CN202038669U - Conveying mechanism for vacuum sputtering workpieces - Google Patents
Conveying mechanism for vacuum sputtering workpieces Download PDFInfo
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- CN202038669U CN202038669U CN2011200920335U CN201120092033U CN202038669U CN 202038669 U CN202038669 U CN 202038669U CN 2011200920335 U CN2011200920335 U CN 2011200920335U CN 201120092033 U CN201120092033 U CN 201120092033U CN 202038669 U CN202038669 U CN 202038669U
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- movable joint
- matrix
- joint transmission
- side guide
- conveying mechanism
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Abstract
A conveying mechanism for vacuum sputtering workpieces relates to a conveying mechanism. The installation basal body of the conveying mechanism is arranged at the two inner sides of a vacuum cavity body, a bearing with a bearing house is arranged at a shaft end which is exposed out of the installation basal body, a screwed ring is arranged outside the bearing, two side guide plates are arranged at the inner side of the installation basal body, two movable joint transmission shafts are arranged at the middle part between the side guide plates, a transmission sprocket is respectively arranged on the two ends of the movable joint transmission shafts and the shafts at the two sides of the side guide plates, the transmission sprockets are meshed with transmission roller chains, support guide rails are arranged between the transmission roller chains and are fixed on the installation basal body through bolts, a buffer wheel is respectively arranged at the rear ends of the shafts at the two ends of the side guide plates, a drive sprocket is respectively arranged on the parts of the two movable joint transmission shafts, which are exposed out of the installation basal body, the drive sprockets are connected with each other through drive roller chains, and a coupling is arranged at the lower ends of the drive sprockets on an a1 shaft in the two movable joint transmission shafts. The conveying mechanism for vacuum sputtering workpieces has a simple structure, is simple and convenient to assemble, dismantle and maintain, and has a long service life and a good seal effect.
Description
Technical field:
The utility model relates to a kind of conveying mechanism, relates in particular to a kind of vacuum splashing and plating workpiece conveying mechanism.
Background technology:
The vacuum splashing and plating technology is that physical vapor deposition (PVD) prepares a kind of in the film plating process, has developed into the plated film that can cover any material on any material substrate so far, is widely used in during various surface coatings produce.
At present, in serialization vacuum splashing and plating manufacturing line, the conveying of workpiece mainly is made up of two parts, comprises transmission device and conveying mechanism.Servo drive motor drives transmission device, sends power to conveying mechanism, and conveying mechanism drives the frock plate that is loaded with workpiece and moves by the direction of vacuum splashing and plating technological requirement.Common transmission device is that synchronizing jugged drive belt and a plurality of transmission shaft are formed, and conveying mechanism is that a plurality of delivery wheels that have cushion rubber are formed.
In serialization vacuum splashing and plating process, above-mentioned conveying mechanism cushion rubber rapid wear, delivery wheel and frock plate are prone to skidding, and the bump problem easily takes place in the frock plate in different cavity switching processes, can not guarantee the stable of effective transmission and conveying; Synchro transmission belt easily decomposes and wears out under hot environment, and service life is short, and analyte has changed the atmosphere in the cavity, has increased the difficulty that reaches high vacuum, and coating quality is caused harmful effect.
The utility model content:
The purpose of this utility model provides a kind of vacuum splashing and plating workpiece conveying mechanism, and its conveying roller chain had both played gearing, plays the conveying effect of workpiece again, simplifies the structure, and mounting or dismounting and maintaining are succinctly convenient, long service life; Axle housing has solved the secondary seal problem of single shield bearing raceway; Supporting guide has played the support and the positioning action of carrying roller chain; Buffering wheel has reduced the bump problem that the frock plate is prone to when different cavitys are carried switching; The sealing magnetic fluid has improved the reliability of high vacuum dynamic seal.
In order to solve the existing problem of background technology, the utility model is by the following technical solutions: it comprises the installation matrix, axle housing, side guide, supporting guide, transportation sprocket, the movable joint transmission shaft, buffering wheel, carry roller chain, the sealing magnetic fluid, servomotor, plunging joint, the drive balls chain, driving chain wheel, vacuum cavity and bung flange, matrix is installed is arranged on both sides in the vacuum cavity, expose the bearing that the outer axial end of matrix is provided with the tape spool shell is installed, the bearing arranged outside has bung flange, the matrix inboard is installed is provided with two side guides, middle part between the side guide is provided with two movable joint transmission shafts, be provided with transportation sprocket on the axle at movable joint transmission shaft two ends and side guide two ends, transportation sprocket is meshed with carrying roller chain, carry between the roller chain and be provided with supporting guide, supporting guide is installed on the matrix by being bolted to, buffering wheel is arranged on the shaft end at side guide two ends, two movable joint transmission shafts expose the part of installing outside the matrix and are provided with driving chain wheel, link to each other by the drive balls chain between the driving chain wheel, driving chain wheel lower end on the a1 axle in two movable joint transmission shafts is provided with plunging joint, the a1 axle links to each other by the servomotor in plunging joint and the vacuum cavity outside, and the motor shaft of servomotor and vacuum cavity junction are provided with the sealing magnetic fluid.
The utility model servomotor is by plunging joint and movable joint transmission shaft (a
1And a
2Two) connect, the movable joint transmission shaft drives driving chain wheel and drive balls chain, drives transportation sprocket simultaneously and carries roller chain, makes transmission be evenly distributed to eight transportation sprockets and four and carries on the roller chain, carries roller chain to be supported and the location by supporting guide.After the frock plate that workpiece is housed enters vacuum cavity, by being contained in the side guide guiding of installing on the matrix, by four buffering wheels bufferings that are contained in two ends; The bearing that the tape spool shell is equipped with at matrix outer shaft place is installed, is adopted the sealing magnetic fluid that axle is sealed between servomotor and vacuum cavity.
Conveying roller chain of the present utility model had both played gearing, played the conveying effect of workpiece again, simplified the structure, and mounting or dismounting and maintaining are succinctly convenient, long service life; Axle housing has solved the secondary seal problem of single shield bearing raceway; Supporting guide has played the support and the positioning action of carrying roller chain; Buffering wheel has reduced the bump problem that the frock plate is prone to when different cavitys are carried switching; The sealing magnetic fluid has improved the reliability of high vacuum dynamic seal.
Description of drawings:
Fig. 1 is a structural representation of the present utility model;
Fig. 2 is that the A-A of Fig. 1 is to revolved sectional view;
Fig. 3 is that the B-B of Fig. 1 is to revolved sectional view.
The specific embodiment:
With reference to Fig. 1-3, this specific embodiment is by the following technical solutions: it comprises installs matrix 2, axle housing 3, side guide 4, supporting guide 5, transportation sprocket 6, movable joint transmission shaft 7, buffering wheel 8, carry roller chain 9, sealing magnetic fluid 10, servomotor 11, plunging joint 12, drive balls chain 13, driving chain wheel 14, vacuum cavity 15 and bung flange 16, matrix 2 is installed is arranged on both sides in the vacuum cavity 15, expose the bearing that matrix 2 outer axial end are provided with tape spool shell 3 is installed, the bearing arranged outside has bung flange 16, matrix 2 inboards are installed are provided with two side guides 4, middle part between the side guide 4 is provided with two movable joint transmission shafts 7, be provided with transportation sprocket 6 on the axle at movable joint transmission shaft 7 two ends and side guide 4 two ends, transportation sprocket 6 is meshed with carrying roller chain 9, carry between the roller chain 9 and be provided with supporting guide 5, supporting guide 5 is installed on the matrix 2 by being bolted to, buffering wheel 8 is arranged on the shaft end at side guide 4 two ends, two movable joint transmission shafts 7 expose the parts of installing outside the matrix 2 and are provided with driving chain wheel 14, link to each other by drive balls chain 13 between the driving chain wheel 14, driving chain wheel 14 lower ends on the a1 axle in two movable joint transmission shafts 7 are provided with plunging joint 12, the a1 axle links to each other with the servomotor 11 in vacuum cavity 15 outsides by plunging joint 12, and the motor shaft of servomotor 11 and vacuum cavity 15 junctions are provided with and seal magnetic fluid 10.
The servomotor 11 of this specific embodiment is by plunging joint 12 and movable joint transmission shaft 7 (a
1And a
2Two) connect, movable joint transmission shaft 7 drives driving chain wheel 14 and drive balls chain 13, drive transportation sprocket 6 simultaneously and carry roller chain 9, make transmission be evenly distributed to eight transportation sprockets 6 and four and carry on the roller chain 9, carry roller chain 9 to support and the location by supporting guide 5.After the frock plate 1 that workpiece is housed enters vacuum cavity 15, by being contained in side guide 4 guiding of installing on the matrix 2, by four buffering wheels, 8 bufferings that are contained in two ends; The bearing that tape spool shell 3 is equipped with at matrix 2 outer shaft places is installed, and 15 of servomotor 11 and vacuum cavities adopt 10 pairs of axles of sealing magnetic fluid to seal.
The conveying roller chain of this specific embodiment had both played gearing, played the conveying effect of workpiece again, simplified the structure, and mounting or dismounting and maintaining are succinctly convenient, long service life; Axle housing has solved the secondary seal problem of single shield bearing raceway; Supporting guide has played the support and the positioning action of carrying roller chain; Buffering wheel has reduced the bump problem that the frock plate is prone to when different cavitys are carried switching; The sealing magnetic fluid has improved the reliability of high vacuum dynamic seal.
Claims (1)
1. vacuum splashing and plating workpiece conveying mechanism, it is characterized in that it comprises installation matrix (2), axle housing (3), side guide (4), supporting guide (5), transportation sprocket (6), movable joint transmission shaft (7), buffering wheel (8), carry roller chain (9), sealing magnetic fluid (10), servomotor (11), plunging joint (12), drive balls chain (13), driving chain wheel (14), vacuum cavity (15) and bung flange (16), matrix (2) is installed is arranged on the interior both sides of vacuum cavity (15), expose the bearing that the outer axial end of matrix (2) is provided with tape spool shell (3) is installed, the bearing arranged outside has bung flange (16), matrix (2) inboard is installed is provided with two side guides (4), middle part between the side guide (4) is provided with two movable joint transmission shafts (7), be provided with transportation sprocket (6) on the axle at movable joint transmission shaft (7) two ends and side guide (4) two ends, transportation sprocket (6) is meshed with carrying roller chain (9), carry between the roller chain (9) and be provided with supporting guide (5), supporting guide (5) is installed on the matrix (2) by being bolted to, buffering wheel (8) is arranged on the shaft end at side guide (4) two ends, two movable joint transmission shafts (7) expose the part of installing outside the matrix (2) and are provided with driving chain wheel (14), link to each other by drive balls chain (13) between the driving chain wheel (14), driving chain wheel (14) lower end on the a1 axle in two movable joint transmission shafts (7) is provided with plunging joint (12), the a1 axle links to each other by the servomotor (11) in plunging joint (12) and vacuum cavity (15) outside, and the motor shaft of servomotor (11) and vacuum cavity (15) junction are provided with and seal magnetic fluid (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200920335U CN202038669U (en) | 2011-03-31 | 2011-03-31 | Conveying mechanism for vacuum sputtering workpieces |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200920335U CN202038669U (en) | 2011-03-31 | 2011-03-31 | Conveying mechanism for vacuum sputtering workpieces |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202038669U true CN202038669U (en) | 2011-11-16 |
Family
ID=44966127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200920335U Expired - Fee Related CN202038669U (en) | 2011-03-31 | 2011-03-31 | Conveying mechanism for vacuum sputtering workpieces |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202038669U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102839357A (en) * | 2012-10-08 | 2012-12-26 | 赫得纳米科技(昆山)有限公司 | Transmission mechanism of continuous horizontal sputtering machine |
| CN108996106A (en) * | 2018-07-17 | 2018-12-14 | 中山瑞科新能源有限公司 | A kind of vacuum equipment live-roller with on-line monitoring function |
-
2011
- 2011-03-31 CN CN2011200920335U patent/CN202038669U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102839357A (en) * | 2012-10-08 | 2012-12-26 | 赫得纳米科技(昆山)有限公司 | Transmission mechanism of continuous horizontal sputtering machine |
| CN102839357B (en) * | 2012-10-08 | 2014-08-06 | 赫得纳米科技(昆山)有限公司 | Transmission mechanism of continuous horizontal sputtering machine |
| CN108996106A (en) * | 2018-07-17 | 2018-12-14 | 中山瑞科新能源有限公司 | A kind of vacuum equipment live-roller with on-line monitoring function |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111116 Termination date: 20130331 |