CN104890322A - Scratch-resistant double-sliver low-radiation coated glass capable of being toughened - Google Patents
Scratch-resistant double-sliver low-radiation coated glass capable of being toughened Download PDFInfo
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- CN104890322A CN104890322A CN201510236548.0A CN201510236548A CN104890322A CN 104890322 A CN104890322 A CN 104890322A CN 201510236548 A CN201510236548 A CN 201510236548A CN 104890322 A CN104890322 A CN 104890322A
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Abstract
The invention relates to scratch-resistant double-sliver low-radiation coated glass capable of being toughened, which belongs to the field of coated glass. The glass comprises a glass substrate, wherein a silicon nitride film layer, a nickel-chromium film layer, a sliver film layer, a nickel-chromium film layer, a zinc-tin oxide film layer, a zinc-aluminum oxide film layer, a sliver film layer, a nickel-chromium layer, a silicon nitride film layer and a carbon nitride film layer are coated on the surface of the glass substrate from bottom to top in sequence; and the glass not only can effectively improve the surface hardness on the premise of keeping the low-radiation performance unchanged, but also can carry out toughening processing.
Description
[technical field]
The present invention relates to coated glass field, especially relating to a kind of damage resistant for building can the two silver low-radiation coated glass of tempering.
[background technology]
Known, two-layer high IR line reflection material is deposited at glass surface, the materials such as such as argent, copper or gold, thus the infrared ray that the infrared ray in the absorption sunshine spectrum enabling glass the least possible sends with other object, due to glass self not stored energy, it is also just relatively very limited to extraradial infrared ray under the less ultrared prerequisite of absorption, and therefore this glass is called as two silver low-radiation coated glass, at present, because two silver low-radiation coated glass can while summer guarantees that light enters in building, near infrared ray in corresponding effective stop sunshine enters indoor, thus reach reduction indoor temperature, the object of corresponding saving refrigeration expense, simultaneously, two silver low-radiation coated glass can also stop in winter the far infrared that the indoor object of own absorption sends, the heat of indoor is avoided to be dispersed into outdoor, thus reach maintenance indoor temperature, the object of corresponding saving heat cost, therefore, the green building material that two a kind of country of silver low-radiation coated glass Chang Zuowei widelys popularize is taken as constructure screen wall glass and door glass uses, but, find in prolonged application, although existing pair of silver low-radiation coated glass outermost layer employing is all the silicon nitride film layer that hardness is higher, but it still can not meet the demand of some high standards client in the application, and the existing pair of silver low-radiation coated glass is also easy in process causes producing higher defect rate because occurring scratching, in addition, due to the silver film in existing pair of silver low-radiation coated glass easily in hot environment occur oxidation or with other substance reactions, therefore it can not tempering.
[summary of the invention]
In order to overcome the deficiency in background technology, the invention discloses a kind of damage resistant can the two silver low-radiation coated glass of tempering, and described glass not only effectively can improve case hardness under the constant prerequisite of low radiance, but also can carry out tempering processing.
For achieving the above object, the present invention adopts following technical scheme:
A kind of damage resistant can the two silver low-radiation coated glass of tempering, described glass comprises glass substrate, and the surface of this glass substrate is from bottom to top coated with silicon nitride film layer, nickel chromium triangle rete, silver film, nickel chromium triangle rete, zinc-tin oxide rete, zinc oxide aluminum rete, silver film, nickel chromium triangle rete, silicon nitride film layer and carbonitride rete successively;
Described glass is selected under vacuum conditions when making, the method depositing ten tunics at glass substrate surface by magnetron sputtering is produced, require to be evacuated to 1.2 × below 10-4Pa at coating chamber, being filled with process gas again makes coating chamber pressure stability at 0.2 to 0.5Pa, then to sputtering source power transmission, operation target starts sputtering, successively corresponding target atom or its Compound deposition is formed corresponding rete to glass substrate surface; Its concrete operations are as follows:
First coating chamber is filled with nitrogen and argon gas, and target is sial target, and at the surface deposition ground floor silicon nitride film of glass substrate, thickness is 10 to 55 nanometers; Second coating chamber is filled with argon gas, and target is nickel chromium triangle target, and silicon nitride film layer deposits second layer nickel chromium triangle film, and thickness is 0.5 to 10 nanometer; 3rd coating chamber is filled with argon gas, and target is silver-colored target, and nickel chromium triangle rete deposits third layer silverskin, and thickness is 5 to 20 nanometers; 4th coating chamber is filled with argon gas, and target is nickel chromium triangle target, and silver film deposits the 4th layer of nickel chromium triangle film, and thickness is 0.5 to 10 nanometer; 5th coating chamber is filled with oxygen and argon gas, and target is zinc-tin target, and nickel chromium triangle rete deposits layer 5 zinc-tin oxide film, and thickness is 20 to 60 nanometers; 6th coating chamber is filled with oxygen and argon gas, and target is zinc-aluminium target, and zinc-tin oxide rete deposits layer 6 zinc oxide aluminum film, and thickness is 10 to 60 nanometers; 7th coating chamber is filled with argon gas, and target is silver-colored target, and zinc oxide aluminum rete deposits layer 7 silverskin, and thickness is 5 to 20 nanometers; 8th coating chamber is filled with argon gas, and target is nickel chromium triangle target, and silver film deposits the 8th layer of nickel chromium triangle film, and thickness is 1 to 10 nanometer; 9th coating chamber is filled with nitrogen and argon gas, and target is sial target, and nickel chromium triangle rete deposits the 9th layer of silicon nitride film, and thickness is 15 to 60 nanometers; Tenth coating chamber is filled with argon gas, and target is ceramic nitriding carbon target, and silicon nitride film layer deposits the tenth layer of carbon nitride films, and thickness is 3 to 30 nanometers.
Further, the pressure stability of coating chamber after process gas is filled with at 0.3Pa.
Owing to adopting technical scheme as above, the present invention has following beneficial effect:
Damage resistant of the present invention effectively can improve case hardness by the two silver low-radiation coated glass of tempering under the constant prerequisite of low radiance, more damage resistant, thus effectively reduce the probability of work in-process appearance scuffing, improve production efficiency accordingly, add the economic well-being of workers and staff of producer; Simultaneously, described glass can also carry out tempering again after plated film, its not only can ensure not oxidized in the hot environment of silver film degree more than 700 in annealing furnace or with other substance reactions, but also the radiance after can effectively ensureing tempering does not change, rete nondiscolouring.
[accompanying drawing explanation]
Fig. 1 is schematic diagram of the present invention.
In figure: 1, glass substrate; 2, silicon nitride film layer; 3, nickel chromium triangle rete; 4, silver film; 5, nickel chromium triangle rete; 6, zinc-tin oxide rete; 7, zinc oxide aluminum rete; 8, silver film; 9, nickel chromium triangle rete; 10, silicon nitride film layer; 11, carbonitride rete.
[detailed description of the invention]
Can explain the present invention in more detail by the following examples, disclose object of the present invention and be intended to protect all changes and improvements in the scope of the invention, the present invention is not limited to the following examples:
By reference to the accompanying drawings 1, described damage resistant the two silver low-radiation coated glass employing of tempering from bottom to top can plate silicon nitride film layer 2, nickel chromium triangle rete 3, silver film 4, nickel chromium triangle rete 5, zinc-tin oxide rete 6, zinc oxide aluminum rete 7, silver film 8, nickel chromium triangle rete 9, silicon nitride film layer 10 and carbonitride rete 11 on glass substrate 1 surface successively, namely form the structure of ten tunic layers on the surface of glass substrate 1, thus damage resistant described in forming can the two silver low-radiation coated glass of tempering;
When making described glass, select under vacuum conditions, the method depositing ten tunics at glass substrate surface by magnetron sputtering is produced, and requires to be evacuated to 1.2 × below 10-4Pa at coating chamber, be filled with process gas again, make coating chamber pressure stability at 0.2 to 0.5 Pa, usually select 0.3Pa, by sputtering source power transmission, target starts sputtering, then send into glass substrate, and corresponding target atom or its compound are deposited to successively glass substrate surface formation rete, its concrete operations are as follows:
First coating chamber is filled with nitrogen and argon gas, and target is sial target, and at the surface deposition ground floor silicon nitride film of glass substrate, thickness is 10 to 55 nanometers; Second coating chamber is filled with argon gas, and target is nickel chromium triangle target, and silicon nitride film layer deposits second layer nickel chromium triangle film, and thickness is 0.5 to 10 nanometer; 3rd coating chamber is filled with argon gas, and target is silver-colored target, and nickel chromium triangle rete deposits third layer silverskin, and thickness is 5 to 20 nanometers; 4th coating chamber is filled with argon gas, and target is nickel chromium triangle target, and silver film deposits the 4th layer of nickel chromium triangle film, and thickness is 0.5 to 10 nanometer; 5th coating chamber is filled with oxygen and argon gas, and target is zinc-tin target, and nickel chromium triangle rete deposits layer 5 zinc-tin oxide film, and thickness is 20 to 60 nanometers; 6th coating chamber is filled with oxygen and argon gas, and target is zinc-aluminium target, and zinc-tin oxide rete deposits layer 6 zinc oxide aluminum film, and thickness is 10 to 60 nanometers; 7th coating chamber is filled with argon gas, and target is silver-colored target, and zinc oxide aluminum rete deposits layer 7 silverskin, and thickness is 5 to 20 nanometers; 8th coating chamber is filled with argon gas, and target is nickel chromium triangle target, and silver film deposits the 8th layer of nickel chromium triangle film, and thickness is 1 to 10 nanometer; 9th coating chamber is filled with nitrogen and argon gas, and target is sial target, and nickel chromium triangle rete deposits the 9th layer of silicon nitride film, and thickness is 15 to 60 nanometers; Tenth coating chamber is filled with argon gas, and target is ceramic nitriding carbon target, and silicon nitride film layer deposits the tenth layer of carbon nitride films, and thickness is 3 to 30 nanometers;
As mentioned above, completely namely generate described glass when ten tunic layers all deposit, wherein: first and nine tunic adopt silicon nitride film to be to improve its adhesion, improve wear-resisting, the decay resistance of rete; The second, four and eight tunics employing nickel chromium triangle films are the adhesive force in order to improve itself and silverskin, thus the not oxidized or object that reacts with other material under reaching the high temperature of effective guarantee silver film degree more than 700 in annealing furnace, and then make described glass can also possess rete nondiscolouring and the indeclinable characteristic of radiance after tempering; 3rd and seven layers adopt silverskin be to make described glass possess low-down radiance; Layer 5 and layer 6 adopt zinc-tin oxide film and zinc oxide aluminum film to be color and visible light transmittance rate in order to regulate glass; Tenth layer adopts carbon nitride films to be overall scratch resistant performance in order to significantly improve glass substrate surface rete.
Part not in the detailed description of the invention is prior art, therefore the present invention is not described in detail.
Claims (2)
1. a damage resistant can the two silver low-radiation coated glass of tempering, described glass comprises glass substrate, it is characterized in that: the surface of described glass substrate (1) is from bottom to top coated with silicon nitride film layer (2), nickel chromium triangle rete (3), silver film (4), nickel chromium triangle rete (5), zinc-tin oxide rete (6), zinc oxide aluminum rete (7), silver film (8), nickel chromium triangle rete (9), silicon nitride film layer (10) and carbonitride rete (11) successively; Described glass is selected under vacuum conditions when making, the method depositing ten tunics at glass substrate surface by magnetron sputtering is produced, require to be evacuated to 1.2 × below 10-4Pa at coating chamber, being filled with process gas again makes coating chamber pressure stability at 0.2 to 0.5Pa, then to sputtering source power transmission, operation target starts sputtering, successively corresponding target atom or its Compound deposition is formed corresponding rete to glass substrate surface; Its concrete operations are as follows:
First coating chamber is filled with nitrogen and argon gas, and target is sial target, and at the surface deposition ground floor silicon nitride film of glass substrate, thickness is 10 to 55 nanometers; Second coating chamber is filled with argon gas, and target is nickel chromium triangle target, and silicon nitride film layer deposits second layer nickel chromium triangle film, and thickness is 0.5 to 10 nanometer; 3rd coating chamber is filled with argon gas, and target is silver-colored target, and at nickel chromium triangle rete (3) upper deposition third layer silverskin, thickness is 5 to 20 nanometers; 4th coating chamber is filled with argon gas, and target is nickel chromium triangle target, and silver film deposits the 4th layer of nickel chromium triangle film, and thickness is 0.5 to 10 nanometer; 5th coating chamber is filled with oxygen and argon gas, and target is zinc-tin target, and nickel chromium triangle rete deposits layer 5 zinc-tin oxide film, and thickness is 20 to 60 nanometers; 6th coating chamber is filled with oxygen and argon gas, and target is zinc-aluminium target, and zinc-tin oxide rete deposits layer 6 zinc oxide aluminum film, and thickness is 10 to 60 nanometers; 7th coating chamber is filled with argon gas, and target is silver-colored target, and zinc oxide aluminum rete deposits layer 7 silverskin, and thickness is 5 to 20 nanometers; 8th coating chamber is filled with argon gas, and target is nickel chromium triangle target, and silver film deposits the 8th layer of nickel chromium triangle film, and thickness is 1 to 10 nanometer; 9th coating chamber is filled with nitrogen and argon gas, and target is sial target, and nickel chromium triangle rete deposits the 9th layer of silicon nitride film, and thickness is 15 to 60 nanometers; Tenth coating chamber is filled with argon gas, and target is ceramic nitriding carbon target, and silicon nitride film layer deposits the tenth layer of carbon nitride films, and thickness is 3 to 30 nanometers.
2. damage resistant according to claim 1 can the two silver low-radiation coated glass of tempering, it is characterized in that: be filled with the pressure stability of coating chamber after process gas at 0.3Pa.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510236548.0A CN104890322A (en) | 2015-05-12 | 2015-05-12 | Scratch-resistant double-sliver low-radiation coated glass capable of being toughened |
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| CN201510236548.0A CN104890322A (en) | 2015-05-12 | 2015-05-12 | Scratch-resistant double-sliver low-radiation coated glass capable of being toughened |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105236765A (en) * | 2015-09-28 | 2016-01-13 | 赛柏利安工业技术（苏州）有限公司 | Double silver energy-saving glass deposition method of sunlight selection light filtration film system |
| CN107867804A (en) * | 2016-09-27 | 2018-04-03 | 四川南玻节能玻璃有限公司 | Can the downward tempering of film surface Low emissivity energy-saving glass |
| CN109824277A (en) * | 2019-04-15 | 2019-05-31 | 中建材光电装备（太仓）有限公司 | A kind of superhard navy blue can temperable di-silver low-emissivity coated glass |
| CN114634314A (en) * | 2022-03-21 | 2022-06-17 | 新福兴玻璃工业集团有限公司 | Functional temperable low-emissivity coated glass and preparation method thereof |
-
2015
- 2015-05-12 CN CN201510236548.0A patent/CN104890322A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105236765A (en) * | 2015-09-28 | 2016-01-13 | 赛柏利安工业技术（苏州）有限公司 | Double silver energy-saving glass deposition method of sunlight selection light filtration film system |
| CN105236765B (en) * | 2015-09-28 | 2018-06-29 | 赛柏利安工业技术（苏州）有限公司 | A kind of double silver-colored energy-saving glass deposition methods of sunlight selection optical filtering membrane system |
| CN107867804A (en) * | 2016-09-27 | 2018-04-03 | 四川南玻节能玻璃有限公司 | Can the downward tempering of film surface Low emissivity energy-saving glass |
| CN107867804B (en) * | 2016-09-27 | 2024-02-06 | 四川南玻节能玻璃有限公司 | Low-radiation energy-saving glass capable of being tempered with film downwards |
| CN109824277A (en) * | 2019-04-15 | 2019-05-31 | 中建材光电装备（太仓）有限公司 | A kind of superhard navy blue can temperable di-silver low-emissivity coated glass |
| CN114634314A (en) * | 2022-03-21 | 2022-06-17 | 新福兴玻璃工业集团有限公司 | Functional temperable low-emissivity coated glass and preparation method thereof |
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Application publication date: 20150909 |