CN107326334A - Continuous type coating apparatus - Google Patents
Continuous type coating apparatus Download PDFInfo
- Publication number
- CN107326334A CN107326334A CN201710565353.XA CN201710565353A CN107326334A CN 107326334 A CN107326334 A CN 107326334A CN 201710565353 A CN201710565353 A CN 201710565353A CN 107326334 A CN107326334 A CN 107326334A
- Authority
- CN
- China
- Prior art keywords
- transfer pipe
- chamber
- workpiece
- opening
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention relates to a kind of continuous type coating apparatus.The continuous type coating apparatus is included successively against setting and can independently form feed mechanism, heating arrangements, buffer gear, film-coating mechanism and the discharging mechanism of sealing structure, and the feed mechanism, the heating arrangements, the buffer gear, the film-coating mechanism and the discharging mechanism are connected with vacuum device；The workpiece of heating is transferred to the buffer gear by the heating arrangement through first Transfer pipe；The buffer gear has second chamber, and the side wall of the second chamber is provided with the second Transfer pipe, and second Transfer pipe is connected with first Transfer pipe, and the second opening and closing part is provided with second Transfer pipe；The film-coating mechanism has the 3rd chamber, and the workpiece that the film-coating mechanism handles ion deposition is transferred to the discharging mechanism through the 5th Transfer pipe.The continuous type coating apparatus can be stablized constantly carries out PVD plated films to workpiece such as screw, screw rods.
Description
Technical field
The present invention relates to screw production equipment technical field, more particularly to a kind of continuous type coating apparatus.
Background technology
With the constantly upgrading of economic development and electronic industry, it is necessary to make it meet newly product surface progress coating film treatment
Performance or appearance requirement.As product surface is coated with metallic film with decorative effect；Product surface be coated with ganoine thin film with
Increase service life；Product surface is coated with corrosion-proof type film and allows it to use in acid or alkaline environment.Product surface is plated
Film would generally use galvanoplastic, molten metal immersion plating, method of chemical treatment or physical vapour deposition (PVD) (PVD) method.Wherein, PVD method
The plated film of preparation has the advantages that high rigidity, low-friction coefficient, preferable wearability and chemical stability.But, when using PVD
When method prepares plated film to workpiece such as screw, screw rods, traditional coating apparatus is difficult to stabilization and constantly the workpiece such as screw, screw rod is entered
Row plated film, it is impossible to realize inexpensive scale of mass production, production efficiency is relatively low, and manufacturing cost is higher.
The content of the invention
Based on this, it is necessary to provide a kind of can stablize and constantly carry out the continuous of PVD plated films to workpiece such as screw, screw rods
Type coating apparatus.
A kind of continuous type coating apparatus, including can form against setting and independently the feeder of sealing structure successively
Structure, heating arrangements, buffer gear, film-coating mechanism and discharging mechanism, the feed mechanism, the heating arrangements, the buffer
Structure, the film-coating mechanism and the discharging mechanism are connected with vacuum device；
The feed mechanism is used to workpiece being transferred to the heating arrangements；
The heating arrangements have first chamber, and the side wall of the first chamber is provided with the first Transfer pipe, described first
First opening and closing part is installed, first opening and closing part is used to control the opening of first Transfer pipe or closed in Transfer pipe
Close；The workpiece of heating is transferred to the buffer gear by the heating arrangement through first Transfer pipe；
The buffer gear has a second chamber, and the side wall of the second chamber is provided with the second Transfer pipe, and described the
Two Transfer pipes are connected with first Transfer pipe, and the second opening and closing part, described are provided with second Transfer pipe
Two opening and closing parts are used for the opening or closure for controlling second Transfer pipe；The opposite side wall of the second chamber is passed provided with the 3rd
Send and the 3rd opening and closing part is installed in passage, the 3rd Transfer pipe, the 3rd opening and closing part is used to control the 3rd transmission
The opening or closure of passage；The workpiece that the buffer gear completes application of vacuum is transferred to described through the 3rd Transfer pipe
Film-coating mechanism；
The film-coating mechanism has the 3rd chamber, and the side wall of the 3rd chamber is provided with the 4th Transfer pipe, and described the
Four Transfer pipes are connected with the 3rd Transfer pipe, and the 4th opening and closing part, described are provided with the 4th Transfer pipe
Four opening and closing parts are used for the opening or closure for controlling the 4th Transfer pipe；The opposite side wall of 3rd chamber is passed provided with the 5th
Send and the 5th opening and closing part is installed in passage, the 5th Transfer pipe, the 5th opening and closing part is used to control the 5th transmission
The opening or closure of passage；The workpiece that ion deposition processing is completed is transferred to by the film-coating mechanism through the 5th Transfer pipe
The discharging mechanism；
The discharging mechanism is used to place and conveying workpieces.
In one of the embodiments, the heating arrangements include the first transmission unit and heating unit, and described first passes
Defeated unit is located in the first chamber, and first transmission unit is used to workpiece being transferred to the buffer gear；It is described to add
Hot cell is located at the side wall of the first chamber, and the heating unit is used to add the workpiece on first transmission unit
Heat treatment.
In one of the embodiments, first transmission unit is roller frame.
In one of the embodiments, the buffer gear includes the second transmission unit, and second transmission unit is located at
In the second chamber, second transmission unit is used to workpiece being transferred to the film-coating mechanism.
In one of the embodiments, second transmission unit is roller frame.
In one of the embodiments, the film-coating mechanism includes the 3rd transmission unit and sputtering target material, and the described 3rd passes
Defeated unit is located in the 3rd chamber, and the 3rd transmission unit is used to workpiece being transferred to the discharging mechanism；It is described to splash
Material of shooting at the target is on the side wall of the 3rd chamber, and positioned at the top of the 3rd transmission unit, and the sputtering target material is used for
Ion deposition processing is carried out to the workpiece on the 3rd transmission unit.
In one of the embodiments, the 3rd transmission unit is roller frame.
In one of the embodiments, the sputtering target material has multiple, and multiple sputtering target materials are installed on side by side successively
The side wall of 3rd chamber.
In one of the embodiments, the feed mechanism has the 4th chamber, and the feed mechanism includes the first transmission
Band, first conveyer belt is located in the 4th chamber, and first conveyer belt is used to workpiece being transferred to the heater
Structure.
In one of the embodiments, the discharging mechanism has the 5th chamber, and the discharging mechanism includes the second transmission
Band, second conveyer belt is located in the 5th chamber, and second conveyer belt is used for conveying workpieces.
In one of the embodiments, in addition to fixed disk, the fixed disk is provided with multiple mesh, and the fixed disk is used for
Clamping workpiece simultaneously drives workpiece in the feed mechanism, the heating arrangements, the buffer gear, the film-coating mechanism and described
Mobile Transmission between discharging mechanism.
In one of the embodiments, the feed mechanism, the heating arrangements, the buffer gear, the coating machine
Structure and the discharging mechanism are to fasten the sealing structure formed by upper lid and casing, and the upper lid is installed in rotation on described
On casing.
In one of the embodiments, the film-coating mechanism has multiple, and multiple film-coating mechanisms are set up in parallel successively.
In one of the embodiments, in addition to cooling body, the cooling body is connected with the film-coating mechanism.
In one of the embodiments, the feed mechanism, the heating arrangements, the buffer gear, the coating machine
Structure and the linear type arrangement of the discharging mechanism.
Continuous type coating apparatus, which includes abutting successively, in the present invention sets and can independently be formed the upper of sealing structure
Expect mechanism, heating arrangements, buffer gear, film-coating mechanism and discharging mechanism, it is the feed mechanism, the heating arrangements, described slow
Punch mechanism, the film-coating mechanism and the discharging mechanism are connected with vacuum device.Workpiece is placed into after feed mechanism,
Vacuum device, which is proceeded by, to be vacuumized, and feed mechanism, heating arrangements, buffer gear, film-coating mechanism and discharging mechanism are true
Altitude.By setting heating arrangements and buffer gear first to be heated to workpiece and the processing technology, work such as forvacuum
Part enters back into film-coating mechanism and carries out ion deposition, and then stably can carry out PVD plated films to workpiece.
In addition, the continuous type coating apparatus by provided with the first Transfer pipe, the second Transfer pipe, the 3rd Transfer pipe,
4th Transfer pipe and the 5th Transfer pipe, and the first opening and closing part, the second opening and closing part, the 3rd folding are respectively correspondingly installed
Part, the 4th opening and closing part and the 5th opening and closing part, ensure that the operating environment requirements of heating arrangements, buffer gear and film-coating mechanism,
Realize the dynamic sealing of each mechanism, it is ensured that workpiece is continuously progressively heated, the processing work such as forvacuum and ion deposition
Skill, and then PVD plated films can be carried out to workpiece automatic continuously.The continuous type coating apparatus can realize scale of mass production, its
Production efficiency is high, and manufacturing cost is low.
Brief description of the drawings
Fig. 1 is the structural representation of continuous type coating apparatus in an embodiment；
Fig. 2 is the structural representation of film-coating mechanism in continuous type coating apparatus as shown in Figure 1.
Description of reference numerals is as follows：
10. continuous type coating apparatus；100. feed mechanism, 110. first conveyer belts；200. heating arrangements, 210. first chambers
Room, 220. first transmission units, 230. heating units；300. buffer gears, 310. second chambers, 320. second transmission units；
400. film-coating mechanisms, 410. the 3rd chambers, 420. the 3rd transmission units, 430. sputtering target materials；500. discharging mechanisms, 510. second
Conveyer belt；610. first Transfer pipes, 620. the 3rd Transfer pipes, 630. the 5th Transfer pipes；730. the 5th opening and closing parts；800.
Vacuum device；900. fixed disk.
Embodiment
For the ease of understanding the present invention, the present invention is described more fully below with reference to relevant drawings.In accompanying drawing
Give presently preferred embodiments of the present invention.But, the present invention can be realized in many different forms, however it is not limited to this paper institutes
The embodiment of description.On the contrary, the purpose for providing these embodiments is to make the understanding to the disclosure more thorough
Comprehensively.
It should be noted that when element is referred to as " being fixed on " another element, it can be directly on another element
Or can also have element placed in the middle.When an element is considered as " connection " another element, it can be directly connected to
To another element or it may be simultaneously present centering elements.
Unless otherwise defined, all of technologies and scientific terms used here by the article is with belonging to technical field of the invention
The implication that technical staff is generally understood that is identical.Term used in the description of the invention herein is intended merely to description tool
The purpose of the embodiment of body, it is not intended that in the limitation present invention.Term as used herein "and/or" includes one or more phases
The arbitrary and all combination of the Listed Items of pass.
In embodiment as shown in Figure 1, the continuous type coating apparatus 10, which includes abutting successively, to be set and can distinguish only
Vertical feed mechanism 100, heating arrangements 200, buffer gear 300, film-coating mechanism 400 and the discharging mechanism 500 for forming sealing structure.
The feed mechanism 100, the heating arrangements 200, the buffer gear 300, the film-coating mechanism 400 and the discharging mechanism 500 are with taking out
Vacuum mechanism 800 is connected.Alternatively, the film-coating mechanism 400 has multiple, and multiple film-coating mechanisms 400 are set up in parallel successively.
In one embodiment, the feed mechanism 100, the heating arrangements 200, the buffer gear 300, the film-coating mechanism
400 and the linear type of discharging mechanism 500 arrangement.Alternatively, (figure is not also including cooling body for the continuous type coating apparatus 10
Show), the cooling body is connected with the film-coating mechanism 400.
The feed mechanism 100 is used to workpiece being transferred to the heating arrangements 200.Alternatively, the feed mechanism 100 is by upper
Lid fastens the sealing structure to be formed with casing, covers on this and is installed in rotation on the casing.Covered in opening, can be by artificial
Or mechanical hand is put the workpiece in feed mechanism 100, covered in closing, it is ensured that make the formation sealing state of feed mechanism 100.Enter one
Alternatively, the feed mechanism 100 has the 4th chamber (not shown) to step, and the feed mechanism 100 includes the first conveyer belt 110, should
First conveyer belt 110 is located in the 4th chamber, and first conveyer belt 110 can be driven to rotate by motor, first transmission
Band 110 is used to workpiece being transferred to the heating arrangements 200.The shapes and sizes of the feed mechanism 100 can be according to process requirements
Carry out reasonable selection, it is ensured that workpiece can be stably transmitted to heating arrangements 200.
Alternatively, the side wall of the feed mechanism 100 is provided with the 6th Transfer pipe (not shown), the side wall with the feeding structure
The side wall of adjacent heating arrangements 200 is provided with the 7th Transfer pipe (not shown), and the 6th Transfer pipe is passed with the described 7th
Passage is sent to be connected.Accordingly, the Transfer pipe of the 6th Transfer pipe machine the 7th is separately installed with the 6th opening and closing part and (schemed not
Show) and the 7th opening and closing part (not shown), opening or closure of the 6th opening and closing part for controlling the 6th Transfer pipe, the 7th
Opening and closing part is used for the opening or closure for controlling the 7th Transfer pipe.Workpiece in the feed mechanism 100 is through the 6th Transfer pipe
And the 7th Transfer pipe be transferred to the heating arrangements 200.Alternatively, the 6th opening and closing part and the 7th opening and closing part can be for can
The baffle arrangement moved up and down.
The heating arrangements 200 have first chamber 210, and the side wall of the first chamber 210 is provided with the first Transfer pipe 610.
First opening and closing part (not shown) is installed, first opening and closing part is used to control first transmission logical in first Transfer pipe 610
The opening or closure in road 610.When heating arrangements 200 heat to workpiece, by controlling first opening and closing part to make
One Transfer pipe 610 is closed, it is ensured that the first chamber 210 of the heating arrangement is closed state.When workpiece heat processing is completed,
By controlling the first opening and closing part to open the first Transfer pipe 610, the workpiece of heating is passed through first Transfer pipe 610
It is defeated to arrive the buffer gear 300.Alternatively, first opening and closing part can be the baffle arrangement that can be moved up and down.Further
Alternatively, the heating arrangements 200 are to fasten the sealing structure formed by upper lid and casing, and lid is installed in rotation on the case on this
On body, lid and the casing are collectively forming first chamber 210 on this.
In one embodiment, the heating arrangements 200 include the first transmission unit 220 and heating unit 230, first biography
Defeated unit 220 is located in the first chamber 210, and first transmission unit 220 is used to workpiece being transferred to the buffer gear 300.
Alternatively, first transmission unit 220 is roller frame.The two ends of the cylinder mechanism are separately mounted to the first chamber 210
Side wall on, the work top of the cylinder mechanism is located in the first chamber 210.Still optionally further, the roller frame by
It is attached between multiple driving drum compositions being set up in parallel, multiple driving drums by belt.By provided with roller frame,
Can high efficiency smooth reliably transmit workpiece.Another step alternatively, drives rolling mechanism to rotate by motor.The motor is servo
During motor, the velocity of rotation of roller frame can be preferably controlled.Deflection correction sensor is also provided with the roller frame, to carry
The stability of high-transmission workpiece.
The heating unit 230 is located at the side wall of the first chamber 210, and the heating unit 230 can be positioned at first chamber
Upper side wall, lower wall, left side wall, right side wall, front side wall or the rear wall of room 210, if the heating unit 230 can to this
Workpiece on one transmission unit 220 is heated.The heating unit 230 can be heating tube, heating collar, heating plate
Or heater strip etc. provides the device of heat, can specifically be needed to be selected according to production.
The buffer gear 300 has second chamber 310, and the side wall of the second chamber 310 is provided with the second Transfer pipe (figure
Do not show), second Transfer pipe is connected with first Transfer pipe 610, and the second folding is provided with second Transfer pipe
Part (not shown), second opening and closing part is used for the opening or closure for controlling second Transfer pipe.The second chamber 310 it is another
Side wall is provided with the 3rd Transfer pipe 620, the 3rd Transfer pipe 620 and is provided with the 3rd opening and closing part (not shown), and the 3rd opens
Component is used for the opening or closure for controlling the 3rd Transfer pipe 620.Alternatively, second opening and closing part and the 3rd opening and closing part can be with
For the baffle arrangement that can be moved up and down.By controlling the operation of vacuum device 800, with the buffer gear 300
Workpiece carry out forvacuum processing.The workpiece that application of vacuum is completed is passed through the second Transfer pipe and the 3rd Transfer pipe 620
It is defeated to arrive the film-coating mechanism 400.
When vacuum device 800 carries out forvacuum to buffer gear 300, by controlling second opening and closing part to make second
Transfer pipe is closed and the 3rd opening and closing part of control closes the 3rd Transfer pipe 620, it is ensured that the buffer structure is closed state.When
When workpiece heat processing is completed, by controlling the 3rd opening and closing part to open the 3rd Transfer pipe 620, the workpiece of application of vacuum is passed through
3rd Transfer pipe 620 is transferred to the film-coating mechanism 400.Alternatively, the buffer gear 300 is to fasten shape by upper lid and casing
Into sealing structure, cover on this and be installed in rotation on the casing, lid and the casing are collectively forming second chamber 310 on this.
In one embodiment, the buffer gear 300 includes the second transmission unit 320, and second transmission unit 320 is located at
In the second chamber 310, second transmission unit 320 is used to workpiece being transferred to the film-coating mechanism 400.Alternatively, this second
Transmission unit 320 is roller frame.The two ends of the cylinder mechanism are separately mounted on the side wall of the second chamber 310, described
The work top of cylinder mechanism is located in the second chamber 310.Still optionally further, the roller frame is set up in parallel by multiple
Driving drum is constituted, and is attached between multiple driving drums by belt.By provided with roller frame, can high efficiency smooth can
The transmission workpiece leaned on.Another step alternatively, drives rolling mechanism to rotate by motor., can be compared with when the motor is servomotor
The velocity of rotation of roller frame is controlled well.Deflection correction sensor is also provided with the roller frame, to improve transmission workpiece
Stability.
The film-coating mechanism 400 has the 3rd chamber 410, and the side wall of the 3rd chamber 410 is provided with the 4th Transfer pipe (figure
Do not show), the 4th Transfer pipe is connected with the 3rd Transfer pipe 620, and the 4th folding is provided with the 4th Transfer pipe
Part (not shown), the 4th opening and closing part is used for the opening or closure for controlling the 4th Transfer pipe.It is another when the 3rd chamber 410
Side wall is provided with the 5th Transfer pipe 630, the 5th Transfer pipe 630 and is provided with the 5th opening and closing part 730, the 5th opening and closing part
730 opening or closure for controlling the 5th Transfer pipe 630.Alternatively, the 4th opening and closing part and the 5th opening and closing part 730 can
Think the baffle arrangement that can be moved up and down.
When film-coating mechanism 400 carries out ion deposition processing to workpiece, by controlling the 4th opening and closing part to make the 4th transmission
Passage is closed and the 5th opening and closing part 730 of control closes the 5th Transfer pipe 630, it is ensured that the film-coating mechanism 400 is closed state.
When the processing of workpiece ion deposition is completed, by controlling the 5th opening and closing part 730 to open the 5th Transfer pipe 630, ion is sunk
The workpiece of product processing is transferred to the discharging mechanism 500 through the 5th Transfer pipe 630.Alternatively, the film-coating mechanism 400 is by upper
Lid fastens the sealing structure to be formed with casing, cover on this and is installed in rotation on the casing, covers and the common shape of the casing on this
Into the 3rd chamber 410.
In embodiment as shown in Figure 2, the film-coating mechanism 400 includes the 3rd transmission unit 420 and sputtering target material 430, should
3rd transmission unit 420 is located in the 3rd chamber 410, and the 3rd transmission unit 420 is used to workpiece being transferred to the discharging machine
Structure 500.The sputtering target material 430 is somebody's turn to do on the side wall of the 3rd chamber 410, and positioned at the top of the 3rd transmission unit 420
Sputtering target material 430 is used to carry out ion deposition processing to the workpiece on the 3rd transmission unit 420.Alternatively, the sputtering target material
430 have multiple, and multiple sputtering target materials 430 are installed on the side wall of the 3rd chamber 410 side by side successively.By provided with multiple sputterings
Target 430, more efficiently can carry out sputtering sedimentation to the workpiece on the 3rd transmission unit 420.Alternatively, the 3rd transmission
Unit 420 is roller frame.The two ends of the cylinder mechanism are separately mounted on the side wall of the 3rd chamber 410, the roller
The work top of mechanism is located in the 3rd chamber 410.Still optionally further, the roller frame is by multiple transmissions being set up in parallel
Roller is constituted, and is attached between multiple driving drums by belt.By provided with roller frame, can high efficiency smooth it is reliable
Transmit workpiece.Another step alternatively, is provided with heater in the driving drum, can provide film-coating mechanism 400 required work
Make heat.Another step alternatively, drives rolling mechanism to rotate by motor.When the motor is servomotor, can preferably it control
The velocity of rotation of roller frame processed.Deflection correction sensor is also provided with the roller frame, to improve the continuity of transmission workpiece
And stability.
In one embodiment, the film-coating mechanism 400 is provided with three sputtering target materials 430 set gradually, the sputtering target material
430 can be planar targets, column target or cake type target.Selection target and reacting gas can be needed according to coating, should
Film-coating mechanism 400 can prepare the thin film coatings such as chromium, chromium nitride, chromium carbide, chromium oxide and evanohm, or prepare titanium, titanium carbide,
Titanium nitride, the oxidation thin film coating such as titanium or titanium alloy, or the thin film coating such as aluminium, aluminium carbide, aluminium nitride, aluminum oxide and aluminium alloy,
Or the thin film coating such as boron, boron carbide, boron nitride, boron oxide and boron alloy, or silicon, carborundum, silicon nitride, silica and silicon alloy
Deng thin film coating, or the thin film coating such as carbons, diamond and DLC.
The discharging mechanism 500 is used to place and conveying workpieces.Alternatively, the discharging mechanism 500 is by upper lid and casing button
The sealing structure formed is closed, covers on this and is installed in rotation on the casing.By being covered in opening, artificial or machine can be passed through
Hand takes out workpiece, by being covered in closing, it is ensured that make the formation sealing state of discharging mechanism 500.Still optionally further, the discharging machine
Structure 500 has the 5th chamber (not shown), and the discharging mechanism 500 includes the second conveyer belt 510, and second conveyer belt 510 is located at
In 5th chamber, second conveyer belt 510 is used for conveying workpieces.Alternatively, the second conveyer belt 510 is driven to transport by motor
It is dynamic.The shapes and sizes of the discharging mechanism 500 can carry out reasonable selection according to process requirements, it is ensured that can stably convey work
Part.
Alternatively, the side wall of the discharging mechanism 500 is provided with the 8th Transfer pipe (not shown), the 8th Transfer pipe and institute
The 5th Transfer pipe 630 is stated to be connected.Accordingly, the 8th Transfer pipe is separately installed with the 8th opening and closing part (not shown).
Alternatively, the 8th opening and closing part is the baffle arrangement that can be moved up and down.8th opening and closing part is used to control the 8th biography
Send the opening or closure of passage.Workpiece in the film-coating mechanism 400 is transferred to through the 5th Transfer pipe 630 and the 8th Transfer pipe
The discharging mechanism 500.
In one embodiment, in addition to fixed disk 900, the fixed disk 900 is provided with multiple mesh, and the fixed disk 900 is used
In clamping workpiece and workpiece is driven in the feed mechanism 100, the heating arrangements 200, the buffer gear 300, the film-coating mechanism 400
And Mobile Transmission between the discharging mechanism 500.The size of mesh can be adjusted in fixed disk 900, so as to which fixation is small
The different types of screws such as type screw, medium-sized screw and large-scale screw.
Continuous type coating apparatus 10, which includes abutting successively, in the present invention sets and can independently be formed sealing structure
Feed mechanism 100, heating arrangements 200, buffer gear 300, film-coating mechanism 400 and discharging mechanism 500, the feed mechanism 100, should
Heating arrangements 200, the buffer gear 300, the film-coating mechanism 400 and the discharging mechanism 500 are connected with vacuum device 800
Connect.Workpiece is placed into after feed mechanism 100, vacuum device 800, which is proceeded by, to be vacuumized, feed mechanism 100, heating arrangements
200th, buffer gear 300, film-coating mechanism 400 and discharging mechanism 500 are vacuum environment.By setting heating arrangements 200 and delaying
Punch mechanism 300 can be heated and the processing technology such as forvacuum to workpiece, and then workpiece enters film-coating mechanism 400 and carried out
Ion deposition, stably can carry out PVD plated films to workpiece.
In addition, the continuous type coating apparatus 10 passes through provided with the first Transfer pipe 610, the second Transfer pipe, the 3rd transmission
Passage 620, the 4th Transfer pipe and the 5th Transfer pipe 630, and the first opening and closing part, the second folding are respectively correspondingly installed
Part, the 3rd opening and closing part, the 4th opening and closing part and the 5th opening and closing part 730, ensure that heating arrangements 200, buffer gear 300 and plated film
The operating environment requirements of mechanism 400, it is ensured that continuously progressively heated to workpiece, the processing work such as forvacuum and ion deposition
Skill, and then PVD plated films can be carried out to workpiece automatic continuously.
The course of work of the continuous type coating apparatus 10 is：The upper lid of feed mechanism 100 is opened, passes through manually or mechanically hand
Put the workpiece in feed mechanism 100, covered in closing, it is ensured that the formation sealing state of feed mechanism 100.Bring into operation and vacuumize
Mechanism 800, it is true to make feed mechanism 100, heating arrangements 200, buffer gear 300, film-coating mechanism 400 and discharging mechanism 500
Dummy status.Control the 6th opening and closing part and the 7th opening and closing part to open the 6th Transfer pipe and the 7th Transfer pipe respectively, pass through first
Workpiece is transferred to the first transmission unit 220 in heating arrangements 200 by conveyer belt through the 6th Transfer pipe and the 7th Transfer pipe
On.The 7th opening and closing part is controlled to close the 7th Transfer pipe, it is ensured that heating arrangements 200 are closed state, and bring into operation heating unit
230, the workpiece in heating arrangements 200 is heated.
After the completion of workpiece heat processing, the first opening and closing part of control and the second opening and closing part open the first Transfer pipe 610 respectively
And second Transfer pipe, workpiece is transferred to through the first Transfer pipe 610 and the second Transfer pipe by the first transmission unit 220
On the second transmission unit 320 in buffer gear 300.The second opening and closing part is controlled to close the second Transfer pipe, it is ensured that buffer gear
300 be closed state, and the vacuum device 800 that brings into operation carries out forvacuum to buffer gear 300.
After the completion of forvacuum, by controlling the 3rd opening and closing part and the 4th opening and closing part to open the 3rd Transfer pipe 620 respectively
And the 4th Transfer pipe, workpiece is transferred to through the 3rd Transfer pipe 620 and the 4th Transfer pipe by the second transmission unit 320
On the 3rd transmission unit 420 in film-coating mechanism 400.The 4th opening and closing part is controlled to close the 4th Transfer pipe, it is ensured that film-coating mechanism
400 be closed state, and the vacuum device 800 that brings into operation is vacuumized to film-coating mechanism 400, and passes through the 3rd transmission unit
The heater in conveying roller in 420 is heated, and is met after processing temperature and pressure requirements, using sputtering target material 430
Sputtering sedimentation is carried out to workpiece on the 3rd transmission unit 420, so that workpiece completes PVD plated films.
After the completion of workpiece plated film, by controlling the 5th opening and closing part 730 and the 8th opening and closing part to open the 5th Transfer pipe respectively
630 and the 8th Transfer pipe, workpiece is passed through the 5th Transfer pipe 630 and the 8th Transfer pipe by the 3rd transmission unit 420
On defeated the second conveyer belt to discharging mechanism 500, then by manipulator or manually workpiece is taken out of.
Screw plated film prepared by the continuous type coating apparatus 10 is detected：L value (the colors of its silver color plated film prepared
Standard CIE1976) up to 81.The L values (color standard CIE1976) of its black coating prepared are up to 35.It prepares plating
The Vickers hardness (25gt) of film is up to 1200HV, and nano hardness is up to 11Gpa.Its plated film prepared can be small by 12
When preservative challenge testing.Its plated film prepared can pass through 2 hours haydite wearability tests.Therefore, the continuous type coating apparatus 10
It can stablize and PVD plated films are constantly carried out to workpiece such as screw, screw rods, and its plated film prepared is compared with plated film prepared by conventional art
Performance is significantly improved.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
Apply all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, the scope of this specification record is all considered to be.
Embodiment described above only expresses the several embodiments of the present invention, and it describes more specific and detailed, but simultaneously
Can not therefore it be construed as limiting the scope of the patent.It should be pointed out that coming for one of ordinary skill in the art
Say, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention
Scope.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (10)
1. a kind of continuous type coating apparatus, it is characterised in that set and can independently be formed sealing knot including abutting successively
Feed mechanism, heating arrangements, buffer gear, film-coating mechanism and the discharging mechanism of structure, the feed mechanism, the heating arrangements,
The buffer gear, the film-coating mechanism and the discharging mechanism are connected with vacuum device；
The feed mechanism is used to workpiece being transferred to the heating arrangements；
The heating arrangements have first chamber, and the side wall of the first chamber is provided with the first Transfer pipe, first transmission
First opening and closing part is installed, first opening and closing part is used for the opening or closure for controlling first Transfer pipe in passage；Institute
State heating arrangement and will heat the workpiece completed and through first Transfer pipe be transferred to the buffer gear；
The buffer gear has second chamber, and the side wall of the second chamber is provided with the second Transfer pipe, and described second passes
Send passage to be connected with first Transfer pipe, the second opening and closing part is installed in second Transfer pipe, described second opens
Component is used for the opening or closure for controlling second Transfer pipe；The opposite side wall of the second chamber is logical provided with the 3rd transmission
3rd opening and closing part is installed, the 3rd opening and closing part is used to control the 3rd Transfer pipe in road, the 3rd Transfer pipe
Opening or closure；The workpiece that the buffer gear completes application of vacuum is transferred to the plated film through the 3rd Transfer pipe
Mechanism；
The film-coating mechanism has the 3rd chamber, and the side wall of the 3rd chamber is provided with the 4th Transfer pipe, and the described 4th passes
Send passage to be connected with the 3rd Transfer pipe, the 4th opening and closing part is installed in the 4th Transfer pipe, the described 4th opens
Component is used for the opening or closure for controlling the 4th Transfer pipe；The opposite side wall of 3rd chamber is logical provided with the 5th transmission
5th opening and closing part is installed, the 5th opening and closing part is used to control the 5th Transfer pipe in road, the 5th Transfer pipe
Opening or closure；The workpiece that the film-coating mechanism completes ion deposition processing is transferred to described through the 5th Transfer pipe
Discharging mechanism；
The discharging mechanism is used to place and conveying workpieces.
2. continuous type coating apparatus according to claim 1, it is characterised in that it is single that the heating arrangements include the first transmission
Member and heating unit, first transmission unit are located in the first chamber, and first transmission unit is used to pass workpiece
It is defeated to arrive the buffer gear；The heating unit is located at the side wall of the first chamber, and the heating unit is used for described the
Workpiece on one transmission unit is heated.
3. continuous type coating apparatus according to claim 1, it is characterised in that it is single that the buffer gear includes the second transmission
Member, second transmission unit is located in the second chamber, and second transmission unit is used to workpiece being transferred to the plating
Film mechanism.
4. continuous type coating apparatus according to claim 1, it is characterised in that it is single that the film-coating mechanism includes the 3rd transmission
Member and sputtering target material, the 3rd transmission unit are located in the 3rd chamber, and the 3rd transmission unit is used to pass workpiece
It is defeated to arrive the discharging mechanism；The sputtering target material is located at the 3rd transmission unit on the side wall of the 3rd chamber
Top, the sputtering target material be used on the 3rd transmission unit workpiece carry out ion deposition processing.
5. continuous type coating apparatus according to claim 1, it is characterised in that the feed mechanism has the 4th chamber,
The feed mechanism includes the first conveyer belt, and first conveyer belt is located in the 4th chamber, and first conveyer belt is used
In workpiece is transferred into the heating arrangements.
6. continuous type coating apparatus according to claim 1, it is characterised in that the discharging mechanism has the 5th chamber,
The discharging mechanism includes the second conveyer belt, and second conveyer belt is located in the 5th chamber, and second conveyer belt is used
In conveying workpieces.
7. the continuous type coating apparatus according to claim any one of 1-6, it is characterised in that described also including fixed disk
Fixed disk is provided with multiple mesh, and the fixed disk is used for clamping workpiece and drives workpiece in the feed mechanism, the heater
Mobile Transmission between structure, the buffer gear, the film-coating mechanism and the discharging mechanism.
8. the continuous type coating apparatus according to claim any one of 1-6, it is characterised in that the feed mechanism, described
Heating arrangements, the buffer gear, the film-coating mechanism and the discharging mechanism are that formed close is fastened with casing by upper lid
Seal structure, the upper lid is installed in rotation on the casing.
9. the continuous type coating apparatus according to claim any one of 1-6, it is characterised in that the film-coating mechanism has many
Individual, multiple film-coating mechanisms are set up in parallel successively.
10. the continuous type coating apparatus according to claim any one of 1-6, it is characterised in that also including cooling body, institute
Cooling body is stated with the film-coating mechanism to be connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710565353.XA CN107326334A (en) | 2017-07-12 | 2017-07-12 | Continuous type coating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710565353.XA CN107326334A (en) | 2017-07-12 | 2017-07-12 | Continuous type coating apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107326334A true CN107326334A (en) | 2017-11-07 |
Family
ID=60197012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710565353.XA Pending CN107326334A (en) | 2017-07-12 | 2017-07-12 | Continuous type coating apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107326334A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112962081A (en) * | 2021-02-01 | 2021-06-15 | 肇庆宏旺金属实业有限公司 | Continuous coating production line and coating process for steel plate |
| CN114807910A (en) * | 2022-06-09 | 2022-07-29 | 广东思泉新材料股份有限公司 | On-line vacuum coating production line |
| WO2023178948A1 (en) * | 2022-03-25 | 2023-09-28 | 厦门韫茂科技有限公司 | Continuous atomic layer deposition (ald) coating apparatus |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201158699Y (en) * | 2008-01-16 | 2008-12-03 | 甘国工 | Coiling film-plating machine |
| CN101353778A (en) * | 2007-07-27 | 2009-01-28 | 鸿富锦精密工业（深圳）有限公司 | Sputtering type film coating apparatus and film coating method |
| CN101376964A (en) * | 2007-08-31 | 2009-03-04 | 鸿富锦精密工业（深圳）有限公司 | Sputtering type film coating apparatus and film coating method |
| CN203834012U (en) * | 2014-04-03 | 2014-09-17 | 蒋绍洪 | Continuous type diamond like carbon film coating device |
| CN104694903A (en) * | 2014-02-26 | 2015-06-10 | 陈庆丰 | Continuous physical vacuum coating equipment |
| CN105239051A (en) * | 2015-11-17 | 2016-01-13 | 广东腾胜真空技术工程有限公司 | Double-way in and out alternating film plating device and method |
| CN105316635A (en) * | 2015-11-16 | 2016-02-10 | 肇庆市大力真空设备有限公司 | Multifunctional magnetron-sputtering automatic coating production line and coating method thereof |
| CN205893383U (en) * | 2016-07-15 | 2017-01-18 | 爱发科豪威光电薄膜科技(深圳)有限公司 | Superhard height passes through membrane production facility |
-
2017
- 2017-07-12 CN CN201710565353.XA patent/CN107326334A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101353778A (en) * | 2007-07-27 | 2009-01-28 | 鸿富锦精密工业（深圳）有限公司 | Sputtering type film coating apparatus and film coating method |
| CN101376964A (en) * | 2007-08-31 | 2009-03-04 | 鸿富锦精密工业（深圳）有限公司 | Sputtering type film coating apparatus and film coating method |
| CN201158699Y (en) * | 2008-01-16 | 2008-12-03 | 甘国工 | Coiling film-plating machine |
| CN104694903A (en) * | 2014-02-26 | 2015-06-10 | 陈庆丰 | Continuous physical vacuum coating equipment |
| CN203834012U (en) * | 2014-04-03 | 2014-09-17 | 蒋绍洪 | Continuous type diamond like carbon film coating device |
| CN105316635A (en) * | 2015-11-16 | 2016-02-10 | 肇庆市大力真空设备有限公司 | Multifunctional magnetron-sputtering automatic coating production line and coating method thereof |
| CN105239051A (en) * | 2015-11-17 | 2016-01-13 | 广东腾胜真空技术工程有限公司 | Double-way in and out alternating film plating device and method |
| CN205893383U (en) * | 2016-07-15 | 2017-01-18 | 爱发科豪威光电薄膜科技(深圳)有限公司 | Superhard height passes through membrane production facility |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112962081A (en) * | 2021-02-01 | 2021-06-15 | 肇庆宏旺金属实业有限公司 | Continuous coating production line and coating process for steel plate |
| WO2023178948A1 (en) * | 2022-03-25 | 2023-09-28 | 厦门韫茂科技有限公司 | Continuous atomic layer deposition (ald) coating apparatus |
| CN114807910A (en) * | 2022-06-09 | 2022-07-29 | 广东思泉新材料股份有限公司 | On-line vacuum coating production line |
| CN114807910B (en) * | 2022-06-09 | 2023-09-01 | 广东思泉新材料股份有限公司 | Online Vacuum Coating Production Line |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107326334A (en) | Continuous type coating apparatus | |
| CN104962914B (en) | Prepare the industrial automation vapor deposition apparatus of DLC film | |
| CA2971754C (en) | Alcrn-based coating providing enhanced crater wear resistance | |
| CN102051581B (en) | Substrate film-coating processing system | |
| CN100549242C (en) | A kind of growing apparatus for preparing IV-VI family semiconductor single crystal thin film | |
| CN112811802B (en) | Uniform heated annealing furnace for glass bottle production | |
| CN104342624B (en) | Method for manufacturing high-temperature-resisting black borosilicate glass | |
| CN101484607A (en) | Substrate tray and film-forming apparatus | |
| WO2020034967A1 (en) | Vacuum coating apparatus and method, and preparation method of film layer inside filter cavity | |
| CN102373422A (en) | Vacuum coating system | |
| CN202022972U (en) | Substrate film coating processing equipment | |
| CN107779835A (en) | A kind of method of continous way magnetic control sputtering device and continous way magnetron sputtering | |
| CN215668193U (en) | Pipeline transmission continuous vacuum coating production line structure | |
| CN107671301A (en) | A kind of graphene Cu-base powder preparation facilities | |
| CN1600894A (en) | Installation for coating work pieces using electron beam | |
| CN210367891U (en) | Cluster formula filming equipment | |
| CN208038545U (en) | A kind of magnetic control film coating production line applied to glassware | |
| CN108070841A (en) | Continuous coating system and method | |
| CN113637951A (en) | Pipeline transmission continuous vacuum coating production line structure and production method thereof | |
| WO2014119212A1 (en) | Hard coating film having adhesion resistance to soft metal | |
| CN102400212B (en) | Method for obtaining polycrystal optical zinc selenide | |
| CN108680009A (en) | A kind of the inoxidzable coating Equipment for Heating Processing and method of carbon/carbon compound material | |
| CN214422739U (en) | Continuous automatic conveying sputtering film forming device with revolution and rotation structure | |
| CN210892438U (en) | Vacuum oven mechanism with double-group multi-layer heating | |
| CN201638797U (en) | Buffering device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20171107 |