CN208038545U - A kind of magnetic control film coating production line applied to glassware - Google Patents
A kind of magnetic control film coating production line applied to glassware Download PDFInfo
- Publication number
- CN208038545U CN208038545U CN201820138785.2U CN201820138785U CN208038545U CN 208038545 U CN208038545 U CN 208038545U CN 201820138785 U CN201820138785 U CN 201820138785U CN 208038545 U CN208038545 U CN 208038545U
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- vacuum chamber
- chamber
- glassware
- coating
- high vacuum
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Abstract
The utility model discloses a kind of reasonable design, the magnetic control film coating production line applied to glassware that glassware deforms and vacuum environment is stablized can be prevented.The utility model includes conveying device, vacuum chamber is provided in conveying device, there are four channel isolations for setting in vacuum chamber, glass transfer passage is both provided on channel isolation, vacuum chamber is divided into the first low vacuum chamber by four channel isolations successively, first high vacuum chamber, coating chamber, second high vacuum chamber and the second low vacuum chamber, magnetic controlled sputtering target is provided in coating chamber, conveying roller in conveying device is ceramic conveyor roll, the both ends of first low vacuum chamber and the second low vacuum chamber are respectively arranged with the first apparatus for vacuum producing and the first aspirator, first high vacuum chamber and the both ends of the second high vacuum chamber and coating chamber are respectively arranged with the second apparatus for vacuum producing and the second aspirator, the lower end of second apparatus for vacuum producing is provided with heating device.The utility model is applied to the technical field of magnetic control film coating.
Description
Technical field
The utility model is related to the technical fields of magnetic control film coating, more particularly to a kind of magnetic control film coating applied to glassware
Production line.
Background technology
Magnetron sputtering plating refers to that coating material is generated cathodic sputtering as target cathode using argon ion bombardment target,
Target atom is splashed to a kind of coating technique that sedimentary is formed on workpiece.Traditional coating film on glass is mostly true only with one
Plenum chamber, and a vacuum chamber be easy to cause the unstable of vacuum environment, to influence the quality of coating film on glass, in addition reproduces
Transmission device in some magnetic control film coating production equipments, mostly uses greatly aluminium alloy either conveying roller made of carbon steel, and glass
It is constantly in contact with conveying roller in transmission device, to cause glassware to occur on the conveying roller made of aluminium alloy or carbon steel
Deformation influences the quality of glassware.
Utility model content
Technical problem to be solved in the utility model be overcome the deficiencies of the prior art and provide a kind of reasonable design,
The magnetic control film coating production line applied to glassware that can prevent glassware deformation and vacuum environment from stablizing.
Technical solution used by the utility model is：The utility model includes conveying device, is set in the conveying device
Be equipped with vacuum chamber, in the vacuum chamber setting be both provided with glass conveying on the channel isolation there are four channel isolation
The vacuum chamber is divided into the first low vacuum chamber, the first high vacuum chamber, plated film by channel, four channel isolations successively
Room, the second high vacuum chamber and the second low vacuum chamber are provided with magnetic controlled sputtering target in the coating chamber, defeated in the conveying device
Send roller for ceramic conveyor roll, the both ends of first low vacuum chamber and second low vacuum chamber are respectively arranged with first and vacuumize
Device and the first aspirator, first high vacuum chamber and the both ends of second high vacuum chamber and the coating chamber are respectively arranged with
The lower end of second apparatus for vacuum producing and the second aspirator, second apparatus for vacuum producing is provided with heating device.
Further, the heating device is electric furnace.
Further, it is provided with plated film observation window on the coating chamber.
The utility model has the beneficial effects that：Since the utility model includes conveying device, it is arranged in the conveying device
Have a vacuum chamber, in the vacuum chamber setting it is logical there are four channel isolation, on the channel isolation to be both provided with glass conveying
Road, four channel isolations by the vacuum chamber be divided into successively the first low vacuum chamber, the first high vacuum chamber, coating chamber,
Second high vacuum chamber and the second low vacuum chamber are provided with magnetic controlled sputtering target, the conveying in the conveying device in the coating chamber
Roller is ceramic conveyor roll, and the both ends of first low vacuum chamber and second low vacuum chamber are respectively arranged with the first apparatus for vacuum producing
With the first aspirator, first high vacuum chamber and the both ends of second high vacuum chamber and the coating chamber are respectively arranged with
The lower end of two apparatus for vacuum producing and the second aspirator, second apparatus for vacuum producing is provided with heating device, so the utility model is logical
Crossing the ceramic conveyor roll drives glassware to pass sequentially through first low vacuum chamber, first high vacuum chamber, the plating
Film room, second high vacuum chamber and second low vacuum chamber, the ceramic conveyor roll can prevent glassware from transmitting
The case where deforming in the process, indoor first low vacuum chamber of the vacuum chamber, first high vacuum chamber, the plating
Film room, second high vacuum chamber and second low vacuum chamber make the vacuum environment of sputter coating more stablize, make glass system
Product coating effects are more preferably.
Description of the drawings
Fig. 1 is the vertical view of the utility model.
Specific implementation mode
As shown in Figure 1, in the present embodiment, the utility model includes conveying device 1, is provided in the conveying device 1
Vacuum chamber 2, in the vacuum chamber 2 setting be both provided with glass conveying on the channel isolation 3 there are four channel isolation 3
The vacuum chamber 2 is divided into the first low vacuum chamber 4, the first high vacuum chamber 5, plating by channel, four channel isolations 3 successively
Film room 6, the second high vacuum chamber 7 and the second low vacuum chamber 8 are provided with magnetic controlled sputtering target, the conveying device in the coating chamber 6
Conveying roller on 1 is ceramic conveyor roll 9, and the ceramic conveyor roll 9 can effectively prevent glassware to occur in transmit process
The case where deformation, improves the quality of glassware；Distinguish at the both ends of first low vacuum chamber 4 and second low vacuum chamber 8
It is provided with the first apparatus for vacuum producing 10 and the first aspirator 11, first apparatus for vacuum producing 10 is for making first low vacuum chamber 4
It is in low vacuum state with second low vacuum chamber 8, first aspirator 11 is for taking 4 He of the first low vacuum chamber away
Exhaust gas in second low vacuum chamber 8, first high vacuum chamber 5 and second high vacuum chamber 7 and the coating chamber 6
Both ends are respectively arranged with the second apparatus for vacuum producing 12 and the second aspirator 13, and the lower end of second apparatus for vacuum producing 12 is provided with heating
Device, the heating device are electric furnace, and the electric furnace and second apparatus for vacuum producing 12 can make 5 He of the first high vacuum chamber
Second high vacuum chamber 7 vacuumizes state into high temperature, makes at first high vacuum chamber 5 and second high vacuum chamber 7
In high vacuum state.
In the present embodiment, plated film observation window is provided on the coating chamber 6, the plated film observation window can be observed at any time
To the plated film situation of the glassware in the coating chamber 6.
In the present embodiment, pressure sensor and temperature sensor, the pressure sensor are provided in the coating chamber 6
Detect air pressure and the temperature of the coating chamber 6 respectively with the temperature sensor.
The working process of the utility model is as follows：Glassware enters the vacuum chamber under the conveying of the conveying device 1
Room 2, and by first low vacuum chamber 4 enter low vacuum state after, pass through first high vacuum chamber 5 enter high vacuum shape
After state, then by the coating chamber 6, glassware is under the high vacuum state that the coating chamber 6 is stablized, the magnetic controlled sputtering target
The atomic group and ion of effusion are persistently beaten on glassware under the action of electric field and magnetic field, make glass article surface
After obtaining one layer of uniform plated film, then is driven by the conveying device 1 and to have plated the glassware after film and pass sequentially through described the
Two high vacuum chambers 7 and second low vacuum chamber 8, finally export from the vacuum chamber 2.
The utility model is applied to the technical field of magnetic control film coating.
Although the embodiments of the present invention are described with practical solution, does not constitute the utility model is contained
Justice limitation, for those skilled in the art, according to this specification to the modification of its embodiment and with the group of other schemes
Conjunction will be apparent from.
Claims (3)
1. a kind of magnetic control film coating production line applied to glassware, including conveying device（1）, the conveying device（1）On set
It is equipped with vacuum chamber（2）, it is characterised in that：The vacuum chamber（2）There are four channel isolations for interior setting（3）, the isolation is logical
Road（3）On be both provided with glass transfer passage, four channel isolations（3）By the vacuum chamber（2）It is divided into successively
One low vacuum chamber（4）, the first high vacuum chamber（5）, coating chamber（6）, the second high vacuum chamber（7）With the second low vacuum chamber（8）, described
Coating chamber（6）Inside it is provided with magnetic controlled sputtering target, the conveying device（1）On conveying roller be ceramic conveyor roll（9）, described first
Low vacuum chamber（4）With second low vacuum chamber（8）Both ends be respectively arranged with the first apparatus for vacuum producing（10）With the first aspirator
（11）, first high vacuum chamber（5）With second high vacuum chamber（7）And the coating chamber（6）Both ends be respectively arranged with
Second apparatus for vacuum producing（12）With the second aspirator（13）, second apparatus for vacuum producing（12）Lower end be provided with heating device.
2. a kind of magnetic control film coating production line applied to glassware according to claim 1, it is characterised in that：It is described to add
Hot charging is set to electric furnace.
3. a kind of magnetic control film coating production line applied to glassware according to claim 1, it is characterised in that：The plating
Film room（6）On be provided with plated film observation window.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820138785.2U CN208038545U (en) | 2018-01-29 | 2018-01-29 | A kind of magnetic control film coating production line applied to glassware |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820138785.2U CN208038545U (en) | 2018-01-29 | 2018-01-29 | A kind of magnetic control film coating production line applied to glassware |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208038545U true CN208038545U (en) | 2018-11-02 |
Family
ID=63954552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820138785.2U Expired - Fee Related CN208038545U (en) | 2018-01-29 | 2018-01-29 | A kind of magnetic control film coating production line applied to glassware |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208038545U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110670039A (en) * | 2019-11-19 | 2020-01-10 | 广东腾胜科技创新有限公司 | Magnetic material coating production line with moving magnetic plate plane cathode |
| CN114345857A (en) * | 2021-12-13 | 2022-04-15 | 凯盛科技股份有限公司蚌埠华益分公司 | Device and method for low-temperature aluminum plating magnetic control film coating |
-
2018
- 2018-01-29 CN CN201820138785.2U patent/CN208038545U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110670039A (en) * | 2019-11-19 | 2020-01-10 | 广东腾胜科技创新有限公司 | Magnetic material coating production line with moving magnetic plate plane cathode |
| CN114345857A (en) * | 2021-12-13 | 2022-04-15 | 凯盛科技股份有限公司蚌埠华益分公司 | Device and method for low-temperature aluminum plating magnetic control film coating |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181102 Termination date: 20220129 |