chamber 26 into the predetermined negative pressure shape of subatmospheric power respectively
Second vacuum unit 29 of state.
The preparation device 3 includes one, and there is one the 3rd feeding mouth 31 to connect the first of the preceding buffer vacuum chamber 23 with one
Buffer vacuum after the pan feeding preparation room 34, one of the preposition preparation chamber 33 of 3rd discharging opening 32 of feeding mouth 20 has a connection described
38, one points of the discharging preparation room of 4th feeding mouth 35 of the second discharging opening 25 of room 27 and the completion chamber 37 of one the 4th discharging opening 36
Preposition chamber 33 and the completion chamber 37 of preparing is not drawn into the 3rd vacuum unit of the predetermined negative pressure state of subatmospheric power
39。
The shuttle element 5 includes plural gate 51, and one controls the switch of the gate 51 and limitation simultaneously adjacent
The gate controller 52 that two gates 51 will not be opened simultaneously.In this example, adjacent two gate 51 positioned at passage both ends then utilizes
Timer (not shown) controls the interval time successively opened, but also the gate controller 52 can be arranged at into each gate
Before 51, therefore, the gate controller 52 may be disposed at any position to control the gate 51 of needs control.
When producing solar cell 6 processed using the preferred embodiment of continous way physical vaccum deposite equipment of the present invention, start institute
State the first vacuum unit 14, the second vacuum unit 29, and the 3rd vacuum unit 39 so that the negative pressure of the plating membrane cavity 11
No more than 10-5Pa, the negative pressure of the cleaning cushion chamber 22 and the buffer vacuum chamber 26 is not more than 10-3Pa, and described preposition
Prepare chamber 33 and the negative pressure for completing chamber 37 is not more than 10-1Pa.
Treat plating membrane cavity 11, the cleaning cushion chamber 22 and the buffer vacuum chamber 26, and the preposition preparation chamber 33
After predetermined negative pressure being all evacuated to the completion chamber 37, the shuttle element 5 and by the solar energy with the conveyer 4
Battery 6 is sequentially delivered to neighbouring 3rd feeding mouth 31,31 lock at the 3rd feeding mouth by the conveyer 4
Door 51 is then opened so that the solar cell 6 is by the 3rd feeding mouth 31, enters to the preposition preparation chamber 33, now
Gate 51 at 3rd feeding mouth 31 is closed.And the solar cell 6 passes through the preposition time for preparing chamber 33
Predetermined negative pressure is evacuated to again for the cleaning cushion chamber 22 enough.And when the solar cell 6 is adjacent to the described 3rd
During discharging opening 32, the gate 51 positioned at the 3rd discharging opening 32 is then opened, so that the solar cell 6 enters the passage
Gate 51 that is interior and treating neighbouring first feeding mouth 20 is opened, then enters the cleaning cushion chamber 22.
When the solar cell 6 enters the cleaning cushion chamber 22, the gate at first feeding mouth 20
51 close, and now the cleaning unit 28 will be pointed to the solar cell 6 and carry out ion cleaning, for follow-up plated film operation
Can not be contaminated and homogeneous film thickness can be plated out.And the solar cell 6 is enough by the time during cleaning cushion chamber 22
The negative pressure of substantially equal to described plating membrane cavity 11 is evacuated to for the cleaning cushion chamber 22, and when the solar cell 6 is neighbouring
During first discharging opening 21, the gate 51 positioned at first discharging opening 21 is then opened, so that the solar cell 6 enters
In the passage, now, the gate at first discharging opening 21 is then closed, and treats that the gate 51 of the neighbouring coating chamber 12 is opened
Open, that is, enter the plating membrane cavity 11.
When the solar cell 6 enters the plating membrane cavity 11, the gate 51 positioned at the neighbouring coating chamber 12 closes
Close, the solar cell 6 can be transported to the institute of the evaporation part 17 with different evaporation coating materials 18 by conveyer 4
Plating membrane cavity 11 is stated, now the moving member 16 can then align the solar cell 6 and drive the carrier 15 to appropriate location,
And the evaporation part 17 movably corresponds to and the solar cell 6 of the carrier 15 is located and the solar cell 6 is entered
Row is deposited for the first time, then enter one by one next plating membrane cavity 11 with the corresponding multi-source deposition unit 13 carry out second, the
Evaporation three times.And the time that the solar cell 6 enters the plating membrane cavity 11 is taken out for the buffer vacuum chamber 26 enough
Vacuum is to a negative pressure for being equal to the plating membrane cavity 11, and after the solar cell 6 completes all plated film actions described in
Buffer vacuum chamber 27 is moved afterwards, and the close of solar cell 6 is sensed into the gate 51 before passage, then opens passage and enter
The gate 51 at mouthful, so that the solar cell 6 enters passage, now, the gate 51 at the feeder connection is closed,
And when the gate opening of neighbouring second feeding mouth 24, when the unlatching of gate 51 positioned at second feeding mouth 24, then
The solar cell 6 enters the buffer vacuum chamber 26.
When the solar cell 6 enters the buffer vacuum chamber 26, the gate 51 positioned at second feeding mouth 24 is
Close, and when the time of the solar cell 6 into the buffer vacuum chamber 26 is broken for the buffer vacuum chamber 26 enough
Vacuum discharges to a desired negative pressure, and when the solar cell 6 is adjacent to second discharging opening 25 positioned at described second
Gate 51 at mouthfuls 25 is then opened, so that the solar cell 6 enters passage, the now gate at second discharging opening 25
Then close, and treat the gate opening at neighbouring 4th feeding mouth 35, then the solar cell 6 can enter the completion
Chamber 37.
When the solar cell 6 enters the completion chamber 37, the gate 51 at the 4th feeding mouth 35 closes
Close, and when solar cell 6 enter it is described completion chamber 37 time enough for it is described completion the vacuum breaker of chamber 37 to predetermined pressure (about
Equal to atmospheric pressure), and when the solar cell 6 is adjacent to four discharging opening 36, positioned at the 4th discharging opening 36
Gate 51 then open, the solar cell 6 then can from it is described completion chamber 37 be sent by the 4th discharging opening 36.This
Shi Suoshu solar cells 6 then complete the plating film stack processing procedure of all different patterns, and then the system of producing completes the majority of this batch too
Positive energy battery.
In summary, continous way physical vaccum deposite equipment of the present invention can carry out the plated film of multiplexing large area and before plated film
Ion beam pre-treatment is first done, and coordinates multistage progressive vacuum device and reaches in identical processing time increase output, therefore really
The real shortcoming that can improve existing filming equipment, reach the purpose of the present invention.
Only as described above, only the preferred embodiments of the invention, when the model that implementation of the invention can not be limited with this
Enclose, i.e., the simple equivalent changes and modifications made generally according to scope of the present invention patent and patent specification content, all still
It is covered by the present invention within the scope of the patent.
Claims (4)
1. a kind of continous way physical vaccum deposite equipment, continuous production solar cell processed, it is included：
One vacuum coater, including coating chamber, plural number with the independent plating membrane cavity of plural number are respectively arranged at the plating membrane cavity
Multi-source deposition unit and be drawn the coating chamber into the first vacuum unit of the negative pressure state suitable for evaporation, the multi-source steams
There is plating unit the carrier formed with the pattern for evaporation, the mobile carrier to be correspondingly positioned at wherein one predetermined solar energy
The moving member of battery and the movably corresponding solar cell that the carrier is located simultaneously steam to the solar cell
The evaporation part of plating；
One buffer vacuum device, including the cleaning cushion chamber with the first feeding mouth with the first discharging opening for connecting the coating chamber
Preceding buffer vacuum chamber, have the second feeding mouth for connecting the coating chamber and the second discharging opening buffer vacuum chamber rear buffering
Vacuum chamber, it is arranged at the preceding buffer vacuum chamber and the wherein at least one solar cell being pointed in the cleaning cushion chamber
Movably carry out the cleaning unit of ion cleaning, be drawn the cleaning cushion chamber respectively with the buffer vacuum chamber into less than big
Second vacuum unit of the predetermined negative pressure state of atmospheric pressure；
Steady device, including the 3rd discharging with the 3rd feeding mouth with the first feeding mouth for connecting the preceding buffer vacuum chamber
Mouthful preposition preparation chamber pan feeding preparation room, have connect it is described after buffer vacuum chamber the second discharging opening the 4th feeding mouth and
The discharging preparation room of the completion chamber of 4th discharging opening, be drawn respectively it is described it is preposition preparation chamber and complete chamber into subatmospheric power it
3rd vacuum unit of predetermined negative pressure state；
One conveyer, plural solar cell is conveyed sequentially by the 3rd feeding mouth, the preposition preparation chamber, described the
Three discharging openings, first feeding mouth, the cleaning cushion chamber, first discharging opening, the plating membrane cavity, second pan feeding
Mouth, the buffer vacuum chamber, second discharging opening, the 4th feeding mouth, the completion chamber and the 4th discharging opening；And
One shuttle element, including the gate controller of plural gate and the control gate, described in the gate controller control
Gate close with can opening respectively the 3rd feeding mouth, the 3rd discharging opening and the first feeding mouth, first discharging opening,
Second feeding mouth, described second enter discharging opening and the 4th feeding mouth and the 4th discharging opening, and ought wherein one too
Even even sun can battery the pair of gate opening answered and pass through the rear lock in the solar cell when reaching
Door termination, while two adjacent gates will not be opened simultaneously；First vacuum unit is made to plate the negative pressure of membrane cavity described in the command of execution
No more than 10-5Pa, second vacuum unit makees to clean cushion chamber described in the command of execution and the negative pressure of the buffer vacuum chamber is little
In 10-3Pa, and the 3rd vacuum unit makees preposition chamber and the negative pressure for completing chamber of preparing described in the command of execution no more than 10- 1Pa；The evaporation part of the multi-source deposition unit heats the evaporation film respectively with least two evaporation coating materials and at least two
The heated seats of material.
2. vacuum coating equipment according to claim 1, it is characterised in that：The cleaning unit of the buffer vacuum device is
Linear ion source.
3. vacuum coating equipment according to claim 1, it is characterised in that：The cleaning unit of the buffer vacuum device is
Plasma-based.
4. vacuum coating equipment according to claim 1, it is characterised in that：The evaporation coating materials is identity element or difference
Element.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW103106550A TWI558835B (en) | 2014-02-26 | 2014-02-26 | Continuous physical vacuum coating equipment |
| TW103106550 | 2014-02-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104694903A CN104694903A (en) | 2015-06-10 |
| CN104694903B true CN104694903B (en) | 2017-11-24 |
Family
ID=53342439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510071505.1A Expired - Fee Related CN104694903B (en) | 2014-02-26 | 2015-02-11 | continuous physical vacuum coating equipment |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN104694903B (en) |
| TW (1) | TWI558835B (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106531847A (en) * | 2016-12-29 | 2017-03-22 | 常州大学 | Black silicon based tunneling contact solar cell online preparation equipment |
| CN106531848A (en) * | 2016-12-30 | 2017-03-22 | 常州大学 | Black silicon-based on-line preparation equipment of tunneling contact solar cell |
| CN107326334A (en) * | 2017-07-12 | 2017-11-07 | 维达力实业(深圳)有限公司 | Continuous type coating apparatus |
| CN109440103B (en) * | 2018-11-17 | 2020-11-10 | 广东腾胜科技创新有限公司 | Vacuum coating machine with interior clean function |
| CN109267011A (en) * | 2018-12-04 | 2019-01-25 | 攀枝花学院 | The method of vacuum electron beam roll pressing plated film |
| CN109295417A (en) * | 2018-12-04 | 2019-02-01 | 攀枝花学院 | The method of serialization vacuum electron beam plated film |
| CN109267017A (en) * | 2018-12-04 | 2019-01-25 | 攀枝花学院 | The method of vacuum electron beam plated film |
| CN111312932A (en) * | 2018-12-11 | 2020-06-19 | 机光科技股份有限公司 | Continuous mass production equipment for organic photoelectric assembly and manufacturing method for organic photoelectric assembly |
| TWI692897B (en) * | 2018-12-11 | 2020-05-01 | 機光科技股份有限公司 | In-line system for mass production of organic optoelectronic device and manufacturing method using the same |
| CN111584676A (en) * | 2019-02-15 | 2020-08-25 | 北京铂阳顶荣光伏科技有限公司 | Coating equipment and continuous coating method |
| CN110434108A (en) * | 2019-07-10 | 2019-11-12 | 奥士康科技股份有限公司 | A kind of dust free room continous way cleaning carrier controls tool equipment |
| CN111852280A (en) * | 2020-06-22 | 2020-10-30 | 上海集成电路研发中心有限公司 | Device and method for replacing device in vacuum cavity |
| CN113754302A (en) * | 2020-10-27 | 2021-12-07 | 湖南旗滨节能玻璃有限公司 | Glass coating conveying system and method |
| CN112460971A (en) * | 2020-11-30 | 2021-03-09 | 苏州晟成光伏设备有限公司 | Silicon wafer drying device and method |
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| CN101165205A (en) * | 2006-10-18 | 2008-04-23 | 甘国工 | Method and device for coating anti reflection passive film on crystal silicon solar cell sheet |
| CN200974865Y (en) * | 2006-11-27 | 2007-11-14 | 比亚迪股份有限公司 | Continuous vacuum coating apparatus |
| CN201648512U (en) * | 2010-03-24 | 2010-11-24 | 深圳森丰真空镀膜有限公司 | Continuous vacuum coating device |
| EP2395567A1 (en) * | 2010-06-10 | 2011-12-14 | Solarwave AB | A method and an apparatus for producing a solar cell module and a solar cell module |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN104694903A (en) | 2015-06-10 |
| TW201533256A (en) | 2015-09-01 |
| TWI558835B (en) | 2016-11-21 |
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